CH616886A5 - Photolithographic receptor material, process for the production thereof, and the use thereof - Google Patents
Photolithographic receptor material, process for the production thereof, and the use thereof Download PDFInfo
- Publication number
- CH616886A5 CH616886A5 CH1159975A CH1159975A CH616886A5 CH 616886 A5 CH616886 A5 CH 616886A5 CH 1159975 A CH1159975 A CH 1159975A CH 1159975 A CH1159975 A CH 1159975A CH 616886 A5 CH616886 A5 CH 616886A5
- Authority
- CH
- Switzerland
- Prior art keywords
- layer
- silica
- receptor material
- silver
- solution
- Prior art date
Links
- 239000000463 material Substances 0.000 title claims description 35
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000000034 method Methods 0.000 title claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 85
- 239000002245 particle Substances 0.000 claims description 49
- 229910052709 silver Inorganic materials 0.000 claims description 34
- 239000004332 silver Substances 0.000 claims description 34
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 27
- 239000000377 silicon dioxide Substances 0.000 claims description 27
- 239000008119 colloidal silica Substances 0.000 claims description 21
- 238000009792 diffusion process Methods 0.000 claims description 14
- 230000007704 transition Effects 0.000 claims description 13
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 11
- 239000012798 spherical particle Substances 0.000 claims description 10
- 239000000839 emulsion Substances 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 7
- -1 silver halide Chemical class 0.000 claims description 7
- 239000004408 titanium dioxide Substances 0.000 claims description 5
- LZBCVRCTAYKYHR-UHFFFAOYSA-N acetic acid;chloroethene Chemical compound ClC=C.CC(O)=O LZBCVRCTAYKYHR-UHFFFAOYSA-N 0.000 claims description 4
- 229920000728 polyester Polymers 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000012876 carrier material Substances 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 description 8
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 235000011187 glycerol Nutrition 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000013065 commercial product Substances 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 239000008267 milk Substances 0.000 description 2
- 210000004080 milk Anatomy 0.000 description 2
- 235000013336 milk Nutrition 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- IOLCXVTUBQKXJR-UHFFFAOYSA-M potassium bromide Chemical compound [K+].[Br-] IOLCXVTUBQKXJR-UHFFFAOYSA-M 0.000 description 2
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulfite Chemical compound [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- XZMCDFZZKTWFGF-UHFFFAOYSA-N Cyanamide Chemical compound NC#N XZMCDFZZKTWFGF-UHFFFAOYSA-N 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 108010082714 Silver Proteins Proteins 0.000 description 1
- 229920006387 Vinylite Polymers 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- CODNYICXDISAEA-UHFFFAOYSA-N bromine monochloride Chemical compound BrCl CODNYICXDISAEA-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 230000005660 hydrophilic surface Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000000276 potassium ferrocyanide Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 150000003378 silver Chemical class 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 235000010265 sodium sulphite Nutrition 0.000 description 1
- AKHNMLFCWUSKQB-UHFFFAOYSA-L sodium thiosulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=S AKHNMLFCWUSKQB-UHFFFAOYSA-L 0.000 description 1
- 235000019345 sodium thiosulphate Nutrition 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- XOGGUFAVLNCTRS-UHFFFAOYSA-N tetrapotassium;iron(2+);hexacyanide Chemical compound [K+].[K+].[K+].[K+].[Fe+2].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-] XOGGUFAVLNCTRS-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/06—Silver salts
- G03F7/07—Silver salts used for diffusion transfer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Printing Plates And Materials Therefor (AREA)
- Manufacture Or Reproduction Of Printing Formes (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US50424474A | 1974-09-09 | 1974-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH616886A5 true CH616886A5 (en) | 1980-04-30 |
Family
ID=24005459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH1159975A CH616886A5 (en) | 1974-09-09 | 1975-09-08 | Photolithographic receptor material, process for the production thereof, and the use thereof |
Country Status (13)
| Country | Link |
|---|---|
| JP (1) | JPS5156303A (is") |
| AR (1) | AR207598A1 (is") |
| AU (1) | AU8462175A (is") |
| BE (1) | BE833183A (is") |
| CA (1) | CA1060695A (is") |
| CH (1) | CH616886A5 (is") |
| DD (1) | DD121200A5 (is") |
| DE (1) | DE2540319C3 (is") |
| FR (1) | FR2284138A1 (is") |
| GB (1) | GB1502649A (is") |
| IT (1) | IT1044674B (is") |
| SU (1) | SU631060A3 (is") |
| YU (1) | YU226775A (is") |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2813495A1 (de) * | 1977-03-28 | 1978-10-05 | Minnesota Mining & Mfg | Photolithographisches empfangsblatt |
| CN117790603B (zh) * | 2024-01-11 | 2024-10-29 | 云南师范大学 | 一种在硅基底上制备栅线的方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1004080A (en) * | 1972-01-07 | 1977-01-25 | Eastman Kodak Company | Lithographic material |
| JPS5115764B2 (is") * | 1972-04-05 | 1976-05-19 |
-
1975
- 1975-01-01 AR AR26028675A patent/AR207598A1/es active
- 1975-08-05 CA CA232,879A patent/CA1060695A/en not_active Expired
- 1975-09-08 BE BE159839A patent/BE833183A/xx not_active IP Right Cessation
- 1975-09-08 IT IT2701875A patent/IT1044674B/it active
- 1975-09-08 YU YU226775A patent/YU226775A/xx unknown
- 1975-09-08 GB GB3689875A patent/GB1502649A/en not_active Expired
- 1975-09-08 AU AU84621/75A patent/AU8462175A/en not_active Expired
- 1975-09-08 CH CH1159975A patent/CH616886A5/de not_active IP Right Cessation
- 1975-09-08 DE DE19752540319 patent/DE2540319C3/de not_active Expired
- 1975-09-08 JP JP10880475A patent/JPS5156303A/ja active Granted
- 1975-09-08 FR FR7527405A patent/FR2284138A1/fr active Granted
- 1975-09-09 DD DD18825275A patent/DD121200A5/xx unknown
- 1975-09-09 SU SU752171453A patent/SU631060A3/ru active
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5156303A (ja) | 1976-05-18 |
| YU226775A (en) | 1982-05-31 |
| JPS5644428B2 (is") | 1981-10-19 |
| FR2284138B1 (is") | 1981-08-21 |
| FR2284138A1 (fr) | 1976-04-02 |
| AR207598A1 (es) | 1976-10-15 |
| DD121200A5 (is") | 1976-07-12 |
| CA1060695A (en) | 1979-08-21 |
| BE833183A (fr) | 1976-03-08 |
| DE2540319C3 (de) | 1982-03-18 |
| SU631060A3 (ru) | 1978-10-30 |
| AU8462175A (en) | 1977-03-17 |
| DE2540319A1 (de) | 1976-03-18 |
| DE2540319B2 (de) | 1981-06-11 |
| GB1502649A (en) | 1978-03-01 |
| IT1044674B (it) | 1980-04-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased | ||
| PL | Patent ceased |