CA987794A - Method and apparatus for cleaning the surface of a semiconductor slice - Google Patents

Method and apparatus for cleaning the surface of a semiconductor slice

Info

Publication number
CA987794A
CA987794A CA187,090A CA187090A CA987794A CA 987794 A CA987794 A CA 987794A CA 187090 A CA187090 A CA 187090A CA 987794 A CA987794 A CA 987794A
Authority
CA
Canada
Prior art keywords
cleaning
semiconductor slice
slice
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA187,090A
Other languages
English (en)
Other versions
CA187090S (en
Inventor
Samuel R. Shortes
Edwin G. Millis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of CA987794A publication Critical patent/CA987794A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
CA187,090A 1973-01-02 1973-11-30 Method and apparatus for cleaning the surface of a semiconductor slice Expired CA987794A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/320,400 US4027686A (en) 1973-01-02 1973-01-02 Method and apparatus for cleaning the surface of a semiconductor slice with a liquid spray of de-ionized water

Publications (1)

Publication Number Publication Date
CA987794A true CA987794A (en) 1976-04-20

Family

ID=23246249

Family Applications (1)

Application Number Title Priority Date Filing Date
CA187,090A Expired CA987794A (en) 1973-01-02 1973-11-30 Method and apparatus for cleaning the surface of a semiconductor slice

Country Status (7)

Country Link
US (1) US4027686A (ja)
JP (1) JPS4999480A (ja)
CA (1) CA987794A (ja)
DE (1) DE2364135A1 (ja)
FR (1) FR2212770A5 (ja)
GB (1) GB1445008A (ja)
NL (1) NL7317476A (ja)

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Also Published As

Publication number Publication date
US4027686A (en) 1977-06-07
JPS4999480A (ja) 1974-09-19
GB1445008A (en) 1976-08-04
FR2212770A5 (ja) 1974-07-26
DE2364135A1 (de) 1974-07-11
NL7317476A (ja) 1974-07-04

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