CA2722380A1 - Method for producing metal oxide layers through arc vaporization - Google Patents

Method for producing metal oxide layers through arc vaporization Download PDF

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Publication number
CA2722380A1
CA2722380A1 CA2722380A CA2722380A CA2722380A1 CA 2722380 A1 CA2722380 A1 CA 2722380A1 CA 2722380 A CA2722380 A CA 2722380A CA 2722380 A CA2722380 A CA 2722380A CA 2722380 A1 CA2722380 A1 CA 2722380A1
Authority
CA
Canada
Prior art keywords
metallic
target
semi
phase
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA2722380A
Other languages
English (en)
French (fr)
Inventor
Juergen Ramm
Beno Widrig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Oerlikon Trading AG Truebbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Trading AG Truebbach filed Critical Oerlikon Trading AG Truebbach
Publication of CA2722380A1 publication Critical patent/CA2722380A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/0408—Light metal alloys
    • C22C1/0416—Aluminium-based alloys
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12014—All metal or with adjacent metals having metal particles
    • Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Catalysts (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Drilling Tools (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
CA2722380A 2008-04-24 2009-02-06 Method for producing metal oxide layers through arc vaporization Abandoned CA2722380A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US4759108P 2008-04-24 2008-04-24
US61/047,591 2008-04-24
EP08016572.3 2008-09-19
EP08016572A EP2166128B1 (de) 2008-09-19 2008-09-19 Verfahren zum Herstellen von Metalloxidschichten durch Funkenverdampfung
PCT/EP2009/000851 WO2009129879A1 (de) 2008-04-24 2009-02-06 Verfahren zum herstellen von metalloxidschichten durch funkenverdampfung

Publications (1)

Publication Number Publication Date
CA2722380A1 true CA2722380A1 (en) 2009-10-29

Family

ID=40297780

Family Applications (2)

Application Number Title Priority Date Filing Date
CA2722520A Abandoned CA2722520A1 (en) 2008-04-24 2009-02-06 Method for producing metal oxide layers of predetermined structure through arc vaporization
CA2722380A Abandoned CA2722380A1 (en) 2008-04-24 2009-02-06 Method for producing metal oxide layers through arc vaporization

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CA2722520A Abandoned CA2722520A1 (en) 2008-04-24 2009-02-06 Method for producing metal oxide layers of predetermined structure through arc vaporization

Country Status (16)

Country Link
US (2) US10323320B2 (es)
EP (2) EP2166128B1 (es)
JP (3) JP2011522960A (es)
KR (2) KR101629905B1 (es)
CN (2) CN102016108B (es)
AT (1) ATE532886T1 (es)
AU (2) AU2009240320B2 (es)
BR (2) BRPI0907265A2 (es)
CA (2) CA2722520A1 (es)
ES (2) ES2377225T3 (es)
MX (2) MX2010011502A (es)
PL (2) PL2166128T3 (es)
PT (2) PT2166128E (es)
RU (2) RU2528602C2 (es)
TW (2) TWI390061B (es)
WO (2) WO2009129880A1 (es)

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DE102012023260A1 (de) * 2012-11-29 2014-06-05 Oerlikon Trading Ag, Trübbach Verfahren zur Strukturierung von Schichtoberflächen und Vorrichtung dazu
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DE102013006633A1 (de) * 2013-04-18 2014-10-23 Oerlikon Trading Ag, Trübbach Funkenverdampfen von metallischen, intermetallischen und keramischen Targetmaterialien um Al-Cr-N Beschichtungen herzustellen
US20160141157A1 (en) * 2013-07-09 2016-05-19 Oerlikon Surface Solutions Ag, Trübbach Target for the reactive sputter deposition of electrically insulating layers
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EP2980267B1 (en) 2014-07-28 2019-05-01 Oerlikon Surface Solutions AG, Trübbach Corundum-type fe-doped cathodic arc evaporated al-cr-o coatings
ES2786348T3 (es) * 2015-12-23 2020-10-09 Materion Advanced Mat Germany Gmbh Diana de pulverización catódica basada en óxido de circonio
DE102016125042A1 (de) * 2015-12-28 2017-06-29 Oerlikon Surface Solutions Ag, Pfäffikon Infrarotspiegel mit einer thermisch stabilen Schicht
DE102016212874A1 (de) * 2016-07-14 2018-01-18 Oerlikon Surface Solutions Ag, Pfäffikon Schutzbeschichtung für eine thermisch beanspruchte Struktur
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Also Published As

Publication number Publication date
WO2009129880A1 (de) 2009-10-29
AU2009240321B2 (en) 2013-10-24
CN102016104B (zh) 2016-08-03
RU2010147450A (ru) 2012-05-27
EP2166128A1 (de) 2010-03-24
EP2166128B1 (de) 2011-11-09
US20090269615A1 (en) 2009-10-29
TWI390061B (zh) 2013-03-21
US20090269600A1 (en) 2009-10-29
KR20100135946A (ko) 2010-12-27
ES2485909T3 (es) 2014-08-14
JP5876123B2 (ja) 2016-03-02
US9611538B2 (en) 2017-04-04
KR101629909B1 (ko) 2016-06-13
RU2010147448A (ru) 2012-05-27
CN102016108B (zh) 2017-03-15
PT2166128E (pt) 2012-01-17
KR20110010737A (ko) 2011-02-07
US10323320B2 (en) 2019-06-18
BRPI0907264A2 (pt) 2015-11-17
JP2011522960A (ja) 2011-08-04
AU2009240321A1 (en) 2009-10-29
MX2010011496A (es) 2011-03-02
CN102016108A (zh) 2011-04-13
PT2265744E (pt) 2014-07-04
WO2009129879A1 (de) 2009-10-29
EP2265744A1 (de) 2010-12-29
MX2010011502A (es) 2010-11-30
JP2011518949A (ja) 2011-06-30
PL2166128T3 (pl) 2012-05-31
AU2009240320A1 (en) 2009-10-29
CN102016104A (zh) 2011-04-13
ES2377225T3 (es) 2012-03-23
PL2265744T3 (pl) 2014-10-31
TW200946698A (en) 2009-11-16
RU2525949C2 (ru) 2014-08-20
EP2265744B1 (de) 2014-05-07
TWI410506B (zh) 2013-10-01
BRPI0907265A2 (pt) 2015-11-17
TW201000657A (en) 2010-01-01
RU2528602C2 (ru) 2014-09-20
ATE532886T1 (de) 2011-11-15
KR101629905B1 (ko) 2016-06-13
JP2015038248A (ja) 2015-02-26
AU2009240320B2 (en) 2014-03-20
CA2722520A1 (en) 2009-10-29

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Effective date: 20131129

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Effective date: 20180206