AU6594200A - Polishing compound for chemimechanical polishing and method for polishing substrate - Google Patents

Polishing compound for chemimechanical polishing and method for polishing substrate

Info

Publication number
AU6594200A
AU6594200A AU65942/00A AU6594200A AU6594200A AU 6594200 A AU6594200 A AU 6594200A AU 65942/00 A AU65942/00 A AU 65942/00A AU 6594200 A AU6594200 A AU 6594200A AU 6594200 A AU6594200 A AU 6594200A
Authority
AU
Australia
Prior art keywords
polishing
chemimechanical
compound
substrate
polishing substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU65942/00A
Other languages
English (en)
Inventor
Akiko Igarashi
Yasuo Kamigata
Yasushi Kurata
Hiroki Terasaki
Takeshi Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Publication of AU6594200A publication Critical patent/AU6594200A/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F3/00—Brightening metals by chemical means
    • C23F3/04—Heavy metals
    • C23F3/06—Heavy metals with acidic solutions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H10P52/40—Chemomechanical polishing [CMP]
    • H10P52/403—Chemomechanical polishing [CMP] of conductive or resistive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/062—Manufacture or treatment of conductive parts of the interconnections by smoothing of conductive parts, e.g. by planarisation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
AU65942/00A 1999-08-17 2000-08-17 Polishing compound for chemimechanical polishing and method for polishing substrate Abandoned AU6594200A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP11/230930 1999-08-17
JP23093099 1999-08-17
JP11/308665 1999-10-29
JP30866599 1999-10-29
PCT/JP2000/005508 WO2001013417A1 (fr) 1999-08-17 2000-08-17 Compose de polissage pour polissage chimiomecanique et procede pour polir un substrat

Publications (1)

Publication Number Publication Date
AU6594200A true AU6594200A (en) 2001-03-13

Family

ID=26529617

Family Applications (1)

Application Number Title Priority Date Filing Date
AU65942/00A Abandoned AU6594200A (en) 1999-08-17 2000-08-17 Polishing compound for chemimechanical polishing and method for polishing substrate

Country Status (8)

Country Link
US (2) US7744666B2 (https=)
EP (1) EP1211717B1 (https=)
JP (3) JP3954383B2 (https=)
KR (1) KR100510977B1 (https=)
CN (1) CN101792655B (https=)
AU (1) AU6594200A (https=)
TW (1) TW501197B (https=)
WO (1) WO2001013417A1 (https=)

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Also Published As

Publication number Publication date
KR20020021408A (ko) 2002-03-20
US7744666B2 (en) 2010-06-29
CN101792655B (zh) 2013-05-01
EP1211717B1 (en) 2016-04-13
JP2011082537A (ja) 2011-04-21
US20060124597A1 (en) 2006-06-15
EP1211717A4 (en) 2007-03-28
WO2001013417A1 (fr) 2001-02-22
TW501197B (en) 2002-09-01
US20060037251A1 (en) 2006-02-23
JP2012182473A (ja) 2012-09-20
EP1211717A1 (en) 2002-06-05
US7319072B2 (en) 2008-01-15
JP5472049B2 (ja) 2014-04-16
CN101792655A (zh) 2010-08-04
JP3954383B2 (ja) 2007-08-08
KR100510977B1 (ko) 2005-08-31

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