AU2001283445A1 - Semiconductor device having passive elements and method of making same - Google Patents

Semiconductor device having passive elements and method of making same

Info

Publication number
AU2001283445A1
AU2001283445A1 AU2001283445A AU8344501A AU2001283445A1 AU 2001283445 A1 AU2001283445 A1 AU 2001283445A1 AU 2001283445 A AU2001283445 A AU 2001283445A AU 8344501 A AU8344501 A AU 8344501A AU 2001283445 A1 AU2001283445 A1 AU 2001283445A1
Authority
AU
Australia
Prior art keywords
semiconductor device
making same
passive elements
passive
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001283445A
Other languages
English (en)
Inventor
Melvy Freeland Miller Iii
Peter Zurcher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of AU2001283445A1 publication Critical patent/AU2001283445A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/01—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate comprising only passive thin-film or thick-film elements formed on a common insulating substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/0688—Integrated circuits having a three-dimensional layout
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
AU2001283445A 2000-08-21 2001-08-17 Semiconductor device having passive elements and method of making same Abandoned AU2001283445A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/642,680 2000-08-21
US09/642,680 US6500724B1 (en) 2000-08-21 2000-08-21 Method of making semiconductor device having passive elements including forming capacitor electrode and resistor from same layer of material
PCT/US2001/025875 WO2002017367A2 (en) 2000-08-21 2001-08-17 Semiconductor device having passive elements and method of making same

Publications (1)

Publication Number Publication Date
AU2001283445A1 true AU2001283445A1 (en) 2002-03-04

Family

ID=24577572

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001283445A Abandoned AU2001283445A1 (en) 2000-08-21 2001-08-17 Semiconductor device having passive elements and method of making same

Country Status (8)

Country Link
US (2) US6500724B1 (zh)
EP (1) EP1314190A2 (zh)
JP (1) JP4937489B2 (zh)
KR (1) KR100794155B1 (zh)
CN (1) CN1211833C (zh)
AU (1) AU2001283445A1 (zh)
TW (1) TW503575B (zh)
WO (1) WO2002017367A2 (zh)

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Also Published As

Publication number Publication date
KR20040000397A (ko) 2004-01-03
JP4937489B2 (ja) 2012-05-23
WO2002017367A3 (en) 2003-01-23
US20030017699A1 (en) 2003-01-23
WO2002017367A2 (en) 2002-02-28
KR100794155B1 (ko) 2008-01-14
CN1478294A (zh) 2004-02-25
TW503575B (en) 2002-09-21
EP1314190A2 (en) 2003-05-28
JP2004507105A (ja) 2004-03-04
CN1211833C (zh) 2005-07-20
US6825092B2 (en) 2004-11-30
US6500724B1 (en) 2002-12-31

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