AU2001294188A1 - Device and method for manufacturing semiconductor - Google Patents
Device and method for manufacturing semiconductorInfo
- Publication number
- AU2001294188A1 AU2001294188A1 AU2001294188A AU9418801A AU2001294188A1 AU 2001294188 A1 AU2001294188 A1 AU 2001294188A1 AU 2001294188 A AU2001294188 A AU 2001294188A AU 9418801 A AU9418801 A AU 9418801A AU 2001294188 A1 AU2001294188 A1 AU 2001294188A1
- Authority
- AU
- Australia
- Prior art keywords
- manufacturing semiconductor
- semiconductor
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F5/00—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater
- F24F5/0007—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater cooling apparatus specially adapted for use in air-conditioning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000-305067 | 2000-10-04 | ||
JP2000305067A JP4737809B2 (en) | 2000-10-04 | 2000-10-04 | Semiconductor manufacturing apparatus and semiconductor manufacturing method |
PCT/JP2001/008764 WO2002029864A1 (en) | 2000-10-04 | 2001-10-04 | Device and method for manufacturing semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001294188A1 true AU2001294188A1 (en) | 2002-04-15 |
Family
ID=18786008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001294188A Abandoned AU2001294188A1 (en) | 2000-10-04 | 2001-10-04 | Device and method for manufacturing semiconductor |
Country Status (5)
Country | Link |
---|---|
US (1) | US6569696B2 (en) |
JP (1) | JP4737809B2 (en) |
KR (1) | KR20020063200A (en) |
AU (1) | AU2001294188A1 (en) |
WO (1) | WO2002029864A1 (en) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4606600B2 (en) * | 2001-01-09 | 2011-01-05 | 東京エレクトロン株式会社 | Process air supply apparatus and method |
US7118780B2 (en) | 2001-03-16 | 2006-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Heat treatment method |
KR100876927B1 (en) | 2001-06-01 | 2009-01-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | Thermal treatment equipment and method for heat-treating |
JP2004103850A (en) * | 2002-09-10 | 2004-04-02 | Fujitsu Ltd | Method and device for applying resist |
JP2004274028A (en) * | 2003-02-20 | 2004-09-30 | Tokyo Ohka Kogyo Co Ltd | Device and method for development |
KR100524875B1 (en) * | 2003-06-28 | 2005-10-31 | 엘지.필립스 엘시디 주식회사 | Clean room system |
US20050173253A1 (en) * | 2004-02-05 | 2005-08-11 | Applied Materials, Inc. | Method and apparatus for infilm defect reduction for electrochemical copper deposition |
JP4689308B2 (en) * | 2005-03-18 | 2011-05-25 | キヤノン株式会社 | Exposure apparatus and device manufacturing method |
JP4748005B2 (en) * | 2006-09-08 | 2011-08-17 | 東京エレクトロン株式会社 | Liquid processing apparatus, liquid processing method, and storage medium. |
KR101037632B1 (en) * | 2008-11-26 | 2011-05-30 | 세메스 주식회사 | Substrate processing apparatus and method for supplying airflow |
KR20110135392A (en) * | 2009-03-06 | 2011-12-16 | 나노잉크, 인크. | Environmental control device |
CN103177985B (en) * | 2011-12-26 | 2016-08-03 | 北京七星华创电子股份有限公司 | Semiconductor wafer fabrication device |
CN103822310B (en) * | 2014-03-22 | 2016-05-04 | 胡明建 | A kind of method for designing of the room air comprehensive regulation |
CN105983456B (en) * | 2015-01-28 | 2018-09-21 | 南通大学 | A kind of purification chem workstation |
JP6654534B2 (en) * | 2016-09-15 | 2020-02-26 | 株式会社Screenホールディングス | Substrate processing apparatus and substrate processing method |
JP6556194B2 (en) * | 2017-06-14 | 2019-08-07 | 佐藤 厳一 | Exhaust cooling device |
JP7253164B2 (en) * | 2018-10-25 | 2023-04-06 | 株式会社ジェーイー | cooling system |
JP7365220B2 (en) | 2019-12-12 | 2023-10-19 | 東京エレクトロン株式会社 | Liquid treatment equipment and temperature adjustment method for treatment liquid |
JP7410565B2 (en) * | 2020-03-27 | 2024-01-10 | 国立研究開発法人産業技術総合研究所 | Encapsulation cleanroom system |
CN113983620B (en) * | 2021-10-27 | 2022-05-17 | 郑州新基业汽车电子有限公司 | Novel multifunctional power generation purifier |
CN116173853A (en) * | 2023-02-14 | 2023-05-30 | 山东达民化工股份有限公司 | Ethylenediamine rectification dehydration system and rectification dehydration process |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61125017A (en) * | 1984-11-22 | 1986-06-12 | Hitachi Tokyo Electronics Co Ltd | Coating apparatus |
US5143552A (en) * | 1988-03-09 | 1992-09-01 | Tokyo Electron Limited | Coating equipment |
JP2845400B2 (en) * | 1988-03-09 | 1999-01-13 | 東京エレクトロン株式会社 | Resist processing apparatus and processing apparatus |
JPH044678A (en) * | 1990-04-23 | 1992-01-09 | Matsushita Electric Ind Co Ltd | Camcorder |
JP2901089B2 (en) * | 1990-09-05 | 1999-06-02 | 東京エレクトロン株式会社 | Liquid supply device |
JP3246621B2 (en) * | 1993-04-06 | 2002-01-15 | 日立プラント建設株式会社 | Semiconductor device manufacturing equipment |
JP3066519B2 (en) * | 1993-11-12 | 2000-07-17 | 東京エレクトロン株式会社 | Processing system and processing method |
JP3361676B2 (en) * | 1995-08-24 | 2003-01-07 | 大日本スクリーン製造株式会社 | Substrate processing method and apparatus |
JP3315037B2 (en) * | 1996-08-13 | 2002-08-19 | 高砂熱学工業株式会社 | Air conditioner |
JP3490582B2 (en) * | 1997-01-28 | 2004-01-26 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
JP3256462B2 (en) * | 1997-03-05 | 2002-02-12 | 東京エレクトロン株式会社 | Resist processing method and resist processing system |
TW459266B (en) * | 1997-08-27 | 2001-10-11 | Tokyo Electron Ltd | Substrate processing method |
US6326597B1 (en) * | 1999-04-15 | 2001-12-04 | Applied Materials, Inc. | Temperature control system for process chamber |
JP4731650B2 (en) * | 1999-12-21 | 2011-07-27 | 東京エレクトロン株式会社 | Ventilation method and ventilation equipment for semiconductor manufacturing equipment |
-
2000
- 2000-10-04 JP JP2000305067A patent/JP4737809B2/en not_active Expired - Fee Related
-
2001
- 2001-04-10 US US10/148,664 patent/US6569696B2/en not_active Expired - Fee Related
- 2001-10-04 KR KR1020027007089A patent/KR20020063200A/en not_active Application Discontinuation
- 2001-10-04 AU AU2001294188A patent/AU2001294188A1/en not_active Abandoned
- 2001-10-04 WO PCT/JP2001/008764 patent/WO2002029864A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
US6569696B2 (en) | 2003-05-27 |
WO2002029864A1 (en) | 2002-04-11 |
JP4737809B2 (en) | 2011-08-03 |
US20020179283A1 (en) | 2002-12-05 |
JP2002110492A (en) | 2002-04-12 |
KR20020063200A (en) | 2002-08-01 |
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