ATE546564T1 - Cvd-filmherstellungsvorrichtung vom rotationstyp für die massenproduktion und verfahren zur herstellung von cvd-film auf der oberfläche in einem kunststoffbehälter - Google Patents
Cvd-filmherstellungsvorrichtung vom rotationstyp für die massenproduktion und verfahren zur herstellung von cvd-film auf der oberfläche in einem kunststoffbehälterInfo
- Publication number
- ATE546564T1 ATE546564T1 AT03760909T AT03760909T ATE546564T1 AT E546564 T1 ATE546564 T1 AT E546564T1 AT 03760909 T AT03760909 T AT 03760909T AT 03760909 T AT03760909 T AT 03760909T AT E546564 T1 ATE546564 T1 AT E546564T1
- Authority
- AT
- Austria
- Prior art keywords
- cvd film
- film forming
- mass production
- rotary type
- plastic container
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D23/00—Details of bottles or jars not otherwise provided for
- B65D23/02—Linings or internal coatings
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002183309A JP4149748B2 (ja) | 2002-06-24 | 2002-06-24 | ロータリー型量産用cvd成膜装置及びプラスチック容器内表面へのcvd膜成膜方法 |
PCT/JP2003/007797 WO2004001095A1 (ja) | 2002-06-24 | 2003-06-19 | ロータリー型量産用cvd成膜装置及びプラスチック容器内表面へのcvd膜成膜方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE546564T1 true ATE546564T1 (de) | 2012-03-15 |
Family
ID=29996676
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT03760909T ATE546564T1 (de) | 2002-06-24 | 2003-06-19 | Cvd-filmherstellungsvorrichtung vom rotationstyp für die massenproduktion und verfahren zur herstellung von cvd-film auf der oberfläche in einem kunststoffbehälter |
Country Status (9)
Country | Link |
---|---|
US (1) | US7603962B2 (de) |
EP (1) | EP1516941B1 (de) |
JP (1) | JP4149748B2 (de) |
KR (1) | KR101089535B1 (de) |
CN (1) | CN100350072C (de) |
AT (1) | ATE546564T1 (de) |
AU (1) | AU2003244311A1 (de) |
HK (1) | HK1080121B (de) |
WO (1) | WO2004001095A1 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100610130B1 (ko) * | 1999-05-19 | 2006-08-09 | 미쯔비시 쇼지 플라스틱 가부시키가이샤 | Dlc막, dlc막 코팅 플라스틱 용기, 그 제조장치 및그 제조방법 |
CN100335376C (zh) * | 2002-04-26 | 2007-09-05 | 北海制罐株式会社 | 内表面经涂覆的塑料容器及其制造方法 |
JP4604541B2 (ja) * | 2004-04-16 | 2011-01-05 | 凸版印刷株式会社 | 成膜装置及び成膜方法 |
FR2889204B1 (fr) * | 2005-07-26 | 2007-11-30 | Sidel Sas | Appareil pour le depot pecvd d'une couche barriere interne sur un recipient, comprenant une ligne de gaz isolee par electrovanne |
JP4611170B2 (ja) * | 2005-10-19 | 2011-01-12 | 三菱重工業株式会社 | バリヤ膜形成装置 |
FR2907037B1 (fr) * | 2006-10-13 | 2009-01-09 | Sidel Participations | Installation de depot,au moyen d'un plasma micro-ondes,d'un revetement barriere interne dans des recipients thermoplastiques |
FR2907351B1 (fr) * | 2006-10-18 | 2009-02-06 | Sidel Participations | Machine de traitement de recipients par plasma,comprenant des circuits de depressurisation et de pressurisation decales |
FR2929295A1 (fr) * | 2008-03-25 | 2009-10-02 | Becton Dickinson France Soc Pa | Appareil pour le traitement par plasma de corps creux |
DE102009001343A1 (de) | 2009-03-05 | 2010-09-09 | Coiffeur Consulting Team Cosmetics Gmbh | Kosmetisches Haarstimulierungs-Set und Verfahren zur Stimulierung des Haarwachstums |
DE102010023119A1 (de) * | 2010-06-07 | 2011-12-22 | Khs Corpoplast Gmbh | Vorrichtung zur Plasmabehandlung von Werkstücken |
JP5603201B2 (ja) * | 2010-10-27 | 2014-10-08 | サントリーホールディングス株式会社 | 樹脂製容器の表面改質方法および樹脂製容器の表面改質装置 |
DE102012204690A1 (de) * | 2012-03-23 | 2013-09-26 | Krones Ag | Vorrichtung zum Plasmabeschichten von Füllgutbehältern, wie Flaschen |
JP6093552B2 (ja) * | 2012-11-08 | 2017-03-08 | 日精エー・エス・ビー機械株式会社 | 樹脂容器用コーティング装置 |
WO2014103677A1 (ja) * | 2012-12-26 | 2014-07-03 | 麒麟麦酒株式会社 | 薄膜の成膜装置 |
JP6352816B2 (ja) | 2013-01-18 | 2018-07-04 | 日精エー・エス・ビー機械株式会社 | 樹脂容器用コーティング装置および樹脂容器製造システム |
PT3209698T (pt) | 2014-10-22 | 2018-12-14 | Crescendo Biologics Ltd | Ratinhos transgénicos |
CN105228330B (zh) * | 2015-09-01 | 2018-09-14 | 沈阳拓荆科技有限公司 | 一种射频等离子体设备匹配器 |
CN116547409A (zh) * | 2020-08-12 | 2023-08-04 | Sio2医药产品公司 | 脉冲等离子体增强化学气相沉积方法和系统 |
DE102021120056A1 (de) * | 2021-08-02 | 2023-02-02 | Khs Gmbh | Verfahren zum Beschichten von Behältern aus Kunststoff |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3616458A (en) * | 1969-12-31 | 1971-10-26 | Yosimaro Moriya | Apparatus for activating internal surfaces of plastic hollow articles |
FR2592874B1 (fr) * | 1986-01-14 | 1990-08-03 | Centre Nat Rech Scient | Procede pour tremper un objet en verre ou vitreux et objet ainsi trempe |
US5565248A (en) * | 1994-02-09 | 1996-10-15 | The Coca-Cola Company | Method and apparatus for coating hollow containers through plasma-assisted deposition of an inorganic substance |
JP2788412B2 (ja) | 1994-08-11 | 1998-08-20 | 麒麟麦酒株式会社 | 炭素膜コーティングプラスチック容器の製造装置および製造方法 |
JP3115252B2 (ja) | 1997-03-14 | 2000-12-04 | 麒麟麦酒株式会社 | 炭素膜コーティングプラスチック容器の製造装置および製造方法 |
EP1010773A4 (de) * | 1997-02-19 | 2004-08-25 | Kirin Brewery | Verfahren und vorrichtungzur herstellung von mit kohlenstoff-film beschichtetem plastik-kontainer |
KR100390578B1 (ko) | 1998-12-17 | 2003-12-18 | 제일모직주식회사 | 고굴절율 전도성 고분자 박막 투명 필름 코팅액 조성물 |
JP2001335945A (ja) | 2000-05-24 | 2001-12-07 | Mitsubishi Shoji Plast Kk | Cvd成膜装置及びcvd成膜方法 |
JP2002121667A (ja) | 2000-10-12 | 2002-04-26 | Mitsubishi Shoji Plast Kk | プラスチック容器内へのdlc膜連続成膜装置及び連続成膜方法 |
JP4850385B2 (ja) * | 2000-12-25 | 2012-01-11 | 三菱商事プラスチック株式会社 | Dlc膜コーティングプラスチック容器の製造装置及びその製造方法 |
JP4067817B2 (ja) | 2001-12-07 | 2008-03-26 | 日精エー・エス・ビー機械株式会社 | 容器のコーティング装置 |
-
2002
- 2002-06-24 JP JP2002183309A patent/JP4149748B2/ja not_active Expired - Fee Related
-
2003
- 2003-06-19 AT AT03760909T patent/ATE546564T1/de active
- 2003-06-19 CN CNB038148919A patent/CN100350072C/zh not_active Expired - Fee Related
- 2003-06-19 AU AU2003244311A patent/AU2003244311A1/en not_active Abandoned
- 2003-06-19 EP EP03760909A patent/EP1516941B1/de not_active Expired - Lifetime
- 2003-06-19 KR KR1020047020694A patent/KR101089535B1/ko active IP Right Grant
- 2003-06-19 US US10/516,732 patent/US7603962B2/en not_active Expired - Fee Related
- 2003-06-19 WO PCT/JP2003/007797 patent/WO2004001095A1/ja active Application Filing
-
2006
- 2006-01-04 HK HK06100078.9A patent/HK1080121B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1516941A1 (de) | 2005-03-23 |
EP1516941A4 (de) | 2009-01-07 |
EP1516941B1 (de) | 2012-02-22 |
JP2004027271A (ja) | 2004-01-29 |
CN100350072C (zh) | 2007-11-21 |
CN1662675A (zh) | 2005-08-31 |
AU2003244311A8 (en) | 2004-01-06 |
WO2004001095A1 (ja) | 2003-12-31 |
HK1080121A1 (en) | 2006-04-21 |
KR20050023316A (ko) | 2005-03-09 |
AU2003244311A1 (en) | 2004-01-06 |
KR101089535B1 (ko) | 2011-12-05 |
US20050155553A1 (en) | 2005-07-21 |
HK1080121B (zh) | 2008-03-28 |
US7603962B2 (en) | 2009-10-20 |
JP4149748B2 (ja) | 2008-09-17 |
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