ATE537457T1 - Beschleunigungsmesser - Google Patents
BeschleunigungsmesserInfo
- Publication number
- ATE537457T1 ATE537457T1 AT05782315T AT05782315T ATE537457T1 AT E537457 T1 ATE537457 T1 AT E537457T1 AT 05782315 T AT05782315 T AT 05782315T AT 05782315 T AT05782315 T AT 05782315T AT E537457 T1 ATE537457 T1 AT E537457T1
- Authority
- AT
- Austria
- Prior art keywords
- axis direction
- acceleration
- displacement
- base
- bending deformation
- Prior art date
Links
- 230000001133 acceleration Effects 0.000 abstract 8
- 238000005452 bending Methods 0.000 abstract 4
- 238000006073 displacement reaction Methods 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 3
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
- G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Air Bags (AREA)
- Vehicle Body Suspensions (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2005/006783 WO2006114832A1 (ja) | 2005-04-06 | 2005-04-06 | 加速度センサ |
PCT/JP2005/016542 WO2006112051A1 (ja) | 2005-04-06 | 2005-09-08 | 加速度センサ |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE537457T1 true ATE537457T1 (de) | 2011-12-15 |
Family
ID=37114800
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05782315T ATE537457T1 (de) | 2005-04-06 | 2005-09-08 | Beschleunigungsmesser |
Country Status (7)
Country | Link |
---|---|
US (1) | US7631559B2 (de) |
EP (1) | EP1868000B1 (de) |
JP (1) | JP3956999B2 (de) |
KR (1) | KR100867550B1 (de) |
CN (1) | CN100454022C (de) |
AT (1) | ATE537457T1 (de) |
WO (2) | WO2006114832A1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5072555B2 (ja) * | 2006-12-12 | 2012-11-14 | パナソニック株式会社 | 電子素子パッケージ |
US8077447B2 (en) * | 2006-12-12 | 2011-12-13 | Panasonic Corporation | Electronic element package and method of manufacturing the same |
JP4687736B2 (ja) * | 2008-03-25 | 2011-05-25 | 株式会社村田製作所 | 外力検知装置の製造方法および外力検知装置 |
JP2010008128A (ja) * | 2008-06-25 | 2010-01-14 | Yamaha Corp | Mems |
JP5037690B2 (ja) * | 2008-08-18 | 2012-10-03 | 株式会社日立製作所 | 微小電気機械システム |
US8386042B2 (en) * | 2009-11-03 | 2013-02-26 | Medtronic Minimed, Inc. | Omnidirectional accelerometer device and medical device incorporating same |
DE112011102030T5 (de) * | 2010-06-15 | 2013-04-04 | Murata Manufacturing Co., Ltd. | Dynamiksensor |
DE102011076006B3 (de) * | 2011-05-17 | 2012-09-13 | Siemens Aktiengesellschaft | Kraftaufnehmer, insbesondere Wägezelle |
DE102011112935B4 (de) * | 2011-09-13 | 2015-02-12 | Micronas Gmbh | Kraftsensor |
JP5971349B2 (ja) * | 2012-11-19 | 2016-08-17 | 株式会社村田製作所 | 角加速度センサ |
CN105308463A (zh) * | 2013-06-04 | 2016-02-03 | 株式会社村田制作所 | 加速度传感器 |
JP6294463B2 (ja) * | 2014-03-20 | 2018-03-14 | 京セラ株式会社 | センサ |
DE102015104410B4 (de) * | 2015-03-24 | 2018-09-13 | Tdk-Micronas Gmbh | Drucksensor |
TW201728905A (zh) * | 2016-02-03 | 2017-08-16 | 智動全球股份有限公司 | 加速度計 |
CN117607489B (zh) * | 2024-01-17 | 2024-04-09 | 中国工程物理研究院电子工程研究所 | 压阻式加速度传感器的敏感结构及加速度传感器 |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD226172A3 (de) * | 1983-02-24 | 1985-08-14 | Halle Feinmech Werke Veb | Anordnung zur stabilisierung der ausgangsparameter eines gefalteten laserresonators |
DE3590167T (de) * | 1984-04-20 | 1986-05-15 | Mitutoyo Mfg. Co., Ltd., Tokio/Tokyo | Koordinatenmeßgerät |
JPH0450657A (ja) * | 1990-06-13 | 1992-02-19 | Ricoh Co Ltd | 加速度センサ |
JPH06130083A (ja) * | 1992-04-01 | 1994-05-13 | Nec Corp | 半導体加速度センサ |
JPH0682472A (ja) | 1992-09-04 | 1994-03-22 | Fujitsu Ten Ltd | 歪ゲージ式加速度センサ |
JPH08160070A (ja) | 1994-11-30 | 1996-06-21 | Akebono Brake Ind Co Ltd | 加速度センサ |
DE19547642A1 (de) * | 1994-12-20 | 1996-06-27 | Zexel Corp | Beschleunigungssensor und Verfahren zu dessen Herstellung |
JP3239709B2 (ja) * | 1995-08-16 | 2001-12-17 | 株式会社村田製作所 | 加速度センサ |
JP3277794B2 (ja) * | 1996-01-12 | 2002-04-22 | 株式会社村田製作所 | 加速度センサ |
WO1999020085A1 (en) | 1997-10-10 | 1999-04-22 | Se Kang Electric Co., Ltd. | Electric lamp circuit and structure using light emitting diodes |
FR2798993B1 (fr) * | 1999-09-28 | 2001-12-07 | Thomson Csf Sextant | Gyrometre de type diapason |
US6249088B1 (en) | 1999-11-01 | 2001-06-19 | Philips Electronics North America Corporation | Three-dimensional lattice structure based led array for illumination |
US6201353B1 (en) | 1999-11-01 | 2001-03-13 | Philips Electronics North America Corporation | LED array employing a lattice relationship |
US6194839B1 (en) | 1999-11-01 | 2001-02-27 | Philips Electronics North America Corporation | Lattice structure based LED array for illumination |
JP2002296293A (ja) | 2001-03-30 | 2002-10-09 | Sumitomo Metal Ind Ltd | 加速度センサ |
JP2003232803A (ja) * | 2002-02-12 | 2003-08-22 | Hitachi Metals Ltd | 半導体型加速度センサ |
DE10214423A1 (de) | 2002-03-30 | 2003-10-09 | Hella Kg Hueck & Co | Beleuchtungsschaltkreis, insbesondere für Kraftfahrzeuge |
JP3969228B2 (ja) * | 2002-07-19 | 2007-09-05 | 松下電工株式会社 | 機械的変形量検出センサ及びそれを用いた加速度センサ、圧力センサ |
TW594015B (en) | 2003-04-28 | 2004-06-21 | Chung Shan Inst Of Science | Multiple axial-direction solid-state accelerometer |
TW594016B (en) | 2003-04-29 | 2004-06-21 | Chung Shan Inst Of Science | Z-axis solid state gyroscope and three-axis inertial measurement apparatus |
EP1491901A1 (de) * | 2003-06-25 | 2004-12-29 | Matsushita Electric Works, Ltd. | Halbleiter-Beschleunigungsaufnehmer und Verfahren zu seiner Herstellung |
CN100565211C (zh) * | 2003-12-24 | 2009-12-02 | 日立金属株式会社 | 半导体型三轴加速度传感器 |
JP4277079B2 (ja) * | 2004-06-18 | 2009-06-10 | Okiセミコンダクタ株式会社 | 半導体加速度センサ装置及びその製造方法 |
JP4540467B2 (ja) * | 2004-12-22 | 2010-09-08 | Okiセミコンダクタ株式会社 | 加速度センサの構造及びその製造方法 |
JP2006204742A (ja) * | 2005-01-31 | 2006-08-10 | Konica Minolta Sensing Inc | 睡眠評価方法、睡眠評価システム及びその動作プログラム、パルスオキシメータ並びに睡眠支援システム |
JP2006263054A (ja) * | 2005-03-23 | 2006-10-05 | Konica Minolta Sensing Inc | 呼吸器系疾患関連解析データの取得方法、オキシメータシステム及びその動作プログラム、オキシメータ並びに酸素補給システム |
-
2005
- 2005-04-06 WO PCT/JP2005/006783 patent/WO2006114832A1/ja not_active Application Discontinuation
- 2005-09-08 KR KR1020077002590A patent/KR100867550B1/ko active IP Right Grant
- 2005-09-08 JP JP2006515400A patent/JP3956999B2/ja not_active Expired - Fee Related
- 2005-09-08 US US11/575,799 patent/US7631559B2/en not_active Expired - Fee Related
- 2005-09-08 WO PCT/JP2005/016542 patent/WO2006112051A1/ja not_active Application Discontinuation
- 2005-09-08 EP EP05782315A patent/EP1868000B1/de not_active Not-in-force
- 2005-09-08 AT AT05782315T patent/ATE537457T1/de active
- 2005-09-08 CN CNB2005800225396A patent/CN100454022C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO2006112051A1 (ja) | 2006-10-26 |
CN100454022C (zh) | 2009-01-21 |
JP3956999B2 (ja) | 2007-08-08 |
US20090183571A1 (en) | 2009-07-23 |
WO2006114832A1 (ja) | 2006-11-02 |
CN1981197A (zh) | 2007-06-13 |
KR100867550B1 (ko) | 2008-11-10 |
US7631559B2 (en) | 2009-12-15 |
JPWO2006112051A1 (ja) | 2008-11-27 |
EP1868000A4 (de) | 2010-10-06 |
EP1868000A1 (de) | 2007-12-19 |
KR20070067073A (ko) | 2007-06-27 |
EP1868000B1 (de) | 2011-12-14 |
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