594015 玖、發明說明 (發明說明應敘明：發明所屬之技術領域、先前技術、内容、實施方式及圖式簡單說明） 【發明所屬之技術領域】 本發明係有關於一種以微機械技術製作的電容式固態加速儀，特別是 一種可同時感測三軸向或二軸向加速度之感測器。 【先前技術】 - 習知以微機械技術製作之三軸向固態加速儀，以美國專利第6,2(^,284 · 號為例，其結構如第一圖所示，包含一個慣性質量塊32，數個感測彈性樑 42將質量塊32連接於包圍其外之質量塊31，使質量塊32只能沿y軸向 - 移動；固定電極塊52p及52η置於質量塊32平行於义軸之兩側，與質量 塊32之二側面形成兩個y軸向感測電容器；數個感測彈性樑將質量塊 31連接於包圍其外之質量塊33，使質量塊31只能沿x軸向移動；固定電 極塊51p及51η置於質量塊31平行於y軸之兩側，與質量塊31之二側面 形成兩個X轴向感測電容器；兩個感測彈性樑43將質量塊33連接於固定 錨60，固定錨60固定於平板71及72，使質量塊33只能沿2軸向移動，φ 平板71及72之表面、對應質量塊33之二表面各含電極板93ρ及93η，與 質量塊33之二表面形成兩個ζ軸向感測電容器。 當沿y轴向輸入^速度’兩個y軸向感測電容器因間距改變而使其 電容值改變故可感測y轴向加速度。 ^ 當沿X轴向輸入-加速度，兩個X軸向感測用電容器因間距改變而使 · 其電容值改變，故可感測X轴向加速度。 當沿Ζ軸向輸人-加速度’兩個Ζ軸向感測用電容器因間距改變而使 6 其電容值改變，γ 4 & 、 輛向及y軸向感測用電容器不受影響，故可感測z軸向 加速度。 【發明内容】 (所欲解決之問題》 述之f用㈣軸向_加速儀在X軸向及y軸細電容器製程 力工必須製作_面深且間鱗_直平面，此製祕適合表面微細 二法或乾私刻法1其所能達到的「深寬比」會_度祕而降低， 莖敏度又到限制。因此，本發日月基於習用多轴向固態加速儀所具有 之缺失進行發明。 (解決問題之技術手段〉 本發明之轉在於：改變_電抑之親，#平行於主平面 之加速度分量使質量塊位料，係使電抑之面積改變，而非使電容器之 間距改變，故無需製作兩面深且間距窄的垂直平面，無高「深寬比」之特 殊製程需求條件問題，製程簡單，適合多種加工法。 《相較於先前技術之功效》 综前所述’本發明乃揭示：-種多軸向電容式固態加速儀，其製程 簡單、無需具高「深寬比」之特殊製程需求條件，可提昇製程成功率、降 低製作成本。 再者，查同類案號（美國專利6,2〇1，284，贿，IPC類別：h〇il纖； Η·21/00)之三軸向電容式固態加速，並未揭示树明所述及之相同特 需製作具高「深寬比」之垂直平行平面，可提昇製《功率、降低製程成 本故本案應付合「產業利用性」及「進步性」之專利要件，轰依專利法 之規定提出本項發明案之專利申請。 【實施方式】 百先’請參閱第二圖，本發明之第—可行實施例之三軸向電容式固 態加速儀，第二_粒結構上《，係由具導紐㈣製成，包含三個 慣性質量塊31 ' 32、33，各以數個感測彈性触、幻、43銜接於外框架 2或固疋“ 60 ’外框架2或固定錯6G並固定於平板71及72，其中感測襟 41 C "十使質罝塊31、32、33分別只能沿平行於平板表面之第 第-軸向、及垂直於平板表面之ζ軸向移動；質量塊Μ、^之表面 分別含數個垂直於第一、第二軸向之長形凹槽31t、32t。 如第二(b)圖，平板71、％面對主結構之表面，對應長形凹槽处 處，各含兩組相互交錯、各含數個平行於長形凹槽之長形薄膜電極板他 及91b ’並分別接至接線板91p及91η，各與質量塊31表面形成兩組第一 袖向感測電谷器，長形薄膜電極板91a及91b與長形凹槽3it沿平行於第 一軸向之相關位置如第二(c)圖所示，該圖係沿第二(^圖及第二(b)圖之 A-A線之檢截面圖；當質量塊31受第一軸向之加速度之影響而產生沿第 一軸向之位移時，第一軸向感測電容器因有效電容器面積改變而使其電容 值改變，兩者之改變值相反，故量測兩組感測電容器之電容值差值即可得 知第一軸向加速度。此加速度感測信號可經由回授電路(未顯示於第二圖 回授至第一軸向感測電容器， 使質量塊31轉結位移處。 對應長形凹槽32t處，各含兩組 :形薄膜電極板92a及92b，並分 平板71、72面對主結構之表面，對」 相互交錯、各含數個平行於長形凹槽之長形 別接至接線板哗及伽，各與質量塊32表面形成兩組第二轴向感測電容 器；當質量塊32受第二軸向之加速度之影響而產生沿第二轴向之位移時， 第一軸向感啦因有效電谷II面積改變而使其電容值改變，兩者之改 變值相反，故量_組_電容H之電容值錄即可得知第二軸向加速 度。此加速度感測信號可經由回授電路(未顯示於第二圖)回授至第二轴向 感測電容器，使質量塊32維持在無位移處。 平板71、72面對主結構之表面，對應質量塊33之表面處，亦各含 薄膜電極板93 ’各與質量塊33表面形成兩組z轴向感測電容器；當質量 塊33受z軸向之加速度之影響而產生沿z軸向之位移時，z軸向感測電容 器因其電容器平板間距改變而使電容值改變，兩者之改變值相反向，故量 測兩組感測電容器之電容值差值即可得知z軸向加速度。此加速度感測信 號可經由回授電路(未顯示於第二圖）回授至第三軸向感測電容器，使質量 塊33維持在無位移處。 上述本發明之第一可行實施例之三軸向電容式固態加速儀，實際包 含二個各自獨立的加速儀，各自感測單一軸向的加速度，不受其他二軸向 加速度的影響。若只需感測二軸向加速度，只需將上述之結構簡化，刪掉 無需感測軸向之加速儀，保留所需二軸向的加速儀即可。 本發明之第二可行實施例之三轴向電容式固態加速儀，如第三圖所 594015 示，其中第三嶋主結構上，線輸軸成，包含三個慣 性質量塊31、32、33 ’其中f量塊31、％連接在—量塊％ 之外圍，賴量塊312，f量塊33以數細彈性樑Μ銜接於質量塊 312，質量塊312以數個感測彈性樑41銜接於感测彈性襟42，感測標42 之兩端衡接於外框架2 ’外框架2固定於平板71及72 ;感測㈣之钟 使質量塊33只能沿垂直於平板表面之z軸向移動；感測樑41、42之設計 使質量塊312只能沿平行於平板表面之第―、第二轴向移動。質量塊μ、 32之兩表面分別含數個垂直於第一、第二轴向之長形凹槽犯、沿。 如第三⑼圖，平板71、72面對主結構之表面，對應長形凹槽31t 處，各含兩組相互交錯、各含數個平行於長形凹槽之長形薄膜電極板灿 及仙’並分別接至接線板邶及_，各與質量塊幻表面形成兩組第一 轴向感測電容器；長形薄膜板91a及仙與長形凹槽at之相關位置 如第三(弥當質量塊31、32、及33受第—軸向之加速度之影響而同時 產生沿第-軸向之位移時’第—軸向感測電容制有效電容器面積改變而 使其電容做變’綠讀魏概，故制兩組❹掩㈣之電容值差 值即可得知第_軸向加速度。此加速度❹Η#號可經由電路(未顯示 於第三_授至第-軸向感測電容器，使質量塊31維持在無位移處。 平板71、72面對主結構之表面，對應長形凹槽幼處，各含兩組 相互父錯、各含數個平行於長形凹槽之長形薄膜電極板92&及9处，並分 別接至接線板92P及92η，各與質量塊32表面形成兩組第二轴向感測電容 器；當質量塊31、32、及33受第二軸向之加速度之影響關時產生沿第 594015 二軸向之位移時，第二軸向感測電容器因有效電容器面積改變而使其電容 值改變，兩者之改變值相反，故量測兩組感測電容器之電容值差值即可得 知第二軸向加速度。此加速度感測信號可經由回授電路(未顯示於第三圖） 回授至第二軸向感測電容器，使質量塊維持在無位移處。 平板71、72面對主結構之表面，對應質量塊33之表面處，亦各含 薄膜電極板93，各與質量塊33表面形成兩組z軸向感測電容器；當質量 塊33受z軸向之加速度之影響而產生沿z轴向之位移時，z軸向感測電容 器因其電容器間距改變而使電容值改變，兩者之改變值相反，故量測兩組 感測電容器之電容值差值即可得知z軸向加速度。此加速度感測信號可經 由回授電路(未顯示於第三圖）回授至第三轴向感測電容器，使質量境33 維持在無位移處。 第一軸向之加速度雖使質量塊31、32、及33同時產生沿第一轴向 之位移，但只要長形薄膜電極板92a及92b之兩端不與長形凹槽32t之兩 端切齊，薄膜電極板93之各邊不與質量塊33之各邊切齊，則第二轴向感 測電容器、z轴向感測電容器之電容值將不受影響。 同理，第二轴向之加速度雖使質量塊Μ、32、及33同時產生沿第 二軸向之位#’但只要長形薄膜電極板9la及灿之兩端不與長形凹槽犯 之兩端切齊，薄膜電極板93之各邊不與質量塊33之各 運刀背，則第一轴 向感測電容器、z轴向感測電容器之電容值將不受影響。 故第一軸向感測電容 z轴向之加速度對質量塊31、32完全無影響， 器 、第二軸向感測電容器之電容值不受影響。 11 594015 若只需感測第一軸向及z軸向加速度，只需取消感測樑42並使减 測標41銜接於外框架或固定錯2、及取消主結構表面垂直於第二轴向之長 形凹槽32t及平板71、72表面之長形薄膜電極板及9沘、接線板9办 及 92η。 本發明之第三可行實施例之三軸向電容式固態加速儀，如第四圖之 主結構上視@，係由具導電性材料製成，僅包含—麵性質量塊$，質量 塊3以數個感測彈性樑41銜接至感測彈性標42,⑤測標之另一端銜接 於外忙采2，外框架2固定於平板71及72。感測樑41與感測樑形成 兩段式“L-型，，感測彈性樑，其設計使質量塊3可沿平行於平板表面之第 一、第二軸向移動及沿垂直於平板表面之ζ軸向移動。質量塊3之兩表面 " 垂直於第、第一軸向之長形凹槽31t、32t，及無長形凹槽之區域。 平板71、72面對主結構之表面之薄膜電極板與上述本發明第二可 仃實知例之薄膜電極板相似，如第三⑼圖，各轴向_原理同上述。 /、要長形薄膜電極板9ia及91b、92a及92b之兩端分別不與長形 凹槽31t、32t之兩端切齊，且薄膜電極板93之範圍小於質量塊3表面無 長形凹槽處’卿—軸向之加速度郷二軸制電容ϋ、ζ轴向感測電 ："電谷值均無影響；同理第二軸向之加速度對第一軸向感測電容器、 車向感測電各||之電容值亦均無影響。Ζ轴向之加速度轉第—轴向感 則電谷器產生影響，使主結構同一面之感測電容器之電容值同時變大或變 小’但因檢取第一軸向感測信號時是量測兩組感測電容器之電容值差值， 故可互相抵銷；若採用制衡迴路，Ζ軸向之加速度對第-軸向感測電容器 12 更無影響。同理Z轴向之加速度對第二軸向之加速度之感測亦無影響。 若只需感測第-軸向及z麵加速度，只需取誠繼42並使感 測樑41純於外框架2，和肖主結構表面垂餘第二軸向之長形凹槽 32t’及取消平板71、72表面之長形薄膜電極板奶及咖、接線板9夺 及 92η 〇 上述本發明之第三可行實施例之三轴向電容式固態加速儀之另一 i式如第五圖所示’質量塊3之兩表面只含數個垂直於第―、第二轴向之 長形凹槽31t、32t。 平板71、72面對主結構之表面之薄膜電極板與上述本發明第二可 行實施例之薄膜電極板相似，如第三(的圖，各軸向感測原理同上述，平板 71、72面對主結構之表面之薄膜電極板只包含第一轴向感測電容器，及第 二轴向感測電容器。且長形薄膜電極板91a及9比、92a及92b係分別配 合長形凹槽31t、32t，並退化薄膜電極板93之設置。 第一軸向及第二軸向之加速度感測如上述之討論。z軸向加速度之 感測則需利用第一軸向感測電容器及第二軸向感測電容器之輸出信號：定 義主結構正面之總合為z轴向感測電容器，主結構反面之總合為z軸向感 測電容器。當質量塊3受z軸向之加速度之影響而產生沿z軸向之位移時， z軸向感測電容器因其電容器間距改變而使電容值改變，兩者之改變值相 反，故量測兩組感測電容器之電容值差值即可得知z軸向加速度。此加速 度感測信號可經由回授電路回授至z軸向感測電容器，使質量塊3維持在 無位移處。 13 第-軸向之加速度使第-軸向感測電容器之電容值改變，兩者之改 變值相反，其總合不變；同理第二轴向之加速度使第二軸向制電谷器之 電容值改變，兩者之改變值相反，其總合不變。故第一軸向及第二軸向之 加速度對Z軸向感測電容器無影響。 Z軸向之加速度對第一軸向及第二軸向之加速度之感測亦無影響， 如上述。 若只需感測第一軸向及z轴向加速度，只需重新設計感測樑41、 42,使質量塊3可沿平行於平板表面之第一軸向移動及沿垂直於平板表面 之z軸向移動，及取消主結構表面垂直於第二軸向之長形凹槽32t及平板 71、72表面之長形薄膜電極板92a及92b、接線板92p及92η。 若只需感測第一轴向及第二轴向加速度，則只需重新設計感測樑 41、42，使質量塊3只可沿平行於平板表面之第一軸向及第二軸向移動。 上述本發明各可行實施例中之長形凹槽，可有不同的變化設計，例 如長形凹槽内可包含數個較深之凹槽甚或穿透孔31h、32h，或長形凹槽以 數個長形孔取代，如第六圖。 第一可行實施例中的感測彈性樑可以係二段式“L_型，，感測彈性 樑’且包含第三可行實施例中的二段式“L型，，感測彈性樑，皆可以有不同 的艾化’例如第四圖〜第七圖之“ L_型”制彈性樑係以不同的方式連 接質量塊與外框架，其中，第六圖〜第七圖之各元件係承接前述之各種實 施方式。 因此’第二可行實施例中之“L_型，，感測彈性樑亦可與另一感測彈性 換卩係將L·型’感測彈性樑置於兩個質量塊之間，而將另一感卿 性樑連質量塊與外框架或固定錯，使内㈣塊只能沿平行於平板表面 "第轴向移動，外質量塊只能沿垂直於平板表面之z轴向移動； 此時内質量塊之兩表面分別含數個垂直於第―、第二軸向之長形凹槽 31t、32t ’而外質量塊之兩表面不含長形凹槽；玻璃平板上之電極板設言十 亦需同時改變。 % 〇上述本發明之各可行實施例之多軸向電容式固態加速儀之主結構 1表面微、场JL法、乾式蝴法、X光深刻精密電鑄模造成形(德文： _gra_aVan()f_ung Abf_ng ’ _ : I·)、翅齡磁 專製成，無需製作兩面深且間距窄的垂直平面，無高「深寬比」之製程需 ,述本發明之各可行實施例若以⑽辦“姻整體微細加工 '乍則配。（110)0晶^式料向蝴特性，其外觀及各組成元件均 -千灯四邊形，任二邊之夹角皆為10948。或7052。。以本發明之第二594015 发明 Description of the invention (The description of the invention should state: the technical field, prior art, content, embodiments, and drawings of the invention are briefly explained.) [Technical field to which the invention belongs] The present invention relates to a micromechanical technology Capacitive solid-state accelerometer, especially a sensor that can simultaneously detect triaxial or biaxial acceleration. [Previous technology]-A conventional triaxial solid-state accelerometer made by micromechanical technology. Take US Patent No. 6,2 (^, 284 ·) as an example. Its structure is shown in the first figure and contains an inertial mass. 32. Several sensing elastic beams 42 connect the mass 32 to the mass 31 surrounding it, so that the mass 32 can only move in the y-axis direction; the fixed electrode blocks 52p and 52η are placed on the mass 32 and parallel to the meaning. On both sides of the shaft, two y-axis sensing capacitors are formed on the two sides of the mass 32; several sensing elastic beams connect the mass 31 to the mass 33 surrounding it, so that the mass 31 can only move along the x Axial movement; the fixed electrode blocks 51p and 51η are placed on both sides of the mass block 31 parallel to the y-axis, and two X-axis sensing capacitors are formed on the two sides of the mass block 31; two sensing elastic beams 43 mass the mass block 33 is connected to the fixed anchor 60, and the fixed anchor 60 is fixed to the plates 71 and 72, so that the mass 33 can only move in 2 axial directions. The surfaces of the φ plates 71 and 72 and the two surfaces corresponding to the mass 33 include electrode plates 93ρ and 93η, two z-axis sensing capacitors are formed on the two surfaces of the mass 33. When the speed is input along the y-axis' The y-axis sensing capacitors can change y-axis acceleration due to the change in the capacitance value. ^ When the acceleration is input along the x-axis, the two x-axis sensing capacitors are caused by the change in pitch. Its capacitance value changes, so it can sense the X-axis acceleration. When the human-acceleration is input along the Z-axis, the two Z-axis sensing capacitors change their capacitance value due to the change in distance. Γ 4 & Capacitors for sensing in the y-axis are not affected, so it can sense the acceleration in the z-axis. [Summary of the Problem] (Problems to be Solved) The f-axis in the f-axis is used in the X-axis and y-axis. The fine capacitor manufacturing process must make _ face deep and thin scale _ straight plane, this system is suitable for the surface micro two method or dry private engraving method 1 The “depth-to-width ratio” that can be achieved will be _ degree secret and reduced, stem sensitivity The degree has reached the limit. Therefore, the present day and month are invented based on the shortcomings of the conventional multi-axial solid-state accelerometer. (Technical means to solve the problem) The invention's turn lies in: changing _ 电 催 之 亲, #Parallel to the main The acceleration component of the plane makes the mass block material change the area of electric suppression, and The distance between capacitors is changed, so there is no need to make vertical planes with deep sides and narrow pitches. There is no special process requirement for high "aspect ratio". The process is simple and suitable for a variety of processing methods. The aforementioned invention discloses:-a multi-axial capacitive solid-state accelerometer, which has a simple process and does not require special process requirements with a high "aspect ratio", which can improve the success rate of the process and reduce the production cost. , Check the same case number (US patent 6,201,284, bribe, IPC category: h〇il fiber; Η · 21/00) triaxial capacitive solid-state acceleration, did not reveal what Shu Ming described The same special needs to produce a vertical parallel plane with a high "aspect ratio", which can increase the production power and reduce the process cost. Therefore, this case should meet the patent requirements of "industrial availability" and "progressiveness." Patent application for an invention. [Embodiment] Baixian 'Please refer to the second figure, the third-capacitive solid-state accelerometer of the first-feasible embodiment of the present invention, the second particle structure, "is made of a guide button, including three Inertial masses 31'32, 33, each with a number of sensing elastic touch, magic, 43 connected to the outer frame 2 or fixed "60 'outer frame 2 or fixed 6G and fixed to the flat plates 71 and 72, where Measuring lapel 41 C " Ten Shi masses 31, 32, 33 can only move along the-axis parallel to the flat surface and the ζ axis perpendicular to the flat surface; the surfaces of the masses M, ^ are respectively Contains several long grooves 31t and 32t perpendicular to the first and second axial directions. As shown in Figure 2 (b), the flat plate 71 and the surface facing the main structure correspond to the long grooves. The two groups are staggered with each other, each containing several long thin-film electrode plates parallel to the long grooves 91b ′ and connected to the wiring plates 91p and 91η, respectively, each forming two sets of first sleeve direction sensing with the surface of the mass 31 The relevant positions of the electric valleyr, the elongated thin-film electrode plates 91a and 91b and the elongated groove 3it parallel to the first axis are shown in the second (c) diagram. The figure is a cross-sectional view taken along the line AA of the second (^ and second (b)); when the mass 31 is affected by the acceleration in the first axis and the displacement along the first axis occurs, the first axis The capacitance value of the sensing capacitor is changed due to the change in the effective capacitor area. The change values of the two are opposite. Therefore, the first axial acceleration can be obtained by measuring the difference between the capacitance values of the two sets of sensing capacitors. This acceleration sensing The signal can be fed back to the first axial sensing capacitor through the feedback circuit (not shown in the second figure), so that the mass 31 is shifted and shifted. Corresponding to the long groove 32t, each contains two groups: a thin film electrode plate 92a and 92b, and the surfaces of the flat plates 71 and 72 facing the main structure are opposite to each other, and each of the elongated shapes each containing several parallel grooves is connected to the connection plate and the surface of the mass 32 respectively. Two sets of second axial sensing capacitors are formed; when the mass 32 is displaced along the second axis by the acceleration of the second axis, the first axial sense is caused by the change in the effective electric valley II area The capacitance value changes, and the changes of the two are opposite, so the capacitance value of the quantity_group_capacitance H is recorded. Know the second axial acceleration. This acceleration sensing signal can be fed back to the second axial sensing capacitor through a feedback circuit (not shown in the second figure), so that the mass 32 is maintained at a non-displacement position. Flat plate 71, 72 faces the main structure, corresponding to the surface of the mass 33, and each contains a thin-film electrode plate 93 ', each forming two sets of z-axis sensing capacitors with the surface of the mass 33; when the mass 33 is subjected to z-axis acceleration When the displacement along the z-axis occurs due to the effect of the z-axis, the capacitance value of the z-axis sensing capacitor changes due to the change in the capacitor plate spacing. The change values of the two are opposite, so the difference in capacitance between the two sets of sensing capacitors is measured. The z-axis acceleration can be obtained from the value. This acceleration sensing signal can be fed back to the third axial sensing capacitor via a feedback circuit (not shown in the second figure), so that the mass 33 is maintained at a position without displacement. The three-axis capacitive solid-state accelerometer of the first feasible embodiment of the present invention described above actually includes two independent accelerometers, each of which senses acceleration in a single axis and is not affected by the acceleration in the other two axes. If you only need to sense the two-axis acceleration, you only need to simplify the structure described above, delete the accelerometer that does not need to sense the axial direction, and keep the required two-axis accelerometer. The three-axis capacitive solid-state accelerometer according to the second feasible embodiment of the present invention is shown in the third figure 594015, in which the main shaft structure of the third frame is formed by a linear axis and includes three inertial masses 31, 32, and 33. 'Where the f gauge block 31 and% are connected to the periphery of the gauge block%, the gauge block 312 and the f gauge block 33 are connected to the mass block 312 by a number of fine elastic beams M, and the mass block 312 is connected by a plurality of sensing elastic beams 41 At the sensing elastic lapel 42, the two ends of the sensing target 42 are balanced to the outer frame 2 'The outer frame 2 is fixed to the flat plates 71 and 72; the bell of the cymbal makes the mass 33 only along the z-axis perpendicular to the surface of the flat plate Directional movement; the design of the sensing beams 41 and 42 allows the mass 312 to move only along the first and second axes parallel to the surface of the flat plate. The two surfaces of the masses μ and 32 respectively include a plurality of elongated grooves and edges perpendicular to the first and second axial directions. As shown in the third figure, the surfaces of the flat plates 71, 72 facing the main structure, corresponding to the long groove 31t, each contain two groups of long thin electrode plates that are staggered with each other, each containing several parallel to the long groove. Xian 'is connected to the connection plates 邶 and _ respectively, each forming two sets of first axial sensing capacitors with the magic surface of the mass block; the relative positions of the long thin film plate 91a and the fairy and the long groove at are as the third (Mi When the masses 31, 32, and 33 are affected by the acceleration in the first axis and the displacement in the first axis is generated at the same time, the area of the effective capacitor of the first axis sensing capacitance system changes and its capacitance becomes green. After reading Wei summary, the difference in capacitance between the two sets of masks can be used to obtain the _axis acceleration. This acceleration ## can be passed through the circuit (not shown in the third _ to the -axis sensing capacitor). , So that the mass 31 is maintained at no displacement. The surfaces of the flat plates 71 and 72 facing the main structure correspond to the long positions of the long grooves, each of which contains two sets of mutual misalignment, each containing several lengths parallel to the long grooves. Shaped thin-film electrode plates 92 & and 9 places, and connected to the wiring plates 92P and 92η respectively, each forming two with the surface of the mass 32 The second axial sensing capacitor; when the masses 31, 32, and 33 are affected by the acceleration in the second axial direction, a displacement along the 594015 second axial direction causes the second axial sensing capacitor to have an effective capacitor area The change causes the capacitance value to change, and the change values of the two are opposite, so the second axial acceleration can be obtained by measuring the difference between the capacitance values of the two sets of sensing capacitors. This acceleration sensing signal can be passed through a feedback circuit (not (Shown in the third figure) The feedback to the second axial sensing capacitor keeps the masses at no displacement. The surfaces of the plates 71, 72 facing the main structure, corresponding to the surface of the mass 33, also each contain a thin film electrode. Plates 93 each form two sets of z-axis sensing capacitors on the surface of the mass 33; when the mass 33 is displaced along the z-axis by the acceleration in the z-axis, the z-axis sensing capacitors are due to their capacitors The change in the distance causes the capacitance value to change. The two values are opposite, so the z-axis acceleration can be obtained by measuring the difference between the capacitance values of the two sets of sensing capacitors. This acceleration sensing signal can be passed through a feedback circuit (not shown). (Pictured in the third picture) To the sensing capacitor, so that the mass environment 33 is maintained at no displacement. Although the acceleration in the first axis causes the masses 31, 32, and 33 to move along the first axis at the same time, as long as the long thin-film electrode plate 92a and The two ends of 92b are not aligned with the two ends of the long groove 32t, and the sides of the thin-film electrode plate 93 are not aligned with the sides of the mass 33. Then, the second axial sensing capacitor and the z axial sensing capacitor The capacitance value will not be affected. Similarly, although the acceleration in the second axis causes the masses M, 32, and 33 to generate positions along the second axis at the same time, as long as the long thin-film electrode plate 9la and Chan The ends are not aligned with the two ends of the long groove, the sides of the thin-film electrode plate 93 are not aligned with the backs of the mass blocks 33, and the capacitance values of the first axial sensing capacitor and the z axial sensing capacitor will be Not affected. Therefore, the acceleration in the z-axis of the first axial sensing capacitor has no effect on the masses 31 and 32, and the capacitance of the second and third axial sensing capacitors is not affected. 11 594015 If only the first axial and z-axis accelerations need to be sensed, it is only necessary to cancel the sensing beam 42 and connect the reduction target 41 to the outer frame or fix it wrongly 2, and cancel the main structure surface perpendicular to the second axis The elongated groove 32t and the elongated thin-film electrode plates and 9 表面 on the surface of the flat plates 71 and 72, and the wiring board 9 and 92η. The three-axis capacitive solid-state accelerometer of the third feasible embodiment of the present invention, as shown in the main structure of the fourth figure @, is made of a conductive material and includes only a planar mass $, mass 3 A plurality of sensing elastic beams 41 are connected to the sensing elastic target 42, and the other end of the measuring target is connected to the busy mining 2 and the outer frame 2 is fixed to the flat plates 71 and 72. The sensing beam 41 and the sensing beam form a two-stage "L-shaped", sensing elastic beam, which is designed so that the mass 3 can move along the first and second axes parallel to the flat surface and perpendicular to the flat surface Ζ axial movement. The two surfaces of the mass 3 " the elongated grooves 31t, 32t perpendicular to the first and the first axis, and the areas without the elongated grooves. The surfaces of the flat plates 71, 72 facing the main structure The thin-film electrode plate is similar to the thin-film electrode plate of the second practical example of the present invention, as shown in the third figure, the principle of each axial direction is the same as above. /, Long thin-film electrode plates 9ia and 91b, 92a, and 92b are required. The two ends are not aligned with the two ends of the long grooves 31t and 32t respectively, and the range of the thin-film electrode plate 93 is smaller than that of the surface of the mass 3 without the long grooves. , Ζ axial sensing electricity: "Electric valley value has no effect; similarly, the acceleration of the second axial direction has no effect on the capacitance values of the first axial sensing capacitor and the vehicle direction sensing electricity. The acceleration of the Z axis turns to the first axis. The axial valley effect affects the valley device, so that the capacitance values of the sensing capacitors on the same side of the main structure are simultaneously It becomes larger or smaller ', but when the first axial sensing signal is detected, the capacitance difference between the two sets of sensing capacitors is measured, so they can offset each other; if a check-and-balance circuit is used, the acceleration in the Z-axis -The axial sensing capacitor 12 has no effect. Similarly, the acceleration in the Z axis has no effect on the acceleration in the second axis. If you only need to sense the acceleration in the -axis and z plane, you only need to be honest. Following 42 and making the sensing beam 41 pure from the outer frame 2, the second axial axial long groove 32t 'is left on the surface of the Xiao main structure, and the long thin film electrode plates on the surface of the flat plates 71 and 72 are removed. Plate 9 and 92η 〇 Another i-type of the three-axis capacitive solid-state accelerometer of the third feasible embodiment of the present invention is shown in the fifth figure. 'The two surfaces of the mass 3 only contain a few perpendicular to the first- The second axial long grooves 31t and 32t. The thin-film electrode plates on the surfaces of the flat plates 71 and 72 facing the main structure are similar to the thin-film electrode plates of the second feasible embodiment of the present invention, as shown in the third figure. The principle of each axis sensing is the same as above. The thin-film electrode plates on the surfaces of the flat plates 71 and 72 facing the main structure only include the first axis. Directional sensing capacitors and second axial sensing capacitors, and the long thin film electrode plates 91a and 9 ratio, 92a and 92b are respectively fitted with the long grooves 31t and 32t, and degrade the arrangement of the thin film electrode plate 93. First The axial and second axial acceleration sensing is as discussed above. The z-axis acceleration sensing requires the output signals of the first axial sensing capacitor and the second axial sensing capacitor: define the front of the main structure The sum is the z-axis sensing capacitor, and the sum of the reverse side of the main structure is the z-axis sensing capacitor. When the mass 3 is affected by the z-axis acceleration and generates a displacement along the z-axis, the z-axis sensing capacitor The capacitance value of the capacitor is changed due to the change in the capacitor pitch. The two values are opposite. Therefore, the z-axis acceleration can be obtained by measuring the difference between the capacitance values of the two sets of sensing capacitors. This acceleration sensing signal can be fed back to the z-axis sensing capacitor via a feedback circuit, so that the mass 3 is maintained at a position without displacement. 13 The acceleration in the first-axis direction changes the capacitance of the first-axis sensing capacitor. The change in the two values is opposite, and the sum of the two values is the same. Similarly, the acceleration in the second axis makes the second valley-controller. The capacitance value is changed, the change value of the two is opposite, and the total is unchanged. Therefore, the acceleration in the first and second axes has no effect on the Z-axis sensing capacitor. The acceleration in the Z axis has no effect on the acceleration in the first and second axes, as described above. If only the first axial and z-axis accelerations need to be sensed, the sensing beams 41, 42, only need to be redesigned so that the mass 3 can move along the first axis parallel to the flat surface and along z that is perpendicular to the flat surface Move axially, and cancel the long grooves 32t on the surface of the main structure perpendicular to the second axis, and the long thin-film electrode plates 92a and 92b and the wiring plates 92p and 92η on the surfaces of the flat plates 71 and 72. If only the first and second axial accelerations need to be sensed, the sensing beams 41 and 42 need only be redesigned so that the mass 3 can only move along the first and second axial directions parallel to the flat surface . The above-mentioned elongated grooves in the various feasible embodiments of the present invention may have different design variations. For example, the elongated grooves may include several deeper grooves or even through holes 31h, 32h, or the elongated grooves. Several elongated holes were replaced, as shown in Figure 6. The sensing elastic beam in the first feasible embodiment may be a two-stage "L_ type, sensing elastic beam 'and including the two-stage" L-type, "sensing a flexible beam in the third feasible embodiment. There can be different AI's. For example, the elastic beams of the "L_ type" made in the fourth to seventh diagrams connect the mass and the outer frame in different ways. Among them, each of the sixth to seventh diagrams is undertaking The aforementioned various embodiments. Therefore, in the "L_type" in the second feasible embodiment, the sensing elastic beam can also be exchanged with another sensing elasticity. The "L-shaped" sensing elastic beam is placed between two masses, and Another sensational beam is connected to the outer frame or fixed incorrectly, so that the inner mass can only move along the "parallel axis" of the flat surface, and the outer mass can only move along the z axis perpendicular to the flat surface; At this time, the two surfaces of the inner mass have several long grooves 31t and 32t perpendicular to the first and second axes, and the two surfaces of the outer mass have no long grooves; the electrode plate on the glass plate Let's say that the ten also needs to be changed at the same time.% 〇 The main structure of the multi-axial capacitive solid-state accelerometer of each of the feasible embodiments of the present invention 1 Surface micro, field JL method, dry butterfly method, X-ray deep precision electroforming mold forming (German: _gra_aVan () f_ung Abf_ng '_: I ·), wing-age magnetic special, no need to make vertical planes that are deep on both sides and narrowly spaced, there is no need for a high "aspect ratio" process. If the feasible embodiment is based on the "fine overall processing of marriage", then it is matched. (110) 0 crystal ^ formula material characteristics, Its appearance and its constituent elements are a thousand-lamp quadrangle, and the angle between any two sides is 10948. Or 7052. According to the second aspect of the present invention,
付施例之三軸向電容式嶋加速儀為例，其結構如第間，除外形與 圖不同外其餘所而各項功能及組成元件並無不同。以⑽)石夕晶片製 具有-優點，㈣其具垂直職刻特性、自動侧停止魏，故製作感 t長形凹槽_單，可精確控制_之寬度，提昇製程成功率及 二"之-致性。但由於感測樑41及42之間並非正交，故第—感測轴 。第二感測軸向並非正交，系統應㈣必須將其轉換至—正交之座標 統： 15 594015 定義-新座標系統(X，，y，，z)，為由原座標系統(x，y，z)繞z轴_ θ(19·48。）角度而成’若感測樑41、42分別平行於y，軸及叉軸，如第八圖 之二座標系統關侧，則第-感測麵平行於χ，軸，第二感測軸向平行於 y軸，故感測加速度分量分別為Αχ，及Ay。因χ轴與y，軸、χ，軸與y轴非 正交咖⑽需轉換至一正交的座標系統：㈣淋心^广設系統之 工作座標為(x，y，z)座標，則由第人圖之二座標系統_圖，即可將(Ax，，Ay) 轉換為(Ax’Ay)，其中，第八圖之各元件係承接前述之各種實施方式。 雖然本發明已以-频實施_露如上，然其麟肋限定本發 明，任何熟悉此技藝者，在不脫離本發明之精神和範圍内，當可作各種之 更動與潤飾，S此本發明之保護麵#視_之巾請專概_界定者為 準。 【圓式簡單說明】 為期能對本發明之目的、功效及構造特徵有更詳盡明確的瞭解， 兹舉可行實施例並配合圖式說明如後： 第一圖所示係習知三軸向電容式固態加速儀之結構示意圖，且其中(a)圖為 主結構之上視圖；（b)圖為橫截面示意圖。 第一圖所示係本發明第一可行實施例之三轴向電容式固態加速儀之結構示 意圖，且其中(a)圖為主結構之上視圖；（b)圖為玻璃平板表面之感測 電容器之長形電極板示意圖；（c)圖為橫截面示意圖。 第二圖所示係本發明第二可行實施例之三轴向電容式固態加速儀之結構示 思圖，且其中(a)圖為主結構之上視圖；（b)圖為玻璃平板表面之感測 電容器之長形電極板示意圖；（c)圖為橫截面示意圖。 16 594015 第四圖、第五騎示係本發明兩種不_式之第三可行實施例三軸向電容 式固態加速儀之主結構示意圖。 第六圖、第七圖所示係本發明不同形式 ^ 、 一、弟三可行實施例之三軸向 電容式固態加速儀之結構示意圖。 第八圖所示係本發明以⑽)矽晶片經整體微細加 I作之第二可者 例之二軸向電容式固態加速儀之結構示意圖。 只也 % 【元件符號說明】As an example, the three-axis capacitive radon accelerometer in the embodiment is as follows. Its structure is the same as in the figure, and the functions and components are not different. ⑽) Shi Xi wafer manufacturing has-advantages, because it has vertical engraving characteristics, automatic side stop Wei, so making a long groove _ single, can accurately control the width of _, to improve the success rate of the process and two " Of-consistent. However, since the sensing beams 41 and 42 are not orthogonal, the first-sensing axis. The second sensing axis is not orthogonal, and the system must convert it to the orthogonal coordinate system: 15 594015 Definition-The new coordinate system (X ,, y ,, z) is the original coordinate system (x, y, z) around the angle of the z-axis _ θ (19 · 48.). If the sensing beams 41, 42 are parallel to the y, axis, and fork axis, respectively, as shown in the eighth figure of the coordinate system off side, then the- The sensing surface is parallel to χ and the axis, and the second sensing axis is parallel to the y-axis, so the sensing acceleration components are Ax and Ay, respectively. Because the χ and y, Axis, χ, and y axes are non-orthogonal, it needs to be converted to an orthogonal coordinate system: ㈣ ^ 心 ^ The working coordinate of the widely set system is (x, y, z), then From the second coordinate system of the second figure, the (Ax ,, Ay) can be converted into (Ax'Ay), wherein each element of the eighth figure is to undertake the aforementioned various embodiments. Although the present invention has been implemented in the same manner as described above, its limitations limit the present invention. Anyone skilled in the art can make various modifications and retouches without departing from the spirit and scope of the present invention.的 保护 面 #The _ of the towel please specifically _ define whichever prevails. [Circular description] In order to have a more detailed and clear understanding of the purpose, efficacy and structural features of the present invention, the feasible embodiments are illustrated in conjunction with the illustrations as follows: The first figure shows the conventional triaxial capacitive type The structure diagram of the solid-state accelerometer, and (a) is a top view of the main structure; (b) is a schematic cross-sectional view. The first figure shows a schematic structural diagram of a triaxial capacitive solid-state accelerometer according to the first feasible embodiment of the present invention, and (a) the top view of the main structure; (b) the sensing of the surface of the glass plate A schematic view of a long electrode plate of a capacitor; (c) is a schematic cross-sectional view. The second figure shows the structure of a three-axis capacitive solid-state accelerometer according to the second feasible embodiment of the present invention, and (a) is the top view of the main structure; (b) is the surface of the glass plate A schematic diagram of a long electrode plate of a sensing capacitor; (c) is a schematic cross-sectional view. 16 594015 The fourth figure and the fifth riding instruction are schematic diagrams of the main structure of the third feasible embodiment of the three different embodiments of the present invention and the triaxial capacitive solid-state accelerometer. The sixth and seventh figures show the structural schematic diagrams of the three-axis capacitive solid-state accelerometers in different forms of the present invention. The eighth figure is a schematic diagram showing the structure of a second possible example of an axial capacitive solid-state accelerometer in which the silicon wafer of the present invention is made by adding micro-crystalline silicon as a whole. Only% [Description of component symbols]
2 :外框架2: Outer frame
3、31、32、33、312:質量塊 31t、32t :長形凹槽 31h、32h ··深凹槽或穿透孔 41、42、43 :感測彈性樑 51ρ、51η :固定電極塊 52ρ、52η :固定電極塊 60 :固定錨 71、72 :平板 91a、91b ··電極板 92a、92b ·電極板 91p、91η :接線板 92ρ、92η :接線板 93 :電極板3, 31, 32, 33, 312: Mass blocks 31t, 32t: Long grooves 31h, 32h ... Deep grooves or penetration holes 41, 42, 43: Sensing elastic beams 51ρ, 51η: Fixed electrode blocks 52ρ , 52η: fixed electrode block 60: fixed anchors 71, 72: flat plates 91a, 91b · electrode plates 92a, 92b · electrode plates 91p, 91η: terminal plates 92ρ, 92η: terminal plates 93: electrode plates