ATE531775T1 - Klebefolie zum schichten von halbleiterchips - Google Patents
Klebefolie zum schichten von halbleiterchipsInfo
- Publication number
- ATE531775T1 ATE531775T1 AT07291507T AT07291507T ATE531775T1 AT E531775 T1 ATE531775 T1 AT E531775T1 AT 07291507 T AT07291507 T AT 07291507T AT 07291507 T AT07291507 T AT 07291507T AT E531775 T1 ATE531775 T1 AT E531775T1
- Authority
- AT
- Austria
- Prior art keywords
- chips
- adhesive film
- stacking
- phenoxy resin
- stacked
- Prior art date
Links
- 239000002313 adhesive film Substances 0.000 title abstract 7
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 239000010410 layer Substances 0.000 abstract 3
- 229920006287 phenoxy resin Polymers 0.000 abstract 3
- 239000013034 phenoxy resin Substances 0.000 abstract 3
- 229920001169 thermoplastic Polymers 0.000 abstract 3
- 239000004416 thermosoftening plastic Substances 0.000 abstract 3
- 239000012790 adhesive layer Substances 0.000 abstract 2
- 239000003822 epoxy resin Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 229920000647 polyepoxide Polymers 0.000 abstract 2
- 125000006850 spacer group Chemical group 0.000 abstract 2
- 229920001187 thermosetting polymer Polymers 0.000 abstract 2
- 238000003848 UV Light-Curing Methods 0.000 abstract 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 abstract 1
- 229920001296 polysiloxane Polymers 0.000 abstract 1
- -1 small molecule compounds Chemical class 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/10—Adhesives in the form of films or foils without carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/20—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive itself
- C09J2301/208—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive itself the adhesive layer being constituted by at least two or more adjacent or superposed adhesive layers, e.g. multilayer adhesive
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2461/00—Presence of condensation polymers of aldehydes or ketones
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2463/00—Presence of epoxy resin
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/2612—Auxiliary members for layer connectors, e.g. spacers
- H01L2224/26122—Auxiliary members for layer connectors, e.g. spacers being formed on the semiconductor or solid-state body to be connected
- H01L2224/26135—Alignment aids
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29075—Plural core members
- H01L2224/2908—Plural core members being stacked
- H01L2224/29083—Three-layer arrangements
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/831—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
- H01L2224/83101—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
- H01L2224/83855—Hardening the adhesive by curing, i.e. thermosetting
- H01L2224/83856—Pre-cured adhesive, i.e. B-stage adhesive
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/0651—Wire or wire-like electrical connections from device to substrate
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- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
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- H01L2225/06575—Auxiliary carrier between devices, the carrier having no electrical connection structure
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- H01L2924/01012—Magnesium [Mg]
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- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2848—Three or more layers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2852—Adhesive compositions
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2852—Adhesive compositions
- Y10T428/287—Adhesive compositions including epoxy group or epoxy polymer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31511—Of epoxy ether
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Die Bonding (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070024620A KR100844383B1 (ko) | 2007-03-13 | 2007-03-13 | 반도체 칩 적층용 접착 필름 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE531775T1 true ATE531775T1 (de) | 2011-11-15 |
Family
ID=39467294
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT07291507T ATE531775T1 (de) | 2007-03-13 | 2007-12-12 | Klebefolie zum schichten von halbleiterchips |
Country Status (7)
Country | Link |
---|---|
US (1) | US7960023B2 (de) |
EP (1) | EP1970422B1 (de) |
JP (1) | JP4590571B2 (de) |
KR (1) | KR100844383B1 (de) |
CN (1) | CN101265393B (de) |
AT (1) | ATE531775T1 (de) |
TW (1) | TWI383032B (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001049228A (ja) * | 1999-08-12 | 2001-02-20 | Sony Chem Corp | 低温硬化型接着剤及びこれを用いた異方導電性接着フィルム |
KR100637322B1 (ko) * | 2004-10-22 | 2006-10-20 | 도레이새한 주식회사 | 전자부품용 접착테이프 조성물 |
KR100635053B1 (ko) * | 2005-06-21 | 2006-10-16 | 도레이새한 주식회사 | 전자부품용 접착테이프 |
KR100844383B1 (ko) * | 2007-03-13 | 2008-07-07 | 도레이새한 주식회사 | 반도체 칩 적층용 접착 필름 |
KR100963675B1 (ko) * | 2008-03-14 | 2010-06-15 | 제일모직주식회사 | 반도체 패키징용 복합기능 테이프 및 이를 이용한 반도체소자의 제조방법 |
KR101075192B1 (ko) * | 2009-03-03 | 2011-10-21 | 도레이첨단소재 주식회사 | 전자부품 제조용 점착테이프 |
KR101073698B1 (ko) * | 2009-09-07 | 2011-10-14 | 도레이첨단소재 주식회사 | 점착테이프와 리드프레임의 라미네이션 방법 |
KR20110041925A (ko) * | 2009-10-16 | 2011-04-22 | 삼성전자주식회사 | 이중층 패턴형성용 접착필름, 이의 제조방법, 및 이를 이용한 패턴 접착층의 형성방법 |
TW201138159A (en) * | 2010-04-22 | 2011-11-01 | shi-long Liu | Light emitting diode package structure and its manufacturing method |
KR20120082129A (ko) * | 2011-01-13 | 2012-07-23 | 도레이첨단소재 주식회사 | 전자부품 제조용 점착테이프 |
KR101295705B1 (ko) * | 2011-04-25 | 2013-08-16 | 도레이첨단소재 주식회사 | 투명 플라스틱기판용 페녹시수지 조성물 및 이를 이용한 투명 플라스틱 기판소재 |
JP5958262B2 (ja) | 2011-10-28 | 2016-07-27 | 信越化学工業株式会社 | ウエハ加工体、ウエハ加工用部材、ウエハ加工用仮接着材、及び薄型ウエハの製造方法 |
EP2657963B1 (de) * | 2012-04-24 | 2017-09-06 | Shin-Etsu Chemical Co., Ltd. | Wafer-dreischichtige Kleberschicht-Träger-Verbund, Träger mit dreischichtiger Kleberschicht zur Verwendung in der Waferverarbeitung, dreischichtige Kleberschicht zur Verwendung in der Waferverarbeitung, Verfahren zur Herstellung des Verbunds und Verfahren zur Herstellung eines dünnen Wafers unter Verwendung des Verbunds |
WO2014051106A1 (ja) * | 2012-09-28 | 2014-04-03 | リンテック株式会社 | 粘着シート及び粘着シートの製造方法 |
US20140091440A1 (en) * | 2012-09-29 | 2014-04-03 | Vijay K. Nair | System in package with embedded rf die in coreless substrate |
JP6059631B2 (ja) * | 2012-11-30 | 2017-01-11 | 信越化学工業株式会社 | ウエハ加工体、ウエハ加工用部材、ウエハ加工用仮接着材、及び薄型ウエハの製造方法 |
KR102116987B1 (ko) | 2013-10-15 | 2020-05-29 | 삼성전자 주식회사 | 반도체 패키지 |
JP6727786B2 (ja) * | 2015-10-16 | 2020-07-22 | リンテック株式会社 | 粘着シートおよび表示体 |
US9659917B1 (en) | 2015-12-11 | 2017-05-23 | Micron Technology, Inc. | Apparatuses and methods for forming die stacks |
CN115260963B (zh) * | 2022-09-27 | 2022-12-27 | 武汉市三选科技有限公司 | 低模量垂直堆叠封装用薄膜黏晶胶、其制备方法及应用 |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0616524B2 (ja) | 1984-03-12 | 1994-03-02 | 日東電工株式会社 | 半導体ウエハ固定用接着薄板 |
JPS60223139A (ja) | 1984-04-18 | 1985-11-07 | Nitto Electric Ind Co Ltd | 半導体ウエハ固定用接着薄板 |
JP2501100B2 (ja) | 1985-08-15 | 1996-05-29 | ソニー株式会社 | 連結シ−ト |
DE68922812T2 (de) * | 1988-09-29 | 1995-12-07 | Tomoegawa Paper Mfg Co Ltd | Klebebänder. |
ATE216122T1 (de) | 1994-01-27 | 2002-04-15 | Loctite Ireland Ltd | Zusammenstellungen und methoden zur anordnung anisotropisch leitender bahnen und verbindungen zwischen zwei sätzen von leitern |
JPH0959346A (ja) * | 1995-08-28 | 1997-03-04 | Matsushita Electric Works Ltd | 積層板用エポキシ樹脂組成物 |
TW505686B (en) * | 1996-07-15 | 2002-10-11 | Hitachi Chemical Ltd | Film-like adhesive for connecting circuit and circuit board |
DE69738783D1 (de) * | 1996-10-08 | 2008-07-31 | Hitachi Chemical Co Ltd | Halbleiteranordnung, halbleiterchipträgersubstrat, herstellungsverfahren für anordnung und substrat, klebstoff und doppelseitiges haftklebeband |
JPH10226769A (ja) * | 1997-02-17 | 1998-08-25 | Hitachi Chem Co Ltd | フィルム状接着剤及び接続方法 |
JP3587859B2 (ja) * | 1997-03-31 | 2004-11-10 | 日立化成工業株式会社 | 回路接続材料並びに回路端子の接続構造及び接続方法 |
JP3678547B2 (ja) * | 1997-07-24 | 2005-08-03 | ソニーケミカル株式会社 | 多層異方導電性接着剤およびその製造方法 |
JP2000068295A (ja) * | 1998-08-25 | 2000-03-03 | Tomoegawa Paper Co Ltd | 電子部品用接着フィルム |
JP3379456B2 (ja) | 1998-12-25 | 2003-02-24 | ソニーケミカル株式会社 | 異方導電性接着フィルム |
EP1026217B1 (de) * | 1999-02-08 | 2003-04-23 | Toray Saehan Inc. | Verfahren zur Herstellung von Klebebändern für elektronische Bauelemente |
JP4423779B2 (ja) * | 1999-10-13 | 2010-03-03 | 味の素株式会社 | エポキシ樹脂組成物並びに該組成物を用いた接着フィルム及びプリプレグ、及びこれらを用いた多層プリント配線板及びその製造法 |
KR100931742B1 (ko) | 2000-02-15 | 2009-12-14 | 히다치 가세고교 가부시끼가이샤 | 접착제 조성물, 그 제조 방법, 이것을 이용한 접착 필름, 반도체 탑재용 기판 및 반도체 장치 |
JP3491595B2 (ja) * | 2000-02-25 | 2004-01-26 | ソニーケミカル株式会社 | 異方導電性接着フィルム |
KR100593314B1 (ko) | 2000-07-24 | 2006-06-26 | 엘지.필립스 엘시디 주식회사 | 액정 표시장치 |
JP2002327165A (ja) * | 2001-04-20 | 2002-11-15 | Three M Innovative Properties Co | 熱硬化性の接着剤フィルム及びそれを用いた接着構造 |
KR100435034B1 (ko) | 2001-11-08 | 2004-06-09 | 엘지전선 주식회사 | 이방성 도전필름 |
JP4067308B2 (ja) * | 2002-01-15 | 2008-03-26 | リンテック株式会社 | ウエハダイシング・接着用シートおよび半導体装置の製造方法 |
CN1280883C (zh) * | 2002-04-03 | 2006-10-18 | 株式会社巴川制纸所 | 半导体装置制造用的粘接片 |
JP2003291156A (ja) * | 2002-04-05 | 2003-10-14 | Dainippon Ink & Chem Inc | セルフ・アセンブル型微細構造を有する積層フィルムの製造方法およびそこで使用する組成物 |
TW200516126A (en) * | 2003-06-23 | 2005-05-16 | Toray Industries | Adhesive composition for semiconductor devices, coverlay films, adhesive sheets and copper-clad polyimide films using the composition |
JP4411876B2 (ja) * | 2003-06-23 | 2010-02-10 | 東レ株式会社 | 半導体装置用接着剤組成物およびそれを用いた接着剤シート及びカバーレイフィルム並びに銅張りポリイミドフィルム |
US20050227064A1 (en) | 2004-04-01 | 2005-10-13 | Hwail Jin | Dicing die bonding film |
KR101165131B1 (ko) * | 2004-04-20 | 2012-07-12 | 히다치 가세고교 가부시끼가이샤 | 접착시트, 반도체장치, 및 반도체장치의 제조방법 |
KR100637322B1 (ko) * | 2004-10-22 | 2006-10-20 | 도레이새한 주식회사 | 전자부품용 접착테이프 조성물 |
KR100737610B1 (ko) * | 2005-04-28 | 2007-07-10 | 엘에스전선 주식회사 | 반도체용 다이싱 다이 접착필름 |
KR100593814B1 (ko) * | 2005-12-06 | 2006-06-28 | 에이스 인더스트리 주식회사 | 반도체 다이본딩용 점착테이프 |
KR100669134B1 (ko) * | 2006-05-08 | 2007-01-16 | 주식회사 이녹스 | 반도체 패키지용 접착필름 |
KR100844383B1 (ko) * | 2007-03-13 | 2008-07-07 | 도레이새한 주식회사 | 반도체 칩 적층용 접착 필름 |
KR100882735B1 (ko) * | 2007-03-19 | 2009-02-06 | 도레이새한 주식회사 | 이방성 전도필름 및 이의 접착방법 |
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- 2007-03-13 KR KR1020070024620A patent/KR100844383B1/ko not_active IP Right Cessation
- 2007-12-05 US US11/950,470 patent/US7960023B2/en active Active
- 2007-12-12 JP JP2007321324A patent/JP4590571B2/ja not_active Expired - Fee Related
- 2007-12-12 EP EP20070291507 patent/EP1970422B1/de not_active Not-in-force
- 2007-12-12 AT AT07291507T patent/ATE531775T1/de active
- 2007-12-19 TW TW96148625A patent/TWI383032B/zh active
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2008
- 2008-01-15 CN CN2008100031979A patent/CN101265393B/zh active Active
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CN101265393A (zh) | 2008-09-17 |
JP2008227455A (ja) | 2008-09-25 |
KR100844383B1 (ko) | 2008-07-07 |
JP4590571B2 (ja) | 2010-12-01 |
EP1970422B1 (de) | 2011-11-02 |
CN101265393B (zh) | 2012-05-02 |
EP1970422A3 (de) | 2010-03-10 |
US7960023B2 (en) | 2011-06-14 |
US20080226884A1 (en) | 2008-09-18 |
TWI383032B (zh) | 2013-01-21 |
TW200837169A (en) | 2008-09-16 |
EP1970422A2 (de) | 2008-09-17 |
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