ATE480604T1 - Verfahren zur herstellung von filmen oder schichten - Google Patents

Verfahren zur herstellung von filmen oder schichten

Info

Publication number
ATE480604T1
ATE480604T1 AT99973059T AT99973059T ATE480604T1 AT E480604 T1 ATE480604 T1 AT E480604T1 AT 99973059 T AT99973059 T AT 99973059T AT 99973059 T AT99973059 T AT 99973059T AT E480604 T1 ATE480604 T1 AT E480604T1
Authority
AT
Austria
Prior art keywords
organic
layers
producing film
substrate
complex
Prior art date
Application number
AT99973059T
Other languages
English (en)
Inventor
Poopathy Kathirgamanathan
Original Assignee
Merck Patent Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Merck Patent Gmbh filed Critical Merck Patent Gmbh
Application granted granted Critical
Publication of ATE480604T1 publication Critical patent/ATE480604T1/de

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30Coordination compounds
    • H10K85/321Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3]
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/60Deposition of organic layers from vapour phase
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/06Luminescent, e.g. electroluminescent, chemiluminescent materials containing organic luminescent materials
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30Coordination compounds
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30Coordination compounds
    • H10K85/351Metal complexes comprising lanthanides or actinides, e.g. comprising europium
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electroluminescent Light Sources (AREA)
  • Formation Of Insulating Films (AREA)
  • Liquid Crystal Substances (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
AT99973059T 1998-12-02 1999-12-01 Verfahren zur herstellung von filmen oder schichten ATE480604T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9826405.4A GB9826405D0 (en) 1998-12-02 1998-12-02 Method for forming films or layers
PCT/GB1999/004030 WO2000032719A1 (en) 1998-12-02 1999-12-01 Method for forming films or layers

Publications (1)

Publication Number Publication Date
ATE480604T1 true ATE480604T1 (de) 2010-09-15

Family

ID=10843457

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99973059T ATE480604T1 (de) 1998-12-02 1999-12-01 Verfahren zur herstellung von filmen oder schichten

Country Status (14)

Country Link
US (1) US6605317B1 (de)
EP (1) EP1144544B1 (de)
JP (1) JP4704567B2 (de)
KR (1) KR20010081055A (de)
CN (1) CN1335880A (de)
AT (1) ATE480604T1 (de)
AU (1) AU757859B2 (de)
BR (1) BR9916924A (de)
CA (1) CA2352882A1 (de)
DE (1) DE69942748D1 (de)
GB (1) GB9826405D0 (de)
ID (1) ID29952A (de)
MX (1) MXPA01005538A (de)
WO (1) WO2000032719A1 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9823761D0 (en) * 1998-11-02 1998-12-23 South Bank Univ Entpr Ltd Novel electroluminescent materials
GB9826407D0 (en) 1998-12-02 1999-01-27 South Bank Univ Entpr Ltd Novel electroluminescent materials
JP4211211B2 (ja) * 2000-09-29 2009-01-21 コニカミノルタホールディングス株式会社 有機エレクトロルミネッセンス素子および有機エレクトロルミネッセンス素子用金属錯体の形成方法
GB0028439D0 (en) * 2000-11-21 2001-01-10 South Bank Univ Entpr Ltd Elecroluminescent device
WO2002075820A1 (en) * 2001-03-16 2002-09-26 Elam-T Limited Electroluminescent devices
GB0109758D0 (en) * 2001-04-20 2001-06-13 Elam T Ltd Mixed metal organic complexes
GB0109755D0 (en) 2001-04-20 2001-06-13 Elam T Ltd Devices incorporating mixed metal organic complexes
GB0109759D0 (en) * 2001-04-20 2001-06-13 Elam T Ltd Green light emitting electroluminescent material
TWI303533B (en) * 2001-06-15 2008-11-21 Oled T Ltd Electroluminescent devices
GB0116644D0 (en) 2001-07-09 2001-08-29 Elam T Ltd Electroluminescent materials and devices
WO2003014256A1 (en) 2001-08-04 2003-02-20 Elam-T Limited Electroluminescent device
GB0119727D0 (en) * 2001-08-14 2001-10-03 Qinetiq Ltd Photoluminescent compounds
GB0119729D0 (en) * 2001-08-14 2001-10-03 Qinetiq Ltd Triboluminescent materials and devices
JP2003147346A (ja) * 2001-11-15 2003-05-21 Kansai Tlo Kk 希土類錯体を用いた光機能材料及び発光装置
KR20030060011A (ko) * 2002-01-05 2003-07-12 삼성전자주식회사 헤테로 고리화합물을 포함하는 전구체
GB0202997D0 (en) * 2002-02-08 2002-03-27 Elam T Ltd Method for forming electroluminescent devices
GB0219253D0 (en) * 2002-08-19 2002-09-25 Elam T Ltd Electroluminescent materials and device
US20050129978A1 (en) * 2002-12-25 2005-06-16 Semiconductor Energy Laboratory Co., Ltd. Electroluminescent device and method of manufacturing thereof
JP3750682B2 (ja) * 2003-06-26 2006-03-01 セイコーエプソン株式会社 有機el装置とその製造方法、並びに電子機器
DE10347856B8 (de) * 2003-10-10 2006-10-19 Colorado State University Research Foundation, Fort Collins Halbleiterdotierung
JP2008509238A (ja) 2004-08-07 2008-03-27 オーエルイーディー−ティー リミテッド エレクトロルミネセンス物質およびデバイス
EP1780816B1 (de) * 2005-11-01 2020-07-01 Novaled GmbH Methode zur Herstellung eines elektronischen Bauelements mit einer Schichtstruktur und elektronisches Bauelement
EP1798306B1 (de) * 2005-12-07 2008-06-11 Novaled AG Verfahren zum Abscheiden eines Aufdampfmaterials
US7977862B2 (en) * 2005-12-21 2011-07-12 Lg Display Co., Ltd. Organic light emitting devices
DE102007014048B4 (de) * 2006-03-21 2013-02-21 Novaled Ag Mischung aus Matrixmaterial und Dotierungsmaterial, sowie Verfahren zum Herstellen einer Schicht aus dotiertem organischen Material
GB2440368A (en) * 2006-07-26 2008-01-30 Oled T Ltd Cathode coating for an electroluminescent device
WO2008111850A2 (en) * 2007-03-15 2008-09-18 Universitetet I Oslo Synthesis of molecular metalorganic compounds
JP4924138B2 (ja) * 2007-03-27 2012-04-25 コニカミノルタホールディングス株式会社 エレクトロルミネッセンス素子および色変換フィルター
DE102008027005A1 (de) * 2008-06-05 2009-12-10 Merck Patent Gmbh Organische elektronische Vorrichtung enthaltend Metallkomplexe
DE102008056391B4 (de) * 2008-09-26 2021-04-01 Osram Oled Gmbh Organisches elektronisches Bauelement und Verfahren zu dessen Herstellung
GB201306365D0 (en) 2013-04-09 2013-05-22 Kathirgamanathan Poopathy Heterocyclic compounds and their use in electro-optical or opto-electronic devices
EP4029069A1 (de) * 2019-09-11 2022-07-20 Credoxys GmbH c/o Institut for Applied Physics Cer-(iv)-komplexe und ihre verwendung in der organischen elektronik
JP2023550703A (ja) * 2020-11-16 2023-12-05 クレドクシス ゲーエムベーハー セリウム-エチレンジアミンケトン型及びセリウム-サレン型複合体及びそれらの有機電子工学における使用
CN116964026A (zh) 2021-03-10 2023-10-27 克雷多西斯有限公司 新型铈(iv)络合物及其在有机电子学中的用途

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4356429A (en) 1980-07-17 1982-10-26 Eastman Kodak Company Organic electroluminescent cell
US4455364A (en) * 1981-11-14 1984-06-19 Konishiroku Photo Industry Co., Ltd. Process for forming metallic image, composite material for the same
DE3375029D1 (en) * 1982-02-22 1988-02-04 Minnesota Mining & Mfg Protected vapor-deposited metal layers
JPS6137887A (ja) 1984-07-31 1986-02-22 Canon Inc El素子
JPS63186844A (ja) * 1987-01-30 1988-08-02 Hitachi Maxell Ltd 非晶質性材料
US4720432A (en) 1987-02-11 1988-01-19 Eastman Kodak Company Electroluminescent device with organic luminescent medium
US4885211A (en) 1987-02-11 1989-12-05 Eastman Kodak Company Electroluminescent device with improved cathode
JP2505244B2 (ja) 1988-04-07 1996-06-05 出光興産株式会社 薄膜el素子
JP2672325B2 (ja) 1988-05-07 1997-11-05 出光興産株式会社 薄膜el素子
US5128587A (en) 1989-12-26 1992-07-07 Moltech Corporation Electroluminescent device based on organometallic membrane
JP3069139B2 (ja) 1990-03-16 2000-07-24 旭化成工業株式会社 分散型電界発光素子
US5364654A (en) * 1990-06-14 1994-11-15 Idemitsu Kosan Co., Ltd. Process for production of a thin film electrode and an electroluminescence device
US6110529A (en) * 1990-07-06 2000-08-29 Advanced Tech Materials Method of forming metal films on a substrate by chemical vapor deposition
ATE188724T1 (de) 1992-02-14 2000-01-15 Nycomed Amersham Plc Fluoreszente verbundstoffe
EP0556005B1 (de) 1992-02-14 1996-04-17 AMERSHAM INTERNATIONAL plc Fluoreszente Verbindungen
EP0569827A2 (de) 1992-05-11 1993-11-18 Idemitsu Kosan Company Limited Organische elektrolumineszente Vorrichtung
JPH06145146A (ja) 1992-11-06 1994-05-24 Chisso Corp オキシネイト誘導体
GB9315975D0 (en) * 1993-08-02 1993-09-15 Ass Octel Organometallic complexes of gallium and indium
DE69526614T2 (de) * 1994-09-12 2002-09-19 Motorola, Inc. Lichtemittierende Vorrichtungen die Organometallische Komplexe enthalten.
US5680292A (en) * 1994-12-12 1997-10-21 T/J Technologies, Inc. High surface area nitride, carbide and boride electrodes and methods of fabrication thereof
US5707745A (en) 1994-12-13 1998-01-13 The Trustees Of Princeton University Multicolor organic light emitting devices
JP3812751B2 (ja) * 1995-03-31 2006-08-23 大日本印刷株式会社 コーティング組成物及びその製造方法、並びに機能性膜及びその製造方法
EP0913448B1 (de) * 1995-05-25 2003-06-18 AEA Technology plc Fluoreszierende Verbindung
JPH09312196A (ja) * 1996-05-23 1997-12-02 Casio Comput Co Ltd 電界発光素子
DE19627070A1 (de) 1996-07-05 1998-01-08 Bayer Ag Elektrolumineszierende Anordnungen unter Verwendung von Blendsystemen
US5755999A (en) 1997-05-16 1998-05-26 Eastman Kodak Company Blue luminescent materials for organic electroluminescent devices
GB9711237D0 (en) 1997-06-02 1997-07-23 Isis Innovation Organomettallic Complexes
GB9712483D0 (en) 1997-06-17 1997-08-20 Kathirgamanathan Poopathy Fabrication of light emitting devices from chelates of transition metals, lanthanides and actinides
JP4514841B2 (ja) 1998-02-17 2010-07-28 淳二 城戸 有機エレクトロルミネッセント素子

Also Published As

Publication number Publication date
EP1144544A1 (de) 2001-10-17
BR9916924A (pt) 2001-11-06
AU1400900A (en) 2000-06-19
AU757859B2 (en) 2003-03-06
JP2002531913A (ja) 2002-09-24
WO2000032719A1 (en) 2000-06-08
US6605317B1 (en) 2003-08-12
MXPA01005538A (es) 2003-07-14
CA2352882A1 (en) 2000-06-08
KR20010081055A (ko) 2001-08-25
DE69942748D1 (de) 2010-10-21
JP4704567B2 (ja) 2011-06-15
GB9826405D0 (en) 1999-01-27
CN1335880A (zh) 2002-02-13
ID29952A (id) 2001-10-25
EP1144544B1 (de) 2010-09-08

Similar Documents

Publication Publication Date Title
ATE480604T1 (de) Verfahren zur herstellung von filmen oder schichten
NL7701376A (nl) Werkwijze en inrichting voor de vorming en af- zetting op een substraat van monomoleculaire lagen van amfifiele moleculen; evenals substra- ten behandeld onder toepassing van de werkwijze.
DE60336006D1 (de) Antistatisches Mehrschichtpaneel und Verfahren zur Herstellung
EP1191819A3 (de) Organische Elektrolumineszenzanzeige
MX168109B (es) Pelicula de multiples capas con mejor adhesion de capa
DE60200607D1 (de) Kontrolle der Dicke einer aufgedampften oder aufsublimierten organischen Schicht während der Herstellung eines organischen licht-emittierenden Bauteils
DK1343639T3 (da) Dekorationsfolie
DE502005008856D1 (de) Zinnbeschichtete Leiterplatten mit geringer Neigung zur Whiskerbildung
ATE474876T1 (de) Verfahren zur herstellung leitfähiger folien sowie in diesem verfahren hergestellte artikel
EA200100035A1 (ru) Композиционный материал, содержащий подложку и барьерный слой, нанесенный на подложку, и способ его изготовления
ATE372524T1 (de) Optisches bauelement mit gradierter dicke und verfahren zu dessen herstellung
JP2007026951A5 (de)
ATE453310T1 (de) Verfahren zur herstellung musterbildender metallstrukturen auf einem trägersubstrat
ATE184814T1 (de) Verfahren zur mehrschichtlackierung
SE7705431L (sv) Sett vid zinkbeleggning av endast en sida av ett jernmetallband
DE69901886D1 (de) Verfahren zur herstellung eines sicherheitsgegenstands
DE60200803D1 (de) Methode zur Herstellung eines Tiefdruck-hergestellten Mehrschicht-Verpackungsmaterials
NL7401859A (nl) Werkwijze voor het vervaardigen van een patroon en of meer lagen op een ondergrond door selijk verwijderen van deze laag of lagen sputteretsen en voorwerpen, in het bijzon- alfgeleiderinrichtingen, vervaardigd met ssing van deze werkwijze.
ATE346025T1 (de) Mehrlagiger oberflächenschutz für stahlbeton zur verbesserung des korrosionsschutzes von stahlbetonbauwerken oder stahlbetonbauteilen sowie verfahren zur herstellung desselben
MY107030A (en) Foil and method of making the same
EP1093906A3 (de) Gestreckte Folie mit unabhängigen Hohlräumen und Verfahren zu ihrer Herstellung
DE50108558D1 (de) Verfahren zur herstellung einer multifunktionalen mehrlagen schicht auf einem transparenten kunststoffsubstrat und eine danach hergestellte multifunktionale mehrlagenschicht
FR2848725B1 (fr) Procede de formation de motifs alignes de part et d'autre d'un film mince
ATE178263T1 (de) Verfahren zur herstellung von mit mehreren schichten beschichteten substraten
DE60102468D1 (de) Herstellung von orientierten mehrschichtigen polymerfilmen

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties