ATE372524T1 - Optisches bauelement mit gradierter dicke und verfahren zu dessen herstellung - Google Patents

Optisches bauelement mit gradierter dicke und verfahren zu dessen herstellung

Info

Publication number
ATE372524T1
ATE372524T1 AT02795513T AT02795513T ATE372524T1 AT E372524 T1 ATE372524 T1 AT E372524T1 AT 02795513 T AT02795513 T AT 02795513T AT 02795513 T AT02795513 T AT 02795513T AT E372524 T1 ATE372524 T1 AT E372524T1
Authority
AT
Austria
Prior art keywords
graded
optical component
masking layer
producing same
aperture
Prior art date
Application number
AT02795513T
Other languages
English (en)
Inventor
Tzu-Yu Wang
Original Assignee
Finisar Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Finisar Corp filed Critical Finisar Corp
Application granted granted Critical
Publication of ATE372524T1 publication Critical patent/ATE372524T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0883—Mirrors with a refractive index gradient
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18386—Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface
    • H01S5/18388—Lenses
AT02795513T 2001-10-10 2002-10-10 Optisches bauelement mit gradierter dicke und verfahren zu dessen herstellung ATE372524T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/975,299 US6606199B2 (en) 2001-10-10 2001-10-10 Graded thickness optical element and method of manufacture therefor

Publications (1)

Publication Number Publication Date
ATE372524T1 true ATE372524T1 (de) 2007-09-15

Family

ID=25522883

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02795513T ATE372524T1 (de) 2001-10-10 2002-10-10 Optisches bauelement mit gradierter dicke und verfahren zu dessen herstellung

Country Status (7)

Country Link
US (1) US6606199B2 (de)
EP (1) EP1442321B1 (de)
JP (1) JP2005505928A (de)
AT (1) ATE372524T1 (de)
AU (1) AU2002360268A1 (de)
DE (1) DE60222290T2 (de)
WO (1) WO2003032024A2 (de)

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US8634144B2 (en) * 2009-04-17 2014-01-21 The Invention Science Fund I Llc Evanescent electromagnetic wave conversion methods I
US8630044B2 (en) * 2009-04-17 2014-01-14 The Invention Science Fund I Llc Evanescent electromagnetic wave conversion methods III
US9081123B2 (en) 2009-04-17 2015-07-14 The Invention Science Fund I Llc Evanescent electromagnetic wave conversion lenses II
US8634140B2 (en) * 2009-04-17 2014-01-21 The Invention Science Fund I Llc Evanescent electromagnetic wave conversion apparatus III
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US10400984B2 (en) * 2013-03-15 2019-09-03 Cree, Inc. LED light fixture and unitary optic member therefor
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TWI818151B (zh) 2019-03-01 2023-10-11 美商應用材料股份有限公司 物理氣相沉積腔室及其操作方法
TW202104957A (zh) * 2019-04-19 2021-02-01 美商應用材料股份有限公司 布拉格反射器中的梯度界面

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Also Published As

Publication number Publication date
US20030067688A1 (en) 2003-04-10
AU2002360268A1 (en) 2003-04-22
US6606199B2 (en) 2003-08-12
DE60222290T2 (de) 2008-01-03
DE60222290D1 (de) 2007-10-18
WO2003032024A2 (en) 2003-04-17
EP1442321A2 (de) 2004-08-04
JP2005505928A (ja) 2005-02-24
EP1442321B1 (de) 2007-09-05
WO2003032024A3 (en) 2003-09-25

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