ATE405942T1 - Herstellungsverfahren einer elektronenquelle - Google Patents
Herstellungsverfahren einer elektronenquelleInfo
- Publication number
- ATE405942T1 ATE405942T1 AT99101104T AT99101104T ATE405942T1 AT E405942 T1 ATE405942 T1 AT E405942T1 AT 99101104 T AT99101104 T AT 99101104T AT 99101104 T AT99101104 T AT 99101104T AT E405942 T1 ATE405942 T1 AT E405942T1
- Authority
- AT
- Austria
- Prior art keywords
- production process
- electron source
- wires
- electron
- power
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/316—Cold cathodes, e.g. field-emissive cathode having an electric field parallel to the surface, e.g. thin film cathodes
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/027—Manufacture of electrodes or electrode systems of cold cathodes of thin film cathodes
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G09G2300/088—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements using a non-linear two-terminal element
- G09G2300/0885—Pixel comprising a non-linear two-terminal element alone in series with each display pixel element
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2310/00—Command of the display device
- G09G2310/06—Details of flat display driving waveforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/316—Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
- H01J2201/3165—Surface conduction emission type cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/319—Circuit elements associated with the emitters by direct integration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Cold Cathode And The Manufacture (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Electron Tubes For Measurement (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
- Electron Sources, Ion Sources (AREA)
- Manufacture Or Reproduction Of Printing Formes (AREA)
- Discharge Lamp (AREA)
- Vending Machines For Individual Products (AREA)
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7816493 | 1993-04-05 | ||
JP7790093 | 1993-04-05 | ||
JP10008893 | 1993-04-05 | ||
JP10008793 | 1993-04-05 | ||
JP27034393 | 1993-10-28 | ||
JP5549394A JP3205167B2 (ja) | 1993-04-05 | 1994-03-25 | 電子源の製造方法及び画像形成装置の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE405942T1 true ATE405942T1 (de) | 2008-09-15 |
Family
ID=27550599
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT94105255T ATE155284T1 (de) | 1993-04-05 | 1994-04-05 | Elektronenquelle-herstellungsverfahren. |
AT99101106T ATE249093T1 (de) | 1993-04-05 | 1994-04-05 | Apparat zur herstellung einer elektronenquelle |
AT99101104T ATE405942T1 (de) | 1993-04-05 | 1994-04-05 | Herstellungsverfahren einer elektronenquelle |
AT96106465T ATE184133T1 (de) | 1993-04-05 | 1994-04-05 | Verfahren zur herstellung einer elektronenquelle und ein bilderzeugungsgerät |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT94105255T ATE155284T1 (de) | 1993-04-05 | 1994-04-05 | Elektronenquelle-herstellungsverfahren. |
AT99101106T ATE249093T1 (de) | 1993-04-05 | 1994-04-05 | Apparat zur herstellung einer elektronenquelle |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT96106465T ATE184133T1 (de) | 1993-04-05 | 1994-04-05 | Verfahren zur herstellung einer elektronenquelle und ein bilderzeugungsgerät |
Country Status (10)
Country | Link |
---|---|
US (1) | US5593335A (de) |
EP (4) | EP0920047B1 (de) |
JP (1) | JP3205167B2 (de) |
CN (2) | CN1072388C (de) |
AT (4) | ATE155284T1 (de) |
AU (1) | AU681622B2 (de) |
CA (1) | CA2120390C (de) |
DE (4) | DE69404066T2 (de) |
ES (1) | ES2104218T3 (de) |
PT (1) | PT920047E (de) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1037246B1 (de) * | 1994-09-22 | 2004-03-10 | Canon Kabushiki Kaisha | Verfahren zur Herstellung einer Elektronen-emittierenden Einrichtung sowie einer Elektronenquelle und eines Bilderzeugungsgerätes mit derartigen Elektronen-emittierenden Einrichtungen |
US5996488A (en) | 1994-11-25 | 1999-12-07 | Canon Kabushiki Kaisha | Preparation of an electron source by offset printing electrodes having thickness less than 200 nm |
JP3241251B2 (ja) | 1994-12-16 | 2001-12-25 | キヤノン株式会社 | 電子放出素子の製造方法及び電子源基板の製造方法 |
JP3299096B2 (ja) | 1995-01-13 | 2002-07-08 | キヤノン株式会社 | 電子源及び画像形成装置の製造方法、並びに電子源の活性化処理方法 |
EP0955662B1 (de) | 1995-03-13 | 2006-01-25 | Canon Kabushiki Kaisha | Herstellungsverfahren einer Elektronenquelle und eines Bilderzeugungsgeräts |
US6473063B1 (en) | 1995-05-30 | 2002-10-29 | Canon Kabushiki Kaisha | Electron source, image-forming apparatus comprising the same and method of driving such an image-forming apparatus |
US6140985A (en) * | 1995-06-05 | 2000-10-31 | Canon Kabushiki Kaisha | Image display apparatus |
JPH09259753A (ja) * | 1996-01-16 | 1997-10-03 | Canon Inc | 電子発生装置、画像形成装置及びそれらの製造方法と調整方法 |
US6231412B1 (en) * | 1996-09-18 | 2001-05-15 | Canon Kabushiki Kaisha | Method of manufacturing and adjusting electron source array |
JP3352385B2 (ja) | 1997-03-21 | 2002-12-03 | キヤノン株式会社 | 電子源基板およびそれを用いた電子装置の製造方法 |
US6534924B1 (en) | 1998-03-31 | 2003-03-18 | Canon Kabushiki Kaisha | Method and apparatus for manufacturing electron source, and method manufacturing image forming apparatus |
JP3087849B1 (ja) * | 1998-06-10 | 2000-09-11 | キヤノン株式会社 | 電子源の製造方法とその製造装置及び画像形成装置の製造方法 |
JP3087847B1 (ja) | 1998-03-31 | 2000-09-11 | キヤノン株式会社 | 電子源の製造方法と製造装置及び画像形成装置の製造方法 |
JP3088102B1 (ja) * | 1998-05-01 | 2000-09-18 | キヤノン株式会社 | 電子源及び画像形成装置の製造方法 |
US6878028B1 (en) | 1998-05-01 | 2005-04-12 | Canon Kabushiki Kaisha | Method of fabricating electron source and image forming apparatus |
JP2000148081A (ja) * | 1998-09-04 | 2000-05-26 | Canon Inc | 電子源と前記電子源を用いた画像形成装置 |
WO2000022643A1 (fr) * | 1998-10-14 | 2000-04-20 | Canon Kabushiki Kaisha | Dispositif d'imagerie et son procede de production |
JP2000243242A (ja) * | 1998-12-22 | 2000-09-08 | Canon Inc | 電子源及び画像表示装置の製造方法 |
JP2000311603A (ja) | 1999-02-23 | 2000-11-07 | Canon Inc | 電子源の製造装置及び製造方法、電子源並びに画像形成装置 |
JP2000311639A (ja) | 1999-02-24 | 2000-11-07 | Canon Inc | 電子源の製造方法、画像形成装置の製造方法、電子源の製造装置および電子源の調整方法 |
JP3518854B2 (ja) * | 1999-02-24 | 2004-04-12 | キヤノン株式会社 | 電子源および画像形成装置の製造方法、ならびにそれらの製造装置 |
JP3472221B2 (ja) * | 1999-02-24 | 2003-12-02 | キヤノン株式会社 | 電子源の製造方法 |
JP3915400B2 (ja) * | 2000-11-28 | 2007-05-16 | 株式会社日立製作所 | 画像表示装置及び画像表示装置の駆動方法 |
JP2002245947A (ja) * | 2000-12-15 | 2002-08-30 | Canon Inc | 細線を有する基板及びその製造方法及び電子源基板及び画像表示装置 |
KR20020057478A (ko) * | 2001-01-05 | 2002-07-11 | 엘지전자 주식회사 | 전계방출형 표시소자 및 그 진공도 측정방법과, 게터의자동 활성화 방법 |
US6936854B2 (en) * | 2001-05-10 | 2005-08-30 | Canon Kabushiki Kaisha | Optoelectronic substrate |
JP3681121B2 (ja) * | 2001-06-15 | 2005-08-10 | キヤノン株式会社 | 駆動回路及び表示装置 |
JP3647426B2 (ja) * | 2001-07-31 | 2005-05-11 | キヤノン株式会社 | 走査回路及び画像表示装置 |
JP3710441B2 (ja) * | 2001-09-07 | 2005-10-26 | キヤノン株式会社 | 電子源基板およびそれを用いた表示装置 |
JP2003092061A (ja) * | 2001-09-17 | 2003-03-28 | Canon Inc | 電圧印加装置、電子源の製造装置及び製造方法 |
JP3902998B2 (ja) | 2001-10-26 | 2007-04-11 | キヤノン株式会社 | 電子源及び画像形成装置の製造方法 |
JP2004003935A (ja) * | 2002-04-12 | 2004-01-08 | Daicel Chem Ind Ltd | 擬似移動床式クロマトグラフィー用光学異性体分離用充填剤 |
JP3715967B2 (ja) * | 2002-06-26 | 2005-11-16 | キヤノン株式会社 | 駆動装置及び駆動回路及び画像表示装置 |
JP4649121B2 (ja) * | 2004-05-18 | 2011-03-09 | キヤノン株式会社 | 駆動装置、電子源の製造方法 |
JP4544518B2 (ja) * | 2004-09-01 | 2010-09-15 | キヤノン株式会社 | 電界励起型発光素子及び画像表示装置 |
JP5177954B2 (ja) * | 2006-01-30 | 2013-04-10 | キヤノン株式会社 | 電界効果型トランジスタ |
JP5294565B2 (ja) * | 2006-03-17 | 2013-09-18 | キヤノン株式会社 | 発光素子及び発光素子の製造方法 |
JP5110803B2 (ja) * | 2006-03-17 | 2012-12-26 | キヤノン株式会社 | 酸化物膜をチャネルに用いた電界効果型トランジスタ及びその製造方法 |
JP4332545B2 (ja) | 2006-09-15 | 2009-09-16 | キヤノン株式会社 | 電界効果型トランジスタ及びその製造方法 |
JP5219529B2 (ja) * | 2008-01-23 | 2013-06-26 | キヤノン株式会社 | 電界効果型トランジスタ及び、該電界効果型トランジスタを備えた表示装置 |
JP2009206508A (ja) * | 2008-01-31 | 2009-09-10 | Canon Inc | 薄膜トランジスタ及び表示装置 |
JP2010244933A (ja) * | 2009-04-08 | 2010-10-28 | Canon Inc | 画像表示装置 |
WO2018070010A1 (ja) * | 2016-10-13 | 2018-04-19 | 株式会社日立ハイテクノロジーズ | 電子線装置 |
CN113488359A (zh) * | 2021-06-08 | 2021-10-08 | 电子科技大学 | 一种用于超高真空系统中制冷型GaN电子源的制备方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6419656A (en) * | 1987-07-15 | 1989-01-23 | Canon Kk | Manufacture of electron emitting element |
JP2614048B2 (ja) * | 1987-07-15 | 1997-05-28 | キヤノン株式会社 | 電子放出素子の製造方法およびその製造装置 |
EP0299461B1 (de) * | 1987-07-15 | 1995-05-10 | Canon Kabushiki Kaisha | Elektronenemittierende Vorrichtung |
JPS6431332A (en) * | 1987-07-28 | 1989-02-01 | Canon Kk | Electron beam generating apparatus and its driving method |
JP2622842B2 (ja) * | 1987-10-12 | 1997-06-25 | キヤノン株式会社 | 電子線画像表示装置および電子線画像表示装置の偏向方法 |
JPH01112631A (ja) * | 1987-10-27 | 1989-05-01 | Canon Inc | 電子放出素子及びその製造方法 |
JP2727193B2 (ja) * | 1988-04-28 | 1998-03-11 | キヤノン株式会社 | 電子放出素子の製造方法 |
JPH0687392B2 (ja) * | 1988-05-02 | 1994-11-02 | キヤノン株式会社 | 電子放出素子の製造方法 |
JP2981751B2 (ja) * | 1989-03-23 | 1999-11-22 | キヤノン株式会社 | 電子線発生装置及びこれを用いた画像形成装置、並びに電子線発生装置の製造方法 |
JPH0680713B2 (ja) * | 1989-10-11 | 1994-10-12 | 三菱電機株式会社 | ウエハ試験用プローブカードおよびその製造方法 |
JP3010299B2 (ja) * | 1990-04-27 | 2000-02-21 | キヤノン株式会社 | 表面伝導形電子放出素子の製造方法 |
JP2854385B2 (ja) * | 1990-05-23 | 1999-02-03 | キヤノン株式会社 | 電子放出素子、マルチ電子源、画像形成装置の製造方法 |
GB9012327D0 (en) * | 1990-06-01 | 1990-07-18 | Thomson Consumer Electronics | Digital fm synthesizer for record circuitry |
JPH0465050A (ja) * | 1990-07-03 | 1992-03-02 | Canon Inc | 表面伝導形電子放出素子の製造方法 |
CA2073923C (en) * | 1991-07-17 | 2000-07-11 | Hidetoshi Suzuki | Image-forming device |
-
1994
- 1994-03-25 JP JP5549394A patent/JP3205167B2/ja not_active Expired - Fee Related
- 1994-03-31 CA CA002120390A patent/CA2120390C/en not_active Expired - Fee Related
- 1994-04-04 CN CN94103552A patent/CN1072388C/zh not_active Expired - Fee Related
- 1994-04-05 EP EP99101106A patent/EP0920047B1/de not_active Expired - Lifetime
- 1994-04-05 DE DE69404066T patent/DE69404066T2/de not_active Expired - Lifetime
- 1994-04-05 EP EP96106465A patent/EP0729168B1/de not_active Expired - Lifetime
- 1994-04-05 US US08/223,528 patent/US5593335A/en not_active Expired - Lifetime
- 1994-04-05 AT AT94105255T patent/ATE155284T1/de not_active IP Right Cessation
- 1994-04-05 EP EP94105255A patent/EP0620581B1/de not_active Expired - Lifetime
- 1994-04-05 AT AT99101106T patent/ATE249093T1/de not_active IP Right Cessation
- 1994-04-05 DE DE69433117T patent/DE69433117D1/de not_active Expired - Lifetime
- 1994-04-05 DE DE69435128T patent/DE69435128D1/de not_active Expired - Lifetime
- 1994-04-05 EP EP99101104A patent/EP0929091B1/de not_active Expired - Lifetime
- 1994-04-05 DE DE69420424T patent/DE69420424T2/de not_active Expired - Lifetime
- 1994-04-05 ES ES94105255T patent/ES2104218T3/es not_active Expired - Lifetime
- 1994-04-05 PT PT99101106T patent/PT920047E/pt unknown
- 1994-04-05 AT AT99101104T patent/ATE405942T1/de not_active IP Right Cessation
- 1994-04-05 AT AT96106465T patent/ATE184133T1/de not_active IP Right Cessation
- 1994-04-05 AU AU59277/94A patent/AU681622B2/en not_active Ceased
-
1999
- 1999-02-13 CN CN99102209.2A patent/CN1201364C/zh not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69420424T2 (de) | 2000-04-13 |
ES2104218T3 (es) | 1997-10-01 |
CA2120390A1 (en) | 1994-10-06 |
DE69420424D1 (de) | 1999-10-07 |
CN1072388C (zh) | 2001-10-03 |
ATE155284T1 (de) | 1997-07-15 |
CN1096398A (zh) | 1994-12-14 |
AU681622B2 (en) | 1997-09-04 |
EP0729168A3 (de) | 1997-01-08 |
EP0920047B1 (de) | 2003-09-03 |
JPH07176265A (ja) | 1995-07-14 |
DE69404066D1 (de) | 1997-08-14 |
CN1277450A (zh) | 2000-12-20 |
EP0920047A1 (de) | 1999-06-02 |
EP0729168B1 (de) | 1999-09-01 |
EP0620581A3 (de) | 1994-11-02 |
DE69433117D1 (de) | 2003-10-09 |
CA2120390C (en) | 1999-08-31 |
US5593335A (en) | 1997-01-14 |
JP3205167B2 (ja) | 2001-09-04 |
ATE184133T1 (de) | 1999-09-15 |
AU5927794A (en) | 1994-10-06 |
EP0620581A2 (de) | 1994-10-19 |
CN1201364C (zh) | 2005-05-11 |
PT920047E (pt) | 2004-01-30 |
DE69404066T2 (de) | 1998-01-15 |
EP0929091B1 (de) | 2008-08-20 |
ATE249093T1 (de) | 2003-09-15 |
DE69435128D1 (de) | 2008-10-02 |
EP0929091A1 (de) | 1999-07-14 |
EP0620581B1 (de) | 1997-07-09 |
EP0729168A2 (de) | 1996-08-28 |
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