ATE249093T1 - Apparat zur herstellung einer elektronenquelle - Google Patents

Apparat zur herstellung einer elektronenquelle

Info

Publication number
ATE249093T1
ATE249093T1 AT99101106T AT99101106T ATE249093T1 AT E249093 T1 ATE249093 T1 AT E249093T1 AT 99101106 T AT99101106 T AT 99101106T AT 99101106 T AT99101106 T AT 99101106T AT E249093 T1 ATE249093 T1 AT E249093T1
Authority
AT
Austria
Prior art keywords
producing
electron source
wires
electron
power
Prior art date
Application number
AT99101106T
Other languages
English (en)
Inventor
Hidetoshi Suzuki
Yoshiyuki Osada
Ichiro Nomura
Takeo Ono
Hisaaki Kawade
Eiji Yamaguchi
Toshihiko Takeda
Hiroaki Toshima
Yasuhiro Hamamoto
Tatsuya Iwasaki
Aoji Isono
Noritake Suzuki
Yasuyuki Todokoro
Masahiro Okuda
Katsuhiko Shinjo
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE249093T1 publication Critical patent/ATE249093T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/316Cold cathodes, e.g. field-emissive cathode having an electric field parallel to the surface, e.g. thin film cathodes
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/22Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123Flat display tubes
    • H01J31/125Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/027Manufacture of electrodes or electrode systems of cold cathodes of thin film cathodes
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00Aspects of the constitution of display devices
    • G09G2300/08Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
    • G09G2300/088Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements using a non-linear two-terminal element
    • G09G2300/0885Pixel comprising a non-linear two-terminal element alone in series with each display pixel element
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00Command of the display device
    • G09G2310/06Details of flat display driving waveforms
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/316Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
    • H01J2201/3165Surface conduction emission type cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/319Circuit elements associated with the emitters by direct integration
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Discharge Lamp (AREA)
  • Vending Machines For Individual Products (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
AT99101106T 1993-04-05 1994-04-05 Apparat zur herstellung einer elektronenquelle ATE249093T1 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP7816493 1993-04-05
JP7790093 1993-04-05
JP10008893 1993-04-05
JP10008793 1993-04-05
JP27034393 1993-10-28
JP5549394A JP3205167B2 (ja) 1993-04-05 1994-03-25 電子源の製造方法及び画像形成装置の製造方法

Publications (1)

Publication Number Publication Date
ATE249093T1 true ATE249093T1 (de) 2003-09-15

Family

ID=27550599

Family Applications (4)

Application Number Title Priority Date Filing Date
AT94105255T ATE155284T1 (de) 1993-04-05 1994-04-05 Elektronenquelle-herstellungsverfahren.
AT99101106T ATE249093T1 (de) 1993-04-05 1994-04-05 Apparat zur herstellung einer elektronenquelle
AT99101104T ATE405942T1 (de) 1993-04-05 1994-04-05 Herstellungsverfahren einer elektronenquelle
AT96106465T ATE184133T1 (de) 1993-04-05 1994-04-05 Verfahren zur herstellung einer elektronenquelle und ein bilderzeugungsgerät

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT94105255T ATE155284T1 (de) 1993-04-05 1994-04-05 Elektronenquelle-herstellungsverfahren.

Family Applications After (2)

Application Number Title Priority Date Filing Date
AT99101104T ATE405942T1 (de) 1993-04-05 1994-04-05 Herstellungsverfahren einer elektronenquelle
AT96106465T ATE184133T1 (de) 1993-04-05 1994-04-05 Verfahren zur herstellung einer elektronenquelle und ein bilderzeugungsgerät

Country Status (10)

Country Link
US (1) US5593335A (de)
EP (4) EP0920047B1 (de)
JP (1) JP3205167B2 (de)
CN (2) CN1072388C (de)
AT (4) ATE155284T1 (de)
AU (1) AU681622B2 (de)
CA (1) CA2120390C (de)
DE (4) DE69404066T2 (de)
ES (1) ES2104218T3 (de)
PT (1) PT920047E (de)

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EP1037246B1 (de) * 1994-09-22 2004-03-10 Canon Kabushiki Kaisha Verfahren zur Herstellung einer Elektronen-emittierenden Einrichtung sowie einer Elektronenquelle und eines Bilderzeugungsgerätes mit derartigen Elektronen-emittierenden Einrichtungen
US5996488A (en) 1994-11-25 1999-12-07 Canon Kabushiki Kaisha Preparation of an electron source by offset printing electrodes having thickness less than 200 nm
JP3241251B2 (ja) 1994-12-16 2001-12-25 キヤノン株式会社 電子放出素子の製造方法及び電子源基板の製造方法
JP3299096B2 (ja) 1995-01-13 2002-07-08 キヤノン株式会社 電子源及び画像形成装置の製造方法、並びに電子源の活性化処理方法
EP0955662B1 (de) 1995-03-13 2006-01-25 Canon Kabushiki Kaisha Herstellungsverfahren einer Elektronenquelle und eines Bilderzeugungsgeräts
US6473063B1 (en) 1995-05-30 2002-10-29 Canon Kabushiki Kaisha Electron source, image-forming apparatus comprising the same and method of driving such an image-forming apparatus
US6140985A (en) * 1995-06-05 2000-10-31 Canon Kabushiki Kaisha Image display apparatus
JPH09259753A (ja) * 1996-01-16 1997-10-03 Canon Inc 電子発生装置、画像形成装置及びそれらの製造方法と調整方法
US6231412B1 (en) * 1996-09-18 2001-05-15 Canon Kabushiki Kaisha Method of manufacturing and adjusting electron source array
JP3352385B2 (ja) 1997-03-21 2002-12-03 キヤノン株式会社 電子源基板およびそれを用いた電子装置の製造方法
US6534924B1 (en) 1998-03-31 2003-03-18 Canon Kabushiki Kaisha Method and apparatus for manufacturing electron source, and method manufacturing image forming apparatus
JP3087849B1 (ja) * 1998-06-10 2000-09-11 キヤノン株式会社 電子源の製造方法とその製造装置及び画像形成装置の製造方法
JP3087847B1 (ja) 1998-03-31 2000-09-11 キヤノン株式会社 電子源の製造方法と製造装置及び画像形成装置の製造方法
JP3088102B1 (ja) * 1998-05-01 2000-09-18 キヤノン株式会社 電子源及び画像形成装置の製造方法
US6878028B1 (en) 1998-05-01 2005-04-12 Canon Kabushiki Kaisha Method of fabricating electron source and image forming apparatus
JP2000148081A (ja) * 1998-09-04 2000-05-26 Canon Inc 電子源と前記電子源を用いた画像形成装置
WO2000022643A1 (fr) * 1998-10-14 2000-04-20 Canon Kabushiki Kaisha Dispositif d'imagerie et son procede de production
JP2000243242A (ja) * 1998-12-22 2000-09-08 Canon Inc 電子源及び画像表示装置の製造方法
JP2000311603A (ja) 1999-02-23 2000-11-07 Canon Inc 電子源の製造装置及び製造方法、電子源並びに画像形成装置
JP2000311639A (ja) 1999-02-24 2000-11-07 Canon Inc 電子源の製造方法、画像形成装置の製造方法、電子源の製造装置および電子源の調整方法
JP3518854B2 (ja) * 1999-02-24 2004-04-12 キヤノン株式会社 電子源および画像形成装置の製造方法、ならびにそれらの製造装置
JP3472221B2 (ja) * 1999-02-24 2003-12-02 キヤノン株式会社 電子源の製造方法
JP3915400B2 (ja) * 2000-11-28 2007-05-16 株式会社日立製作所 画像表示装置及び画像表示装置の駆動方法
JP2002245947A (ja) * 2000-12-15 2002-08-30 Canon Inc 細線を有する基板及びその製造方法及び電子源基板及び画像表示装置
KR20020057478A (ko) * 2001-01-05 2002-07-11 엘지전자 주식회사 전계방출형 표시소자 및 그 진공도 측정방법과, 게터의자동 활성화 방법
US6936854B2 (en) * 2001-05-10 2005-08-30 Canon Kabushiki Kaisha Optoelectronic substrate
JP3681121B2 (ja) * 2001-06-15 2005-08-10 キヤノン株式会社 駆動回路及び表示装置
JP3647426B2 (ja) * 2001-07-31 2005-05-11 キヤノン株式会社 走査回路及び画像表示装置
JP3710441B2 (ja) * 2001-09-07 2005-10-26 キヤノン株式会社 電子源基板およびそれを用いた表示装置
JP2003092061A (ja) * 2001-09-17 2003-03-28 Canon Inc 電圧印加装置、電子源の製造装置及び製造方法
JP3902998B2 (ja) 2001-10-26 2007-04-11 キヤノン株式会社 電子源及び画像形成装置の製造方法
JP2004003935A (ja) * 2002-04-12 2004-01-08 Daicel Chem Ind Ltd 擬似移動床式クロマトグラフィー用光学異性体分離用充填剤
JP3715967B2 (ja) * 2002-06-26 2005-11-16 キヤノン株式会社 駆動装置及び駆動回路及び画像表示装置
JP4649121B2 (ja) * 2004-05-18 2011-03-09 キヤノン株式会社 駆動装置、電子源の製造方法
JP4544518B2 (ja) * 2004-09-01 2010-09-15 キヤノン株式会社 電界励起型発光素子及び画像表示装置
JP5177954B2 (ja) * 2006-01-30 2013-04-10 キヤノン株式会社 電界効果型トランジスタ
JP5294565B2 (ja) * 2006-03-17 2013-09-18 キヤノン株式会社 発光素子及び発光素子の製造方法
JP5110803B2 (ja) * 2006-03-17 2012-12-26 キヤノン株式会社 酸化物膜をチャネルに用いた電界効果型トランジスタ及びその製造方法
JP4332545B2 (ja) 2006-09-15 2009-09-16 キヤノン株式会社 電界効果型トランジスタ及びその製造方法
JP5219529B2 (ja) * 2008-01-23 2013-06-26 キヤノン株式会社 電界効果型トランジスタ及び、該電界効果型トランジスタを備えた表示装置
JP2009206508A (ja) * 2008-01-31 2009-09-10 Canon Inc 薄膜トランジスタ及び表示装置
JP2010244933A (ja) * 2009-04-08 2010-10-28 Canon Inc 画像表示装置
WO2018070010A1 (ja) * 2016-10-13 2018-04-19 株式会社日立ハイテクノロジーズ 電子線装置
CN113488359A (zh) * 2021-06-08 2021-10-08 电子科技大学 一种用于超高真空系统中制冷型GaN电子源的制备方法

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Also Published As

Publication number Publication date
DE69420424T2 (de) 2000-04-13
ES2104218T3 (es) 1997-10-01
CA2120390A1 (en) 1994-10-06
DE69420424D1 (de) 1999-10-07
CN1072388C (zh) 2001-10-03
ATE155284T1 (de) 1997-07-15
ATE405942T1 (de) 2008-09-15
CN1096398A (zh) 1994-12-14
AU681622B2 (en) 1997-09-04
EP0729168A3 (de) 1997-01-08
EP0920047B1 (de) 2003-09-03
JPH07176265A (ja) 1995-07-14
DE69404066D1 (de) 1997-08-14
CN1277450A (zh) 2000-12-20
EP0920047A1 (de) 1999-06-02
EP0729168B1 (de) 1999-09-01
EP0620581A3 (de) 1994-11-02
DE69433117D1 (de) 2003-10-09
CA2120390C (en) 1999-08-31
US5593335A (en) 1997-01-14
JP3205167B2 (ja) 2001-09-04
ATE184133T1 (de) 1999-09-15
AU5927794A (en) 1994-10-06
EP0620581A2 (de) 1994-10-19
CN1201364C (zh) 2005-05-11
PT920047E (pt) 2004-01-30
DE69404066T2 (de) 1998-01-15
EP0929091B1 (de) 2008-08-20
DE69435128D1 (de) 2008-10-02
EP0929091A1 (de) 1999-07-14
EP0620581B1 (de) 1997-07-09
EP0729168A2 (de) 1996-08-28

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