ATE384245T1 - Atomkraftmikroskop mit nach wahl auswechselbarer flüssigkeitszelle - Google Patents

Atomkraftmikroskop mit nach wahl auswechselbarer flüssigkeitszelle

Info

Publication number
ATE384245T1
ATE384245T1 AT98201015T AT98201015T ATE384245T1 AT E384245 T1 ATE384245 T1 AT E384245T1 AT 98201015 T AT98201015 T AT 98201015T AT 98201015 T AT98201015 T AT 98201015T AT E384245 T1 ATE384245 T1 AT E384245T1
Authority
AT
Austria
Prior art keywords
probe
choice
microscope
nuclear power
module
Prior art date
Application number
AT98201015T
Other languages
English (en)
Inventor
Paul K Hansma
Barney Drake
Original Assignee
Univ California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ California filed Critical Univ California
Application granted granted Critical
Publication of ATE384245T1 publication Critical patent/ATE384245T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025—Optical microscopes coupled with SPM
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/12—Fluid environment
    • G01Q30/14—Liquid environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G01Q70/04—Probe holders with compensation for temperature or vibration induced errors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/863—Atomic force probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/87—Optical lever arm for reflecting light

Landscapes

  • Radiology & Medical Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Optical Measuring Cells (AREA)
  • Micro-Organisms Or Cultivation Processes Thereof (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
AT98201015T 1989-03-13 1990-02-16 Atomkraftmikroskop mit nach wahl auswechselbarer flüssigkeitszelle ATE384245T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/322,001 US4935634A (en) 1989-03-13 1989-03-13 Atomic force microscope with optional replaceable fluid cell

Publications (1)

Publication Number Publication Date
ATE384245T1 true ATE384245T1 (de) 2008-02-15

Family

ID=23252966

Family Applications (3)

Application Number Title Priority Date Filing Date
AT90301688T ATE125934T1 (de) 1989-03-13 1990-02-16 Atomisches kraftmikroskop mit nach wahl auswechselbarer flüssigkeitszelle.
AT94118110T ATE172536T1 (de) 1989-03-13 1990-02-16 Atomkraftmikroskop mit nach wahl auswechselbarer flüssigkeitszelle
AT98201015T ATE384245T1 (de) 1989-03-13 1990-02-16 Atomkraftmikroskop mit nach wahl auswechselbarer flüssigkeitszelle

Family Applications Before (2)

Application Number Title Priority Date Filing Date
AT90301688T ATE125934T1 (de) 1989-03-13 1990-02-16 Atomisches kraftmikroskop mit nach wahl auswechselbarer flüssigkeitszelle.
AT94118110T ATE172536T1 (de) 1989-03-13 1990-02-16 Atomkraftmikroskop mit nach wahl auswechselbarer flüssigkeitszelle

Country Status (5)

Country Link
US (2) US4935634A (de)
EP (3) EP0388023B1 (de)
JP (1) JPH0776696B2 (de)
AT (3) ATE125934T1 (de)
DE (3) DE69032714T2 (de)

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* Cited by examiner, † Cited by third party
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ATE125934T1 (de) 1995-08-15
EP0388023B1 (de) 1995-08-02
EP0650029A3 (de) 1996-08-28
EP0862045A3 (de) 2000-10-04
ATE172536T1 (de) 1998-11-15
EP0388023A3 (de) 1992-01-02
EP0650029A2 (de) 1995-04-26
EP0650029B1 (de) 1998-10-21
DE69021235D1 (de) 1995-09-07
DE69034251D1 (de) 2008-03-06
DE69021235T2 (de) 1996-01-04
JPH0776696B2 (ja) 1995-08-16
US4935634A (en) 1990-06-19
DE69032714T2 (de) 1999-06-02
EP0862045B1 (de) 2008-01-16
DE69032714D1 (de) 1998-11-26
JPH02284015A (ja) 1990-11-21
USRE34489E (en) 1993-12-28
USRE34489F1 (en) 1999-12-14
EP0388023A2 (de) 1990-09-19
EP0862045A2 (de) 1998-09-02

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