ATE374168T1 - Verfahren zur abscheidung von galliumoxidbeschichtungen auf flachglas - Google Patents
Verfahren zur abscheidung von galliumoxidbeschichtungen auf flachglasInfo
- Publication number
- ATE374168T1 ATE374168T1 AT05723485T AT05723485T ATE374168T1 AT E374168 T1 ATE374168 T1 AT E374168T1 AT 05723485 T AT05723485 T AT 05723485T AT 05723485 T AT05723485 T AT 05723485T AT E374168 T1 ATE374168 T1 AT E374168T1
- Authority
- AT
- Austria
- Prior art keywords
- gallium oxide
- deposing
- oxide coating
- flat glass
- oxide coatings
- Prior art date
Links
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 title abstract 4
- 229910001195 gallium oxide Inorganic materials 0.000 title abstract 4
- 238000000034 method Methods 0.000 title abstract 4
- 239000011248 coating agent Substances 0.000 abstract 4
- 238000000576 coating method Methods 0.000 abstract 4
- 238000000151 deposition Methods 0.000 abstract 3
- 230000008021 deposition Effects 0.000 abstract 3
- 238000005229 chemical vapour deposition Methods 0.000 abstract 2
- 150000002895 organic esters Chemical class 0.000 abstract 2
- 125000004432 carbon atom Chemical group C* 0.000 abstract 1
- 229910052733 gallium Inorganic materials 0.000 abstract 1
- -1 gallium halide Chemical class 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/228—Other specific oxides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/797,450 US7223441B2 (en) | 2004-03-10 | 2004-03-10 | Method for depositing gallium oxide coatings on flat glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE374168T1 true ATE374168T1 (de) | 2007-10-15 |
Family
ID=34920057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT05723485T ATE374168T1 (de) | 2004-03-10 | 2005-02-23 | Verfahren zur abscheidung von galliumoxidbeschichtungen auf flachglas |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7223441B2 (de) |
| EP (1) | EP1725504B1 (de) |
| JP (1) | JP4757862B2 (de) |
| KR (1) | KR20070012647A (de) |
| CN (1) | CN1930099B (de) |
| AT (1) | ATE374168T1 (de) |
| DE (1) | DE602005002635T2 (de) |
| WO (1) | WO2005092809A1 (de) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7160578B2 (en) * | 2004-03-10 | 2007-01-09 | Pilkington North America | Method for depositing aluminum oxide coatings on flat glass |
| EP2083935B1 (de) * | 2006-11-22 | 2012-02-22 | S.O.I.TEC Silicon on Insulator Technologies | Verfahren zur epitaktischen Abscheidung von einkristallinen III-V Halbleitermaterial |
| US20090214858A1 (en) * | 2008-02-25 | 2009-08-27 | Pilkington North America, Inc. | Magnesium oxide coated glass article and a method for depositing magnesium oxide coatings on flat glass |
| JP2010231019A (ja) * | 2009-03-27 | 2010-10-14 | Fuji Xerox Co Ltd | 受光素子、プロセスカートリッジおよび画像形成装置 |
| CN102169949B (zh) * | 2011-02-25 | 2013-10-09 | 聚灿光电科技(苏州)有限公司 | 一种发光二极管基板及其制造方法 |
| GB201114242D0 (en) * | 2011-08-18 | 2011-10-05 | Pilkington Group Ltd | Tantalum oxide coatings |
| KR101452976B1 (ko) * | 2012-06-14 | 2014-10-22 | 연세대학교 산학협력단 | 원자층증착법을 이용한 갈륨 산화물 나노선을 형성하는 방법 |
| CN104647828B (zh) * | 2013-11-21 | 2017-06-16 | 北京有色金属研究总院 | 一种Cr2O3和Al2O3复合梯度阻氢涂层及其制备方法和应用 |
| CN105500811B (zh) * | 2014-10-08 | 2018-02-23 | 北京有色金属研究总院 | 高温真空集热管内壁弥散阻氢涂层及其制备方法 |
| US10985284B2 (en) * | 2016-04-15 | 2021-04-20 | Macom Technology Solutions Holdings, Inc. | High-voltage lateral GaN-on-silicon schottky diode with reduced junction leakage current |
| US20170301780A1 (en) | 2016-04-15 | 2017-10-19 | Macom Technology Solutions Holdings, Inc. | High-voltage gan high electron mobility transistors with reduced leakage current |
| US11233047B2 (en) | 2018-01-19 | 2022-01-25 | Macom Technology Solutions Holdings, Inc. | Heterolithic microwave integrated circuits including gallium-nitride devices on highly doped regions of intrinsic silicon |
| US11056483B2 (en) | 2018-01-19 | 2021-07-06 | Macom Technology Solutions Holdings, Inc. | Heterolithic microwave integrated circuits including gallium-nitride devices on intrinsic semiconductor |
| US10950598B2 (en) | 2018-01-19 | 2021-03-16 | Macom Technology Solutions Holdings, Inc. | Heterolithic microwave integrated circuits including gallium-nitride devices formed on highly doped semiconductor |
| JP2020011858A (ja) * | 2018-07-17 | 2020-01-23 | トヨタ自動車株式会社 | 成膜方法、及び、半導体装置の製造方法 |
| WO2021195506A1 (en) | 2020-03-26 | 2021-09-30 | Macom Technology Solutions Holdings, Inc. | Microwave integrated circuits including gallium-nitride devices on silicon |
| CN112410763A (zh) * | 2020-10-28 | 2021-02-26 | 武汉华星光电半导体显示技术有限公司 | 一种薄膜封装层，其制备方法及可折叠显示装置 |
| JP7749904B2 (ja) * | 2021-06-18 | 2025-10-07 | レール・リキード－ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | ガリウム含有酸化物膜堆積用のガリウム前駆体 |
| CN115548159A (zh) * | 2021-06-30 | 2022-12-30 | 浙江晶科能源有限公司 | 太阳能电池片及其形成方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4321301A1 (de) * | 1992-07-06 | 1994-01-13 | Zeiss Carl Fa | Dünne Schicht aus Galliumoxid und Herstellverfahren dafür |
| US5389401A (en) * | 1994-02-23 | 1995-02-14 | Gordon; Roy G. | Chemical vapor deposition of metal oxides |
| US5451548A (en) * | 1994-03-23 | 1995-09-19 | At&T Corp. | Electron beam deposition of gallium oxide thin films using a single high purity crystal source |
| US5725801A (en) * | 1995-07-05 | 1998-03-10 | Adrian H. Kitai | Doped amorphous and crystalline gallium oxides, alkaline earth gallates and doped zinc germanate phosphors as electroluminescent materials |
| US6238738B1 (en) * | 1996-08-13 | 2001-05-29 | Libbey-Owens-Ford Co. | Method for depositing titanium oxide coatings on flat glass |
| GB9616983D0 (en) * | 1996-08-13 | 1996-09-25 | Pilkington Plc | Method for depositing tin oxide and titanium oxide coatings on flat glass and the resulting coated glass |
| JP4184487B2 (ja) * | 1997-08-15 | 2008-11-19 | 昭和電工株式会社 | 二酸化チタン微粒子の製造方法 |
| GB9913315D0 (en) * | 1999-06-08 | 1999-08-11 | Pilkington Plc | Improved process for coating glass |
| JP4083396B2 (ja) * | 2000-07-10 | 2008-04-30 | 独立行政法人科学技術振興機構 | 紫外透明導電膜とその製造方法 |
| GB0306797D0 (en) * | 2003-03-25 | 2003-04-30 | Pilkington Plc | Titania coatings |
| US7211513B2 (en) * | 2003-07-01 | 2007-05-01 | Pilkington North America, Inc. | Process for chemical vapor desposition of a nitrogen-doped titanium oxide coating |
-
2004
- 2004-03-10 US US10/797,450 patent/US7223441B2/en not_active Expired - Lifetime
-
2005
- 2005-02-23 CN CN2005800078876A patent/CN1930099B/zh not_active Expired - Fee Related
- 2005-02-23 KR KR1020067018433A patent/KR20070012647A/ko not_active Withdrawn
- 2005-02-23 DE DE602005002635T patent/DE602005002635T2/de not_active Expired - Lifetime
- 2005-02-23 WO PCT/US2005/005601 patent/WO2005092809A1/en not_active Ceased
- 2005-02-23 JP JP2007502834A patent/JP4757862B2/ja not_active Expired - Fee Related
- 2005-02-23 AT AT05723485T patent/ATE374168T1/de not_active IP Right Cessation
- 2005-02-23 EP EP05723485A patent/EP1725504B1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007528445A (ja) | 2007-10-11 |
| EP1725504B1 (de) | 2007-09-26 |
| US7223441B2 (en) | 2007-05-29 |
| DE602005002635T2 (de) | 2008-07-17 |
| US20050202170A1 (en) | 2005-09-15 |
| KR20070012647A (ko) | 2007-01-26 |
| WO2005092809A1 (en) | 2005-10-06 |
| EP1725504A1 (de) | 2006-11-29 |
| CN1930099B (zh) | 2011-08-03 |
| CN1930099A (zh) | 2007-03-14 |
| JP4757862B2 (ja) | 2011-08-24 |
| DE602005002635D1 (de) | 2007-11-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |