ATE365443T1 - Verfahren zur herstellung eines keramischen mehrschichtigen substrats - Google Patents
Verfahren zur herstellung eines keramischen mehrschichtigen substratsInfo
- Publication number
- ATE365443T1 ATE365443T1 AT99913716T AT99913716T ATE365443T1 AT E365443 T1 ATE365443 T1 AT E365443T1 AT 99913716 T AT99913716 T AT 99913716T AT 99913716 T AT99913716 T AT 99913716T AT E365443 T1 ATE365443 T1 AT E365443T1
- Authority
- AT
- Austria
- Prior art keywords
- producing
- layer substrate
- sheets
- shrinkage suppression
- layered
- Prior art date
Links
- 239000000919 ceramic Substances 0.000 title abstract 5
- 239000000758 substrate Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 230000001629 suppression Effects 0.000 abstract 3
- 239000000843 powder Substances 0.000 abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 238000005245 sintering Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
- H01L21/481—Insulating layers on insulating parts, with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4857—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4864—Cleaning, e.g. removing of solder
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
- H05K2203/025—Abrading, e.g. grinding or sand blasting
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0736—Methods for applying liquids, e.g. spraying
- H05K2203/0746—Local treatment using a fluid jet, e.g. for removing or cleaning material; Providing mechanical pressure using a fluid jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Ceramic Engineering (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Laminated Bodies (AREA)
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11467198 | 1998-04-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE365443T1 true ATE365443T1 (de) | 2007-07-15 |
Family
ID=14643698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT99913716T ATE365443T1 (de) | 1998-04-24 | 1999-04-19 | Verfahren zur herstellung eines keramischen mehrschichtigen substrats |
Country Status (9)
Country | Link |
---|---|
US (1) | US6740183B1 (de) |
EP (1) | EP0993242B1 (de) |
KR (1) | KR100375486B1 (de) |
CN (1) | CN1190117C (de) |
AT (1) | ATE365443T1 (de) |
DE (1) | DE69936329T2 (de) |
ID (1) | ID24350A (de) |
TW (1) | TW411750B (de) |
WO (1) | WO1999056510A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004034758A1 (ja) * | 2002-10-10 | 2004-04-22 | Murata Manufacturing Co., Ltd. | セラミック多層基板の製造方法 |
US20070111642A1 (en) * | 2005-11-14 | 2007-05-17 | Davis Ian M | Apparatus and methods for slurry cleaning of etch chambers |
KR100900637B1 (ko) * | 2007-10-29 | 2009-06-02 | 삼성전기주식회사 | 구속시트 제조방법 |
KR100978664B1 (ko) * | 2008-10-23 | 2010-08-30 | 삼성전기주식회사 | 미소결 다층 세라믹 기판 및 무수축 다층 세라믹 기판의 제조방법 |
TWI589165B (zh) * | 2016-03-09 | 2017-06-21 | 瑞軒科技股份有限公司 | 平衡推挽式喇叭裝置及其控制方法、音訊處理電路及音訊處理方法 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4517774A (en) * | 1982-05-04 | 1985-05-21 | Frank Dudding | Wet blasting apparatus |
JPH025899Y2 (de) * | 1984-12-05 | 1990-02-13 | ||
US5130067A (en) * | 1986-05-02 | 1992-07-14 | International Business Machines Corporation | Method and means for co-sintering ceramic/metal mlc substrates |
US4817342A (en) * | 1987-07-15 | 1989-04-04 | Whitemetal Inc. | Water/abrasive propulsion chamber |
US4920640A (en) * | 1988-01-27 | 1990-05-01 | W. R. Grace & Co.-Conn. | Hot pressing dense ceramic sheets for electronic substrates and for multilayer electronic substrates |
US4896464A (en) * | 1988-06-15 | 1990-01-30 | International Business Machines Corporation | Formation of metallic interconnects by grit blasting |
US5085720A (en) * | 1990-01-18 | 1992-02-04 | E. I. Du Pont De Nemours And Company | Method for reducing shrinkage during firing of green ceramic bodies |
JPH0417392A (ja) * | 1990-05-11 | 1992-01-22 | Hitachi Ltd | 多層セラミック配線基板の製法 |
KR100200902B1 (ko) * | 1990-09-19 | 1999-06-15 | 가나이 쓰도무 | 다층세라믹 소결체 및 그 제조방법 |
JP2785544B2 (ja) * | 1991-10-04 | 1998-08-13 | 松下電器産業株式会社 | 多層セラミック基板の製造方法 |
EP0535711A3 (en) * | 1991-10-04 | 1993-12-01 | Matsushita Electric Ind Co Ltd | Method for producing multilayered ceramic substrate |
DE69328390T2 (de) * | 1992-05-20 | 2000-12-07 | Matsushita Electric Industrial Co., Ltd. | Verfahren zur Herstellung eines mehrlagigen Substrats |
JPH0661649A (ja) * | 1992-08-07 | 1994-03-04 | Matsushita Electric Ind Co Ltd | 多層セラミック基板の製造方法 |
US5456778A (en) * | 1992-08-21 | 1995-10-10 | Sumitomo Metal Ceramics Inc. | Method of fabricating ceramic circuit substrate |
JP2784527B2 (ja) * | 1992-10-12 | 1998-08-06 | 株式会社住友金属エレクトロデバイス | ガラスセラミックス基板の製造方法 |
JPH0864968A (ja) * | 1994-08-24 | 1996-03-08 | Oki Electric Ind Co Ltd | プリント配線板のヴィアホールの形成方法とそれを用いた多層プリント配線板の製造方法 |
JPH0992983A (ja) * | 1995-07-17 | 1997-04-04 | Sumitomo Kinzoku Electro Device:Kk | セラミック多層基板の製造方法 |
US5708570A (en) * | 1995-10-11 | 1998-01-13 | Hughes Aircraft Company | Shrinkage-matched circuit package utilizing low temperature co-fired ceramic structures |
US6042667A (en) * | 1996-03-13 | 2000-03-28 | Sumotomo Metal Electronics Devices, Inc. | Method of fabricating ceramic multilayer substrate |
JP3471571B2 (ja) * | 1996-07-02 | 2003-12-02 | Tdk株式会社 | 多層ガラス・セラミック基板の製造方法 |
US5827114A (en) * | 1996-09-25 | 1998-10-27 | Church & Dwight Co., Inc. | Slurry blasting process |
JPH10218675A (ja) * | 1997-02-06 | 1998-08-18 | Sumitomo Kinzoku Electro Device:Kk | セラミック基板の製造方法 |
US6241838B1 (en) * | 1997-09-08 | 2001-06-05 | Murata Manufacturing Co., Ltd. | Method of producing a multi-layer ceramic substrate |
JP3322199B2 (ja) * | 1998-01-06 | 2002-09-09 | 株式会社村田製作所 | 多層セラミック基板およびその製造方法 |
US6139666A (en) * | 1999-05-26 | 2000-10-31 | International Business Machines Corporation | Method for producing ceramic surfaces with easily removable contact sheets |
-
1999
- 1999-04-19 DE DE69936329T patent/DE69936329T2/de not_active Expired - Lifetime
- 1999-04-19 WO PCT/JP1999/002079 patent/WO1999056510A1/ja active IP Right Grant
- 1999-04-19 EP EP99913716A patent/EP0993242B1/de not_active Expired - Lifetime
- 1999-04-19 KR KR10-1999-7011664A patent/KR100375486B1/ko not_active IP Right Cessation
- 1999-04-19 US US09/445,892 patent/US6740183B1/en not_active Expired - Lifetime
- 1999-04-19 CN CNB998005207A patent/CN1190117C/zh not_active Expired - Fee Related
- 1999-04-19 AT AT99913716T patent/ATE365443T1/de not_active IP Right Cessation
- 1999-04-19 ID IDW991391A patent/ID24350A/id unknown
- 1999-04-23 TW TW088106516A patent/TW411750B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1190117C (zh) | 2005-02-16 |
KR20010013652A (ko) | 2001-02-26 |
US6740183B1 (en) | 2004-05-25 |
CN1263692A (zh) | 2000-08-16 |
DE69936329D1 (de) | 2007-08-02 |
DE69936329T2 (de) | 2007-10-04 |
TW411750B (en) | 2000-11-11 |
EP0993242A1 (de) | 2000-04-12 |
EP0993242B1 (de) | 2007-06-20 |
KR100375486B1 (ko) | 2003-03-10 |
EP0993242A4 (de) | 2005-04-06 |
WO1999056510A1 (fr) | 1999-11-04 |
ID24350A (id) | 2000-07-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |