ATE346752T1 - Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermedium - Google Patents

Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermedium

Info

Publication number
ATE346752T1
ATE346752T1 AT03733741T AT03733741T ATE346752T1 AT E346752 T1 ATE346752 T1 AT E346752T1 AT 03733741 T AT03733741 T AT 03733741T AT 03733741 T AT03733741 T AT 03733741T AT E346752 T1 ATE346752 T1 AT E346752T1
Authority
AT
Austria
Prior art keywords
molding tool
oxide film
group
layer
producing
Prior art date
Application number
AT03733741T
Other languages
English (en)
Inventor
Torbjoern Ling
Lars Montelius
Matthias Keil
Marc Beck
Original Assignee
Obducat Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SE0201917A external-priority patent/SE523095C2/sv
Application filed by Obducat Ab filed Critical Obducat Ab
Application granted granted Critical
Publication of ATE346752T1 publication Critical patent/ATE346752T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0017—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor for the production of embossing, cutting or similar devices; for the production of casting means
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855—Coating only part of a support with a magnetic layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B29C33/424—Moulding surfaces provided with means for marking or patterning

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Magnetic Record Carriers (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Adhesives Or Adhesive Processes (AREA)
AT03733741T 2002-06-20 2003-06-16 Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermedium ATE346752T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE0201917A SE523095C2 (sv) 2002-06-20 2002-06-20 Sätt att framställa formverktyg för ett reliefmönster i nanoskala, formverktyg och lagringsmedium
US40693102P 2002-08-30 2002-08-30

Publications (1)

Publication Number Publication Date
ATE346752T1 true ATE346752T1 (de) 2006-12-15

Family

ID=30002440

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03733741T ATE346752T1 (de) 2002-06-20 2003-06-16 Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermedium

Country Status (8)

Country Link
US (1) US7687007B2 (de)
EP (1) EP1513688B1 (de)
JP (1) JP3892460B2 (de)
CN (1) CN100341712C (de)
AT (1) ATE346752T1 (de)
AU (1) AU2003239022A1 (de)
DE (1) DE60310070T2 (de)
WO (1) WO2004000567A1 (de)

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SE519573C2 (sv) * 2001-07-05 2003-03-11 Obducat Ab Stamp med antividhäftningsskikt samt sätt att framställa och sätt att reparera en sådan stamp
ES2317246T3 (es) 2004-05-28 2009-04-16 Obducat Ab Moldes metalicos modificados para su uso en procesos de impresion.
EP1600811A1 (de) * 2004-05-28 2005-11-30 Obducat AB Modifizierte Metallformen für Imprint-Verfahren
JP4458958B2 (ja) * 2004-07-01 2010-04-28 独立行政法人理化学研究所 微細パターン形成方法および微細パターン形成装置
JP4584754B2 (ja) * 2005-04-06 2010-11-24 株式会社日立産機システム ナノプリント金型、その製造方法及びこの金型を用いたナノプリント装置並びにナノプリント方法
US7854873B2 (en) 2005-06-10 2010-12-21 Obducat Ab Imprint stamp comprising cyclic olefin copolymer
KR101366505B1 (ko) * 2005-06-10 2014-02-24 오브듀캇 아베 고리형 올레핀 공중합체를 포함하는 임프린트 스탬프
KR101301321B1 (ko) * 2005-07-28 2013-08-29 듀폰-미쯔이 플루오로케미칼 가부시끼가이샤 플루오로중합체 필름을 갖는 적층체 및 필름-형성플루오로중합체
US7690910B2 (en) * 2006-02-01 2010-04-06 Canon Kabushiki Kaisha Mold for imprint, process for producing minute structure using the mold, and process for producing the mold
EP1830422A3 (de) * 2006-03-03 2012-03-07 Semiconductor Energy Laboratory Co., Ltd. Lichtemittierende Vorrichtung und elektronische Vorrichtung
JP4973089B2 (ja) * 2006-09-25 2012-07-11 凸版印刷株式会社 熱インプリント用モールド
KR100790899B1 (ko) * 2006-12-01 2008-01-03 삼성전자주식회사 얼라인 마크가 형성된 템플릿 및 그 제조 방법
WO2008149544A1 (ja) * 2007-06-04 2008-12-11 Scivax Corporation 型、微細加工品およびそれらの製造方法
JP5211597B2 (ja) * 2007-09-13 2013-06-12 株式会社リコー 断熱構造を有するスタンパの製造方法
KR20110031275A (ko) * 2008-06-05 2011-03-25 아사히 가라스 가부시키가이샤 나노 임프린트용 몰드, 그 제조 방법 및 표면에 미세 요철 구조를 갖는 수지 성형체 그리고 와이어 그리드형 편광자의 제조 방법
EP2199855B1 (de) * 2008-12-19 2016-07-20 Obducat Verfahren und Prozesse zur Modifizierung von Polymermaterialoberflächeninteraktionen
EP2199854B1 (de) 2008-12-19 2015-12-16 Obducat AB Hybridpolymerform für nanoimprintverfahren und verfahren zu seiner herstellung
JP2010173237A (ja) * 2009-01-30 2010-08-12 Konica Minolta Opto Inc 成形型の製造方法及び成形型
JP5693941B2 (ja) 2010-03-31 2015-04-01 株式会社東芝 テンプレートの表面処理方法及び装置並びにパターン形成方法
KR20130058012A (ko) 2010-04-28 2013-06-03 킴벌리-클라크 월드와이드, 인크. 사출 성형된 마이크로니들 어레이 및 마이크로니들 어레이의 형성 방법
KR20120062255A (ko) 2010-12-06 2012-06-14 한국전자통신연구원 인쇄용 원판 및 그 복사판
TW201231242A (en) * 2011-01-25 2012-08-01 Hon Hai Prec Ind Co Ltd Method of injection molding an optical element
JP6535464B2 (ja) 2011-10-27 2019-06-26 ソレント・セラピューティクス・インコーポレイテッド 生理活性薬剤の送達のための移植可能な装置
WO2014202145A1 (de) * 2013-06-20 2014-12-24 Ev Group E. Thallner Gmbh Stempel mit einer stempelstruktur sowie vorrichtung und verfahren zu dessen herstellung
RU2016146472A (ru) 2014-04-29 2018-05-29 Форд Отомотив Санайи Аноним Ширкети Система клапанного распределения
CN108931884A (zh) * 2017-05-27 2018-12-04 蓝思科技（长沙）有限公司 压印膜及压印装置
US10497564B1 (en) * 2017-07-17 2019-12-03 Northrop Grumman Systems Corporation Nano-imprinting using high-pressure crystal phase transformations
DE102019209700A1 (de) * 2019-07-02 2021-01-07 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Verfahren zum herstellen eines formwerkzeugs und formwerkzeug zum herstellen eines optischen elements
CN117175353B (zh) * 2023-08-21 2025-02-25 安徽格恩半导体有限公司 一种半导体蓝光激光器

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US6309580B1 (en) * 1995-11-15 2001-10-30 Regents Of The University Of Minnesota Release surfaces, particularly for use in nanoimprint lithography
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US6380101B1 (en) 2000-04-18 2002-04-30 International Business Machines Corporation Method of forming patterned indium zinc oxide and indium tin oxide films via microcontact printing and uses thereof
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Also Published As

Publication number Publication date
CN100341712C (zh) 2007-10-10
CN1662383A (zh) 2005-08-31
DE60310070D1 (de) 2007-01-11
US20050287820A1 (en) 2005-12-29
US7687007B2 (en) 2010-03-30
JP3892460B2 (ja) 2007-03-14
WO2004000567A1 (en) 2003-12-31
AU2003239022A1 (en) 2004-01-06
JP2006512213A (ja) 2006-04-13
EP1513688B1 (de) 2006-11-29
DE60310070T2 (de) 2007-05-31
EP1513688A1 (de) 2005-03-16

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