ATE346752T1 - Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermedium - Google Patents
Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermediumInfo
- Publication number
- ATE346752T1 ATE346752T1 AT03733741T AT03733741T ATE346752T1 AT E346752 T1 ATE346752 T1 AT E346752T1 AT 03733741 T AT03733741 T AT 03733741T AT 03733741 T AT03733741 T AT 03733741T AT E346752 T1 ATE346752 T1 AT E346752T1
- Authority
- AT
- Austria
- Prior art keywords
- molding tool
- oxide film
- group
- layer
- producing
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000465 moulding Methods 0.000 title 3
- 239000002184 metal Substances 0.000 abstract 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 abstract 1
- 230000000181 anti-adherent effect Effects 0.000 abstract 1
- 239000003153 chemical reaction reagent Substances 0.000 abstract 1
- 229910052731 fluorine Inorganic materials 0.000 abstract 1
- 239000011737 fluorine Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0017—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor for the production of embossing, cutting or similar devices; for the production of casting means
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/855—Coating only part of a support with a magnetic layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
- B29C33/424—Moulding surfaces provided with means for marking or patterning
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Nanotechnology (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Theoretical Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mathematical Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Adhesives Or Adhesive Processes (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE0201917A SE523095C2 (sv) | 2002-06-20 | 2002-06-20 | Sätt att framställa formverktyg för ett reliefmönster i nanoskala, formverktyg och lagringsmedium |
| US40693102P | 2002-08-30 | 2002-08-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE346752T1 true ATE346752T1 (de) | 2006-12-15 |
Family
ID=30002440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT03733741T ATE346752T1 (de) | 2002-06-20 | 2003-06-16 | Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermedium |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7687007B2 (de) |
| EP (1) | EP1513688B1 (de) |
| JP (1) | JP3892460B2 (de) |
| CN (1) | CN100341712C (de) |
| AT (1) | ATE346752T1 (de) |
| AU (1) | AU2003239022A1 (de) |
| DE (1) | DE60310070T2 (de) |
| WO (1) | WO2004000567A1 (de) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE519573C2 (sv) * | 2001-07-05 | 2003-03-11 | Obducat Ab | Stamp med antividhäftningsskikt samt sätt att framställa och sätt att reparera en sådan stamp |
| EP1600811A1 (de) | 2004-05-28 | 2005-11-30 | Obducat AB | Modifizierte Metallformen für Imprint-Verfahren |
| ES2317246T3 (es) * | 2004-05-28 | 2009-04-16 | Obducat Ab | Moldes metalicos modificados para su uso en procesos de impresion. |
| JP4458958B2 (ja) * | 2004-07-01 | 2010-04-28 | 独立行政法人理化学研究所 | 微細パターン形成方法および微細パターン形成装置 |
| JP4584754B2 (ja) * | 2005-04-06 | 2010-11-24 | 株式会社日立産機システム | ナノプリント金型、その製造方法及びこの金型を用いたナノプリント装置並びにナノプリント方法 |
| KR101366505B1 (ko) * | 2005-06-10 | 2014-02-24 | 오브듀캇 아베 | 고리형 올레핀 공중합체를 포함하는 임프린트 스탬프 |
| US7854873B2 (en) | 2005-06-10 | 2010-12-21 | Obducat Ab | Imprint stamp comprising cyclic olefin copolymer |
| EP1915433A1 (de) * | 2005-07-28 | 2008-04-30 | Dupont-Mitsui Fluorochemicals Co., Ltd. | Laminat mit fluorpolymerfilm und filmbildendes fluorpolymer |
| US7690910B2 (en) * | 2006-02-01 | 2010-04-06 | Canon Kabushiki Kaisha | Mold for imprint, process for producing minute structure using the mold, and process for producing the mold |
| EP1830422A3 (de) | 2006-03-03 | 2012-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Lichtemittierende Vorrichtung und elektronische Vorrichtung |
| JP4973089B2 (ja) * | 2006-09-25 | 2012-07-11 | 凸版印刷株式会社 | 熱インプリント用モールド |
| KR100790899B1 (ko) * | 2006-12-01 | 2008-01-03 | 삼성전자주식회사 | 얼라인 마크가 형성된 템플릿 및 그 제조 방법 |
| JP5456465B2 (ja) * | 2007-06-04 | 2014-03-26 | 丸善石油化学株式会社 | 微細加工品およびその製造方法 |
| JP5211597B2 (ja) * | 2007-09-13 | 2013-06-12 | 株式会社リコー | 断熱構造を有するスタンパの製造方法 |
| EP2286980A4 (de) * | 2008-06-05 | 2011-07-13 | Asahi Glass Co Ltd | Form zur nanoprägung, verfahren zu ihrer herstellung und verfahren zur herstellung eines geformten kunstharzes mit feiner, aber robuster struktur auf einer oberfläche und zur herstellung eines drahtgitterpolarisators |
| EP2199854B1 (de) | 2008-12-19 | 2015-12-16 | Obducat AB | Hybridpolymerform für nanoimprintverfahren und verfahren zu seiner herstellung |
| EP2199855B1 (de) * | 2008-12-19 | 2016-07-20 | Obducat | Verfahren und Prozesse zur Modifizierung von Polymermaterialoberflächeninteraktionen |
| JP2010173237A (ja) * | 2009-01-30 | 2010-08-12 | Konica Minolta Opto Inc | 成形型の製造方法及び成形型 |
| JP5693941B2 (ja) | 2010-03-31 | 2015-04-01 | 株式会社東芝 | テンプレートの表面処理方法及び装置並びにパターン形成方法 |
| BR112012027672A2 (pt) | 2010-04-28 | 2023-12-05 | Kimberly Clark Co | Dispositivo médico compreendendo um conjunto de microagulhas que se estendem para fora a partir de um suporte e método para formar um dispositivo médico |
| KR20120062255A (ko) | 2010-12-06 | 2012-06-14 | 한국전자통신연구원 | 인쇄용 원판 및 그 복사판 |
| TW201231242A (en) * | 2011-01-25 | 2012-08-01 | Hon Hai Prec Ind Co Ltd | Method of injection molding an optical element |
| US11110066B2 (en) | 2011-10-27 | 2021-09-07 | Sorrento Therapeutics, Inc. | Implantable devices for delivery of bioactive agents |
| WO2014202145A1 (de) * | 2013-06-20 | 2014-12-24 | Ev Group E. Thallner Gmbh | Stempel mit einer stempelstruktur sowie vorrichtung und verfahren zu dessen herstellung |
| CN106661973B (zh) | 2014-04-29 | 2019-04-12 | 福特汽车萨纳伊股份有限公司 | 气门正时系统 |
| CN108931884A (zh) * | 2017-05-27 | 2018-12-04 | 蓝思科技(长沙)有限公司 | 压印膜及压印装置 |
| US10497564B1 (en) * | 2017-07-17 | 2019-12-03 | Northrop Grumman Systems Corporation | Nano-imprinting using high-pressure crystal phase transformations |
| DE102019209700A1 (de) * | 2019-07-02 | 2021-01-07 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Verfahren zum herstellen eines formwerkzeugs und formwerkzeug zum herstellen eines optischen elements |
| CN117175353B (zh) * | 2023-08-21 | 2025-02-25 | 安徽格恩半导体有限公司 | 一种半导体蓝光激光器 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4120995A (en) * | 1977-10-18 | 1978-10-17 | International Business Machines Corporation | Process for bonding a durable low surface energy coating |
| JPH0818336B2 (ja) | 1991-02-06 | 1996-02-28 | 松下電器産業株式会社 | 成形用部材およびその製造方法 |
| US5512131A (en) * | 1993-10-04 | 1996-04-30 | President And Fellows Of Harvard College | Formation of microstamped patterns on surfaces and derivative articles |
| US5772905A (en) * | 1995-11-15 | 1998-06-30 | Regents Of The University Of Minnesota | Nanoimprint lithography |
| US6309580B1 (en) * | 1995-11-15 | 2001-10-30 | Regents Of The University Of Minnesota | Release surfaces, particularly for use in nanoimprint lithography |
| EP1162244A4 (de) * | 1998-08-24 | 2004-09-01 | Daikin Ind Ltd | Dünne beschichtungsfolie aus fluorpolymer und verfahren zu ihrer herstellung |
| EP0989595A3 (de) * | 1998-09-18 | 2001-09-19 | Ims-Ionen Mikrofabrikations Systeme Gmbh | Vorrichtung zur Bearbeitung von Substratoberflächen |
| AU2001228987A1 (en) * | 2000-01-21 | 2001-07-31 | Obducat Aktiebolag | A mold for nano imprinting |
| SE515962C2 (sv) | 2000-03-15 | 2001-11-05 | Obducat Ab | Anordning för överföring av mönster till objekt |
| US6380101B1 (en) * | 2000-04-18 | 2002-04-30 | International Business Machines Corporation | Method of forming patterned indium zinc oxide and indium tin oxide films via microcontact printing and uses thereof |
| US6532657B1 (en) * | 2001-09-21 | 2003-03-18 | General Electric Co., | Pre-service oxidation of gas turbine disks and seals |
| JP4255307B2 (ja) | 2003-04-25 | 2009-04-15 | セイコークロック株式会社 | 時刻データ供給装置及び時刻データ供給方法 |
| DE10326769B3 (de) * | 2003-06-13 | 2004-11-11 | Esk Ceramics Gmbh & Co. Kg | Dauerhafte BN-Formtrennschichten für das Druckgießen von Nichteisenmetallen |
| DE10326815A1 (de) * | 2003-06-13 | 2004-12-30 | Institut für Neue Materialien Gemeinnützige GmbH | Antiadhäsive Hochtemperaturschichten |
| US20060097423A1 (en) * | 2004-10-12 | 2006-05-11 | General Magnaplate Corporation | Light weight spray tooling |
| JP4262267B2 (ja) * | 2005-09-06 | 2009-05-13 | キヤノン株式会社 | モールド、インプリント装置及びデバイスの製造方法 |
| US20070186589A1 (en) * | 2006-02-10 | 2007-08-16 | Ether Precision, Inc. | Mold for press-molding glass elements |
-
2003
- 2003-06-16 EP EP03733741A patent/EP1513688B1/de not_active Expired - Lifetime
- 2003-06-16 AU AU2003239022A patent/AU2003239022A1/en not_active Abandoned
- 2003-06-16 US US10/518,475 patent/US7687007B2/en not_active Expired - Lifetime
- 2003-06-16 WO PCT/SE2003/001004 patent/WO2004000567A1/en not_active Ceased
- 2003-06-16 DE DE60310070T patent/DE60310070T2/de not_active Expired - Lifetime
- 2003-06-16 AT AT03733741T patent/ATE346752T1/de not_active IP Right Cessation
- 2003-06-16 CN CNB038141213A patent/CN100341712C/zh not_active Expired - Lifetime
- 2003-06-16 JP JP2004515304A patent/JP3892460B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1513688B1 (de) | 2006-11-29 |
| EP1513688A1 (de) | 2005-03-16 |
| DE60310070D1 (de) | 2007-01-11 |
| AU2003239022A1 (en) | 2004-01-06 |
| CN100341712C (zh) | 2007-10-10 |
| US7687007B2 (en) | 2010-03-30 |
| WO2004000567A1 (en) | 2003-12-31 |
| JP2006512213A (ja) | 2006-04-13 |
| JP3892460B2 (ja) | 2007-03-14 |
| CN1662383A (zh) | 2005-08-31 |
| US20050287820A1 (en) | 2005-12-29 |
| DE60310070T2 (de) | 2007-05-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UEP | Publication of translation of european patent specification |
Ref document number: 1513688 Country of ref document: EP |
|
| REN | Ceased due to non-payment of the annual fee |