ATE25151T1 - Untersuchungs- und pruefungsverfahren fuer eine elektrische vorrichtung in der art einer integrierten oder gedruckten schaltung. - Google Patents

Untersuchungs- und pruefungsverfahren fuer eine elektrische vorrichtung in der art einer integrierten oder gedruckten schaltung.

Info

Publication number
ATE25151T1
ATE25151T1 AT84810249T AT84810249T ATE25151T1 AT E25151 T1 ATE25151 T1 AT E25151T1 AT 84810249 T AT84810249 T AT 84810249T AT 84810249 T AT84810249 T AT 84810249T AT E25151 T1 ATE25151 T1 AT E25151T1
Authority
AT
Austria
Prior art keywords
pct
inspection
integrated
printed circuit
electrical device
Prior art date
Application number
AT84810249T
Other languages
English (en)
Inventor
Louis F Pau
Original Assignee
Battelle Memorial Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Memorial Institute filed Critical Battelle Memorial Institute
Application granted granted Critical
Publication of ATE25151T1 publication Critical patent/ATE25151T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/304—Contactless testing of printed or hybrid circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
AT84810249T 1983-05-25 1984-05-22 Untersuchungs- und pruefungsverfahren fuer eine elektrische vorrichtung in der art einer integrierten oder gedruckten schaltung. ATE25151T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH284283 1983-05-25
EP84810249A EP0129508B1 (de) 1983-05-25 1984-05-22 Untersuchungs- und Prüfungsverfahren für eine elektrische Vorrichtung in der Art einer integrierten oder gedruckten Schaltung

Publications (1)

Publication Number Publication Date
ATE25151T1 true ATE25151T1 (de) 1987-02-15

Family

ID=4242812

Family Applications (1)

Application Number Title Priority Date Filing Date
AT84810249T ATE25151T1 (de) 1983-05-25 1984-05-22 Untersuchungs- und pruefungsverfahren fuer eine elektrische vorrichtung in der art einer integrierten oder gedruckten schaltung.

Country Status (6)

Country Link
US (1) US4712057A (de)
EP (1) EP0129508B1 (de)
JP (1) JPH0634027B2 (de)
AT (1) ATE25151T1 (de)
DE (1) DE3462182D1 (de)
WO (1) WO1984004819A1 (de)

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US4706018A (en) * 1984-11-01 1987-11-10 International Business Machines Corporation Noncontact dynamic tester for integrated circuits
DE3714357C2 (de) * 1986-04-30 1994-02-03 Toshiba Ceramics Co Siliciumwafer und Verfahren zu dessen Herstellung und Siliziumwafer-Auswahleinrichtung
EP0275306B1 (de) * 1986-08-01 1990-10-24 Electro-Scan Corporation Mehrzwecksgasdetektoranordnung fuer elektronmikroskopen
DE3683053D1 (de) * 1986-10-23 1992-01-30 Ibm Verfahren zur kontaktfreien pruefung von platinen fuer integrierte schaltungen unter atmosphaerischen bedingungen.
US4870295A (en) * 1987-12-07 1989-09-26 The United States Of America As Represented By The United States Department Of Energy Photoconductive circuit element pulse generator
US4851767A (en) * 1988-01-15 1989-07-25 International Business Machines Corporation Detachable high-speed opto-electronic sampling probe
US4924096A (en) * 1988-07-13 1990-05-08 Mroczkowski Jacek A Non-contact testing of photovoltaic detector arrays
JP3151203B2 (ja) * 1988-11-23 2001-04-03 テキサス インスツルメンツ インコーポレイテツド 集積回路の自己検査装置
US5131392A (en) * 1990-02-13 1992-07-21 Brigham & Women's Hospital Use of magnetic field of magnetic resonance imaging devices as the source of the magnetic field of electromagnetic transducers
GB2247345B (en) * 1990-07-05 1995-04-05 Haroon Ahmed Integrated circuit structure analysis
US5268638A (en) * 1991-07-15 1993-12-07 Siemens Aktiengesellschaft Method for particle beam testing of substrates for liquid crystal displays "LCD"
JPH0526944A (ja) * 1991-07-24 1993-02-05 Nippon Sheet Glass Co Ltd 導電パターンの検査装置
JPH05109378A (ja) * 1991-10-15 1993-04-30 Hitachi Ltd 電子顕微像観察方法及び装置
US5369359A (en) * 1991-11-05 1994-11-29 Siemens Aktiengesellschaft Particle beam testing method with countervoltage or retarding voltage follow-up or feedback
US5471055A (en) * 1993-05-28 1995-11-28 The United States Of America As Represented By The Secretary Of The Army Focal plane array test facility
US6002792A (en) * 1993-11-16 1999-12-14 Hamamatsu Photonics Kk Semiconductor device inspection system
US5504017A (en) * 1994-12-20 1996-04-02 Advanced Micro Devices, Inc. Void detection in metallization patterns
US5498974A (en) * 1994-12-30 1996-03-12 International Business Machines Corporation Contactless corona-oxide-semiconductor Q-V mobile charge measurement method and apparatus
FR2732464B1 (fr) * 1995-03-30 1997-04-30 Alcatel Cable Procede et dispositif de verification de la conformite d'un element isolant donne avec un element isolant de reference
DE19525081B4 (de) * 1995-07-10 2006-06-29 Display Products Group, Inc., Hayward Verfahren und Vorrichtung zum Testen der Funktion von Mikrostrukturelementen
JP3441855B2 (ja) * 1995-08-25 2003-09-02 科学技術振興事業団 荷電粒子顕微鏡の観察装置
US5781017A (en) * 1996-04-26 1998-07-14 Sandia Corporation Capacitive charge generation apparatus and method for testing circuits
JP3813336B2 (ja) * 1997-11-20 2006-08-23 株式会社ルネサステクノロジ 集積回路の故障箇所特定方法および故障箇所特定装置
US20030165212A1 (en) * 1998-02-18 2003-09-04 Maglich Bogdan C. Method and apparatus for detecting, locating, and analyzing chemical compounds using subatomic particle activation
US6252412B1 (en) 1999-01-08 2001-06-26 Schlumberger Technologies, Inc. Method of detecting defects in patterned substrates
US6614922B1 (en) 2000-01-04 2003-09-02 The Ohio State University Wire pattern test system
US6359451B1 (en) 2000-02-11 2002-03-19 Image Graphics Incorporated System for contactless testing of printed circuit boards
WO2001058558A2 (en) 2000-02-14 2001-08-16 Eco 3 Max Inc. Process for removing volatile organic compounds from an air stream and apparatus therefor
US7295154B2 (en) * 2002-01-17 2007-11-13 The Ohio State University Vehicle obstacle warning radar
GB0220755D0 (en) * 2002-09-06 2002-10-16 Univ Cambridge Tech Terahertz spectroscopy
US7528614B2 (en) * 2004-12-22 2009-05-05 Applied Materials, Inc. Apparatus and method for voltage contrast analysis of a wafer using a tilted pre-charging beam
US6954678B1 (en) * 2002-09-30 2005-10-11 Advanced Micro Devices, Inc. Artificial intelligence system for track defect problem solving
JP2004151045A (ja) * 2002-11-01 2004-05-27 Hitachi High-Technologies Corp 電子顕微鏡またはｘ線分析装置及び試料の分析方法
US6860081B2 (en) * 2002-12-04 2005-03-01 The Ohio State University Sidelobe controlled radio transmission region in metallic panel
US7196657B2 (en) * 2003-01-31 2007-03-27 The Ohio State University Radar system using RF noise
US6765203B1 (en) * 2003-01-31 2004-07-20 Shimadzu Corporation Pallet assembly for substrate inspection device and substrate inspection device
WO2005088245A1 (en) * 2004-03-11 2005-09-22 Hienergy Technologies, Inc. Method and apparatus for measuring wall thickness of a vessel
US20060103378A1 (en) * 2004-11-12 2006-05-18 Nader Pakdaman Apparatus and method for dynamic diagnostic testing of integrated circuits
WO2009129864A1 (en) * 2008-04-25 2009-10-29 Agc Flat Glass Europe Sa Method for detecting electrical inhomogeneities caused by local defects in a conductive layer and corresponding apparatus
US7859276B1 (en) * 2008-12-02 2010-12-28 Lockheed Martin Corporation Non-destructive validation of semiconductor devices
FR2939964B1 (fr) * 2008-12-17 2010-12-10 Eads Europ Aeronautic Defence Dispositif de test de circuit integre et procede de mise en oeuvre
DE102009003544B4 (de) * 2009-02-26 2012-10-18 Q-Cells Se Verfahren zur Überprüfung von Solarzellenoberflächen
WO2014008508A1 (en) 2012-07-06 2014-01-09 The Ohio State University Compact dual band gnss antenna design
EP3428726A1 (de) * 2017-07-13 2019-01-16 ASML Netherlands B.V. Inspektionswerkzeug, lithographische vorrichtung, lithographisches system, inspektionsverfahren und vorrichtungsherstellungsverfahren
EP3428725A1 (de) * 2017-07-13 2019-01-16 ASML Netherlands B.V. Inspektionswerkzeug, lithographische vorrichtung, lithographisches system, inspektionsverfahren und vorrichtungsherstellungsverfahren
WO2019011608A1 (en) * 2017-07-13 2019-01-17 Asml Netherlands B.V. INSPECTION TOOL, LITHOGRAPHIC APPARATUS, LITHOGRAPHIC SYSTEM, INSPECTION METHOD, AND DEVICE MANUFACTURING METHOD
US20240272412A1 (en) * 2023-02-13 2024-08-15 Intel Corporation Fault isolation via electron photoemission microscopy

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SU148154A1 (ru) * 1961-07-15 1961-11-30 Н.Н. Седов Способ получени изображени p-n переходов
DE1946931A1 (de) * 1969-09-17 1971-03-18 Gen Electric Verfahren zum Pruefen von Schaltungen und Vorrichtung zur Ausfuehrung des Verfahrens
US3861199A (en) * 1971-04-07 1975-01-21 Sarkis Barkhoudarian Acoustic imaging system
US3803413A (en) * 1972-05-01 1974-04-09 Vanzetti Infrared Computer Sys Infrared non-contact system for inspection of infrared emitting components in a device
US3889053A (en) * 1973-10-30 1975-06-10 Westinghouse Electric Corp Contactless test system
GB1601816A (en) * 1977-05-27 1981-11-04 Nat Res Dev Investigation of samples by nmr techniques
US4242635A (en) * 1979-01-26 1980-12-30 The United States Of America As Represented By The Secretary Of The Air Force Apparatus and method for integrated circuit test analysis
US4241635A (en) * 1979-04-13 1980-12-30 Tadahiro Sugimoto Hydraulic system for controlling saw-frame cutting feed speed in a sawing machine
US4358732A (en) * 1979-05-14 1982-11-09 California Institute Of Technology Synchronized voltage contrast display analysis system
US4326165A (en) * 1980-01-10 1982-04-20 Westinghouse Electric Corp. Corona charging for testing reliability of insulator-covered semiconductor devices
GB2069152B (en) * 1980-01-28 1984-01-11 Post Office Integrated circuit testing
NL8004176A (nl) * 1980-07-21 1982-02-16 Philips Nv Inrichting voor het testen van een schakeling met digitaal werkende en kombinatorisch werkende onderdelen.
JPS5770541A (en) * 1980-10-20 1982-05-01 Hitachi Metals Ltd Prossure fixing type magnetic toner for reversal development
US4441205A (en) * 1981-05-18 1984-04-03 Kulicke & Soffa Industries, Inc. Pattern recognition system
US4417203A (en) * 1981-05-26 1983-11-22 International Business Machines Corporation System for contactless electrical property testing of multi-layer ceramics
JPS57204141A (en) * 1981-06-10 1982-12-14 Ibm Method of inspecting deflection of semiconductor substrate
DE3232671A1 (de) * 1982-09-02 1984-03-08 Siemens AG, 1000 Berlin und 8000 München Anordnung und verfahren zur spannungsmessung an einem vergrabenen messobjekt

Also Published As

Publication number Publication date
JPH0634027B2 (ja) 1994-05-02
WO1984004819A1 (fr) 1984-12-06
US4712057A (en) 1987-12-08
JPS60501424A (ja) 1985-08-29
EP0129508A1 (de) 1984-12-27
DE3462182D1 (en) 1987-02-26
EP0129508B1 (de) 1987-01-21

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