ATE25151T1 - Untersuchungs- und pruefungsverfahren fuer eine elektrische vorrichtung in der art einer integrierten oder gedruckten schaltung. - Google Patents
Untersuchungs- und pruefungsverfahren fuer eine elektrische vorrichtung in der art einer integrierten oder gedruckten schaltung.Info
- Publication number
- ATE25151T1 ATE25151T1 AT84810249T AT84810249T ATE25151T1 AT E25151 T1 ATE25151 T1 AT E25151T1 AT 84810249 T AT84810249 T AT 84810249T AT 84810249 T AT84810249 T AT 84810249T AT E25151 T1 ATE25151 T1 AT E25151T1
- Authority
- AT
- Austria
- Prior art keywords
- pct
- inspection
- integrated
- printed circuit
- electrical device
- Prior art date
Links
- 238000012360 testing method Methods 0.000 title abstract 2
- 238000007689 inspection Methods 0.000 title 1
- 230000005855 radiation Effects 0.000 abstract 3
- 230000003993 interaction Effects 0.000 abstract 1
- 230000000638 stimulation Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/305—Contactless testing using electron beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/304—Contactless testing of printed or hybrid circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measurement Of Radiation (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
- Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH284283 | 1983-05-25 | ||
EP84810249A EP0129508B1 (de) | 1983-05-25 | 1984-05-22 | Untersuchungs- und Prüfungsverfahren für eine elektrische Vorrichtung in der Art einer integrierten oder gedruckten Schaltung |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE25151T1 true ATE25151T1 (de) | 1987-02-15 |
Family
ID=4242812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT84810249T ATE25151T1 (de) | 1983-05-25 | 1984-05-22 | Untersuchungs- und pruefungsverfahren fuer eine elektrische vorrichtung in der art einer integrierten oder gedruckten schaltung. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4712057A (de) |
EP (1) | EP0129508B1 (de) |
JP (1) | JPH0634027B2 (de) |
AT (1) | ATE25151T1 (de) |
DE (1) | DE3462182D1 (de) |
WO (1) | WO1984004819A1 (de) |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3428965A1 (de) * | 1984-08-06 | 1986-02-06 | Siemens AG, 1000 Berlin und 8000 München | Verfahren und vorrichtung zur detektion und abbildung von messpunkten, die einen bestimmten signalverlauf aufweisen |
US4706018A (en) * | 1984-11-01 | 1987-11-10 | International Business Machines Corporation | Noncontact dynamic tester for integrated circuits |
DE3714357C2 (de) * | 1986-04-30 | 1994-02-03 | Toshiba Ceramics Co | Siliciumwafer und Verfahren zu dessen Herstellung und Siliziumwafer-Auswahleinrichtung |
EP0275306B1 (de) * | 1986-08-01 | 1990-10-24 | Electro-Scan Corporation | Mehrzwecksgasdetektoranordnung fuer elektronmikroskopen |
DE3683053D1 (de) * | 1986-10-23 | 1992-01-30 | Ibm | Verfahren zur kontaktfreien pruefung von platinen fuer integrierte schaltungen unter atmosphaerischen bedingungen. |
US4870295A (en) * | 1987-12-07 | 1989-09-26 | The United States Of America As Represented By The United States Department Of Energy | Photoconductive circuit element pulse generator |
US4851767A (en) * | 1988-01-15 | 1989-07-25 | International Business Machines Corporation | Detachable high-speed opto-electronic sampling probe |
US4924096A (en) * | 1988-07-13 | 1990-05-08 | Mroczkowski Jacek A | Non-contact testing of photovoltaic detector arrays |
JP3151203B2 (ja) * | 1988-11-23 | 2001-04-03 | テキサス インスツルメンツ インコーポレイテツド | 集積回路の自己検査装置 |
US5131392A (en) * | 1990-02-13 | 1992-07-21 | Brigham & Women's Hospital | Use of magnetic field of magnetic resonance imaging devices as the source of the magnetic field of electromagnetic transducers |
GB2282480B (en) * | 1990-07-05 | 1995-07-26 | Olivetti Systems & Networks S | Integrated circuit structure analysis |
US5268638A (en) * | 1991-07-15 | 1993-12-07 | Siemens Aktiengesellschaft | Method for particle beam testing of substrates for liquid crystal displays "LCD" |
JPH0526944A (ja) * | 1991-07-24 | 1993-02-05 | Nippon Sheet Glass Co Ltd | 導電パターンの検査装置 |
JPH05109378A (ja) * | 1991-10-15 | 1993-04-30 | Hitachi Ltd | 電子顕微像観察方法及び装置 |
US5369359A (en) * | 1991-11-05 | 1994-11-29 | Siemens Aktiengesellschaft | Particle beam testing method with countervoltage or retarding voltage follow-up or feedback |
US5471055A (en) * | 1993-05-28 | 1995-11-28 | The United States Of America As Represented By The Secretary Of The Army | Focal plane array test facility |
US6002792A (en) * | 1993-11-16 | 1999-12-14 | Hamamatsu Photonics Kk | Semiconductor device inspection system |
US5504017A (en) * | 1994-12-20 | 1996-04-02 | Advanced Micro Devices, Inc. | Void detection in metallization patterns |
US5498974A (en) * | 1994-12-30 | 1996-03-12 | International Business Machines Corporation | Contactless corona-oxide-semiconductor Q-V mobile charge measurement method and apparatus |
FR2732464B1 (fr) * | 1995-03-30 | 1997-04-30 | Alcatel Cable | Procede et dispositif de verification de la conformite d'un element isolant donne avec un element isolant de reference |
DE19525081B4 (de) * | 1995-07-10 | 2006-06-29 | Display Products Group, Inc., Hayward | Verfahren und Vorrichtung zum Testen der Funktion von Mikrostrukturelementen |
JP3441855B2 (ja) * | 1995-08-25 | 2003-09-02 | 科学技術振興事業団 | 荷電粒子顕微鏡の観察装置 |
US5781017A (en) * | 1996-04-26 | 1998-07-14 | Sandia Corporation | Capacitive charge generation apparatus and method for testing circuits |
JP3813336B2 (ja) * | 1997-11-20 | 2006-08-23 | 株式会社ルネサステクノロジ | 集積回路の故障箇所特定方法および故障箇所特定装置 |
US20030165212A1 (en) * | 1998-02-18 | 2003-09-04 | Maglich Bogdan C. | Method and apparatus for detecting, locating, and analyzing chemical compounds using subatomic particle activation |
US6252412B1 (en) | 1999-01-08 | 2001-06-26 | Schlumberger Technologies, Inc. | Method of detecting defects in patterned substrates |
US6614922B1 (en) | 2000-01-04 | 2003-09-02 | The Ohio State University | Wire pattern test system |
US6359451B1 (en) | 2000-02-11 | 2002-03-19 | Image Graphics Incorporated | System for contactless testing of printed circuit boards |
WO2001058558A2 (en) | 2000-02-14 | 2001-08-16 | Eco 3 Max Inc. | Process for removing volatile organic compounds from an air stream and apparatus therefor |
US7295154B2 (en) * | 2002-01-17 | 2007-11-13 | The Ohio State University | Vehicle obstacle warning radar |
GB0220755D0 (en) * | 2002-09-06 | 2002-10-16 | Univ Cambridge Tech | Terahertz spectroscopy |
US7528614B2 (en) * | 2004-12-22 | 2009-05-05 | Applied Materials, Inc. | Apparatus and method for voltage contrast analysis of a wafer using a tilted pre-charging beam |
US6954678B1 (en) * | 2002-09-30 | 2005-10-11 | Advanced Micro Devices, Inc. | Artificial intelligence system for track defect problem solving |
JP2004151045A (ja) * | 2002-11-01 | 2004-05-27 | Hitachi High-Technologies Corp | 電子顕微鏡またはx線分析装置及び試料の分析方法 |
US6860081B2 (en) * | 2002-12-04 | 2005-03-01 | The Ohio State University | Sidelobe controlled radio transmission region in metallic panel |
US7196657B2 (en) * | 2003-01-31 | 2007-03-27 | The Ohio State University | Radar system using RF noise |
US6765203B1 (en) * | 2003-01-31 | 2004-07-20 | Shimadzu Corporation | Pallet assembly for substrate inspection device and substrate inspection device |
WO2005088245A1 (en) * | 2004-03-11 | 2005-09-22 | Hienergy Technologies, Inc. | Method and apparatus for measuring wall thickness of a vessel |
US20060103378A1 (en) * | 2004-11-12 | 2006-05-18 | Nader Pakdaman | Apparatus and method for dynamic diagnostic testing of integrated circuits |
WO2009129864A1 (en) * | 2008-04-25 | 2009-10-29 | Agc Flat Glass Europe Sa | Method for detecting electrical inhomogeneities caused by local defects in a conductive layer and corresponding apparatus |
US7859276B1 (en) * | 2008-12-02 | 2010-12-28 | Lockheed Martin Corporation | Non-destructive validation of semiconductor devices |
FR2939964B1 (fr) * | 2008-12-17 | 2010-12-10 | Eads Europ Aeronautic Defence | Dispositif de test de circuit integre et procede de mise en oeuvre |
DE102009003544B4 (de) * | 2009-02-26 | 2012-10-18 | Q-Cells Se | Verfahren zur Überprüfung von Solarzellenoberflächen |
US9425516B2 (en) | 2012-07-06 | 2016-08-23 | The Ohio State University | Compact dual band GNSS antenna design |
EP3428725A1 (de) * | 2017-07-13 | 2019-01-16 | ASML Netherlands B.V. | Inspektionswerkzeug, lithographische vorrichtung, lithographisches system, inspektionsverfahren und vorrichtungsherstellungsverfahren |
EP3428726A1 (de) * | 2017-07-13 | 2019-01-16 | ASML Netherlands B.V. | Inspektionswerkzeug, lithographische vorrichtung, lithographisches system, inspektionsverfahren und vorrichtungsherstellungsverfahren |
WO2019011608A1 (en) * | 2017-07-13 | 2019-01-17 | Asml Netherlands B.V. | INSPECTION TOOL, LITHOGRAPHIC APPARATUS, LITHOGRAPHIC SYSTEM, INSPECTION METHOD, AND DEVICE MANUFACTURING METHOD |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU148154A1 (ru) * | 1961-07-15 | 1961-11-30 | Н.Н. Седов | Способ получени изображени p-n переходов |
DE1946931A1 (de) * | 1969-09-17 | 1971-03-18 | Gen Electric | Verfahren zum Pruefen von Schaltungen und Vorrichtung zur Ausfuehrung des Verfahrens |
US3861199A (en) * | 1971-04-07 | 1975-01-21 | Sarkis Barkhoudarian | Acoustic imaging system |
US3803413A (en) * | 1972-05-01 | 1974-04-09 | Vanzetti Infrared Computer Sys | Infrared non-contact system for inspection of infrared emitting components in a device |
US3889053A (en) * | 1973-10-30 | 1975-06-10 | Westinghouse Electric Corp | Contactless test system |
GB1601816A (en) * | 1977-05-27 | 1981-11-04 | Nat Res Dev | Investigation of samples by nmr techniques |
US4242635A (en) * | 1979-01-26 | 1980-12-30 | The United States Of America As Represented By The Secretary Of The Air Force | Apparatus and method for integrated circuit test analysis |
US4241635A (en) * | 1979-04-13 | 1980-12-30 | Tadahiro Sugimoto | Hydraulic system for controlling saw-frame cutting feed speed in a sawing machine |
US4358732A (en) * | 1979-05-14 | 1982-11-09 | California Institute Of Technology | Synchronized voltage contrast display analysis system |
US4326165A (en) * | 1980-01-10 | 1982-04-20 | Westinghouse Electric Corp. | Corona charging for testing reliability of insulator-covered semiconductor devices |
GB2069152B (en) * | 1980-01-28 | 1984-01-11 | Post Office | Integrated circuit testing |
NL8004176A (nl) * | 1980-07-21 | 1982-02-16 | Philips Nv | Inrichting voor het testen van een schakeling met digitaal werkende en kombinatorisch werkende onderdelen. |
JPS5770541A (en) * | 1980-10-20 | 1982-05-01 | Hitachi Metals Ltd | Prossure fixing type magnetic toner for reversal development |
US4441205A (en) * | 1981-05-18 | 1984-04-03 | Kulicke & Soffa Industries, Inc. | Pattern recognition system |
US4417203A (en) * | 1981-05-26 | 1983-11-22 | International Business Machines Corporation | System for contactless electrical property testing of multi-layer ceramics |
JPS57204141A (en) * | 1981-06-10 | 1982-12-14 | Ibm | Method of inspecting deflection of semiconductor substrate |
DE3232671A1 (de) * | 1982-09-02 | 1984-03-08 | Siemens AG, 1000 Berlin und 8000 München | Anordnung und verfahren zur spannungsmessung an einem vergrabenen messobjekt |
-
1984
- 1984-05-22 DE DE8484810249T patent/DE3462182D1/de not_active Expired
- 1984-05-22 AT AT84810249T patent/ATE25151T1/de not_active IP Right Cessation
- 1984-05-22 EP EP84810249A patent/EP0129508B1/de not_active Expired
- 1984-05-22 US US06/705,341 patent/US4712057A/en not_active Expired - Lifetime
- 1984-05-22 WO PCT/CH1984/000081 patent/WO1984004819A1/de unknown
- 1984-05-22 JP JP59501908A patent/JPH0634027B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS60501424A (ja) | 1985-08-29 |
WO1984004819A1 (en) | 1984-12-06 |
JPH0634027B2 (ja) | 1994-05-02 |
DE3462182D1 (en) | 1987-02-26 |
US4712057A (en) | 1987-12-08 |
EP0129508B1 (de) | 1987-01-21 |
EP0129508A1 (de) | 1984-12-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |