ATE235072T1 - Verfahren zum entschichten eines resistmaterials - Google Patents

Verfahren zum entschichten eines resistmaterials

Info

Publication number
ATE235072T1
ATE235072T1 AT99113172T AT99113172T ATE235072T1 AT E235072 T1 ATE235072 T1 AT E235072T1 AT 99113172 T AT99113172 T AT 99113172T AT 99113172 T AT99113172 T AT 99113172T AT E235072 T1 ATE235072 T1 AT E235072T1
Authority
AT
Austria
Prior art keywords
resist material
sensitive adhesive
adhesive sheet
pressure
peeling
Prior art date
Application number
AT99113172T
Other languages
English (en)
Inventor
Eiji Nitto Toyoda
Makoto Namikawa
Takuji Okeyui
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP19299498A external-priority patent/JP2000029230A/ja
Priority claimed from JP32379898A external-priority patent/JP3959189B2/ja
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Application granted granted Critical
Publication of ATE235072T1 publication Critical patent/ATE235072T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0028—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by adhesive surfaces
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10S156/918—Delaminating processes adapted for specified product, e.g. delaminating medical specimen slide
    • Y10S156/919—Delaminating in preparation for post processing recycling step
    • Y10S156/922—Specified electronic component delaminating in preparation for recycling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1142—Changing dimension during delaminating [e.g., crushing, expanding, warping, etc.]
    • Y10T156/1147—Using shrinking or swelling agent during delaminating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1168—Gripping and pulling work apart during delaminating
    • Y10T156/1179—Gripping and pulling work apart during delaminating with poking during delaminating [e.g., jabbing, etc.]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Weting (AREA)
  • Adhesive Tapes (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
AT99113172T 1998-07-08 1999-07-07 Verfahren zum entschichten eines resistmaterials ATE235072T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19299498A JP2000029230A (ja) 1998-07-08 1998-07-08 レジスト材の除去方法
JP32379898A JP3959189B2 (ja) 1998-01-16 1998-11-13 レジスト材の除去方法

Publications (1)

Publication Number Publication Date
ATE235072T1 true ATE235072T1 (de) 2003-04-15

Family

ID=26507633

Family Applications (2)

Application Number Title Priority Date Filing Date
AT02008596T ATE418750T1 (de) 1998-07-08 1999-07-07 Verfahren zum entschichten von resistmaterial
AT99113172T ATE235072T1 (de) 1998-07-08 1999-07-07 Verfahren zum entschichten eines resistmaterials

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT02008596T ATE418750T1 (de) 1998-07-08 1999-07-07 Verfahren zum entschichten von resistmaterial

Country Status (5)

Country Link
US (2) US6245188B1 (de)
EP (2) EP0971270B1 (de)
AT (2) ATE418750T1 (de)
DE (2) DE69940168D1 (de)
ES (1) ES2191387T3 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000331322A (ja) * 1999-05-21 2000-11-30 Nitto Denko Corp ヘッドスライダの製造方法
JP2002231600A (ja) * 2001-01-30 2002-08-16 Nitto Denko Corp レジスト除去用接着テープとレジスト除去方法
TW582069B (en) * 2001-05-18 2004-04-01 Nitto Denko Corp Method for removing resist material
DE10242560A1 (de) * 2002-09-13 2004-03-25 Creavis Gesellschaft Für Technologie Und Innovation Mbh Herstellung von selbstreinigenden Oberflächen auf textilen Beschichtungen
US7681302B2 (en) * 2003-01-27 2010-03-23 Sae Magnetics (H. K.) Ltd. Method for manufacturing a hard disk drive arm
US20060246279A1 (en) * 2003-04-25 2006-11-02 Masakatsu Urairi Method of producing laser-processed product and adhesive sheet, for laser processing used therefor
JP4854061B2 (ja) * 2005-01-14 2012-01-11 日東電工株式会社 レーザー加工品の製造方法及びレーザー加工用保護シート
WO2009088357A1 (en) * 2008-01-07 2009-07-16 Agency For Science, Technology And Research Method for lift-off patterning films on a substrate
US8153466B2 (en) * 2009-01-21 2012-04-10 Varian Semiconductor Equipment Associates, Inc. Mask applied to a workpiece
WO2015087192A1 (en) * 2013-12-12 2015-06-18 Semiconductor Energy Laboratory Co., Ltd. Peeling method and peeling apparatus
JP7547498B2 (ja) * 2020-11-09 2024-09-09 デンカ株式会社 粘着テープ及び加工方法
JP7743733B2 (ja) * 2021-08-31 2025-09-25 富士電機株式会社 半導体装置の製造方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5368578A (en) * 1976-12-01 1978-06-19 Hitachi Ltd Photo mask
JPS5394770A (en) * 1977-01-31 1978-08-19 Hitachi Ltd Photo mask
JPS6040695B2 (ja) * 1977-08-10 1985-09-12 株式会社日立製作所 フオトマスク
JPS6053457B2 (ja) * 1977-11-21 1985-11-26 株式会社日立製作所 ホトマスクの製造方法
AU570439B2 (en) 1983-03-28 1988-03-17 Compression Labs, Inc. A combined intraframe and interframe transform coding system
JPS63194333A (ja) * 1987-02-09 1988-08-11 Seiko Epson Corp プライマ処理方法
JPH02119847A (ja) 1988-10-28 1990-05-07 Hitachi Medical Corp Ｄｓａ装置
US5053318A (en) * 1989-05-18 1991-10-01 Shipley Company Inc. Plasma processing with metal mask integration
US5688864A (en) * 1990-04-03 1997-11-18 Ppg Industries, Inc. Autophobic water repellent surface treatment
JP2566098B2 (ja) * 1992-05-01 1996-12-25 東京応化工業株式会社 ネガ型放射線感応性レジスト組成物
US5268245A (en) * 1992-07-09 1993-12-07 Polaroid Corporation Process for forming a filter on a solid state imager
JPH0684787A (ja) * 1992-09-01 1994-03-25 Fujitsu Ltd 多層レジストのパターン形成方法
JPH06151671A (ja) * 1992-11-02 1994-05-31 Nitto Denko Corp リードフレームの画像形成工程におけるレジスト膜画像の除去方法、及びこれに用いる接着剤あるいは接着シート類
US5466325A (en) * 1993-06-02 1995-11-14 Nitto Denko Corporation Resist removing method, and curable pressure-sensitive adhesive, adhesive sheets and apparatus used for the method
TW301037B (de) * 1993-11-19 1997-03-21 Sony Co Ltd
KR19990022993A (ko) * 1995-06-15 1999-03-25 야마모토 히데키 내식막의 제거방법, 및 이에 사용되는 접착제 또는 접착 시트
US5641541A (en) * 1995-09-29 1997-06-24 Taiwan Semiconductor Manufacturing Company Process to apply photoresist printer to a wafer
US6228552B1 (en) * 1996-09-13 2001-05-08 Kabushiki Kaisha Toshiba Photo-sensitive material, method of forming a resist pattern and manufacturing an electronic parts using photo-sensitive material
US5763006A (en) * 1996-10-04 1998-06-09 Taiwan Semiconductor Manufacturing Company, Ltd. Method and apparatus for automatic purge of HMDS vapor piping
JP3806991B2 (ja) 1996-10-16 2006-08-09 日産自動車株式会社 自動車部品の組み付け装置
JPH10158602A (ja) * 1996-11-29 1998-06-16 Nitto Denko Corp レジスト除去用粘着テ―プとレジスト除去方法
KR100250637B1 (ko) * 1997-01-06 2000-04-01 윤종용 디하이드로피란에 의한 웨이퍼 프라임 방법
JPH1167626A (ja) * 1997-08-12 1999-03-09 Hitachi Ltd レジスト除去方法および装置
JPH11162805A (ja) * 1997-12-02 1999-06-18 Nitto Denko Corp レジスト除去方法

Also Published As

Publication number Publication date
DE69940168D1 (de) 2009-02-05
ES2191387T3 (es) 2003-09-01
EP1248156B1 (de) 2008-12-24
EP1248156A3 (de) 2003-07-09
US6565704B2 (en) 2003-05-20
DE69905985D1 (de) 2003-04-24
DE69905985T2 (de) 2003-09-11
EP0971270A1 (de) 2000-01-12
EP0971270B1 (de) 2003-03-19
US6245188B1 (en) 2001-06-12
EP1248156A2 (de) 2002-10-09
ATE418750T1 (de) 2009-01-15
US20010015259A1 (en) 2001-08-23

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