ATE177983T1 - Verfahren und gerät zur automatischen ankopplung eines testkopfs an ein schaltungsbehandlungsgerät - Google Patents

Verfahren und gerät zur automatischen ankopplung eines testkopfs an ein schaltungsbehandlungsgerät

Info

Publication number
ATE177983T1
ATE177983T1 AT95308206T AT95308206T ATE177983T1 AT E177983 T1 ATE177983 T1 AT E177983T1 AT 95308206 T AT95308206 T AT 95308206T AT 95308206 T AT95308206 T AT 95308206T AT E177983 T1 ATE177983 T1 AT E177983T1
Authority
AT
Austria
Prior art keywords
test head
automatically coupling
treatment device
circuit treatment
axis
Prior art date
Application number
AT95308206T
Other languages
English (en)
Inventor
Daniel J Graham
Alyn R Holt
Robert E Matthiessen
I Marvin Weilerstein
Christopher L West
Original Assignee
Intest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intest Corp filed Critical Intest Corp
Application granted granted Critical
Publication of ATE177983T1 publication Critical patent/ATE177983T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37133—Linear, rotary variable differential transformer, lvdt, rvdt
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37404—Orientation of workpiece or tool, surface sensor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/40—Robotics, robotics mapping to robotics vision
    • G05B2219/40082—Docking, align object on end effector with target
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45089—Testing robot
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49117—Alignment of surfaces to get them parallel
AT95308206T 1994-12-12 1995-11-16 Verfahren und gerät zur automatischen ankopplung eines testkopfs an ein schaltungsbehandlungsgerät ATE177983T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/355,501 US5600258A (en) 1993-09-15 1994-12-12 Method and apparatus for automated docking of a test head to a device handler

Publications (1)

Publication Number Publication Date
ATE177983T1 true ATE177983T1 (de) 1999-04-15

Family

ID=23397664

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95308206T ATE177983T1 (de) 1994-12-12 1995-11-16 Verfahren und gerät zur automatischen ankopplung eines testkopfs an ein schaltungsbehandlungsgerät

Country Status (10)

Country Link
US (2) US5600258A (de)
EP (1) EP0716905B1 (de)
JP (1) JP2878169B2 (de)
KR (1) KR100225805B1 (de)
CN (1) CN1107231C (de)
AT (1) ATE177983T1 (de)
DE (1) DE69508542T2 (de)
MY (1) MY112312A (de)
PH (1) PH31538A (de)
SG (1) SG34322A1 (de)

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6057695A (en) * 1993-09-15 2000-05-02 Intest Corporation Method and apparatus for automated docking of a test head to a device handler
US6166552A (en) * 1996-06-10 2000-12-26 Motorola Inc. Method and apparatus for testing a semiconductor wafer
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6009536A (en) * 1996-09-20 1999-12-28 Micron Electronics, Inc. Method for using fuse identification codes for masking bad bits on memory modules
JP3494828B2 (ja) * 1996-11-18 2004-02-09 株式会社アドバンテスト 水平搬送テストハンドラ
US6314527B1 (en) 1998-03-05 2001-11-06 Micron Technology, Inc. Recovery of useful areas of partially defective synchronous memory components
US6332183B1 (en) 1998-03-05 2001-12-18 Micron Technology, Inc. Method for recovery of useful areas of partially defective synchronous memory components
US6381708B1 (en) 1998-04-28 2002-04-30 Micron Technology, Inc. Method for decoding addresses for a defective memory array
US6381707B1 (en) 1998-04-28 2002-04-30 Micron Technology, Inc. System for decoding addresses for a defective memory array
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6496876B1 (en) 1998-12-21 2002-12-17 Micron Technology, Inc. System and method for storing a tag to identify a functional storage location in a memory device
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6310486B1 (en) 1999-10-01 2001-10-30 Teradyne, Inc. Integrated test cell
MY138984A (en) * 2000-03-01 2009-08-28 Intest Corp Vertical counter balanced test head manipulator
US6578157B1 (en) 2000-03-06 2003-06-10 Micron Technology, Inc. Method and apparatus for recovery of useful areas of partially defective direct rambus rimm components
US7269765B1 (en) * 2000-04-13 2007-09-11 Micron Technology, Inc. Method and apparatus for storing failing part locations in a module
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
JP2004509344A (ja) 2000-09-20 2004-03-25 インテスト　アイピー　コーポレイション 重心調整可能側部支持体
EP1712923B1 (de) 2000-09-22 2013-05-15 inTEST Corporation Vorrichtung und Verfahren zum Ausbalancieren und Bereitstellung eines konformen Bereichs für einen Prüfkopf
DE20114544U1 (de) 2000-12-04 2002-02-21 Cascade Microtech Inc Wafersonde
US6586925B2 (en) 2001-04-09 2003-07-01 St Assembly Test Services Ltd. Method and apparatus for establishing quick and reliable connection between a semiconductor device handler plate and a semiconductor device test head plate
US6970634B2 (en) * 2001-05-04 2005-11-29 Cascade Microtech, Inc. Fiber optic wafer probe
US7008802B2 (en) * 2001-05-29 2006-03-07 Asm America, Inc. Method and apparatus to correct water drift
US6766996B1 (en) 2001-07-16 2004-07-27 Reid-Ashman Manufacturing, Inc. Manipulator
DE60238767D1 (de) * 2001-07-16 2011-02-10 Intest Corp System und verfahren zur ankopplung eines prüfkopfs
WO2003052435A1 (en) 2001-08-21 2003-06-26 Cascade Microtech, Inc. Membrane probing system
US6836135B2 (en) * 2001-08-31 2004-12-28 Cascade Microtech, Inc. Optical testing device
US6897645B2 (en) * 2001-12-29 2005-05-24 Vincent Hing Chung So Docking system and method for docking in automated testing systems
KR100583949B1 (ko) * 2002-01-07 2006-05-26 삼성전자주식회사 웨이퍼 프로빙 장치 및 테스트 헤드 도킹 제어방법
US6646431B1 (en) 2002-01-22 2003-11-11 Elite E/M, Inc. Test head manipulator
AU2003226352A1 (en) * 2002-04-15 2003-11-03 Intest Ip Corporation Test head positioner system
US6567725B1 (en) * 2002-07-15 2003-05-20 Speedfam-Ipec Corporation Method and apparatus for teaching robot station location
US7235964B2 (en) * 2003-03-31 2007-06-26 Intest Corporation Test head positioning system and method
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US6836329B1 (en) * 2003-07-09 2004-12-28 International Business Machines Corporation Real time IR optical sensor
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
DE202004021093U1 (de) 2003-12-24 2006-09-28 Cascade Microtech, Inc., Beaverton Aktiver Halbleiterscheibenmessfühler
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7312604B2 (en) * 2005-07-29 2007-12-25 Nextest Systems Corporation Portable manipulator for stackable semiconductor test system
US7598725B2 (en) * 2005-12-30 2009-10-06 Teradyne, Inc. Alignment receptacle of a sensor adapted to interact with a pin to generate position data along at least two transverse axes for docking a test head
US7783384B2 (en) * 2006-05-31 2010-08-24 Kraft Brett W Ambidextrous robotic master controller
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
EP2104862B1 (de) * 2006-12-29 2012-08-08 inTEST Corporation System und verfahren zur testkopfpositionierung
TWI439709B (zh) 2006-12-29 2014-06-01 Intest Corp 用於使負載沿平移軸線平移之操縱器與負載定位系統
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US8041450B2 (en) * 2007-10-04 2011-10-18 Asm Japan K.K. Position sensor system for substrate transfer robot
KR101489963B1 (ko) * 2007-12-13 2015-02-04 한국에이에스엠지니텍 주식회사 박막 증착 장치 및 이를 이용한 증착 방법
US8273178B2 (en) * 2008-02-28 2012-09-25 Asm Genitech Korea Ltd. Thin film deposition apparatus and method of maintaining the same
US7963736B2 (en) * 2008-04-03 2011-06-21 Asm Japan K.K. Wafer processing apparatus with wafer alignment device
US8704543B2 (en) * 2008-07-14 2014-04-22 Advantest Corporation Test head moving apparatus and electronic component testing apparatus
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
US9193051B2 (en) * 2010-04-02 2015-11-24 Aktiebolaget Skf Multiple stud tensioning machine and method for automatically controlling the elongation of a plurality of studs
EP2732298A1 (de) 2011-07-12 2014-05-21 Intest Corporation Verfahren und vorrichtung zum andocken eines testkopfes an einem peripheriegerät
EP2859365A1 (de) * 2012-11-05 2015-04-15 ISMECA Semiconductor Holding SA Anordnung zum prüfen der leistung eines bauteils
WO2017170393A1 (ja) * 2016-03-28 2017-10-05 株式会社東京精密 プローバ及びプローバの操作方法
CN106024981B (zh) * 2016-07-08 2018-10-09 江苏博硕智能系统有限公司 一种物料的铺设方法及所用的铺设系统
CN107817059B (zh) * 2017-12-13 2019-05-24 中国飞机强度研究所 一种轮胎温度测量装置
CN108132411B (zh) * 2017-12-29 2023-10-27 重庆市灵龙自动化设备有限公司 用于扩展坞的高效检测仪
CN108226758A (zh) * 2018-03-09 2018-06-29 京东方科技集团股份有限公司 一种检测设备及其控制方法
CN108872924B (zh) * 2018-06-28 2024-03-19 广东电网有限责任公司 电能表检定装置及系统
CN109333525B (zh) * 2018-11-22 2023-12-26 杭州极木科技有限公司 一种可旋转的机械臂
CN110196405A (zh) * 2019-06-27 2019-09-03 南方电网科学研究院有限责任公司 用于电能表现场校验仪的辅助系统
CN114325325B (zh) * 2021-12-29 2023-12-01 日月新半导体(昆山)有限公司 用于测试集成电路产品的装置

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE32119C (de) * TH. NORDENFELT in London und C. G. WITTEN STRÖM in Motala, Schweden Neuerung an Apparaten zum Verbrennen von Naphta und anderen flüchtigen Flüssigkeiten
US2697529A (en) * 1951-02-27 1954-12-21 John P Hubbell Apparatus for handling frangible articles by remote control
NL253341A (de) * 1959-07-02
US3262593A (en) * 1963-07-10 1966-07-26 Gen Mills Inc Wall-mounted support structure
US3665148A (en) * 1971-04-07 1972-05-23 Gen Motors Corp Six-axis manipulator
DE2226407C3 (de) * 1972-05-31 1978-10-12 Industrie-Werke Karlsruhe Augsburg Ag, 7500 Karlsruhe Gerät zur maschinellen, durch veränderbare Programme steuerbaren Handreichung
DE2630857A1 (de) * 1976-07-09 1978-01-12 Volkswagenwerk Ag Handhabungsautomat
US4328553A (en) * 1976-12-07 1982-05-04 Computervision Corporation Method and apparatus for targetless wafer alignment
US4160207A (en) * 1977-06-27 1979-07-03 Haines Fred E Printed circuit board tester with removable head
EP0001686B1 (de) * 1977-10-20 1981-11-04 Imperial Chemical Industries Plc Industrieller Manipulator zum dicht gegeneinander Stapeln von Gegenständen und Stapelnverfahren unter Verwendung des Manipulators
US4303368A (en) * 1978-09-18 1981-12-01 Westinghouse Electric Corp. Remote docking apparatus
US4229136A (en) * 1979-03-19 1980-10-21 International Business Machines Corporation Programmable air pressure counterbalance system for a manipulator
US4272892A (en) * 1979-08-10 1981-06-16 Omnicomp, Inc. Automatic test probe positioning apparatus
DE3042656A1 (de) * 1980-11-12 1982-06-16 Walter Dipl.-Ing. Dr. 6078 Neu-Isenburg Hillesheimer Hydraulisch betriebene hebebuehne
FR2473029A1 (fr) * 1980-01-08 1981-07-10 Hillesheimer Walter Pont elevateur, transporteur ou basculant, actionne hydrauliquement
US4379335A (en) * 1980-10-28 1983-04-05 Auto-Place, Inc. Electronic controller and portable programmer system for a pneumatically-powered point-to-point robot
EP0102217B1 (de) * 1982-08-25 1988-06-01 InTest Corporation Positionierer für elektronische Testköpfe von Testsystemen
US4705447A (en) * 1983-08-11 1987-11-10 Intest Corporation Electronic test head positioner for test systems
US4527942A (en) * 1982-08-25 1985-07-09 Intest Corporation Electronic test head positioner for test systems
US4652204A (en) * 1985-08-02 1987-03-24 Arnett Edward M Apparatus for handling hazardous materials
US4751457A (en) * 1986-09-08 1988-06-14 Tektronix, Inc. Integrated circuit probe parallelism establishing method and apparatus
JPS6465848A (en) * 1987-09-04 1989-03-13 Canon Kk Alignment
DE3713548A1 (de) * 1987-04-23 1988-11-03 Heidenhain Gmbh Dr Johannes Montageverfahren fuer eine positionsmesseinrichtung
US4893074A (en) * 1988-05-13 1990-01-09 Intest Corporation Electronic device testing system
FR2645679B1 (fr) * 1989-04-07 1994-05-06 Onera (Off Nat Aerospatiale) Installation de test, en particulier pour plaquettes de materiau semi-conducteur
JPH03159148A (ja) * 1989-11-16 1991-07-09 Advantest Corp 位置決め装置及びこの位置決め装置を利用したｉｃ試験装置
US5196998A (en) * 1990-04-02 1993-03-23 Fulton Francis M Adaptive control man-augmentation system for a suspended work station
US5390104A (en) * 1990-04-02 1995-02-14 Fulton; Francis M. Adaptive control man-augmentation system for a suspended work station
US5321351A (en) * 1990-05-25 1994-06-14 Everett Charles Technologies, Inc. Test fixture alignment system
US5030869A (en) * 1990-07-25 1991-07-09 Intest Corporation Device testing system with cable pivot
JP3012853B2 (ja) * 1990-09-14 2000-02-28 株式会社富士通宮城エレクトロニクス 半導体試験装置のハンドラー
US5124644A (en) * 1990-12-19 1992-06-23 Vlsi Technology, Inc. System for positioning a semiconductor chip package with respect to a testing device
US5263775A (en) * 1991-02-01 1993-11-23 Aetrium, Inc. Apparatus for handling devices under varying temperatures
US5513948A (en) * 1991-05-17 1996-05-07 Kensington Laboratories, Inc. Universal specimen prealigner
US5168003A (en) * 1991-06-24 1992-12-01 Ford Motor Company Step gradient anti-iridescent coatings
US5241870A (en) * 1991-07-22 1993-09-07 Intest Corporation Test head manipulator
US5321352A (en) * 1991-08-01 1994-06-14 Tokyo Electron Yamanashi Limited Probe apparatus and method of alignment for the same
US5404111A (en) * 1991-08-03 1995-04-04 Tokyo Electron Limited Probe apparatus with a swinging holder for an object of examination
US5440943A (en) * 1993-09-15 1995-08-15 Intest Corporation Electronic test head manipulator

Also Published As

Publication number Publication date
EP0716905A2 (de) 1996-06-19
DE69508542T2 (de) 1999-12-23
DE69508542D1 (de) 1999-04-29
KR100225805B1 (ko) 1999-10-15
US5600258A (en) 1997-02-04
CN1107231C (zh) 2003-04-30
JP2878169B2 (ja) 1999-04-05
PH31538A (en) 1998-11-03
CN1136665A (zh) 1996-11-27
SG34322A1 (en) 1996-12-06
JPH08220190A (ja) 1996-08-30
EP0716905B1 (de) 1999-03-24
US5900737A (en) 1999-05-04
KR960024441A (ko) 1996-07-20
EP0716905A3 (de) 1996-08-14
MY112312A (en) 2001-05-31

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