ATE158384T1 - Elektronzyklotronresonanz-ionentriebwerk - Google Patents

Elektronzyklotronresonanz-ionentriebwerk

Info

Publication number
ATE158384T1
ATE158384T1 AT92830091T AT92830091T ATE158384T1 AT E158384 T1 ATE158384 T1 AT E158384T1 AT 92830091 T AT92830091 T AT 92830091T AT 92830091 T AT92830091 T AT 92830091T AT E158384 T1 ATE158384 T1 AT E158384T1
Authority
AT
Austria
Prior art keywords
cyclotron resonance
processes
ion engine
field
discharge
Prior art date
Application number
AT92830091T
Other languages
English (en)
Inventor
Gianfranco Cirri
Original Assignee
Laben Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Laben Spa filed Critical Laben Spa
Application granted granted Critical
Publication of ATE158384T1 publication Critical patent/ATE158384T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H—PRODUCING A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H1/00—Using plasma to produce a reactive propulsive thrust
    • F03H1/0037—Electrostatic ion thrusters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma Technology (AREA)
  • Particle Accelerators (AREA)
  • Lasers (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Electron Sources, Ion Sources (AREA)
AT92830091T 1991-03-07 1992-02-28 Elektronzyklotronresonanz-ionentriebwerk ATE158384T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITFI910049A IT1246684B (it) 1991-03-07 1991-03-07 Propulsore ionico a risonanza ciclotronica.

Publications (1)

Publication Number Publication Date
ATE158384T1 true ATE158384T1 (de) 1997-10-15

Family

ID=11349505

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92830091T ATE158384T1 (de) 1991-03-07 1992-02-28 Elektronzyklotronresonanz-ionentriebwerk

Country Status (6)

Country Link
US (1) US5241244A (de)
EP (1) EP0505327B1 (de)
JP (1) JPH05172038A (de)
AT (1) ATE158384T1 (de)
DE (1) DE69222211T2 (de)
IT (1) IT1246684B (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5369953A (en) * 1993-05-21 1994-12-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Three-grid accelerator system for an ion propulsion engine
WO1995001085A1 (fr) * 1993-06-21 1995-01-05 Societe Europeenne De Propulsion Dispositif de mesure de variations de la poussee d'un moteur a plasma a derive fermee d'electrons
US5506475A (en) * 1994-03-22 1996-04-09 Martin Marietta Energy Systems, Inc. Microwave electron cyclotron electron resonance (ECR) ion source with a large, uniformly distributed, axially symmetric, ECR plasma volume
IT1269413B (it) 1994-10-21 1997-04-01 Proel Tecnologie Spa Sorgente di plasma a radiofrequenza
RU2094896C1 (ru) * 1996-03-25 1997-10-27 Научно-производственное предприятие "Новатех" Источник быстрых нейтральных молекул
US5866871A (en) * 1997-04-28 1999-02-02 Birx; Daniel Plasma gun and methods for the use thereof
US6566667B1 (en) 1997-05-12 2003-05-20 Cymer, Inc. Plasma focus light source with improved pulse power system
US6586757B2 (en) 1997-05-12 2003-07-01 Cymer, Inc. Plasma focus light source with active and buffer gas control
US5763930A (en) * 1997-05-12 1998-06-09 Cymer, Inc. Plasma focus high energy photon source
US6576916B2 (en) 1998-03-23 2003-06-10 Penn State Research Foundation Container for transporting antiprotons and reaction trap
US6414331B1 (en) 1998-03-23 2002-07-02 Gerald A. Smith Container for transporting antiprotons and reaction trap
US5977554A (en) * 1998-03-23 1999-11-02 The Penn State Research Foundation Container for transporting antiprotons
US6334302B1 (en) * 1999-06-28 2002-01-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Variable specific impulse magnetoplasma rocket engine
DE19948229C1 (de) * 1999-10-07 2001-05-03 Daimler Chrysler Ag Hochfrequenz-Ionenquelle
US7180081B2 (en) * 2000-06-09 2007-02-20 Cymer, Inc. Discharge produced plasma EUV light source
RU2206186C2 (ru) 2000-07-04 2003-06-10 Государственный научный центр Российской Федерации Троицкий институт инновационных и термоядерных исследований Способ получения коротковолнового излучения из газоразрядной плазмы и устройство для его реализации
JP3849913B2 (ja) * 2000-10-05 2006-11-22 日立オムロンターミナルソリューションズ株式会社 紙葉類取扱装置
US6804327B2 (en) * 2001-04-03 2004-10-12 Lambda Physik Ag Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays
ATE335928T1 (de) * 2003-03-20 2006-09-15 Elwing Llc Antriebssystem für raumfahrzeuge
US7461502B2 (en) 2003-03-20 2008-12-09 Elwing Llc Spacecraft thruster
IL156719A0 (en) * 2003-06-30 2004-01-04 Axiomic Technologies Inc A multi-stage open ion system in various topologies
US7586097B2 (en) * 2006-01-05 2009-09-08 Virgin Islands Microsystems, Inc. Switching micro-resonant structures using at least one director
EP2295797B1 (de) * 2004-09-22 2013-01-23 Elwing LLC Antriebssystem für Raumfahrzeuge
US7498592B2 (en) * 2006-06-28 2009-03-03 Wisconsin Alumni Research Foundation Non-ambipolar radio-frequency plasma electron source and systems and methods for generating electron beams
JP5119514B2 (ja) * 2008-01-09 2013-01-16 独立行政法人 宇宙航空研究開発機構 イオン噴射装置、推進装置及び人工衛星
US8635850B1 (en) 2008-08-29 2014-01-28 U.S. Department Of Energy Ion electric propulsion unit
GB0823391D0 (en) * 2008-12-23 2009-01-28 Qinetiq Ltd Electric propulsion
FR2985292B1 (fr) 2011-12-29 2014-01-24 Onera (Off Nat Aerospatiale) Propulseur plasmique et procede de generation d'une poussee propulsive plasmique
ES2745473T3 (es) * 2015-10-27 2020-03-02 Aernnova Acelerador de plasma con empuje modulado y vehículo espacial con el mismo
RU2716133C1 (ru) * 2018-12-24 2020-03-06 Федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технологический университет "СТАНКИН" (ФГБОУ ВО "МГТУ "СТАНКИН") Источник быстрых нейтральных молекул
CN115492736B (zh) * 2022-09-29 2024-05-14 哈尔滨工业大学 无磁路微波同轴谐振离子推力器及推力形成方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5779621A (en) * 1980-11-05 1982-05-18 Mitsubishi Electric Corp Plasma processing device
US4684848A (en) * 1983-09-26 1987-08-04 Kaufman & Robinson, Inc. Broad-beam electron source
JPS6276137A (ja) * 1985-09-30 1987-04-08 Hitachi Ltd イオン源
JPH0654644B2 (ja) * 1985-10-04 1994-07-20 株式会社日立製作所 イオン源
JPH0610348B2 (ja) * 1986-07-28 1994-02-09 三菱電機株式会社 イオン注入装置
US4825646A (en) * 1987-04-23 1989-05-02 Hughes Aircraft Company Spacecraft with modulated thrust electrostatic ion thruster and associated method
US4778561A (en) * 1987-10-30 1988-10-18 Veeco Instruments, Inc. Electron cyclotron resonance plasma source
US4937456A (en) * 1988-10-17 1990-06-26 The Boeing Company Dielectric coated ion thruster
US4927293A (en) * 1989-02-21 1990-05-22 Campbell Randy P Method and apparatus for remediating contaminated soil
US5081398A (en) * 1989-10-20 1992-01-14 Board Of Trustees Operating Michigan State University Resonant radio frequency wave coupler apparatus using higher modes

Also Published As

Publication number Publication date
ITFI910049A1 (it) 1992-09-07
ITFI910049A0 (it) 1991-03-07
US5241244A (en) 1993-08-31
EP0505327B1 (de) 1997-09-17
EP0505327A1 (de) 1992-09-23
JPH05172038A (ja) 1993-07-09
DE69222211D1 (de) 1997-10-23
IT1246684B (it) 1994-11-24
DE69222211T2 (de) 1998-03-12

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