JPS5489196A - Ion source device - Google Patents
Ion source deviceInfo
- Publication number
- JPS5489196A JPS5489196A JP15680677A JP15680677A JPS5489196A JP S5489196 A JPS5489196 A JP S5489196A JP 15680677 A JP15680677 A JP 15680677A JP 15680677 A JP15680677 A JP 15680677A JP S5489196 A JPS5489196 A JP S5489196A
- Authority
- JP
- Japan
- Prior art keywords
- filament
- location
- high frequency
- generation
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To lengthen the life of a filament, by generating eddy loss to the inside of the cylindrical filament, which location can be adjsuted, by outside high frequency coil action, and by ionizing gas by the generation of heat.
CONSTITUTION: A high frequency coil 34 is mounted around a cylindrical filament 30, and covered with a shield cylinder 36. A location adjusting mechanism 38 is installed to an upper portion of the shield cylinder 36 to adjust the upper and lower locations of the filament 30. When conducting the coil 34, eddy loss is formed at the inside of the filament 30, thermion is radiated by the generation of heat and inflow gas in an ionization chamber 14 is ionized. The filament 30 can be used for a long term because it is moved to the optimum location all the time even if it is wasted by ion bombardment at that time.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15680677A JPS5489196A (en) | 1977-12-26 | 1977-12-26 | Ion source device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15680677A JPS5489196A (en) | 1977-12-26 | 1977-12-26 | Ion source device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5489196A true JPS5489196A (en) | 1979-07-14 |
Family
ID=15635722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15680677A Pending JPS5489196A (en) | 1977-12-26 | 1977-12-26 | Ion source device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5489196A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08111198A (en) * | 1994-10-11 | 1996-04-30 | Ulvac Japan Ltd | Ion source |
-
1977
- 1977-12-26 JP JP15680677A patent/JPS5489196A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08111198A (en) * | 1994-10-11 | 1996-04-30 | Ulvac Japan Ltd | Ion source |
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