JPS53105699A - Cold cathod discharging type ion source device - Google Patents
Cold cathod discharging type ion source deviceInfo
- Publication number
- JPS53105699A JPS53105699A JP2070077A JP2070077A JPS53105699A JP S53105699 A JPS53105699 A JP S53105699A JP 2070077 A JP2070077 A JP 2070077A JP 2070077 A JP2070077 A JP 2070077A JP S53105699 A JPS53105699 A JP S53105699A
- Authority
- JP
- Japan
- Prior art keywords
- source device
- ion source
- type ion
- discharging type
- cold cathod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE: To maintain a plasma generation efficiency always at the best, by means of being subjected to enable a facing distance between a cold cathode and an anode to be adjustable by mounting a supporting rod of the cathode movablytoward the projecting direction on a base flange.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52020700A JPS5812973B2 (en) | 1977-02-25 | 1977-02-25 | Cold cathode discharge ion source device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52020700A JPS5812973B2 (en) | 1977-02-25 | 1977-02-25 | Cold cathode discharge ion source device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53105699A true JPS53105699A (en) | 1978-09-13 |
JPS5812973B2 JPS5812973B2 (en) | 1983-03-11 |
Family
ID=12034418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52020700A Expired JPS5812973B2 (en) | 1977-02-25 | 1977-02-25 | Cold cathode discharge ion source device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5812973B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5882447A (en) * | 1981-11-11 | 1983-05-18 | Ulvac Corp | Electrodes distance controller of lead-out electrode in ion source |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59159597A (en) * | 1983-03-03 | 1984-09-10 | 工業技術院長 | Impact resistance mounting method |
JPH0274099A (en) * | 1988-09-09 | 1990-03-14 | Murata Mfg Co Ltd | Electronic component built-in multilayer resin board |
-
1977
- 1977-02-25 JP JP52020700A patent/JPS5812973B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5882447A (en) * | 1981-11-11 | 1983-05-18 | Ulvac Corp | Electrodes distance controller of lead-out electrode in ion source |
JPS6316854B2 (en) * | 1981-11-11 | 1988-04-11 | Ulvac Corp |
Also Published As
Publication number | Publication date |
---|---|
JPS5812973B2 (en) | 1983-03-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB982669A (en) | Improvements in or relating to electron beam generators | |
JPS53102677A (en) | Ion beam radiating unit | |
JPS53105699A (en) | Cold cathod discharging type ion source device | |
JPS5423492A (en) | X-ray generator | |
JPS51115888A (en) | Enzyme analyzer | |
JPS52115161A (en) | Electron gun for electron beam exposing device | |
JPS5292473A (en) | Main lens electric field forming method of inline type 3 beam electron gun | |
JPS53145558A (en) | Peripheral unit for cathode ray tube | |
JPS53137660A (en) | Electron gun | |
JPS5335363A (en) | Field radiation type cathode | |
JPS5236487A (en) | X-ray generator | |
JPS52132774A (en) | Electrode construction for electron tubes | |
JPS5316572A (en) | Magnetron | |
JPS5329612A (en) | Pick up tube | |
JPS5313869A (en) | Cathode ray tube | |
JPS52119580A (en) | Supporting structure of electrodes for electric dust collector | |
JPS53397A (en) | Metalic ion source | |
JPS5370756A (en) | Electronic gun for microwave tube | |
JPS53128263A (en) | Electronic gun | |
JPS5230150A (en) | Manufacturing system of electron radiation cathode rod | |
JPS5359199A (en) | Electron beam radiating apparatus | |
JPS5418679A (en) | Electron impact type ion source device | |
JPS526070A (en) | Electric field radiating type cold cathode | |
JPS53117966A (en) | Semiconductor device | |
JPS5359357A (en) | Magnetron unit |