JPS53105699A - Cold cathod discharging type ion source device - Google Patents

Cold cathod discharging type ion source device

Info

Publication number
JPS53105699A
JPS53105699A JP2070077A JP2070077A JPS53105699A JP S53105699 A JPS53105699 A JP S53105699A JP 2070077 A JP2070077 A JP 2070077A JP 2070077 A JP2070077 A JP 2070077A JP S53105699 A JPS53105699 A JP S53105699A
Authority
JP
Japan
Prior art keywords
source device
ion source
type ion
discharging type
cold cathod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2070077A
Other languages
Japanese (ja)
Other versions
JPS5812973B2 (en
Inventor
Hiroichi Sato
Kazuo Horie
Yoichi Akasaka
Katsuhiro Tsukamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP52020700A priority Critical patent/JPS5812973B2/en
Publication of JPS53105699A publication Critical patent/JPS53105699A/en
Publication of JPS5812973B2 publication Critical patent/JPS5812973B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To maintain a plasma generation efficiency always at the best, by means of being subjected to enable a facing distance between a cold cathode and an anode to be adjustable by mounting a supporting rod of the cathode movablytoward the projecting direction on a base flange.
COPYRIGHT: (C)1978,JPO&Japio
JP52020700A 1977-02-25 1977-02-25 Cold cathode discharge ion source device Expired JPS5812973B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52020700A JPS5812973B2 (en) 1977-02-25 1977-02-25 Cold cathode discharge ion source device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52020700A JPS5812973B2 (en) 1977-02-25 1977-02-25 Cold cathode discharge ion source device

Publications (2)

Publication Number Publication Date
JPS53105699A true JPS53105699A (en) 1978-09-13
JPS5812973B2 JPS5812973B2 (en) 1983-03-11

Family

ID=12034418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52020700A Expired JPS5812973B2 (en) 1977-02-25 1977-02-25 Cold cathode discharge ion source device

Country Status (1)

Country Link
JP (1) JPS5812973B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5882447A (en) * 1981-11-11 1983-05-18 Ulvac Corp Electrodes distance controller of lead-out electrode in ion source

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59159597A (en) * 1983-03-03 1984-09-10 工業技術院長 Impact resistance mounting method
JPH0274099A (en) * 1988-09-09 1990-03-14 Murata Mfg Co Ltd Electronic component built-in multilayer resin board

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5882447A (en) * 1981-11-11 1983-05-18 Ulvac Corp Electrodes distance controller of lead-out electrode in ion source
JPS6316854B2 (en) * 1981-11-11 1988-04-11 Ulvac Corp

Also Published As

Publication number Publication date
JPS5812973B2 (en) 1983-03-11

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