JPS6316854B2 - - Google Patents
Info
- Publication number
- JPS6316854B2 JPS6316854B2 JP56179619A JP17961981A JPS6316854B2 JP S6316854 B2 JPS6316854 B2 JP S6316854B2 JP 56179619 A JP56179619 A JP 56179619A JP 17961981 A JP17961981 A JP 17961981A JP S6316854 B2 JPS6316854 B2 JP S6316854B2
- Authority
- JP
- Japan
- Prior art keywords
- extraction electrode
- shaft
- sliding member
- ion source
- drive motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000605 extraction Methods 0.000 claims description 36
- 150000002500 ions Chemical class 0.000 claims description 18
- 230000007246 mechanism Effects 0.000 claims description 9
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
Description
【発明の詳細な説明】
この発明は、イオン源、特に熱陰極アーク放電
型イオン源における引出電極の位置および姿勢調
整装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ion source, particularly a device for adjusting the position and attitude of an extraction electrode in a hot cathode arc discharge type ion source.
従来型のこの種のイオン源においては、イオン
放出面言い換えればイオン生成室の出口すなわち
アークチヤンバと引出電極との距離は固定されて
いる。このため引出電圧を可変としたときに、高
電圧側でのイオンビームの引出時に放電が多くな
り、装置としての使用が不可能となる欠点があ
る。 In this kind of conventional ion source, the distance between the ion emitting surface, in other words, the exit of the ion generation chamber, that is, the arc chamber, and the extraction electrode is fixed. For this reason, when the extraction voltage is made variable, there is a drawback that a large amount of discharge occurs during extraction of the ion beam on the high voltage side, making it impossible to use the device as a device.
一般に引出される電流の値は、Langmuir―
Childの法則を適用して次式で表わされる。 Typically the value of the current drawn is Langmuir−
Applying Child's law, it is expressed by the following formula.
Ｉ＝ＫV3/2／d2
上式で、Ｋはイオンの質量および電荷並びに誘
電率によつて決まる定数、Ｖは引出電圧、ｄはイ
オン放出面から引出電極までの距離である。 I=KV 3/2 /d 2 In the above formula, K is a constant determined by the mass and charge of the ion and the dielectric constant, V is the extraction voltage, and d is the distance from the ion emission surface to the extraction electrode.
上式からわかるように電極間距離ｄを小さくす
ると、引出される電流Ｉは増加するが、ｄを小さ
くするとイオン流が引出電極に衝突して生じる電
子、突起及びよごれ等が原因となつて、主として
イオン生成室と引出電極との間で火花放電、連続
放電が開始し、安定なビーム電流が得られなくな
る。これに対する対策としてイオン放出面と引出
電極との間の距離ｄを大きくすれば放電が減少す
ることが認められる。 As can be seen from the above equation, when the distance d between the electrodes is decreased, the extracted current I increases, but when d is decreased, the ion flow collides with the extraction electrode, causing electrons, protrusions, dirt, etc. Spark discharge and continuous discharge start mainly between the ion generation chamber and the extraction electrode, making it impossible to obtain a stable beam current. As a countermeasure against this, it is recognized that the discharge is reduced by increasing the distance d between the ion emitting surface and the extraction electrode.
そこで、この発明は引出電極を中心軸線方向に
可動支持して電極間距離を調整できるようにする
と共に、引出電極の中心軸線に対する位置および
傾きを調整できるようにし、それにより従来構造
のもつ欠点を解消することを目的とする。 Therefore, the present invention makes it possible to adjust the distance between the electrodes by movably supporting the extraction electrode in the direction of the central axis, and also makes it possible to adjust the position and inclination of the extraction electrode with respect to the central axis, thereby solving the drawbacks of the conventional structure. The purpose is to eliminate the problem.
この目的を達成するために、この発明による装
置は、イオン源およびイオン源において生成され
たイオンを引出す引出電極を収容し、側部に開口
部を備えたハウジングと、引出電極およびアーク
チヤンバを通る中心軸線方向に沿つて摺動可能に
上記開口部に密封装着され、上記引出電極の軸を
摺動かつ回動自在に密封支持した摺動部材と、上
記摺動部材を上記中心軸線方向に沿つて駆動する
駆動モータと、上記摺動部材に取り付けられ、上
記引出電極の軸をその軸線方向に動かす位置調整
機構と、上記摺動部材に取り付けられ、上記引出
電極の軸を回動させて上記引出電極の傾きを調整
する傾き調整機構とから成ることを特徴としてい
る。 To achieve this objective, the device according to the invention comprises a housing containing an ion source and an extraction electrode for extracting the ions produced in the ion source, with an opening on the side and a center through which the extraction electrode and the arc chamber pass. a sliding member that is slidably and sealably attached to the opening portion along the axial direction and that sealably supports the shaft of the extraction electrode in a slidable and rotatable manner; a drive motor to drive; a position adjustment mechanism attached to the sliding member to move the shaft of the extraction electrode in its axial direction; and a position adjustment mechanism attached to the sliding member to rotate the axis of the extraction electrode to extract the extraction It is characterized by comprising a tilt adjustment mechanism that adjusts the tilt of the electrode.
以下この発明を添附図面を参照して一実施例に
ついて説明する。 Hereinafter, one embodiment of the present invention will be described with reference to the accompanying drawings.
第１，２，３図にはこの発明の装置の一実施例
を示し、１はイオン源のハウジングで、その内部
にアークチヤンバ２および引出電極３が示されて
いる。ハウジング１の側部の開口部４には取付案
内板５が固着されており、この取付案内板５は引
出電極３の軸６を通す穴７および上下二つの案内
フランジ８，９を備えている。１０は摺動板で、
この摺動板１０は取付案内板５の外側に設けた二
つの案内溝１１，１２に嵌合する複数個の滑動ロ
ーラ１３，１４を備えており、そしてＯリング１
５によつて取付案内板５に対して密封保持されて
いる。１６は摺動板１０に取付けられた軸受で、
この軸受１６は引出電極３の軸６を摺動かつ回動
自在に支持し、そしてこの軸受１６と軸６とはＯ
リング１７によつて密封状態に保持されている。
１８は内側にねじを切つた回転スリーブで、押え
部材１９によつて軸受１６に対して回転自在に保
持されている。この回転スリーブ１８は軸６に設
けた送りねじ２０と係合し、またその外周囲には
スプロケツト２１を備えている。 1, 2, and 3 show an embodiment of the apparatus of the present invention. Reference numeral 1 indicates a housing of an ion source, and an arc chamber 2 and an extraction electrode 3 are shown inside the housing. A mounting guide plate 5 is fixed to the side opening 4 of the housing 1, and the mounting guide plate 5 is provided with a hole 7 through which the shaft 6 of the extraction electrode 3 passes, and two upper and lower guide flanges 8, 9. . 10 is a sliding plate,
This sliding plate 10 includes a plurality of sliding rollers 13 and 14 that fit into two guide grooves 11 and 12 provided on the outside of the mounting guide plate 5, and an O-ring 1.
5, it is held sealed against the mounting guide plate 5. 16 is a bearing attached to the sliding plate 10;
This bearing 16 slidably and rotatably supports the shaft 6 of the extraction electrode 3, and this bearing 16 and the shaft 6 are
It is held in a sealed state by a ring 17.
Reference numeral 18 denotes a rotating sleeve threaded on the inside, which is held rotatably relative to the bearing 16 by a pressing member 19. The rotating sleeve 18 engages with a feed screw 20 provided on the shaft 6, and is provided with a sprocket 21 around its outer periphery.
２２は摺動板１０の駆動モータであり、この駆
動モータ２２の出力軸２３は摺動板１０に取付け
たねじ機構２４とねじ係合し、それにより出力軸
２３の回転に応じて摺動板１０は装置の中心軸線
方向に沿つて前後に駆動される。従つて引出電極
３はアークチヤンバ２に対して前後に動かされ得
る。 Reference numeral 22 denotes a drive motor for the sliding plate 10, and the output shaft 23 of this drive motor 22 is threadedly engaged with a screw mechanism 24 attached to the sliding plate 10, so that the sliding plate is rotated according to the rotation of the output shaft 23. 10 is driven back and forth along the central axis of the device. The extraction electrode 3 can therefore be moved back and forth relative to the arc chamber 2.
また第２，３図に示すように摺動板１０には引
出電極３をその中心軸線に対する位置および傾き
を必要に応じて調整する位置調整機構を成す位置
調整用駆動モータ２６および傾き調整機構を成す
傾き調整用駆動モータ２７の取り付けられた支持
板２５が固着されている。位置調整用駆動モータ
２６の出力軸にはスプロケツト２８が装着されて
おり、チエーン２９を介して引出電極３の軸６に
装着されたスプロケツト２１を駆動する。これに
より回転スリーブ１８のねじと軸６に設けた送り
ねじ２０との係合により軸６はその軸線方向に前
後に動かされる。また傾き調整用駆動モータ２７
の出力軸はアーム３０，３１，３２を介して軸６
に連結され、この場合図示してないがアーム３１
は軸６に対してその軸線方向には摺動可能なよう
に例えばすべりキーまたはスプラインを介してア
ーム３２に結合されている。従つて傾き調整用駆
動モータ２７の作動により軸６は回動され得る。
この場合アーム３２の作動とチエーン２９すなわ
ちスプロケツト２１の作動とが互いに干渉しない
ように構成されているので、軸６の軸線方向の移
動と回動とは相互に影響されずに行なわれる。上
述の三つの駆動モータ２２，２６，２７はその機
能からして可逆モータであるのが好ましいが、必
要ならば切換機構を設けて逆転できるようにする
こともできる。 Further, as shown in FIGS. 2 and 3, the sliding plate 10 is equipped with a position adjustment drive motor 26 and an inclination adjustment mechanism, which constitute a position adjustment mechanism for adjusting the position and inclination of the extraction electrode 3 with respect to its central axis as necessary. A support plate 25 to which a drive motor 27 for adjusting the inclination is attached is fixed. A sprocket 28 is attached to the output shaft of the position adjustment drive motor 26, and drives the sprocket 21 attached to the shaft 6 of the extraction electrode 3 via a chain 29. As a result, the shaft 6 is moved back and forth in its axial direction by engagement between the screw of the rotating sleeve 18 and the feed screw 20 provided on the shaft 6. In addition, the drive motor 27 for tilt adjustment
The output shaft of is connected to shaft 6 via arms 30, 31, 32.
In this case, although not shown, the arm 31
is connected to the arm 32 so as to be slidable in its axial direction relative to the shaft 6, for example via a sliding key or a spline. Therefore, the shaft 6 can be rotated by operating the tilt adjustment drive motor 27.
In this case, since the operation of the arm 32 and the operation of the chain 29, ie, the sprocket 21, are constructed so as not to interfere with each other, the axial movement and rotation of the shaft 6 are performed without being influenced by each other. The three drive motors 22, 26, 27 described above are preferably reversible motors in view of their functions, but if necessary, a switching mechanism may be provided to enable reversible motors.
以上のように構成することによつて、引出電極
３はアークチヤンバ２に対する電極間距離を駆動
モータ２２による摺動板１０の駆動で所望のよう
に変えることができると共に、引出電極３のアラ
イメントも位置調整用駆動モータ２６および傾き
調整用駆動モータ２７によつて容易にかつ正確に
調整することができる。 By configuring as described above, the distance between the extraction electrodes 3 and the arc chamber 2 can be changed as desired by driving the sliding plate 10 by the drive motor 22, and the alignment of the extraction electrodes 3 can also be adjusted to the desired position. Adjustment can be easily and accurately performed using the adjustment drive motor 26 and the tilt adjustment drive motor 27.
以上説明してきたように、この発明によれば前
後に摺動可能な摺動板１０に引出電極３を取付け
たことによつて、引出電圧を上昇させるとき、電
極間距離も増加させることができるので、有害な
放電を押えることができると共に、引出電圧を可
変としたとき一定のビーム電流を得ることができ
る。 As explained above, according to the present invention, by attaching the extraction electrode 3 to the sliding plate 10 that can be slid back and forth, when increasing the extraction voltage, the distance between the electrodes can also be increased. Therefore, harmful discharge can be suppressed and a constant beam current can be obtained when the extraction voltage is made variable.
第１図はこの発明による装置の一実施例を示す
縦断面図、第２図は第１図の装置の部分断面正面
図、第３図はその側面図である。
図中、２：アークチヤンバ、３：引出電極、
６：軸、１０：摺動部材（摺動板）、２２：駆動
モータ、２６：位置調整用駆動モータ、２７：傾
き調整用駆動モータ。
FIG. 1 is a longitudinal cross-sectional view showing one embodiment of the apparatus according to the invention, FIG. 2 is a partially sectional front view of the apparatus of FIG. 1, and FIG. 3 is a side view thereof. In the figure, 2: arc chamber, 3: extraction electrode,
6: shaft, 10: sliding member (sliding plate), 22: drive motor, 26: position adjustment drive motor, 27: tilt adjustment drive motor.
Claims (1)
イオンを引出す引出電極３を収容し、側部に開口
部４を備えたハウジング１と、引出電極３および
アークチヤンバ２を通る中心軸線方向に沿つて摺
動可能に上記開口部４に密封装着され、上記引出
電極３の軸６を摺動かつ回動自在に密封支持した
摺動部材１０と、上記摺動部材１０を上記中心軸
線方向に沿つて駆動する駆動モータ２２と、上記
摺動部材１０に取り付けられ、上記引出電極３の
軸６をその軸線方向に動かす位置調整機構１８，
１９，２０，２８，２９と、上記摺動部材１０に
取り付けられ、上記引出電極３の軸６を回動させ
て上記引出電極３の傾きを調整する傾き調整機構
２７，３０，３１，３２とを有することを特徴と
するイオン源における引出電極の位置および姿勢
調整装置。1 A housing 1 that accommodates an ion source and an extraction electrode 3 for extracting ions generated in the ion source and has an opening 4 on the side, and is slidable along the central axis direction passing through the extraction electrode 3 and the arc chamber 2. a sliding member 10 that is sealed in the opening 4 and that slidably and rotatably supports the shaft 6 of the extraction electrode 3; and a drive that drives the sliding member 10 along the central axis direction. a motor 22; a position adjustment mechanism 18 that is attached to the sliding member 10 and moves the shaft 6 of the extraction electrode 3 in its axial direction;
19, 20, 28, 29, and tilt adjustment mechanisms 27, 30, 31, 32 that are attached to the sliding member 10 and adjust the inclination of the extraction electrode 3 by rotating the shaft 6 of the extraction electrode 3. 1. A position and attitude adjustment device for an extraction electrode in an ion source, characterized in that the device comprises:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17961981A JPS5882447A (en) | 1981-11-11 | 1981-11-11 | Electrodes distance controller of lead-out electrode in ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17961981A JPS5882447A (en) | 1981-11-11 | 1981-11-11 | Electrodes distance controller of lead-out electrode in ion source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5882447A JPS5882447A (en) | 1983-05-18 |
| JPS6316854B2 true JPS6316854B2 (en) | 1988-04-11 |
Family
ID=16068915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17961981A Granted JPS5882447A (en) | 1981-11-11 | 1981-11-11 | Electrodes distance controller of lead-out electrode in ion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5882447A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0635363Y2 (en) * | 1988-08-22 | 1994-09-14 | 日新電機株式会社 | Ion source |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884299A (en) * | 1972-02-16 | 1973-11-09 | ||
| JPS5164373A (en) * | 1974-07-31 | 1976-06-03 | Atomic Energy Authority Uk | |
| JPS53105699A (en) * | 1977-02-25 | 1978-09-13 | Mitsubishi Electric Corp | Cold cathod discharging type ion source device |
| JPS54132898A (en) * | 1977-11-28 | 1979-10-16 | Anvar | Movable drawing electric pole for ion source |
-
1981
- 1981-11-11 JP JP17961981A patent/JPS5882447A/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884299A (en) * | 1972-02-16 | 1973-11-09 | ||
| JPS5164373A (en) * | 1974-07-31 | 1976-06-03 | Atomic Energy Authority Uk | |
| JPS53105699A (en) * | 1977-02-25 | 1978-09-13 | Mitsubishi Electric Corp | Cold cathod discharging type ion source device |
| JPS54132898A (en) * | 1977-11-28 | 1979-10-16 | Anvar | Movable drawing electric pole for ion source |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5882447A (en) | 1983-05-18 |
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