JPS53128263A - Electronic gun - Google Patents

Electronic gun

Info

Publication number
JPS53128263A
JPS53128263A JP4266077A JP4266077A JPS53128263A JP S53128263 A JPS53128263 A JP S53128263A JP 4266077 A JP4266077 A JP 4266077A JP 4266077 A JP4266077 A JP 4266077A JP S53128263 A JPS53128263 A JP S53128263A
Authority
JP
Japan
Prior art keywords
electronic gun
omit
anode
cathode
gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4266077A
Other languages
Japanese (ja)
Inventor
Hideo Todokoro
Yoshio Hokotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4266077A priority Critical patent/JPS53128263A/en
Publication of JPS53128263A publication Critical patent/JPS53128263A/en
Pending legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To omit the mechanical matching with the optical axis by installing multi-divided lead-out anodes to the intermediate position between the cathode and the anode.
COPYRIGHT: (C)1978,JPO&Japio
JP4266077A 1977-04-15 1977-04-15 Electronic gun Pending JPS53128263A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4266077A JPS53128263A (en) 1977-04-15 1977-04-15 Electronic gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4266077A JPS53128263A (en) 1977-04-15 1977-04-15 Electronic gun

Publications (1)

Publication Number Publication Date
JPS53128263A true JPS53128263A (en) 1978-11-09

Family

ID=12642159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4266077A Pending JPS53128263A (en) 1977-04-15 1977-04-15 Electronic gun

Country Status (1)

Country Link
JP (1) JPS53128263A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944754A (en) * 1982-09-06 1984-03-13 Jeol Ltd Charged particle source
JPH01289057A (en) * 1988-05-16 1989-11-21 Res Dev Corp Of Japan Charged particle beam generation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944754A (en) * 1982-09-06 1984-03-13 Jeol Ltd Charged particle source
JPH01289057A (en) * 1988-05-16 1989-11-21 Res Dev Corp Of Japan Charged particle beam generation device

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