JPS53128263A - Electronic gun - Google Patents
Electronic gunInfo
- Publication number
- JPS53128263A JPS53128263A JP4266077A JP4266077A JPS53128263A JP S53128263 A JPS53128263 A JP S53128263A JP 4266077 A JP4266077 A JP 4266077A JP 4266077 A JP4266077 A JP 4266077A JP S53128263 A JPS53128263 A JP S53128263A
- Authority
- JP
- Japan
- Prior art keywords
- electronic gun
- omit
- anode
- cathode
- gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE: To omit the mechanical matching with the optical axis by installing multi-divided lead-out anodes to the intermediate position between the cathode and the anode.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4266077A JPS53128263A (en) | 1977-04-15 | 1977-04-15 | Electronic gun |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4266077A JPS53128263A (en) | 1977-04-15 | 1977-04-15 | Electronic gun |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53128263A true JPS53128263A (en) | 1978-11-09 |
Family
ID=12642159
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4266077A Pending JPS53128263A (en) | 1977-04-15 | 1977-04-15 | Electronic gun |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53128263A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5944754A (en) * | 1982-09-06 | 1984-03-13 | Jeol Ltd | Charged particle source |
JPH01289057A (en) * | 1988-05-16 | 1989-11-21 | Res Dev Corp Of Japan | Charged particle beam generation device |
-
1977
- 1977-04-15 JP JP4266077A patent/JPS53128263A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5944754A (en) * | 1982-09-06 | 1984-03-13 | Jeol Ltd | Charged particle source |
JPH01289057A (en) * | 1988-05-16 | 1989-11-21 | Res Dev Corp Of Japan | Charged particle beam generation device |
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