JPS53397A - Metalic ion source - Google Patents

Metalic ion source

Info

Publication number
JPS53397A
JPS53397A JP7513176A JP7513176A JPS53397A JP S53397 A JPS53397 A JP S53397A JP 7513176 A JP7513176 A JP 7513176A JP 7513176 A JP7513176 A JP 7513176A JP S53397 A JPS53397 A JP S53397A
Authority
JP
Japan
Prior art keywords
metalic
ion source
anode
cathode
constituting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7513176A
Other languages
Japanese (ja)
Other versions
JPS5852295B2 (en
Inventor
Katsuhiro Tsukamoto
Kazuo Horie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7513176A priority Critical patent/JPS5852295B2/en
Publication of JPS53397A publication Critical patent/JPS53397A/en
Publication of JPS5852295B2 publication Critical patent/JPS5852295B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To generate metallic vapor simply, by means of constituting one of an anode or a cathode by metallic ion discharging metal thereof.
COPYRIGHT: (C)1978,JPO&Japio
JP7513176A 1976-06-24 1976-06-24 metal ion source Expired JPS5852295B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7513176A JPS5852295B2 (en) 1976-06-24 1976-06-24 metal ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7513176A JPS5852295B2 (en) 1976-06-24 1976-06-24 metal ion source

Publications (2)

Publication Number Publication Date
JPS53397A true JPS53397A (en) 1978-01-05
JPS5852295B2 JPS5852295B2 (en) 1983-11-21

Family

ID=13567323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7513176A Expired JPS5852295B2 (en) 1976-06-24 1976-06-24 metal ion source

Country Status (1)

Country Link
JP (1) JPS5852295B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005146363A (en) * 2003-11-17 2005-06-09 Toshio Goto Apparatus for supplying metal ions and method therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005146363A (en) * 2003-11-17 2005-06-09 Toshio Goto Apparatus for supplying metal ions and method therefor
JP4578798B2 (en) * 2003-11-17 2010-11-10 俊夫 後藤 Metal ion supply device

Also Published As

Publication number Publication date
JPS5852295B2 (en) 1983-11-21

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