ATE140560T1 - Ionenpumpe und vakuumpumpanlage dafür - Google Patents

Ionenpumpe und vakuumpumpanlage dafür

Info

Publication number
ATE140560T1
ATE140560T1 AT91113057T AT91113057T ATE140560T1 AT E140560 T1 ATE140560 T1 AT E140560T1 AT 91113057 T AT91113057 T AT 91113057T AT 91113057 T AT91113057 T AT 91113057T AT E140560 T1 ATE140560 T1 AT E140560T1
Authority
AT
Austria
Prior art keywords
outer electrode
accelerating grid
emission source
thermionic emission
vessel
Prior art date
Application number
AT91113057T
Other languages
English (en)
Inventor
Kazutoshi Nagai
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of ATE140560T1 publication Critical patent/ATE140560T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
AT91113057T 1990-08-03 1991-08-02 Ionenpumpe und vakuumpumpanlage dafür ATE140560T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2205224A JPH0675386B2 (ja) 1990-08-03 1990-08-03 高真空装置及び該高真空装置を用いた真空ポンプ装置

Publications (1)

Publication Number Publication Date
ATE140560T1 true ATE140560T1 (de) 1996-08-15

Family

ID=16503470

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91113057T ATE140560T1 (de) 1990-08-03 1991-08-02 Ionenpumpe und vakuumpumpanlage dafür

Country Status (4)

Country Link
EP (1) EP0469631B1 (de)
JP (1) JPH0675386B2 (de)
AT (1) ATE140560T1 (de)
DE (1) DE69120874T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5326227A (en) * 1990-08-03 1994-07-05 Ebara Corporation Exhaust apparatus with vacuum pump
US5240381A (en) * 1990-08-03 1993-08-31 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
JPH05174780A (ja) * 1991-02-12 1993-07-13 Ebara Corp 高真空装置及び該高真空装置を用いた真空ポンプ装置
WO2014182333A1 (en) * 2013-05-09 2014-11-13 Fomani Arash Akhavan Vacuum pumps for producing adsorbate-free surfaces
CN109707612B (zh) * 2018-11-28 2020-01-17 中国科学院近代物理研究所 一种离子泵性能测试和优化装置及其测试和优化方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE596017C (de) * 1932-06-24 1934-04-25 Linde Eismasch Ag Verfahren zur Erzielung einer Pumpwirkung in Gasen
US2578009A (en) * 1947-12-23 1951-12-11 Rca Corp Electronic high vacuum apparatus
GB684710A (en) * 1950-07-19 1952-12-24 Ass Elect Ind Improvements relating to high vacuum pumps

Also Published As

Publication number Publication date
EP0469631B1 (de) 1996-07-17
EP0469631A3 (en) 1992-07-01
DE69120874T2 (de) 1997-02-27
JPH0492353A (ja) 1992-03-25
JPH0675386B2 (ja) 1994-09-21
EP0469631A2 (de) 1992-02-05
DE69120874D1 (de) 1996-08-22

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties