EP0469631A3 - Ion pump and vacuum pumping unit using the same - Google Patents

Ion pump and vacuum pumping unit using the same Download PDF

Info

Publication number
EP0469631A3
EP0469631A3 EP19910113057 EP91113057A EP0469631A3 EP 0469631 A3 EP0469631 A3 EP 0469631A3 EP 19910113057 EP19910113057 EP 19910113057 EP 91113057 A EP91113057 A EP 91113057A EP 0469631 A3 EP0469631 A3 EP 0469631A3
Authority
EP
European Patent Office
Prior art keywords
outer electrode
accelerating grid
emission source
thermionic emission
pumping unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19910113057
Other versions
EP0469631A2 (en
EP0469631B1 (en
Inventor
Kazutoshi Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP0469631A2 publication Critical patent/EP0469631A2/en
Publication of EP0469631A3 publication Critical patent/EP0469631A3/en
Application granted granted Critical
Publication of EP0469631B1 publication Critical patent/EP0469631B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

An exhaust apparatus (50) and a vacuum pumping unit (100) using the exhaust apparatus are disclosed. The exhaust apparatus (50) comprises a thermionic emission source (21), an electron accelerating grid (22) surrounding the thermionic emission source, an outer electrode (23) surrounding the electron accelerating grid, an ion accelerating grid (24) intersecting an axis of the outer electrode and installed apart from the outer electrode, a vessel (25) containing the thermionic emission source, the electron accelerating grid, the outer electrode, and the ion accelerating grid therein, a magnet (26) disposed outside of the vessel and generating a magnetic field almost parallel to the axis of the outer electrode, a power supply (29) for heating the thermionic emission source, a first DC power supply for applying a voltage between the electron accelerating grid, the outer electrode (23) and the thermionic emission source (21), a second DC power supply for applying a voltage between the outer electrode and the ion accelerating grid so as to get the outer electrode positive. The vacuum pumping unit (100) is constituted by interposing the exhaust (50) apparatus between a vacuum vessel to be evacuated and an auxiliary vacuum pump. By this, gas molecules in the vacuum vessel (25) are ionized by electron bombardment and accelerated toward the auxiliary vacuum pump (31) to be exhausted. <IMAGE>
EP91113057A 1990-08-03 1991-08-02 Ion pump and vacuum pumping unit using the same Expired - Lifetime EP0469631B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2205224A JPH0675386B2 (en) 1990-08-03 1990-08-03 High vacuum device and vacuum pump device using the high vacuum device
JP205224/90 1990-08-03

Publications (3)

Publication Number Publication Date
EP0469631A2 EP0469631A2 (en) 1992-02-05
EP0469631A3 true EP0469631A3 (en) 1992-07-01
EP0469631B1 EP0469631B1 (en) 1996-07-17

Family

ID=16503470

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91113057A Expired - Lifetime EP0469631B1 (en) 1990-08-03 1991-08-02 Ion pump and vacuum pumping unit using the same

Country Status (4)

Country Link
EP (1) EP0469631B1 (en)
JP (1) JPH0675386B2 (en)
AT (1) ATE140560T1 (en)
DE (1) DE69120874T2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5240381A (en) * 1990-08-03 1993-08-31 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
US5326227A (en) * 1990-08-03 1994-07-05 Ebara Corporation Exhaust apparatus with vacuum pump
JPH05174780A (en) * 1991-02-12 1993-07-13 Ebara Corp High vacuum device and vacuum pump device using the same
WO2014182333A1 (en) * 2013-05-09 2014-11-13 Fomani Arash Akhavan Vacuum pumps for producing adsorbate-free surfaces
CN109707612B (en) * 2018-11-28 2020-01-17 中国科学院近代物理研究所 Ion pump performance testing and optimizing device and testing and optimizing method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE596017C (en) * 1932-06-24 1934-04-25 Linde Eismasch Ag Process for achieving a pumping effect in gases
US2578009A (en) * 1947-12-23 1951-12-11 Rca Corp Electronic high vacuum apparatus
GB684710A (en) * 1950-07-19 1952-12-24 Ass Elect Ind Improvements relating to high vacuum pumps

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE596017C (en) * 1932-06-24 1934-04-25 Linde Eismasch Ag Process for achieving a pumping effect in gases
US2578009A (en) * 1947-12-23 1951-12-11 Rca Corp Electronic high vacuum apparatus
GB684710A (en) * 1950-07-19 1952-12-24 Ass Elect Ind Improvements relating to high vacuum pumps

Also Published As

Publication number Publication date
JPH0492353A (en) 1992-03-25
ATE140560T1 (en) 1996-08-15
DE69120874T2 (en) 1997-02-27
EP0469631A2 (en) 1992-02-05
EP0469631B1 (en) 1996-07-17
JPH0675386B2 (en) 1994-09-21
DE69120874D1 (en) 1996-08-22

Similar Documents

Publication Publication Date Title
JPH0568545B2 (en)
DE69222211T2 (en) Electron cyclotron resonance ion engine
JPS62229641A (en) Electron cyclotron resonance ion source
US4851668A (en) Ion source application device
EP0469631A3 (en) Ion pump and vacuum pumping unit using the same
JPH04277500A (en) Source of high speed atomic ray
JP3454384B2 (en) Ion beam generator and method
JPS57191950A (en) Charged-particle source
JPH0746586B2 (en) Ion source
Bashkeev et al. Continuously operated negative ion surface plasma source
US5480286A (en) Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
GB1398167A (en) High pressure ion sources
JP2855160B2 (en) Ion source
JP3154018B2 (en) Ion source
JPH06140196A (en) Pulse drawing type electron cyclotron resonance ion source
JP3213135B2 (en) Fast atom beam source
JP3379227B2 (en) Ion source device
JPH01161699A (en) High-speed atomic beam source
JPH06139978A (en) Electron cyclotron resonance ion source of pulse driven type
JPH0378954A (en) Ion source
JP2569913Y2 (en) Ion implanter
JPH0837098A (en) Plasma generating device
RU2076384C1 (en) Plasma source of negative atomic ions
JPH06289198A (en) Fast atomic beam source
JPS59111230A (en) Ion generating apparatus

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH DE DK ES FR GB GR IT LI LU NL SE

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH DE DK ES FR GB GR IT LI LU NL SE

17P Request for examination filed

Effective date: 19921113

17Q First examination report despatched

Effective date: 19941221

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH DE DK ES FR GB GR IT LI LU NL SE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRE;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED.SCRIBED TIME-LIMIT

Effective date: 19960717

Ref country code: DK

Effective date: 19960717

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19960717

Ref country code: LI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19960717

Ref country code: CH

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19960717

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19960717

Ref country code: ES

Free format text: THE PATENT HAS BEEN ANNULLED BY A DECISION OF A NATIONAL AUTHORITY

Effective date: 19960717

Ref country code: BE

Effective date: 19960717

Ref country code: AT

Effective date: 19960717

REF Corresponds to:

Ref document number: 140560

Country of ref document: AT

Date of ref document: 19960815

Kind code of ref document: T

REF Corresponds to:

Ref document number: 69120874

Country of ref document: DE

Date of ref document: 19960822

ET Fr: translation filed
PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19960831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Effective date: 19961017

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20020717

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20020723

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20020828

Year of fee payment: 12

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20030802

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20040302

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20030802

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20040430

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST