DE69120874D1 - Ion pump and vacuum pump system therefor - Google Patents

Ion pump and vacuum pump system therefor

Info

Publication number
DE69120874D1
DE69120874D1 DE69120874T DE69120874T DE69120874D1 DE 69120874 D1 DE69120874 D1 DE 69120874D1 DE 69120874 T DE69120874 T DE 69120874T DE 69120874 T DE69120874 T DE 69120874T DE 69120874 D1 DE69120874 D1 DE 69120874D1
Authority
DE
Germany
Prior art keywords
outer electrode
accelerating grid
emission source
thermionic emission
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69120874T
Other languages
German (de)
Other versions
DE69120874T2 (en
Inventor
Kazutoshi Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69120874D1 publication Critical patent/DE69120874D1/en
Publication of DE69120874T2 publication Critical patent/DE69120874T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

An exhaust apparatus (50) and a vacuum pumping unit (100) using the exhaust apparatus are disclosed. The exhaust apparatus (50) comprises a thermionic emission source (21), an electron accelerating grid (22) surrounding the thermionic emission source, an outer electrode (23) surrounding the electron accelerating grid, an ion accelerating grid (24) intersecting an axis of the outer electrode and installed apart from the outer electrode, a vessel (25) containing the thermionic emission source, the electron accelerating grid, the outer electrode, and the ion accelerating grid therein, a magnet (26) disposed outside of the vessel and generating a magnetic field almost parallel to the axis of the outer electrode, a power supply (29) for heating the thermionic emission source, a first DC power supply for applying a voltage between the electron accelerating grid, the outer electrode (23) and the thermionic emission source (21), a second DC power supply for applying a voltage between the outer electrode and the ion accelerating grid so as to get the outer electrode positive. The vacuum pumping unit (100) is constituted by interposing the exhaust (50) apparatus between a vacuum vessel to be evacuated and an auxiliary vacuum pump. By this, gas molecules in the vacuum vessel (25) are ionized by electron bombardment and accelerated toward the auxiliary vacuum pump (31) to be exhausted. <IMAGE>
DE69120874T 1990-08-03 1991-08-02 Ion pump and vacuum pump system therefor Expired - Fee Related DE69120874T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2205224A JPH0675386B2 (en) 1990-08-03 1990-08-03 High vacuum device and vacuum pump device using the high vacuum device

Publications (2)

Publication Number Publication Date
DE69120874D1 true DE69120874D1 (en) 1996-08-22
DE69120874T2 DE69120874T2 (en) 1997-02-27

Family

ID=16503470

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69120874T Expired - Fee Related DE69120874T2 (en) 1990-08-03 1991-08-02 Ion pump and vacuum pump system therefor

Country Status (4)

Country Link
EP (1) EP0469631B1 (en)
JP (1) JPH0675386B2 (en)
AT (1) ATE140560T1 (en)
DE (1) DE69120874T2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5240381A (en) * 1990-08-03 1993-08-31 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
US5326227A (en) * 1990-08-03 1994-07-05 Ebara Corporation Exhaust apparatus with vacuum pump
JPH05174780A (en) * 1991-02-12 1993-07-13 Ebara Corp High vacuum device and vacuum pump device using the same
WO2014182333A1 (en) * 2013-05-09 2014-11-13 Fomani Arash Akhavan Vacuum pumps for producing adsorbate-free surfaces
CN109707612B (en) * 2018-11-28 2020-01-17 中国科学院近代物理研究所 Ion pump performance testing and optimizing device and testing and optimizing method thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE596017C (en) * 1932-06-24 1934-04-25 Linde Eismasch Ag Process for achieving a pumping effect in gases
US2578009A (en) * 1947-12-23 1951-12-11 Rca Corp Electronic high vacuum apparatus
GB684710A (en) * 1950-07-19 1952-12-24 Ass Elect Ind Improvements relating to high vacuum pumps

Also Published As

Publication number Publication date
DE69120874T2 (en) 1997-02-27
JPH0675386B2 (en) 1994-09-21
JPH0492353A (en) 1992-03-25
ATE140560T1 (en) 1996-08-15
EP0469631B1 (en) 1996-07-17
EP0469631A3 (en) 1992-07-01
EP0469631A2 (en) 1992-02-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee