GB684710A - Improvements relating to high vacuum pumps - Google Patents

Improvements relating to high vacuum pumps

Info

Publication number
GB684710A
GB684710A GB1805450A GB1805450A GB684710A GB 684710 A GB684710 A GB 684710A GB 1805450 A GB1805450 A GB 1805450A GB 1805450 A GB1805450 A GB 1805450A GB 684710 A GB684710 A GB 684710A
Authority
GB
United Kingdom
Prior art keywords
cathode
electrode
tube
ionising
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1805450A
Inventor
Michael Edward Haine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Priority to GB1805450A priority Critical patent/GB684710A/en
Publication of GB684710A publication Critical patent/GB684710A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes

Landscapes

  • Electron Tubes For Measurement (AREA)

Abstract

684,710. Producing high vacua. ASSOCIATED ELECTRICAL INDUSTRIES, Ltd. June 1, 1951 [July 19, 1950], No. 18054/50. Class 8 (i). A high vacuum pump comprises a tube 1 communicating with a space to be evacuated and containing an apertured anode 8, a cathode 9 and a grid-like electrode 10 which is preferably held at negative potential relative to the cathode; gas molecules diffusing into the tube from the space to be evacuated are ionised by a stream of electrons emitted from the cathode which is heated. and the positive ions thus produced are accelerated towards and through the electrode 10 and out of the tube preferably to a backing pump. A magnetic ion lens 7, or an electrostatic ion lens, is used to concentrate or focus the stream of positive ions. A transverse magnetic field may be applied to the ionising region thereby causing the electrons emitted by the cathode, which may comprise a single straight wire of tungsten, to follow a cycloidal path 9' and thus increase the ionising efficiency. In another embodiment the cathode is combined with the electrode 10. In a modification, Fig. 3, the tube contains a cylindrical anode 13, supplied with a potential of about 5.000 volts, disposed between apertured negative electrodes 14, 15. A coil 16 provides an axial magnetic field which accelerates the ions, produced by virtue of a stable gas discharge in the ionising region, in an outward direction. The ions passing upwardly through the electrode 14 are stopped by a baffle 19 whilst the remainder pass through the electrode 15 to the backing pump after being concentrated or focused by the magnetic coil 16 or by a separate magnetic coil.
GB1805450A 1950-07-19 1950-07-19 Improvements relating to high vacuum pumps Expired GB684710A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1805450A GB684710A (en) 1950-07-19 1950-07-19 Improvements relating to high vacuum pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1805450A GB684710A (en) 1950-07-19 1950-07-19 Improvements relating to high vacuum pumps

Publications (1)

Publication Number Publication Date
GB684710A true GB684710A (en) 1952-12-24

Family

ID=10105842

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1805450A Expired GB684710A (en) 1950-07-19 1950-07-19 Improvements relating to high vacuum pumps

Country Status (1)

Country Link
GB (1) GB684710A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2808980A (en) * 1953-09-23 1957-10-08 Westinghouse Electric Corp Electrical vacuum pump
DE971675C (en) * 1955-03-01 1959-03-12 Siemens Ag Arrangement to prevent the penetration of oil vapor into the recipient in high vacuum systems working with oil diffusion pumps
DE1089112B (en) * 1958-02-13 1960-09-15 Thomson Houston Comp Francaise Vacuum pump
US3070283A (en) * 1959-06-15 1962-12-25 Ultek Corp Vacuum pump
US3169693A (en) * 1961-12-29 1965-02-16 Geophysics Corp Of America Ion pump
US3174278A (en) * 1963-01-24 1965-03-23 Raymond L Barger Continuously operating induction plasma accelerator
US3279175A (en) * 1962-12-19 1966-10-18 Rca Corp Apparatus for generating and accelerating charged particles
EP0469631A2 (en) * 1990-08-03 1992-02-05 Ebara Corporation Ion pump and vacuum pumping unit using the same
EP0499239A2 (en) * 1991-02-12 1992-08-19 Ebara Corporation Ion pump and vacuum pumping unit using the same
US5240381A (en) * 1990-08-03 1993-08-31 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
US5480286A (en) * 1990-08-03 1996-01-02 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
US10455683B2 (en) 2016-05-31 2019-10-22 Agilent Technologies, Inc. Ion throughput pump and method

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2808980A (en) * 1953-09-23 1957-10-08 Westinghouse Electric Corp Electrical vacuum pump
DE971675C (en) * 1955-03-01 1959-03-12 Siemens Ag Arrangement to prevent the penetration of oil vapor into the recipient in high vacuum systems working with oil diffusion pumps
DE1089112B (en) * 1958-02-13 1960-09-15 Thomson Houston Comp Francaise Vacuum pump
US3070283A (en) * 1959-06-15 1962-12-25 Ultek Corp Vacuum pump
US3169693A (en) * 1961-12-29 1965-02-16 Geophysics Corp Of America Ion pump
US3279175A (en) * 1962-12-19 1966-10-18 Rca Corp Apparatus for generating and accelerating charged particles
US3174278A (en) * 1963-01-24 1965-03-23 Raymond L Barger Continuously operating induction plasma accelerator
EP0469631A2 (en) * 1990-08-03 1992-02-05 Ebara Corporation Ion pump and vacuum pumping unit using the same
EP0469631A3 (en) * 1990-08-03 1992-07-01 Ebara Corporation Ion pump and vacuum pumping unit using the same
US5240381A (en) * 1990-08-03 1993-08-31 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
US5480286A (en) * 1990-08-03 1996-01-02 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
US5727929A (en) * 1990-08-03 1998-03-17 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
EP0499239A2 (en) * 1991-02-12 1992-08-19 Ebara Corporation Ion pump and vacuum pumping unit using the same
EP0499239A3 (en) * 1991-02-12 1993-03-03 Ebara Corporation Ion pump and vacuum pumping unit using the same
US10455683B2 (en) 2016-05-31 2019-10-22 Agilent Technologies, Inc. Ion throughput pump and method

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