GB684710A - Improvements relating to high vacuum pumps - Google Patents
Improvements relating to high vacuum pumpsInfo
- Publication number
- GB684710A GB684710A GB1805450A GB1805450A GB684710A GB 684710 A GB684710 A GB 684710A GB 1805450 A GB1805450 A GB 1805450A GB 1805450 A GB1805450 A GB 1805450A GB 684710 A GB684710 A GB 684710A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cathode
- electrode
- tube
- ionising
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
684,710. Producing high vacua. ASSOCIATED ELECTRICAL INDUSTRIES, Ltd. June 1, 1951 [July 19, 1950], No. 18054/50. Class 8 (i). A high vacuum pump comprises a tube 1 communicating with a space to be evacuated and containing an apertured anode 8, a cathode 9 and a grid-like electrode 10 which is preferably held at negative potential relative to the cathode; gas molecules diffusing into the tube from the space to be evacuated are ionised by a stream of electrons emitted from the cathode which is heated. and the positive ions thus produced are accelerated towards and through the electrode 10 and out of the tube preferably to a backing pump. A magnetic ion lens 7, or an electrostatic ion lens, is used to concentrate or focus the stream of positive ions. A transverse magnetic field may be applied to the ionising region thereby causing the electrons emitted by the cathode, which may comprise a single straight wire of tungsten, to follow a cycloidal path 9' and thus increase the ionising efficiency. In another embodiment the cathode is combined with the electrode 10. In a modification, Fig. 3, the tube contains a cylindrical anode 13, supplied with a potential of about 5.000 volts, disposed between apertured negative electrodes 14, 15. A coil 16 provides an axial magnetic field which accelerates the ions, produced by virtue of a stable gas discharge in the ionising region, in an outward direction. The ions passing upwardly through the electrode 14 are stopped by a baffle 19 whilst the remainder pass through the electrode 15 to the backing pump after being concentrated or focused by the magnetic coil 16 or by a separate magnetic coil.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1805450A GB684710A (en) | 1950-07-19 | 1950-07-19 | Improvements relating to high vacuum pumps |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1805450A GB684710A (en) | 1950-07-19 | 1950-07-19 | Improvements relating to high vacuum pumps |
Publications (1)
Publication Number | Publication Date |
---|---|
GB684710A true GB684710A (en) | 1952-12-24 |
Family
ID=10105842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1805450A Expired GB684710A (en) | 1950-07-19 | 1950-07-19 | Improvements relating to high vacuum pumps |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB684710A (en) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2808980A (en) * | 1953-09-23 | 1957-10-08 | Westinghouse Electric Corp | Electrical vacuum pump |
DE971675C (en) * | 1955-03-01 | 1959-03-12 | Siemens Ag | Arrangement to prevent the penetration of oil vapor into the recipient in high vacuum systems working with oil diffusion pumps |
DE1089112B (en) * | 1958-02-13 | 1960-09-15 | Thomson Houston Comp Francaise | Vacuum pump |
US3070283A (en) * | 1959-06-15 | 1962-12-25 | Ultek Corp | Vacuum pump |
US3169693A (en) * | 1961-12-29 | 1965-02-16 | Geophysics Corp Of America | Ion pump |
US3174278A (en) * | 1963-01-24 | 1965-03-23 | Raymond L Barger | Continuously operating induction plasma accelerator |
US3279175A (en) * | 1962-12-19 | 1966-10-18 | Rca Corp | Apparatus for generating and accelerating charged particles |
EP0469631A2 (en) * | 1990-08-03 | 1992-02-05 | Ebara Corporation | Ion pump and vacuum pumping unit using the same |
EP0499239A2 (en) * | 1991-02-12 | 1992-08-19 | Ebara Corporation | Ion pump and vacuum pumping unit using the same |
US5240381A (en) * | 1990-08-03 | 1993-08-31 | Ebara Corporation | Exhaust apparatus and vacuum pumping unit including the exhaust apparatus |
US5480286A (en) * | 1990-08-03 | 1996-01-02 | Ebara Corporation | Exhaust apparatus and vacuum pumping unit including the exhaust apparatus |
US10455683B2 (en) | 2016-05-31 | 2019-10-22 | Agilent Technologies, Inc. | Ion throughput pump and method |
-
1950
- 1950-07-19 GB GB1805450A patent/GB684710A/en not_active Expired
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2808980A (en) * | 1953-09-23 | 1957-10-08 | Westinghouse Electric Corp | Electrical vacuum pump |
DE971675C (en) * | 1955-03-01 | 1959-03-12 | Siemens Ag | Arrangement to prevent the penetration of oil vapor into the recipient in high vacuum systems working with oil diffusion pumps |
DE1089112B (en) * | 1958-02-13 | 1960-09-15 | Thomson Houston Comp Francaise | Vacuum pump |
US3070283A (en) * | 1959-06-15 | 1962-12-25 | Ultek Corp | Vacuum pump |
US3169693A (en) * | 1961-12-29 | 1965-02-16 | Geophysics Corp Of America | Ion pump |
US3279175A (en) * | 1962-12-19 | 1966-10-18 | Rca Corp | Apparatus for generating and accelerating charged particles |
US3174278A (en) * | 1963-01-24 | 1965-03-23 | Raymond L Barger | Continuously operating induction plasma accelerator |
EP0469631A2 (en) * | 1990-08-03 | 1992-02-05 | Ebara Corporation | Ion pump and vacuum pumping unit using the same |
EP0469631A3 (en) * | 1990-08-03 | 1992-07-01 | Ebara Corporation | Ion pump and vacuum pumping unit using the same |
US5240381A (en) * | 1990-08-03 | 1993-08-31 | Ebara Corporation | Exhaust apparatus and vacuum pumping unit including the exhaust apparatus |
US5480286A (en) * | 1990-08-03 | 1996-01-02 | Ebara Corporation | Exhaust apparatus and vacuum pumping unit including the exhaust apparatus |
US5727929A (en) * | 1990-08-03 | 1998-03-17 | Ebara Corporation | Exhaust apparatus and vacuum pumping unit including the exhaust apparatus |
EP0499239A2 (en) * | 1991-02-12 | 1992-08-19 | Ebara Corporation | Ion pump and vacuum pumping unit using the same |
EP0499239A3 (en) * | 1991-02-12 | 1993-03-03 | Ebara Corporation | Ion pump and vacuum pumping unit using the same |
US10455683B2 (en) | 2016-05-31 | 2019-10-22 | Agilent Technologies, Inc. | Ion throughput pump and method |
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