EP0499239A3 - Ion pump and vacuum pumping unit using the same - Google Patents

Ion pump and vacuum pumping unit using the same Download PDF

Info

Publication number
EP0499239A3
EP0499239A3 EP19920102346 EP92102346A EP0499239A3 EP 0499239 A3 EP0499239 A3 EP 0499239A3 EP 19920102346 EP19920102346 EP 19920102346 EP 92102346 A EP92102346 A EP 92102346A EP 0499239 A3 EP0499239 A3 EP 0499239A3
Authority
EP
European Patent Office
Prior art keywords
pumping unit
vacuum
vacuum pumping
same
ion pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19920102346
Other versions
EP0499239B1 (en
EP0499239A2 (en
Inventor
Kazutoshi Nagai
Tohru Satake
Hideaki Hayashi
Takanari Yasui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP0499239A2 publication Critical patent/EP0499239A2/en
Publication of EP0499239A3 publication Critical patent/EP0499239A3/en
Application granted granted Critical
Publication of EP0499239B1 publication Critical patent/EP0499239B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

An exhaust apparatus and a high vacuum pumping unit including such high vacuum device (50) and an auxiliary vacuum pump (31) are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.
EP92102346A 1991-02-12 1992-02-12 Ion pump and vacuum pumping unit using the same Expired - Lifetime EP0499239B1 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP3884791 1991-02-12
JP3884791 1991-02-12
JP3884891 1991-02-12
JP38847/91 1991-02-12
JP3884891 1991-02-12
JP38848/91 1991-02-12

Publications (3)

Publication Number Publication Date
EP0499239A2 EP0499239A2 (en) 1992-08-19
EP0499239A3 true EP0499239A3 (en) 1993-03-03
EP0499239B1 EP0499239B1 (en) 1999-07-07

Family

ID=26378132

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92102346A Expired - Lifetime EP0499239B1 (en) 1991-02-12 1992-02-12 Ion pump and vacuum pumping unit using the same

Country Status (4)

Country Link
EP (1) EP0499239B1 (en)
JP (1) JPH05174780A (en)
AT (1) ATE182031T1 (en)
DE (1) DE69229511T2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4820996B2 (en) * 2005-05-30 2011-11-24 大学共同利用機関法人自然科学研究機構 Noble gas immobilization device and immobilization method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR968943A (en) * 1948-07-02 1950-12-08 Csf Enhancements to high vacuum pumping devices
US2578009A (en) * 1947-12-23 1951-12-11 Rca Corp Electronic high vacuum apparatus
GB684710A (en) * 1950-07-19 1952-12-24 Ass Elect Ind Improvements relating to high vacuum pumps
GB762365A (en) * 1953-07-10 1956-11-28 Edwards And Co London Ltd W Improvements in and relating to ionic vacuum pumping apparatus
DE1915367A1 (en) * 1968-03-27 1969-10-09 Jakopic Ing Erich Single or multi-stage compressing ion pump
EP0469631A2 (en) * 1990-08-03 1992-02-05 Ebara Corporation Ion pump and vacuum pumping unit using the same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2578009A (en) * 1947-12-23 1951-12-11 Rca Corp Electronic high vacuum apparatus
FR968943A (en) * 1948-07-02 1950-12-08 Csf Enhancements to high vacuum pumping devices
GB684710A (en) * 1950-07-19 1952-12-24 Ass Elect Ind Improvements relating to high vacuum pumps
GB762365A (en) * 1953-07-10 1956-11-28 Edwards And Co London Ltd W Improvements in and relating to ionic vacuum pumping apparatus
DE1915367A1 (en) * 1968-03-27 1969-10-09 Jakopic Ing Erich Single or multi-stage compressing ion pump
EP0469631A2 (en) * 1990-08-03 1992-02-05 Ebara Corporation Ion pump and vacuum pumping unit using the same

Also Published As

Publication number Publication date
EP0499239B1 (en) 1999-07-07
JPH05174780A (en) 1993-07-13
ATE182031T1 (en) 1999-07-15
DE69229511D1 (en) 1999-08-12
DE69229511T2 (en) 2000-02-03
EP0499239A2 (en) 1992-08-19

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