DE69229511T2 - Ion pump and vacuum pump system therefor - Google Patents

Ion pump and vacuum pump system therefor

Info

Publication number
DE69229511T2
DE69229511T2 DE69229511T DE69229511T DE69229511T2 DE 69229511 T2 DE69229511 T2 DE 69229511T2 DE 69229511 T DE69229511 T DE 69229511T DE 69229511 T DE69229511 T DE 69229511T DE 69229511 T2 DE69229511 T2 DE 69229511T2
Authority
DE
Germany
Prior art keywords
vacuum
vacuum pump
pump
system therefor
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69229511T
Other languages
German (de)
Other versions
DE69229511D1 (en
Inventor
Kazutoshi Nagai
Tohru Satake
Hideaki Hayashi
Takanari Yasui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69229511D1 publication Critical patent/DE69229511D1/en
Publication of DE69229511T2 publication Critical patent/DE69229511T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

An exhaust apparatus and a high vacuum pumping unit including such high vacuum device (50) and an auxiliary vacuum pump (31) are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.
DE69229511T 1991-02-12 1992-02-12 Ion pump and vacuum pump system therefor Expired - Fee Related DE69229511T2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3884791 1991-02-12
JP3884891 1991-02-12

Publications (2)

Publication Number Publication Date
DE69229511D1 DE69229511D1 (en) 1999-08-12
DE69229511T2 true DE69229511T2 (en) 2000-02-03

Family

ID=26378132

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69229511T Expired - Fee Related DE69229511T2 (en) 1991-02-12 1992-02-12 Ion pump and vacuum pump system therefor

Country Status (4)

Country Link
EP (1) EP0499239B1 (en)
JP (1) JPH05174780A (en)
AT (1) ATE182031T1 (en)
DE (1) DE69229511T2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4820996B2 (en) * 2005-05-30 2011-11-24 大学共同利用機関法人自然科学研究機構 Noble gas immobilization device and immobilization method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2578009A (en) * 1947-12-23 1951-12-11 Rca Corp Electronic high vacuum apparatus
FR968943A (en) * 1948-07-02 1950-12-08 Csf Enhancements to high vacuum pumping devices
GB684710A (en) * 1950-07-19 1952-12-24 Ass Elect Ind Improvements relating to high vacuum pumps
GB762365A (en) * 1953-07-10 1956-11-28 Edwards And Co London Ltd W Improvements in and relating to ionic vacuum pumping apparatus
AT288066B (en) * 1968-03-27 1971-02-25 Erich Ing Jakopic Single or multi-stage compressing ion pump
JPH0675386B2 (en) * 1990-08-03 1994-09-21 株式会社荏原製作所 High vacuum device and vacuum pump device using the high vacuum device

Also Published As

Publication number Publication date
EP0499239A3 (en) 1993-03-03
ATE182031T1 (en) 1999-07-15
JPH05174780A (en) 1993-07-13
EP0499239A2 (en) 1992-08-19
EP0499239B1 (en) 1999-07-07
DE69229511D1 (en) 1999-08-12

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee