IL156719A0 - A multi-stage open ion system in various topologies - Google Patents
A multi-stage open ion system in various topologiesInfo
- Publication number
- IL156719A0 IL156719A0 IL15671903A IL15671903A IL156719A0 IL 156719 A0 IL156719 A0 IL 156719A0 IL 15671903 A IL15671903 A IL 15671903A IL 15671903 A IL15671903 A IL 15671903A IL 156719 A0 IL156719 A0 IL 156719A0
- Authority
- IL
- Israel
- Prior art keywords
- ion system
- various topologies
- stage open
- open ion
- stage
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/16—Means for permitting pumping during operation of the tube or lamp
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IL15671903A IL156719A0 (en) | 2003-06-30 | 2003-06-30 | A multi-stage open ion system in various topologies |
PCT/IL2004/000580 WO2005001020A2 (en) | 2003-06-30 | 2004-06-30 | A multi-stage open ion system in various topologies |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IL15671903A IL156719A0 (en) | 2003-06-30 | 2003-06-30 | A multi-stage open ion system in various topologies |
Publications (1)
Publication Number | Publication Date |
---|---|
IL156719A0 true IL156719A0 (en) | 2004-01-04 |
Family
ID=32587687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL15671903A IL156719A0 (en) | 2003-06-30 | 2003-06-30 | A multi-stage open ion system in various topologies |
Country Status (2)
Country | Link |
---|---|
IL (1) | IL156719A0 (en) |
WO (1) | WO2005001020A2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL156719A0 (en) * | 2003-06-30 | 2004-01-04 | Axiomic Technologies Inc | A multi-stage open ion system in various topologies |
US7098667B2 (en) * | 2003-12-31 | 2006-08-29 | Fei Company | Cold cathode ion gauge |
CN101969759A (en) | 2007-12-20 | 2011-02-09 | 巴斯夫植物科学有限公司 | Plants having enhanced yield-related traits and a method for making the same |
DE102009005620B4 (en) * | 2009-01-22 | 2010-12-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and arrangement for generating an electron beam |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5283177A (en) * | 1975-12-31 | 1977-07-11 | Fujitsu Ltd | Electron beam exposure device |
US4800100A (en) * | 1987-10-27 | 1989-01-24 | Massachusetts Institute Of Technology | Combined ion and molecular beam apparatus and method for depositing materials |
US5274306A (en) * | 1990-08-31 | 1993-12-28 | Kaufman & Robinson, Inc. | Capacitively coupled radiofrequency plasma source |
GB9021629D0 (en) * | 1990-10-04 | 1990-11-21 | Superion Ltd | Apparatus for and method of producing ion beams |
IT1246684B (en) * | 1991-03-07 | 1994-11-24 | Proel Tecnologie Spa | CYCLOTRONIC RESONANCE IONIC PROPULSOR. |
EP0525927B1 (en) * | 1991-07-23 | 1995-09-27 | Nissin Electric Company, Limited | Ion source having a mass separation device |
DE29507225U1 (en) * | 1995-04-29 | 1995-07-13 | Grünewald, Wolfgang, Dr.rer.nat., 09122 Chemnitz | Ion beam preparation device for electron microscopy |
JP3449198B2 (en) * | 1997-10-22 | 2003-09-22 | 日新電機株式会社 | Ion implanter |
US6335534B1 (en) * | 1998-04-17 | 2002-01-01 | Kabushiki Kaisha Toshiba | Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes |
GB9813327D0 (en) * | 1998-06-19 | 1998-08-19 | Superion Ltd | Apparatus and method relating to charged particles |
DE19929278A1 (en) * | 1998-06-26 | 2000-02-17 | Nissin Electric Co Ltd | Negative hydrogen ion beam injection method on substrate |
IL156719A0 (en) * | 2003-06-30 | 2004-01-04 | Axiomic Technologies Inc | A multi-stage open ion system in various topologies |
-
2003
- 2003-06-30 IL IL15671903A patent/IL156719A0/en unknown
-
2004
- 2004-06-30 WO PCT/IL2004/000580 patent/WO2005001020A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2005001020A2 (en) | 2005-01-06 |
WO2005001020A3 (en) | 2006-12-07 |
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