AT517253A3 - Vorrichtung zur Behandlung eines scheibenfömigen Substrats sowie Trägeradapter - Google Patents
Vorrichtung zur Behandlung eines scheibenfömigen Substrats sowie TrägeradapterInfo
- Publication number
- AT517253A3 AT517253A3 ATA50469/2016A AT504692016A AT517253A3 AT 517253 A3 AT517253 A3 AT 517253A3 AT 504692016 A AT504692016 A AT 504692016A AT 517253 A3 AT517253 A3 AT 517253A3
- Authority
- AT
- Austria
- Prior art keywords
- carrier
- disc
- shaped substrate
- treatment
- carrier adapter
- Prior art date
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Eine Vorrichtung (10) zur Behandlung eines scheibenförmigen Substrats ist beschrieben, mit einem Träger (14), der eine Trägerfläche (16) für das scheibenförmige Substrat hat, und einem mit dem Träger (14) koppelbaren Trägeradapter (20), der eine Maske (22) tragen kann, die zur Behandlung des scheibenförmigen Substrats verwendet wird. Eine Schnittstelle (24) ist vorgesehen, die die Koppelung des Trägeradapters (20) mit dem Träger (14) erfasst. Zudem ist eine Steuerung (36) vorgesehen, die mit der Schnittstelle (24) zusammenwirkt und erkennt, ob der Trägeradapter (20) mit dem Träger (14) gekoppelt ist, insbesondere die Schnittstelle (24) belegt ist. Ferner ist ein Trägeradapter (20) zur Verwendung in einer solchen Vorrichtung (10) beschrieben.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL2014864A NL2014864B1 (en) | 2015-05-27 | 2015-05-27 | Device for treating a disc-shaped substrate and support adapter. |
Publications (3)
Publication Number | Publication Date |
---|---|
AT517253A2 AT517253A2 (de) | 2016-12-15 |
AT517253A3 true AT517253A3 (de) | 2018-08-15 |
AT517253B1 AT517253B1 (de) | 2020-07-15 |
Family
ID=53901079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ATA50469/2016A AT517253B1 (de) | 2015-05-27 | 2016-05-24 | Vorrichtung zur Behandlung eines scheibenfömigen Substrats sowie Trägeradapter |
Country Status (8)
Country | Link |
---|---|
US (1) | US10101672B2 (de) |
JP (1) | JP6824635B2 (de) |
KR (1) | KR102584913B1 (de) |
CN (1) | CN106206401B (de) |
AT (1) | AT517253B1 (de) |
DE (1) | DE102016109345A1 (de) |
NL (1) | NL2014864B1 (de) |
TW (1) | TWI692004B (de) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1060624A (ja) * | 1996-08-20 | 1998-03-03 | Matsushita Electric Ind Co Ltd | スパッタリング装置 |
JP2003131387A (ja) * | 2001-10-22 | 2003-05-09 | Hitachi Electronics Eng Co Ltd | マスクと露光対象基板との搬送に兼用できる搬送アーム及びそれを備えた露光装置 |
DE102005005124A1 (de) * | 2005-02-04 | 2006-08-10 | Robert Bosch Gmbh | Belichtungsmaskeneinrichtung und Verfahren zur Ausrichtung einer Vielzahl von Substraten auf eine Belichtungsmaske |
US20060209288A1 (en) * | 2005-03-18 | 2006-09-21 | Lg. Philips Lcd Co., Ltd. | Proximity type exposure apparatus |
US20120037819A1 (en) * | 2010-08-12 | 2012-02-16 | Heumueller Michael | Mask carrier, mask handling module and method for adjusting a mask |
WO2012173692A1 (en) * | 2011-06-17 | 2012-12-20 | Applied Materials, Inc. | Cvd mask alignment for oled processing |
US20150024147A1 (en) * | 2013-07-19 | 2015-01-22 | Samsung Display Co., Ltd. | Plasma-enhanced chemical vapor deposition apparatus and method of manufacturing display apparatus using the same |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3192844A (en) * | 1963-03-05 | 1965-07-06 | Kulicke And Soffa Mfg Company | Mask alignment fixture |
JPS506513B2 (de) * | 1972-11-24 | 1975-03-14 | ||
US3912844A (en) | 1973-06-01 | 1975-10-14 | Canon Kk | Thermal recording method |
US3858978A (en) * | 1973-08-10 | 1975-01-07 | Kasper Instruments | Chuck for use in out-of-contact optical alignment and exposure apparatus |
JPS5226214A (en) * | 1975-08-25 | 1977-02-26 | Hitachi Ltd | Method for coating resist |
JPH0248196A (ja) * | 1988-06-15 | 1990-02-16 | Canon Inc | 搬送装置 |
JP2919158B2 (ja) * | 1992-02-10 | 1999-07-12 | キヤノン株式会社 | 基板保持装置 |
JPH09180978A (ja) * | 1995-12-27 | 1997-07-11 | Nikon Corp | 近接効果補正方法 |
JPH10270535A (ja) * | 1997-03-25 | 1998-10-09 | Nikon Corp | 移動ステージ装置、及び該ステージ装置を用いた回路デバイス製造方法 |
JPH1160624A (ja) | 1997-08-19 | 1999-03-02 | Tosoh Corp | オレフィン重合用触媒およびポリオレフィンの製造方法 |
JP2001244313A (ja) | 2000-02-28 | 2001-09-07 | Nikon Corp | 搬送方法及び搬送装置、露光方法及び露光装置 |
JP3959283B2 (ja) * | 2002-02-19 | 2007-08-15 | 株式会社日立ハイテクノロジーズ | 露光装置及び露光方法 |
JP2004095883A (ja) * | 2002-08-30 | 2004-03-25 | Tokyo Seimitsu Co Ltd | マスク搬送用トレー |
JP5006513B2 (ja) | 2004-11-05 | 2012-08-22 | キヤノン株式会社 | 露光装置及びデバイス製造方法 |
CN100456136C (zh) * | 2005-12-02 | 2009-01-28 | 上海微电子装备有限公司 | 一种步进扫描投影光刻机多总线时序同步控制方法 |
JP2009266886A (ja) * | 2008-04-22 | 2009-11-12 | Nikon Corp | マスク、マスク保持装置、露光装置及びデバイスの製造方法 |
JP5533227B2 (ja) * | 2010-05-13 | 2014-06-25 | 凸版印刷株式会社 | 露光装置 |
US8895943B2 (en) * | 2010-12-14 | 2014-11-25 | Mapper Lithography Ip B.V. | Lithography system and method of processing substrates in such a lithography system |
KR101539153B1 (ko) | 2010-12-14 | 2015-07-23 | 가부시키가이샤 니콘 | 노광 방법 및 노광 장치, 그리고 디바이스 제조 방법 |
US9368379B2 (en) * | 2012-03-14 | 2016-06-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods of controlling semiconductor wafer fabrication processes |
-
2015
- 2015-05-27 NL NL2014864A patent/NL2014864B1/en active
-
2016
- 2016-05-19 JP JP2016100357A patent/JP6824635B2/ja active Active
- 2016-05-20 DE DE102016109345.9A patent/DE102016109345A1/de active Pending
- 2016-05-24 AT ATA50469/2016A patent/AT517253B1/de active
- 2016-05-24 TW TW105116141A patent/TWI692004B/zh active
- 2016-05-26 KR KR1020160064868A patent/KR102584913B1/ko active IP Right Grant
- 2016-05-27 CN CN201610366122.1A patent/CN106206401B/zh active Active
- 2016-05-27 US US15/166,431 patent/US10101672B2/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1060624A (ja) * | 1996-08-20 | 1998-03-03 | Matsushita Electric Ind Co Ltd | スパッタリング装置 |
JP2003131387A (ja) * | 2001-10-22 | 2003-05-09 | Hitachi Electronics Eng Co Ltd | マスクと露光対象基板との搬送に兼用できる搬送アーム及びそれを備えた露光装置 |
DE102005005124A1 (de) * | 2005-02-04 | 2006-08-10 | Robert Bosch Gmbh | Belichtungsmaskeneinrichtung und Verfahren zur Ausrichtung einer Vielzahl von Substraten auf eine Belichtungsmaske |
US20060209288A1 (en) * | 2005-03-18 | 2006-09-21 | Lg. Philips Lcd Co., Ltd. | Proximity type exposure apparatus |
US20120037819A1 (en) * | 2010-08-12 | 2012-02-16 | Heumueller Michael | Mask carrier, mask handling module and method for adjusting a mask |
WO2012173692A1 (en) * | 2011-06-17 | 2012-12-20 | Applied Materials, Inc. | Cvd mask alignment for oled processing |
US20150024147A1 (en) * | 2013-07-19 | 2015-01-22 | Samsung Display Co., Ltd. | Plasma-enhanced chemical vapor deposition apparatus and method of manufacturing display apparatus using the same |
Also Published As
Publication number | Publication date |
---|---|
AT517253B1 (de) | 2020-07-15 |
DE102016109345A1 (de) | 2016-12-01 |
US10101672B2 (en) | 2018-10-16 |
KR20160140462A (ko) | 2016-12-07 |
US20160370715A1 (en) | 2016-12-22 |
CN106206401A (zh) | 2016-12-07 |
JP2016224435A (ja) | 2016-12-28 |
JP6824635B2 (ja) | 2021-02-03 |
NL2014864B1 (en) | 2017-01-31 |
TWI692004B (zh) | 2020-04-21 |
AT517253A2 (de) | 2016-12-15 |
TW201709276A (zh) | 2017-03-01 |
NL2014864A (en) | 2016-12-08 |
CN106206401B (zh) | 2021-06-29 |
KR102584913B1 (ko) | 2023-10-05 |
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