ZA977995B - Wafer fabricated electroacoustic transducer. - Google Patents

Wafer fabricated electroacoustic transducer.

Info

Publication number
ZA977995B
ZA977995B ZA9707995A ZA977995A ZA977995B ZA 977995 B ZA977995 B ZA 977995B ZA 9707995 A ZA9707995 A ZA 9707995A ZA 977995 A ZA977995 A ZA 977995A ZA 977995 B ZA977995 B ZA 977995B
Authority
ZA
South Africa
Prior art keywords
electroacoustic transducer
wafer fabricated
fabricated electroacoustic
wafer
transducer
Prior art date
Application number
ZA9707995A
Other languages
English (en)
Inventor
Bob Ray Beavers
Original Assignee
Northrop Grumman Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Grumman Corp filed Critical Northrop Grumman Corp
Publication of ZA977995B publication Critical patent/ZA977995B/xx

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F11/02—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement
    • G01F11/04—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement of the free-piston type
    • G01F11/06—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement of the free-piston type with provision for varying the stroke of the piston
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F11/02—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement
    • G01F11/08—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement of the diaphragm or bellows type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49226—Electret making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece
ZA9707995A 1996-09-06 1997-09-05 Wafer fabricated electroacoustic transducer. ZA977995B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/711,444 US5854846A (en) 1996-09-06 1996-09-06 Wafer fabricated electroacoustic transducer

Publications (1)

Publication Number Publication Date
ZA977995B true ZA977995B (en) 1998-03-02

Family

ID=24858117

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA9707995A ZA977995B (en) 1996-09-06 1997-09-05 Wafer fabricated electroacoustic transducer.

Country Status (11)

Country Link
US (3) US5854846A (ja)
EP (1) EP1009977B1 (ja)
JP (1) JP2001500258A (ja)
KR (1) KR20010029481A (ja)
AU (1) AU727839B2 (ja)
CA (1) CA2268053A1 (ja)
DE (1) DE69730165T2 (ja)
IL (1) IL128722A (ja)
TW (1) TW344903B (ja)
WO (1) WO1998010252A2 (ja)
ZA (1) ZA977995B (ja)

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DE19709136A1 (de) * 1997-03-06 1998-09-10 Inst Mikrotechnik Mainz Gmbh Verfahren zur Herstellung und Magazinierung von Mikrobauteilen, Magazin und Montageverfahren für Mikrobauteile
TW387198B (en) * 1997-09-03 2000-04-11 Hosiden Corp Audio sensor and its manufacturing method, and semiconductor electret capacitance microphone using the same
JP3445536B2 (ja) * 1999-10-04 2003-09-08 三洋電機株式会社 半導体装置
JP3636030B2 (ja) * 2000-04-26 2005-04-06 株式会社村田製作所 モジュール基板の製造方法
US6944308B2 (en) * 2000-10-20 2005-09-13 Bruel & Kjaer Sound & Vibration Measurement A/S Capacitive transducer
DE60109953T2 (de) * 2000-10-20 2006-02-09 Brüel & Kjaer Sound & Vibration Measurement A/S Kapazitiver wandler
EP1343353B1 (en) * 2000-10-20 2004-12-15 Brüel & Kjaer Sound & Vibration Measurement A/S A capacitive transducer
JP2002142295A (ja) * 2000-10-30 2002-05-17 Star Micronics Co Ltd コンデンサマイクロホン
US8629005B1 (en) 2000-11-28 2014-01-14 Knowles Electronics, Llc Methods of manufacture of bottom port surface mount silicon condenser microphone packages
US7434305B2 (en) 2000-11-28 2008-10-14 Knowles Electronics, Llc. Method of manufacturing a microphone
US6741709B2 (en) * 2000-12-20 2004-05-25 Shure Incorporated Condenser microphone assembly
GB2386030B (en) * 2000-12-22 2004-08-18 Bruel & Kjaer Sound & Vibratio A micromachined capacitive transducer
EP1246502A1 (en) * 2001-03-30 2002-10-02 Phone-Or Ltd Microphone
JP2002345092A (ja) * 2001-05-15 2002-11-29 Citizen Electronics Co Ltd コンデンサマイクロホンの製造方法
JP3953752B2 (ja) * 2001-06-19 2007-08-08 株式会社ケンウッド 光音響変換装置の振動板構造
JP4482925B2 (ja) * 2002-02-22 2010-06-16 味の素株式会社 アミノ酸類粉末及びその製造方法
US6813925B2 (en) * 2002-06-05 2004-11-09 General Electric Company Calibration method and system for a dynamic combustor sensor
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US8351632B2 (en) * 2005-08-23 2013-01-08 Analog Devices, Inc. Noise mitigating microphone system and method
US8130979B2 (en) * 2005-08-23 2012-03-06 Analog Devices, Inc. Noise mitigating microphone system and method
WO2007135740A1 (ja) * 2006-05-24 2007-11-29 Panasonic Corporation 電気機械音響変換器の実装構造
JP5321111B2 (ja) * 2009-02-13 2013-10-23 船井電機株式会社 マイクロホンユニット
US8189851B2 (en) 2009-03-06 2012-05-29 Emo Labs, Inc. Optically clear diaphragm for an acoustic transducer and method for making same
EP2638706B1 (en) * 2010-11-12 2019-01-09 Sonova AG Hearing device with a microphone
TWI455601B (zh) * 2011-08-16 2014-10-01 Merry Electronics Co Ltd 具感應功能之電聲轉換器
DE102011082814A1 (de) 2011-09-16 2013-03-21 Robert Bosch Gmbh Kapazitiver Sensor mit Luftpolster
CN103999484B (zh) 2011-11-04 2017-06-30 美商楼氏电子有限公司 作为声学设备中的屏障的嵌入式电介质和制造方法
US9078063B2 (en) 2012-08-10 2015-07-07 Knowles Electronics, Llc Microphone assembly with barrier to prevent contaminant infiltration
US9094743B2 (en) 2013-03-15 2015-07-28 Emo Labs, Inc. Acoustic transducers
USD733678S1 (en) 2013-12-27 2015-07-07 Emo Labs, Inc. Audio speaker
USD741835S1 (en) 2013-12-27 2015-10-27 Emo Labs, Inc. Speaker
USD748072S1 (en) 2014-03-14 2016-01-26 Emo Labs, Inc. Sound bar audio speaker
CN105502277A (zh) * 2014-09-24 2016-04-20 中芯国际集成电路制造(上海)有限公司 一种mems麦克风及其制作方法和电子装置
US9794661B2 (en) 2015-08-07 2017-10-17 Knowles Electronics, Llc Ingress protection for reducing particle infiltration into acoustic chamber of a MEMS microphone package
WO2018081439A1 (en) 2016-10-27 2018-05-03 Cts Corporation Transducer, transducer array, and method of making the same
DK3373597T3 (da) * 2017-03-07 2019-10-28 G R A S Sound & Vibration As Mikrofon til montering på en overflade med lav profil
JP1602163S (ja) * 2017-09-12 2018-04-16

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Also Published As

Publication number Publication date
JP2001500258A (ja) 2001-01-09
WO1998010252A3 (en) 1998-07-02
WO1998010252A2 (en) 1998-03-12
TW344903B (en) 1998-11-11
US6145186A (en) 2000-11-14
US5854846A (en) 1998-12-29
EP1009977B1 (en) 2004-08-04
DE69730165T2 (de) 2005-08-11
DE69730165D1 (de) 2004-09-09
IL128722A0 (en) 2000-01-31
CA2268053A1 (en) 1998-03-12
AU727839B2 (en) 2001-01-04
EP1009977A2 (en) 2000-06-21
AU4182597A (en) 1998-03-26
KR20010029481A (ko) 2001-04-06
IL128722A (en) 2002-12-01
US6308398B1 (en) 2001-10-30

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