TW344903B - Wafer fabricated electroacoustic transducer - Google Patents

Wafer fabricated electroacoustic transducer

Info

Publication number
TW344903B
TW344903B TW086112803A TW86112803A TW344903B TW 344903 B TW344903 B TW 344903B TW 086112803 A TW086112803 A TW 086112803A TW 86112803 A TW86112803 A TW 86112803A TW 344903 B TW344903 B TW 344903B
Authority
TW
Taiwan
Prior art keywords
electrode
transducer
electroacoustic transducer
wafer fabricated
electrodes
Prior art date
Application number
TW086112803A
Other languages
English (en)
Inventor
Ray Beavers Bob
Original Assignee
Northrop Grumman Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Grumman Corp filed Critical Northrop Grumman Corp
Application granted granted Critical
Publication of TW344903B publication Critical patent/TW344903B/zh

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F11/02—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement
    • G01F11/04—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement of the free-piston type
    • G01F11/06—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement of the free-piston type with provision for varying the stroke of the piston
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F11/02—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement
    • G01F11/08—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement of the diaphragm or bellows type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49226—Electret making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
TW086112803A 1996-09-06 1997-09-05 Wafer fabricated electroacoustic transducer TW344903B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/711,444 US5854846A (en) 1996-09-06 1996-09-06 Wafer fabricated electroacoustic transducer

Publications (1)

Publication Number Publication Date
TW344903B true TW344903B (en) 1998-11-11

Family

ID=24858117

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086112803A TW344903B (en) 1996-09-06 1997-09-05 Wafer fabricated electroacoustic transducer

Country Status (11)

Country Link
US (3) US5854846A (zh)
EP (1) EP1009977B1 (zh)
JP (1) JP2001500258A (zh)
KR (1) KR20010029481A (zh)
AU (1) AU727839B2 (zh)
CA (1) CA2268053A1 (zh)
DE (1) DE69730165T2 (zh)
IL (1) IL128722A (zh)
TW (1) TW344903B (zh)
WO (1) WO1998010252A2 (zh)
ZA (1) ZA977995B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI455601B (zh) * 2011-08-16 2014-10-01 Merry Electronics Co Ltd 具感應功能之電聲轉換器

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3604243B2 (ja) * 1996-11-27 2004-12-22 長野計器株式会社 静電容量型トランスデューサ
DE19709136A1 (de) * 1997-03-06 1998-09-10 Inst Mikrotechnik Mainz Gmbh Verfahren zur Herstellung und Magazinierung von Mikrobauteilen, Magazin und Montageverfahren für Mikrobauteile
TW387198B (en) * 1997-09-03 2000-04-11 Hosiden Corp Audio sensor and its manufacturing method, and semiconductor electret capacitance microphone using the same
JP3445536B2 (ja) * 1999-10-04 2003-09-08 三洋電機株式会社 半導体装置
JP3636030B2 (ja) * 2000-04-26 2005-04-06 株式会社村田製作所 モジュール基板の製造方法
US6944308B2 (en) * 2000-10-20 2005-09-13 Bruel & Kjaer Sound & Vibration Measurement A/S Capacitive transducer
EP1343353B1 (en) * 2000-10-20 2004-12-15 Brüel & Kjaer Sound & Vibration Measurement A/S A capacitive transducer
DE60107876T2 (de) * 2000-10-20 2005-12-22 Brüel & Kjaer Sound & Vibration Measurement A/S Kapazitiver Wandler
JP2002142295A (ja) * 2000-10-30 2002-05-17 Star Micronics Co Ltd コンデンサマイクロホン
US7434305B2 (en) 2000-11-28 2008-10-14 Knowles Electronics, Llc. Method of manufacturing a microphone
US8623709B1 (en) 2000-11-28 2014-01-07 Knowles Electronics, Llc Methods of manufacture of top port surface mount silicon condenser microphone packages
US6741709B2 (en) * 2000-12-20 2004-05-25 Shure Incorporated Condenser microphone assembly
WO2002052894A1 (en) * 2000-12-22 2002-07-04 Brüel & Kjær Sound & Vibration Measurement A/S A micromachined capacitive transducer
EP1246502A1 (en) * 2001-03-30 2002-10-02 Phone-Or Ltd Microphone
JP2002345092A (ja) * 2001-05-15 2002-11-29 Citizen Electronics Co Ltd コンデンサマイクロホンの製造方法
JP3953752B2 (ja) * 2001-06-19 2007-08-08 株式会社ケンウッド 光音響変換装置の振動板構造
DE60329744D1 (de) * 2002-02-22 2009-12-03 Ajinomoto Kk Aminosäurepulver und verfahren zu seiner herstellung
US6813925B2 (en) * 2002-06-05 2004-11-09 General Electric Company Calibration method and system for a dynamic combustor sensor
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US8351632B2 (en) * 2005-08-23 2013-01-08 Analog Devices, Inc. Noise mitigating microphone system and method
US8130979B2 (en) * 2005-08-23 2012-03-06 Analog Devices, Inc. Noise mitigating microphone system and method
CN101449592B (zh) * 2006-05-24 2012-07-18 松下电器产业株式会社 电机声学换能器的安装结构
JP5321111B2 (ja) * 2009-02-13 2013-10-23 船井電機株式会社 マイクロホンユニット
US8189851B2 (en) 2009-03-06 2012-05-29 Emo Labs, Inc. Optically clear diaphragm for an acoustic transducer and method for making same
EP2638706B1 (en) * 2010-11-12 2019-01-09 Sonova AG Hearing device with a microphone
DE102011082814A1 (de) 2011-09-16 2013-03-21 Robert Bosch Gmbh Kapazitiver Sensor mit Luftpolster
US9374643B2 (en) 2011-11-04 2016-06-21 Knowles Electronics, Llc Embedded dielectric as a barrier in an acoustic device and method of manufacture
US9078063B2 (en) 2012-08-10 2015-07-07 Knowles Electronics, Llc Microphone assembly with barrier to prevent contaminant infiltration
CN105228757A (zh) 2013-03-15 2016-01-06 埃莫实验室公司 具有弯曲限制部件的声换能器
USD733678S1 (en) 2013-12-27 2015-07-07 Emo Labs, Inc. Audio speaker
USD741835S1 (en) 2013-12-27 2015-10-27 Emo Labs, Inc. Speaker
USD748072S1 (en) 2014-03-14 2016-01-26 Emo Labs, Inc. Sound bar audio speaker
CN105502277A (zh) * 2014-09-24 2016-04-20 中芯国际集成电路制造(上海)有限公司 一种mems麦克风及其制作方法和电子装置
US9794661B2 (en) 2015-08-07 2017-10-17 Knowles Electronics, Llc Ingress protection for reducing particle infiltration into acoustic chamber of a MEMS microphone package
WO2018081439A1 (en) 2016-10-27 2018-05-03 Cts Corporation Transducer, transducer array, and method of making the same
PL3373597T3 (pl) * 2017-03-07 2020-02-28 G.R.A.S. Sound & Vibration A/S Mikrofon niskoprofilowy do montowania na powierzchni
JP1602163S (zh) * 2017-09-12 2018-04-16

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3405559A (en) * 1966-11-07 1968-10-15 United Aircraft Corp Pressure transducer
US3646281A (en) * 1969-06-02 1972-02-29 Rdf West Electrostatic transducer with vented diaphragm
JPS5221046Y2 (zh) * 1971-08-31 1977-05-14
US3775839A (en) * 1972-03-27 1973-12-04 Itt Method of making a transducer
US3963881A (en) * 1973-05-29 1976-06-15 Thermo Electron Corporation Unidirectional condenser microphone
JPS5419172B2 (zh) * 1973-07-23 1979-07-13
NL7313455A (nl) * 1973-10-01 1975-04-03 Philips Nv Mikrofoon met elektrostatische capsule.
JPS5220297Y2 (zh) * 1974-05-10 1977-05-10
US4249043A (en) * 1977-12-02 1981-02-03 The Post Office Electret transducer backplate, electret transducer and method of making an electret transducer
US4360955A (en) * 1978-05-08 1982-11-30 Barry Block Method of making a capacitive force transducer
US4225755A (en) * 1978-05-08 1980-09-30 Barry Block Capacitive force transducer
US4458537A (en) * 1981-05-11 1984-07-10 Combustion Engineering, Inc. High accuracy differential pressure capacitive transducer
JPS57193198A (en) * 1981-05-22 1982-11-27 Toshiba Corp Electrostatic microphone
US4389895A (en) * 1981-07-27 1983-06-28 Rosemount Inc. Capacitance pressure sensor
GB2122842B (en) * 1982-05-29 1985-08-29 Tokyo Shibaura Electric Co An electroacoustic transducer and a method of manufacturing an electroacoustic transducer
JPS58209300A (ja) * 1982-05-29 1983-12-06 Toshiba Corp トランスジユ−サ
JPS59105800A (ja) * 1982-12-08 1984-06-19 Matsushita Electric Ind Co Ltd 静電型スピ−カ
US4558184A (en) * 1983-02-24 1985-12-10 At&T Bell Laboratories Integrated capacitive transducer
US4872945A (en) * 1986-06-25 1989-10-10 Motorola Inc. Post seal etching of transducer diaphragm
US5038459A (en) * 1987-03-04 1991-08-13 Hosiden Electronics Co., Ltd. Method of fabricating the diaphragm unit of a condenser microphone by electron beam welding
US4866683A (en) * 1988-05-24 1989-09-12 Honeywell, Inc. Integrated acoustic receiver or projector
JPH0266988A (ja) * 1988-08-31 1990-03-07 Nec Corp 大形多数個取りセラミック基板
JPH02218299A (ja) * 1989-02-17 1990-08-30 Onkyo Corp 電気音響変換器とその製造方法
DE3909185A1 (de) * 1989-03-21 1990-09-27 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
DE3910646A1 (de) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
US5101543A (en) * 1990-07-02 1992-04-07 Gentex Corporation Method of making a variable capacitor microphone
US5272758A (en) * 1991-09-09 1993-12-21 Hosiden Corporation Electret condenser microphone unit
DE4206675C2 (de) * 1992-02-28 1995-04-27 Siemens Ag Verfahren zum Herstellen von Druckdifferenz-Sensoren
US5452268A (en) * 1994-08-12 1995-09-19 The Charles Stark Draper Laboratory, Inc. Acoustic transducer with improved low frequency response

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI455601B (zh) * 2011-08-16 2014-10-01 Merry Electronics Co Ltd 具感應功能之電聲轉換器

Also Published As

Publication number Publication date
DE69730165D1 (de) 2004-09-09
WO1998010252A2 (en) 1998-03-12
KR20010029481A (ko) 2001-04-06
US5854846A (en) 1998-12-29
AU727839B2 (en) 2001-01-04
US6308398B1 (en) 2001-10-30
DE69730165T2 (de) 2005-08-11
ZA977995B (en) 1998-03-02
IL128722A0 (en) 2000-01-31
AU4182597A (en) 1998-03-26
CA2268053A1 (en) 1998-03-12
JP2001500258A (ja) 2001-01-09
IL128722A (en) 2002-12-01
EP1009977A2 (en) 2000-06-21
US6145186A (en) 2000-11-14
EP1009977B1 (en) 2004-08-04
WO1998010252A3 (en) 1998-07-02

Similar Documents

Publication Publication Date Title
TW344903B (en) Wafer fabricated electroacoustic transducer
SE9703295D0 (sv) Electrical devices and a method of manufacturing the same
TW324843B (en) Compound electrode stack capacitor
TW343388B (en) Semiconductor device
AUPO581397A0 (en) Sensor connection means
EP0291904A3 (en) Ion-selective electrode having a non-metal sensing element
SE8504703D0 (sv) Absoluttrycktransduktor
EP0806834A3 (en) Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck
WO2001030437A8 (en) Patient-shielding and coil system
CA2203695A1 (en) Field effect sensor
GB2386030A (en) A micromachined capacitive transducer
WO2002017677A3 (en) Electrostatic electroacoustical transducer
EP0313390A3 (en) Gas sensor and method for production thereof
CA2401008A1 (en) Pressure-sensitive switch, its method of calibration and use in a hydrophone array
JPS6488128A (en) Temperature sensor
JPS6452305A (en) Continuous flexble electric conductor which can function as electric switch
WO2001096219A3 (en) Electro-adhesion device
CA2124294A1 (en) Devices for manufacturing electrets, and electrets obtained thereby
EP0106631B1 (en) Ceramic microphone
JPS6468728A (en) Thin film transistor
MY121017A (en) Transducer suspension system with high conductivity leads having two layers.
JPS5731298A (en) Ultrasonic probe
JPS60111199U (ja) 圧電形電気音響変換器
TW346679B (en) Semiconductor device with increased semiconductor capacitance and method of manufacturing the same
JPS62149307U (zh)