DE69730165D1 - Auf einer substratscheibe hergestellter elektroakustischer wandler - Google Patents

Auf einer substratscheibe hergestellter elektroakustischer wandler

Info

Publication number
DE69730165D1
DE69730165D1 DE69730165T DE69730165T DE69730165D1 DE 69730165 D1 DE69730165 D1 DE 69730165D1 DE 69730165 T DE69730165 T DE 69730165T DE 69730165 T DE69730165 T DE 69730165T DE 69730165 D1 DE69730165 D1 DE 69730165D1
Authority
DE
Germany
Prior art keywords
electro
acoustic transformer
substrate disc
transformer manufactured
manufactured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69730165T
Other languages
English (en)
Other versions
DE69730165T2 (de
Inventor
R Beavers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Corp
Original Assignee
Northrop Grumman Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Grumman Corp filed Critical Northrop Grumman Corp
Publication of DE69730165D1 publication Critical patent/DE69730165D1/de
Application granted granted Critical
Publication of DE69730165T2 publication Critical patent/DE69730165T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F11/02—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement
    • G01F11/04—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement of the free-piston type
    • G01F11/06—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement of the free-piston type with provision for varying the stroke of the piston
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F11/02—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement
    • G01F11/08—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement of the diaphragm or bellows type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49226—Electret making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
DE69730165T 1996-09-06 1997-09-05 Auf einer substratscheibe hergestellter elektroakustischer wandler Expired - Lifetime DE69730165T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US711444 1996-09-06
US08/711,444 US5854846A (en) 1996-09-06 1996-09-06 Wafer fabricated electroacoustic transducer
PCT/US1997/015643 WO1998010252A2 (en) 1996-09-06 1997-09-05 Wafer fabricated electroacoustic transducer

Publications (2)

Publication Number Publication Date
DE69730165D1 true DE69730165D1 (de) 2004-09-09
DE69730165T2 DE69730165T2 (de) 2005-08-11

Family

ID=24858117

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69730165T Expired - Lifetime DE69730165T2 (de) 1996-09-06 1997-09-05 Auf einer substratscheibe hergestellter elektroakustischer wandler

Country Status (11)

Country Link
US (3) US5854846A (de)
EP (1) EP1009977B1 (de)
JP (1) JP2001500258A (de)
KR (1) KR20010029481A (de)
AU (1) AU727839B2 (de)
CA (1) CA2268053A1 (de)
DE (1) DE69730165T2 (de)
IL (1) IL128722A (de)
TW (1) TW344903B (de)
WO (1) WO1998010252A2 (de)
ZA (1) ZA977995B (de)

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JP3604243B2 (ja) * 1996-11-27 2004-12-22 長野計器株式会社 静電容量型トランスデューサ
DE19709136A1 (de) * 1997-03-06 1998-09-10 Inst Mikrotechnik Mainz Gmbh Verfahren zur Herstellung und Magazinierung von Mikrobauteilen, Magazin und Montageverfahren für Mikrobauteile
TW387198B (en) * 1997-09-03 2000-04-11 Hosiden Corp Audio sensor and its manufacturing method, and semiconductor electret capacitance microphone using the same
JP3445536B2 (ja) * 1999-10-04 2003-09-08 三洋電機株式会社 半導体装置
JP3636030B2 (ja) * 2000-04-26 2005-04-06 株式会社村田製作所 モジュール基板の製造方法
WO2002034008A1 (en) * 2000-10-20 2002-04-25 Brüel & Kjær Sound & Vibration Measurement A/S A capacitive transducer
DK1329129T3 (da) * 2000-10-20 2005-04-25 Brueel & Kjaer Sound & Vibrati Kapacitiv transducer
US6944308B2 (en) * 2000-10-20 2005-09-13 Bruel & Kjaer Sound & Vibration Measurement A/S Capacitive transducer
JP2002142295A (ja) * 2000-10-30 2002-05-17 Star Micronics Co Ltd コンデンサマイクロホン
US8623709B1 (en) 2000-11-28 2014-01-07 Knowles Electronics, Llc Methods of manufacture of top port surface mount silicon condenser microphone packages
US7434305B2 (en) 2000-11-28 2008-10-14 Knowles Electronics, Llc. Method of manufacturing a microphone
US6741709B2 (en) * 2000-12-20 2004-05-25 Shure Incorporated Condenser microphone assembly
GB2386030B (en) * 2000-12-22 2004-08-18 Bruel & Kjaer Sound & Vibratio A micromachined capacitive transducer
EP1246502A1 (de) * 2001-03-30 2002-10-02 Phone-Or Ltd Mikrofon
JP2002345092A (ja) * 2001-05-15 2002-11-29 Citizen Electronics Co Ltd コンデンサマイクロホンの製造方法
JP3953752B2 (ja) * 2001-06-19 2007-08-08 株式会社ケンウッド 光音響変換装置の振動板構造
DE60329744D1 (de) * 2002-02-22 2009-12-03 Ajinomoto Kk Aminosäurepulver und verfahren zu seiner herstellung
US6813925B2 (en) * 2002-06-05 2004-11-09 General Electric Company Calibration method and system for a dynamic combustor sensor
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US8130979B2 (en) * 2005-08-23 2012-03-06 Analog Devices, Inc. Noise mitigating microphone system and method
US8351632B2 (en) * 2005-08-23 2013-01-08 Analog Devices, Inc. Noise mitigating microphone system and method
CN101449592B (zh) * 2006-05-24 2012-07-18 松下电器产业株式会社 电机声学换能器的安装结构
JP5321111B2 (ja) * 2009-02-13 2013-10-23 船井電機株式会社 マイクロホンユニット
US8189851B2 (en) 2009-03-06 2012-05-29 Emo Labs, Inc. Optically clear diaphragm for an acoustic transducer and method for making same
US9232318B2 (en) * 2010-11-12 2016-01-05 Sonova Ag Hearing device with a microphone
TWI455601B (zh) * 2011-08-16 2014-10-01 Merry Electronics Co Ltd 具感應功能之電聲轉換器
DE102011082814A1 (de) 2011-09-16 2013-03-21 Robert Bosch Gmbh Kapazitiver Sensor mit Luftpolster
CN103999484B (zh) 2011-11-04 2017-06-30 美商楼氏电子有限公司 作为声学设备中的屏障的嵌入式电介质和制造方法
US9078063B2 (en) 2012-08-10 2015-07-07 Knowles Electronics, Llc Microphone assembly with barrier to prevent contaminant infiltration
CN105228757A (zh) 2013-03-15 2016-01-06 埃莫实验室公司 具有弯曲限制部件的声换能器
USD741835S1 (en) 2013-12-27 2015-10-27 Emo Labs, Inc. Speaker
USD733678S1 (en) 2013-12-27 2015-07-07 Emo Labs, Inc. Audio speaker
USD748072S1 (en) 2014-03-14 2016-01-26 Emo Labs, Inc. Sound bar audio speaker
CN105502277A (zh) * 2014-09-24 2016-04-20 中芯国际集成电路制造(上海)有限公司 一种mems麦克风及其制作方法和电子装置
US9794661B2 (en) 2015-08-07 2017-10-17 Knowles Electronics, Llc Ingress protection for reducing particle infiltration into acoustic chamber of a MEMS microphone package
WO2018081439A1 (en) 2016-10-27 2018-05-03 Cts Corporation Transducer, transducer array, and method of making the same
PL3373597T3 (pl) * 2017-03-07 2020-02-28 G.R.A.S. Sound & Vibration A/S Mikrofon niskoprofilowy do montowania na powierzchni
JP1602163S (de) * 2017-09-12 2018-04-16

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US3646281A (en) * 1969-06-02 1972-02-29 Rdf West Electrostatic transducer with vented diaphragm
JPS5221046Y2 (de) * 1971-08-31 1977-05-14
US3775839A (en) * 1972-03-27 1973-12-04 Itt Method of making a transducer
US3963881A (en) * 1973-05-29 1976-06-15 Thermo Electron Corporation Unidirectional condenser microphone
JPS5419172B2 (de) * 1973-07-23 1979-07-13
NL7313455A (nl) * 1973-10-01 1975-04-03 Philips Nv Mikrofoon met elektrostatische capsule.
JPS5220297Y2 (de) * 1974-05-10 1977-05-10
US4249043A (en) * 1977-12-02 1981-02-03 The Post Office Electret transducer backplate, electret transducer and method of making an electret transducer
US4225755A (en) * 1978-05-08 1980-09-30 Barry Block Capacitive force transducer
US4360955A (en) * 1978-05-08 1982-11-30 Barry Block Method of making a capacitive force transducer
US4458537A (en) * 1981-05-11 1984-07-10 Combustion Engineering, Inc. High accuracy differential pressure capacitive transducer
JPS57193198A (en) * 1981-05-22 1982-11-27 Toshiba Corp Electrostatic microphone
US4389895A (en) * 1981-07-27 1983-06-28 Rosemount Inc. Capacitance pressure sensor
JPS58209300A (ja) * 1982-05-29 1983-12-06 Toshiba Corp トランスジユ−サ
GB2122842B (en) * 1982-05-29 1985-08-29 Tokyo Shibaura Electric Co An electroacoustic transducer and a method of manufacturing an electroacoustic transducer
JPS59105800A (ja) * 1982-12-08 1984-06-19 Matsushita Electric Ind Co Ltd 静電型スピ−カ
US4558184A (en) * 1983-02-24 1985-12-10 At&T Bell Laboratories Integrated capacitive transducer
US4872945A (en) * 1986-06-25 1989-10-10 Motorola Inc. Post seal etching of transducer diaphragm
US5038459A (en) * 1987-03-04 1991-08-13 Hosiden Electronics Co., Ltd. Method of fabricating the diaphragm unit of a condenser microphone by electron beam welding
US4866683A (en) * 1988-05-24 1989-09-12 Honeywell, Inc. Integrated acoustic receiver or projector
JPH0266988A (ja) * 1988-08-31 1990-03-07 Nec Corp 大形多数個取りセラミック基板
JPH02218299A (ja) * 1989-02-17 1990-08-30 Onkyo Corp 電気音響変換器とその製造方法
DE3909185A1 (de) * 1989-03-21 1990-09-27 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
DE3910646A1 (de) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
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Also Published As

Publication number Publication date
KR20010029481A (ko) 2001-04-06
WO1998010252A3 (en) 1998-07-02
ZA977995B (en) 1998-03-02
US6308398B1 (en) 2001-10-30
AU727839B2 (en) 2001-01-04
US6145186A (en) 2000-11-14
US5854846A (en) 1998-12-29
EP1009977A2 (de) 2000-06-21
TW344903B (en) 1998-11-11
CA2268053A1 (en) 1998-03-12
DE69730165T2 (de) 2005-08-11
EP1009977B1 (de) 2004-08-04
IL128722A0 (en) 2000-01-31
AU4182597A (en) 1998-03-26
WO1998010252A2 (en) 1998-03-12
JP2001500258A (ja) 2001-01-09
IL128722A (en) 2002-12-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition