ZA200707988B - RF MEMS switch with a flexible and free switch membrane - Google Patents
RF MEMS switch with a flexible and free switch membrane Download PDFInfo
- Publication number
- ZA200707988B ZA200707988B ZA200707988A ZA200707988A ZA200707988B ZA 200707988 B ZA200707988 B ZA 200707988B ZA 200707988 A ZA200707988 A ZA 200707988A ZA 200707988 A ZA200707988 A ZA 200707988A ZA 200707988 B ZA200707988 B ZA 200707988B
- Authority
- ZA
- South Africa
- Prior art keywords
- membrane
- switch
- mems switch
- mems
- state
- Prior art date
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 103
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 238000005452 bending Methods 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000035939 shock Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007786 electrostatic charging Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229940056345 tums Drugs 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/01—Switches
- B81B2201/012—Switches characterised by the shape
- B81B2201/018—Switches not provided for in B81B2201/014 - B81B2201/016
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
- Electrotherapy Devices (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Push-Button Switches (AREA)
- Burglar Alarm Systems (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP05370005A EP1705676B9 (en) | 2005-03-21 | 2005-03-21 | RF MEMS switch with a flexible and free switch membrane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ZA200707988B true ZA200707988B (en) | 2008-06-25 |
Family
ID=34942756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ZA200707988A ZA200707988B (en) | 2005-03-21 | 2007-09-17 | RF MEMS switch with a flexible and free switch membrane |
Country Status (19)
| Country | Link |
|---|---|
| US (1) | US7834722B2 (es) |
| EP (1) | EP1705676B9 (es) |
| JP (1) | JP4637234B2 (es) |
| KR (1) | KR101230284B1 (es) |
| CN (1) | CN101147223B (es) |
| AT (1) | ATE376704T1 (es) |
| AU (1) | AU2006226642B2 (es) |
| BR (1) | BRPI0611549A2 (es) |
| CA (1) | CA2602187C (es) |
| DE (1) | DE602005003008T2 (es) |
| DK (1) | DK1705676T3 (es) |
| ES (1) | ES2296116T3 (es) |
| IL (1) | IL185992A (es) |
| MX (1) | MX2007011641A (es) |
| PT (1) | PT1705676E (es) |
| RU (1) | RU2433499C2 (es) |
| UA (1) | UA94039C2 (es) |
| WO (1) | WO2006099945A1 (es) |
| ZA (1) | ZA200707988B (es) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7627812B2 (en) | 2005-10-27 | 2009-12-01 | Microsoft Corporation | Variable formatting of cells |
| US8461948B2 (en) * | 2007-09-25 | 2013-06-11 | The United States Of America As Represented By The Secretary Of The Army | Electronic ohmic shunt RF MEMS switch and method of manufacture |
| DE102009006421A1 (de) * | 2009-01-22 | 2010-07-29 | E.G.O. Elektro-Gerätebau GmbH | Bedieneinrichtung für ein Elektrogerät |
| EP2230679B1 (en) * | 2009-03-20 | 2012-05-16 | Delfmems | Mems structure with a flexible membrane and improved electric actuation means |
| US8354899B2 (en) * | 2009-09-23 | 2013-01-15 | General Electric Company | Switch structure and method |
| CN102074771A (zh) * | 2011-01-06 | 2011-05-25 | 东南大学 | 一种微固支梁式射频开关 |
| EP2506282B1 (en) * | 2011-03-28 | 2013-09-11 | Delfmems | RF MEMS crosspoint switch and crosspoint switch matrix comprising RF MEMS crosspoint switches |
| US9641174B2 (en) * | 2011-04-11 | 2017-05-02 | The Regents Of The University Of California | Use of micro-structured plate for controlling capacitance of mechanical capacitor switches |
| US9085454B2 (en) * | 2011-07-05 | 2015-07-21 | Duality Reality Energy, LLC | Reduced stiffness micro-mechanical structure |
| JP6169614B2 (ja) | 2012-01-23 | 2017-07-26 | ザ・リージェンツ・オブ・ザ・ユニバーシティ・オブ・ミシガンＴｈｅ Ｒｅｇｅｎｔｓ Ｏｆ Ｔｈｅ Ｕｎｉｖｅｒｓｉｔｙ Ｏｆ Ｍｉｃｈｉｇａｎ | プラズモン電極を有する光伝導装置 |
| EP2969912A4 (en) | 2013-03-15 | 2016-11-09 | Wispry Inc | DEVICES AND METHODS FOR CONTROLLING AND SEPARATING ACTUATOR PLATES |
| FR3006808B1 (fr) * | 2013-06-06 | 2015-05-29 | St Microelectronics Rousset | Dispositif de commutation integre electriquement activable |
| US9859079B2 (en) | 2013-08-06 | 2018-01-02 | The Regents Of The University Of Michigan | Reconfigurable device for terahertz (THz) and infrared (IR) filtering and modulation |
| RU2527942C1 (ru) * | 2013-11-05 | 2014-09-10 | Общество С Ограниченной Ответственностью "Научно-Производственное Предприятие "Технология" | Способ изготовления электростатического силового мэмс ключа |
| CN103762123A (zh) * | 2014-01-21 | 2014-04-30 | 西安电子科技大学 | 一种静电驱动双稳态rfmems开关 |
| EP3038125A1 (en) | 2014-12-22 | 2016-06-29 | DelfMEMS SAS | Mems structure with multilayer membrane |
| EP3038126A1 (en) | 2014-12-22 | 2016-06-29 | DelfMEMS SAS | MEMS structure with thick movable membrane |
| FR3031098A1 (fr) * | 2014-12-26 | 2016-07-01 | Delfmems | Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane mobile en translation et une electrode d'actionnement isolee de la membrane par une couche dielectrique |
| FR3031096A1 (fr) * | 2014-12-26 | 2016-07-01 | Delfmems | Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane qui est mobile en translation et est profilee pour reduire les courts-circuits et la formation d'arcs electriques |
| WO2016196309A2 (en) | 2015-05-27 | 2016-12-08 | The Regents Of The University Of California | Terahertz endoscopy through laser-driven terahertz sources and detectors |
| JP6864682B2 (ja) * | 2015-12-07 | 2021-04-28 | オー ユール アイラーセン，ニールス | ロードセル |
| KR200480523Y1 (ko) | 2015-12-31 | 2016-06-29 | 한지흠 | 펄스모양 회전축을 구비한 중풍 손 물리치료 기구 |
| KR200481233Y1 (ko) | 2015-12-31 | 2016-09-01 | 한지흠 | 마비된 중풍 손가락의 관절과 근육 물리치료용 운동기구 |
| CN105680132B (zh) * | 2016-03-16 | 2018-06-29 | 西安电子科技大学 | 一种太赫兹波阻抗易调谐空气共面波导结构及其制备方法 |
| FR3051784B1 (fr) * | 2016-05-24 | 2018-05-25 | Airmems | Membrane mems a ligne de transmission integree |
| RU169456U1 (ru) * | 2016-07-06 | 2017-03-21 | Общество с ограниченной ответственностью "Базовые технологии" | Трехбитный РЧ МЭМС варактор |
| WO2018195429A1 (en) | 2017-04-20 | 2018-10-25 | The Regents Of The University Of California | Systems and methods for high frequency nanoscopy |
| WO2018223068A1 (en) | 2017-06-01 | 2018-12-06 | The Regents Of The University Of California | Metallo-graphene nanocomposites and methods for using metallo-graphene nanocomposites for electromagnetic energy conversion |
| JP7176108B2 (ja) * | 2018-10-16 | 2022-11-21 | フラウンホファー ゲセルシャフト ツール フェールデルンク ダー アンゲヴァンテン フォルシュンク エー．ファオ． | アクチュエータとしての曲げ変換器、センサとしての曲げ変換器、曲げ変換器システム |
| RU2705564C1 (ru) * | 2018-12-20 | 2019-11-08 | федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) | Интегральный микроэлектромеханический переключатель |
| RU2705792C1 (ru) * | 2018-12-26 | 2019-11-12 | федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) | Интегральный микроэлектромеханический переключатель |
| CN110212805B (zh) * | 2019-05-30 | 2020-12-25 | 上海集成电路研发中心有限公司 | 一种改善翘曲程度的mems结构 |
| US11906424B2 (en) | 2019-10-01 | 2024-02-20 | The Regents Of The University Of California | Method for identifying chemical and structural variations through terahertz time-domain spectroscopy |
| US12066380B2 (en) | 2019-10-31 | 2024-08-20 | The Regents Of The University Of California | Methods and systems for detecting water status in plants using terahertz radiation |
| US12055927B2 (en) * | 2021-02-26 | 2024-08-06 | Honeywell International Inc. | Thermal metamaterial for low power MEMS thermal control |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6717496B2 (en) * | 2001-11-13 | 2004-04-06 | The Board Of Trustees Of The University Of Illinois | Electromagnetic energy controlled low actuation voltage microelectromechanical switch |
| US20040050674A1 (en) * | 2002-09-14 | 2004-03-18 | Rubel Paul John | Mechanically bi-stable mems relay device |
| KR100513723B1 (ko) * | 2002-11-18 | 2005-09-08 | 삼성전자주식회사 | Ｍｅｍｓ스위치 |
| JP4066928B2 (ja) * | 2002-12-12 | 2008-03-26 | 株式会社村田製作所 | Ｒｆｍｅｍｓスイッチ |
| JP2004319215A (ja) * | 2003-04-15 | 2004-11-11 | Murata Mfg Co Ltd | 静電駆動素子 |
| US6882256B1 (en) | 2003-06-20 | 2005-04-19 | Northrop Grumman Corporation | Anchorless electrostatically activated micro electromechanical system switch |
| JP4364565B2 (ja) * | 2003-07-02 | 2009-11-18 | シャープ株式会社 | 静電アクチュエーター，マイクロスイッチ，マイクロ光スイッチ，電子機器および静電アクチュエーターの製造方法 |
| FR2858459B1 (fr) * | 2003-08-01 | 2006-03-10 | Commissariat Energie Atomique | Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant |
| US20070188846A1 (en) * | 2003-09-03 | 2007-08-16 | Slicker James M | MEMS switch with bistable element having straight beam components |
| US7348870B2 (en) * | 2005-01-05 | 2008-03-25 | International Business Machines Corporation | Structure and method of fabricating a hinge type MEMS switch |
-
2005
- 2005-03-21 PT PT05370005T patent/PT1705676E/pt unknown
- 2005-03-21 ES ES05370005T patent/ES2296116T3/es active Active
- 2005-03-21 EP EP05370005A patent/EP1705676B9/en not_active Not-in-force
- 2005-03-21 AT AT05370005T patent/ATE376704T1/de active
- 2005-03-21 DE DE602005003008T patent/DE602005003008T2/de active Active
- 2005-03-21 DK DK05370005T patent/DK1705676T3/da active
-
2006
- 2006-03-07 CA CA2602187A patent/CA2602187C/en not_active Expired - Fee Related
- 2006-03-07 BR BRPI0611549-7A patent/BRPI0611549A2/pt not_active Application Discontinuation
- 2006-03-07 JP JP2008502274A patent/JP4637234B2/ja not_active Expired - Fee Related
- 2006-03-07 US US11/886,684 patent/US7834722B2/en not_active Expired - Fee Related
- 2006-03-07 CN CN2006800092844A patent/CN101147223B/zh not_active Expired - Fee Related
- 2006-03-07 WO PCT/EP2006/002076 patent/WO2006099945A1/en not_active Application Discontinuation
- 2006-03-07 MX MX2007011641A patent/MX2007011641A/es unknown
- 2006-03-07 KR KR1020077021560A patent/KR101230284B1/ko not_active IP Right Cessation
- 2006-03-07 AU AU2006226642A patent/AU2006226642B2/en not_active Ceased
- 2006-03-07 RU RU2007134310/07A patent/RU2433499C2/ru not_active IP Right Cessation
- 2006-07-03 UA UAA200710442A patent/UA94039C2/ru unknown
-
2007
- 2007-09-17 ZA ZA200707988A patent/ZA200707988B/en unknown
- 2007-09-17 IL IL185992A patent/IL185992A/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| PT1705676E (pt) | 2008-02-07 |
| JP4637234B2 (ja) | 2011-02-23 |
| CA2602187A1 (en) | 2006-09-28 |
| RU2007134310A (ru) | 2009-04-27 |
| ES2296116T3 (es) | 2008-04-16 |
| US7834722B2 (en) | 2010-11-16 |
| IL185992A0 (en) | 2008-01-20 |
| DK1705676T3 (da) | 2008-02-18 |
| EP1705676B1 (en) | 2007-10-24 |
| CN101147223B (zh) | 2010-09-08 |
| EP1705676A1 (en) | 2006-09-27 |
| DE602005003008T2 (de) | 2008-08-14 |
| KR101230284B1 (ko) | 2013-02-06 |
| WO2006099945A1 (en) | 2006-09-28 |
| MX2007011641A (es) | 2008-01-18 |
| CA2602187C (en) | 2014-05-06 |
| AU2006226642A1 (en) | 2006-09-28 |
| JP2008533690A (ja) | 2008-08-21 |
| ATE376704T1 (de) | 2007-11-15 |
| DE602005003008D1 (de) | 2007-12-06 |
| BRPI0611549A2 (pt) | 2010-09-21 |
| AU2006226642B2 (en) | 2010-11-11 |
| RU2433499C2 (ru) | 2011-11-10 |
| UA94039C2 (en) | 2011-04-11 |
| EP1705676B9 (en) | 2010-08-11 |
| KR20080004467A (ko) | 2008-01-09 |
| IL185992A (en) | 2011-08-31 |
| US20080237024A1 (en) | 2008-10-02 |
| CN101147223A (zh) | 2008-03-19 |
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