DK1705676T3 - RF MEMS omskifter med en fleksibel og fri omskiftermembran - Google Patents

RF MEMS omskifter med en fleksibel og fri omskiftermembran

Info

Publication number
DK1705676T3
DK1705676T3 DK05370005T DK05370005T DK1705676T3 DK 1705676 T3 DK1705676 T3 DK 1705676T3 DK 05370005 T DK05370005 T DK 05370005T DK 05370005 T DK05370005 T DK 05370005T DK 1705676 T3 DK1705676 T3 DK 1705676T3
Authority
DK
Denmark
Prior art keywords
switch
flexible
membrane
free
mems
Prior art date
Application number
DK05370005T
Other languages
Danish (da)
English (en)
Inventor
Olivier Millet
Original Assignee
Delfmems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Delfmems filed Critical Delfmems
Application granted granted Critical
Publication of DK1705676T3 publication Critical patent/DK1705676T3/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/018—Switches not provided for in B81B2201/014 - B81B2201/016
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Electrotherapy Devices (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Switches That Are Operated By Magnetic Or Electric Fields (AREA)
  • Push-Button Switches (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Burglar Alarm Systems (AREA)
DK05370005T 2005-03-21 2005-03-21 RF MEMS omskifter med en fleksibel og fri omskiftermembran DK1705676T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05370005A EP1705676B9 (en) 2005-03-21 2005-03-21 RF MEMS switch with a flexible and free switch membrane

Publications (1)

Publication Number Publication Date
DK1705676T3 true DK1705676T3 (da) 2008-02-18

Family

ID=34942756

Family Applications (1)

Application Number Title Priority Date Filing Date
DK05370005T DK1705676T3 (da) 2005-03-21 2005-03-21 RF MEMS omskifter med en fleksibel og fri omskiftermembran

Country Status (19)

Country Link
US (1) US7834722B2 (es)
EP (1) EP1705676B9 (es)
JP (1) JP4637234B2 (es)
KR (1) KR101230284B1 (es)
CN (1) CN101147223B (es)
AT (1) ATE376704T1 (es)
AU (1) AU2006226642B2 (es)
BR (1) BRPI0611549A2 (es)
CA (1) CA2602187C (es)
DE (1) DE602005003008T2 (es)
DK (1) DK1705676T3 (es)
ES (1) ES2296116T3 (es)
IL (1) IL185992A (es)
MX (1) MX2007011641A (es)
PT (1) PT1705676E (es)
RU (1) RU2433499C2 (es)
UA (1) UA94039C2 (es)
WO (1) WO2006099945A1 (es)
ZA (1) ZA200707988B (es)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7627812B2 (en) 2005-10-27 2009-12-01 Microsoft Corporation Variable formatting of cells
US8461948B2 (en) * 2007-09-25 2013-06-11 The United States Of America As Represented By The Secretary Of The Army Electronic ohmic shunt RF MEMS switch and method of manufacture
DE102009006421A1 (de) * 2009-01-22 2010-07-29 E.G.O. Elektro-Gerätebau GmbH Bedieneinrichtung für ein Elektrogerät
DK2230679T3 (da) 2009-03-20 2012-07-30 Delfmems MEMS-struktur med en fleksibel membran og forbedrede elektriske påvirkningsmidler
US8354899B2 (en) * 2009-09-23 2013-01-15 General Electric Company Switch structure and method
CN102074771A (zh) * 2011-01-06 2011-05-25 东南大学 一种微固支梁式射频开关
EP2506282B1 (en) 2011-03-28 2013-09-11 Delfmems RF MEMS crosspoint switch and crosspoint switch matrix comprising RF MEMS crosspoint switches
US9641174B2 (en) * 2011-04-11 2017-05-02 The Regents Of The University Of California Use of micro-structured plate for controlling capacitance of mechanical capacitor switches
US9085454B2 (en) * 2011-07-05 2015-07-21 Duality Reality Energy, LLC Reduced stiffness micro-mechanical structure
EP2807675B1 (en) 2012-01-23 2018-09-05 The Regents of The University of Michigan Photoconductive device with plasmonic electrodes
CN108439325B (zh) 2013-03-15 2023-03-14 瑞声科技(新加坡)有限公司 微电子机械系统装置及调整其可动部件的形状的方法
FR3006808B1 (fr) * 2013-06-06 2015-05-29 St Microelectronics Rousset Dispositif de commutation integre electriquement activable
WO2015021100A1 (en) * 2013-08-06 2015-02-12 The Regents Of The University Of Michigan Reconfigurable device for terahertz (thz) and infrared (ir) filtering and modulation
RU2527942C1 (ru) * 2013-11-05 2014-09-10 Общество С Ограниченной Ответственностью "Научно-Производственное Предприятие "Технология" Способ изготовления электростатического силового мэмс ключа
CN103762123A (zh) * 2014-01-21 2014-04-30 西安电子科技大学 一种静电驱动双稳态rfmems开关
EP3038126A1 (en) * 2014-12-22 2016-06-29 DelfMEMS SAS MEMS structure with thick movable membrane
EP3038125A1 (en) 2014-12-22 2016-06-29 DelfMEMS SAS Mems structure with multilayer membrane
FR3031098A1 (fr) * 2014-12-26 2016-07-01 Delfmems Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane mobile en translation et une electrode d'actionnement isolee de la membrane par une couche dielectrique
FR3031096A1 (fr) * 2014-12-26 2016-07-01 Delfmems Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane qui est mobile en translation et est profilee pour reduire les courts-circuits et la formation d'arcs electriques
US10863895B2 (en) 2015-05-27 2020-12-15 The Regents Of The University Of California Terahertz endoscopy through laser-driven terahertz sources and detectors
CN108291846B (zh) * 2015-12-07 2020-08-04 尼尔斯·奥格·尤尔·艾勒森 测压仪
KR200481233Y1 (ko) 2015-12-31 2016-09-01 한지흠 마비된 중풍 손가락의 관절과 근육 물리치료용 운동기구
KR200480523Y1 (ko) 2015-12-31 2016-06-29 한지흠 펄스모양 회전축을 구비한 중풍 손 물리치료 기구
CN105680132B (zh) * 2016-03-16 2018-06-29 西安电子科技大学 一种太赫兹波阻抗易调谐空气共面波导结构及其制备方法
FR3051784B1 (fr) * 2016-05-24 2018-05-25 Airmems Membrane mems a ligne de transmission integree
RU169456U1 (ru) * 2016-07-06 2017-03-21 Общество с ограниченной ответственностью "Базовые технологии" Трехбитный РЧ МЭМС варактор
WO2018195429A1 (en) 2017-04-20 2018-10-25 The Regents Of The University Of California Systems and methods for high frequency nanoscopy
WO2018223068A1 (en) 2017-06-01 2018-12-06 The Regents Of The University Of California Metallo-graphene nanocomposites and methods for using metallo-graphene nanocomposites for electromagnetic energy conversion
CN113195399A (zh) * 2018-10-16 2021-07-30 弗劳恩霍夫应用研究促进协会 作为致动器的弯曲换能器、作为传感器的弯曲换能器、以及弯曲换能器系统
RU2705564C1 (ru) * 2018-12-20 2019-11-08 федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) Интегральный микроэлектромеханический переключатель
RU2705792C1 (ru) * 2018-12-26 2019-11-12 федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) Интегральный микроэлектромеханический переключатель
CN110212805B (zh) * 2019-05-30 2020-12-25 上海集成电路研发中心有限公司 一种改善翘曲程度的mems结构
WO2021067635A1 (en) 2019-10-01 2021-04-08 The Regents Of The University Of California Method for identifying chemical and structural variations through terahertz time-domain spectroscopy
US20220276615A1 (en) * 2021-02-26 2022-09-01 Honeywell International Inc. Thermal metamaterial for low power mems thermal control

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6717496B2 (en) * 2001-11-13 2004-04-06 The Board Of Trustees Of The University Of Illinois Electromagnetic energy controlled low actuation voltage microelectromechanical switch
US20040050674A1 (en) * 2002-09-14 2004-03-18 Rubel Paul John Mechanically bi-stable mems relay device
KR100513723B1 (ko) * 2002-11-18 2005-09-08 삼성전자주식회사 Ｍｅｍｓ스위치
JP4066928B2 (ja) * 2002-12-12 2008-03-26 株式会社村田製作所 Ｒｆｍｅｍｓスイッチ
JP2004319215A (ja) * 2003-04-15 2004-11-11 Murata Mfg Co Ltd 静電駆動素子
US6882256B1 (en) * 2003-06-20 2005-04-19 Northrop Grumman Corporation Anchorless electrostatically activated micro electromechanical system switch
JP4364565B2 (ja) * 2003-07-02 2009-11-18 シャープ株式会社 静電アクチュエーター，マイクロスイッチ，マイクロ光スイッチ，電子機器および静電アクチュエーターの製造方法
FR2858459B1 (fr) * 2003-08-01 2006-03-10 Commissariat Energie Atomique Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant
US20070188846A1 (en) * 2003-09-03 2007-08-16 Slicker James M MEMS switch with bistable element having straight beam components
US7348870B2 (en) * 2005-01-05 2008-03-25 International Business Machines Corporation Structure and method of fabricating a hinge type MEMS switch

Also Published As

Publication number Publication date
CN101147223B (zh) 2010-09-08
PT1705676E (pt) 2008-02-07
RU2007134310A (ru) 2009-04-27
JP4637234B2 (ja) 2011-02-23
CN101147223A (zh) 2008-03-19
IL185992A (en) 2011-08-31
MX2007011641A (es) 2008-01-18
AU2006226642B2 (en) 2010-11-11
US7834722B2 (en) 2010-11-16
EP1705676B9 (en) 2010-08-11
ZA200707988B (en) 2008-06-25
ES2296116T3 (es) 2008-04-16
EP1705676B1 (en) 2007-10-24
AU2006226642A1 (en) 2006-09-28
KR101230284B1 (ko) 2013-02-06
DE602005003008D1 (de) 2007-12-06
KR20080004467A (ko) 2008-01-09
CA2602187A1 (en) 2006-09-28
UA94039C2 (en) 2011-04-11
CA2602187C (en) 2014-05-06
ATE376704T1 (de) 2007-11-15
US20080237024A1 (en) 2008-10-02
WO2006099945A1 (en) 2006-09-28
RU2433499C2 (ru) 2011-11-10
DE602005003008T2 (de) 2008-08-14
IL185992A0 (en) 2008-01-20
BRPI0611549A2 (pt) 2010-09-21
JP2008533690A (ja) 2008-08-21
EP1705676A1 (en) 2006-09-27

Similar Documents

Publication Publication Date Title
DK1705676T3 (da) RF MEMS omskifter med en fleksibel og fri omskiftermembran
DE50212832D1 (de) Bewegbarer Möbelteil
NO20053564D0 (no) Bis(3)-alkoksyalkan-2-ol)sulfider, sulfoner og sulfoksider: nye overflateaktive midler.
DE60220558D1 (de) Kraftrückkopplungsmechanismus für Spielsteuerungsvorrichtung
DK1860916T3 (da) Høreapparat med vippeagtig afbryder til ind-/udkobling
TW200720148A (en) Bicycle operating component with electrical shift control switch
WO2006096645A3 (en) Miniaturized switch device
MX352172B (es) Dispositivo de control para interruptores.
SE0101183D0 (sv) Micro electromechanical switches
ATE459082T1 (de) Grossflächiges schaltgerät
ATE469386T1 (de) Bedienelement mit zentralem taster
DK1896401T3 (da) Syntese af umættede sulfider, sulfoner, sulfoxider og sulfonamider
ATE483243T1 (de) Positionsschalter
NO20076497L (no) Artikkel omfattende en knapp som er bevegelig mellom minst to posisjoner
ATE445470T1 (de) SCHALTVORRICHTUNG, INSBESONDERE FUßSCHALTER, FÜR EINE FERTIGUNGSEINRICHTUNG
ATE534134T1 (de) Schaltvorrichtung mit betätigungselement
DK1973131T3 (da) Flervejsomskifter, især for blinde
DE502006004669D1 (de) Schalter mit einer Kupplung zur Befestigung einer Betätigungsvorrichtung
DE602004025223D1 (de) Erdungsschalter
ATE382518T1 (de) Selektive betätigungseinrichtung
HK1097719A1 (en) Anastomosis applier
WO2004068259A3 (de) Bedieneinrichtung mit haptischer rückmeldung
DK1744335T3 (da) Koblingsindretning til elektriske husinstallationer
DE50209085D1 (de) MEMS-Kontaktanordnung und Mikro-Relais
DE502004002488D1 (de) Elektrisches schaltermodul