MX2007011641A - Conmutador con sistema micro-electromecanicode radiofrecuencia con una membrana conmutadora flexible y libre. - Google Patents
Conmutador con sistema micro-electromecanicode radiofrecuencia con una membrana conmutadora flexible y libre.Info
- Publication number
- MX2007011641A MX2007011641A MX2007011641A MX2007011641A MX2007011641A MX 2007011641 A MX2007011641 A MX 2007011641A MX 2007011641 A MX2007011641 A MX 2007011641A MX 2007011641 A MX2007011641 A MX 2007011641A MX 2007011641 A MX2007011641 A MX 2007011641A
- Authority
- MX
- Mexico
- Prior art keywords
- switch
- flexible
- membrane
- free
- mems
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/01—Switches
- B81B2201/012—Switches characterised by the shape
- B81B2201/018—Switches not provided for in B81B2201/014 - B81B2201/016
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
- Electrotherapy Devices (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Push-Button Switches (AREA)
- Burglar Alarm Systems (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
El conmutador RF MEMS comprende medios de conmutacion micromecanica que estan portados por un sustrato (1) y que pueden activarse entre dos posiciones: una primera posicion (estado desactivado/figura 1) y una segunda posicion (estado activado), y unos medios de activacion para activar la posicion de los medios de conmutacion; los medios de conmutacion micromecanica comprenden una membrana flexible (6) la cual esta sostenida libremente por los medios de soporte (3), la cual puede doblarse bajo la accion de los medios de activacion (7) y la cual puede deslizarse libremente con relacion a los medios de soporte (3) durante su movimiento de doblez.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05370005A EP1705676B9 (en) | 2005-03-21 | 2005-03-21 | RF MEMS switch with a flexible and free switch membrane |
PCT/EP2006/002076 WO2006099945A1 (en) | 2005-03-21 | 2006-03-07 | Rf mems switch a flexible and free switch membrane |
Publications (1)
Publication Number | Publication Date |
---|---|
MX2007011641A true MX2007011641A (es) | 2008-01-18 |
Family
ID=34942756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2007011641A MX2007011641A (es) | 2005-03-21 | 2006-03-07 | Conmutador con sistema micro-electromecanicode radiofrecuencia con una membrana conmutadora flexible y libre. |
Country Status (19)
Country | Link |
---|---|
US (1) | US7834722B2 (es) |
EP (1) | EP1705676B9 (es) |
JP (1) | JP4637234B2 (es) |
KR (1) | KR101230284B1 (es) |
CN (1) | CN101147223B (es) |
AT (1) | ATE376704T1 (es) |
AU (1) | AU2006226642B2 (es) |
BR (1) | BRPI0611549A2 (es) |
CA (1) | CA2602187C (es) |
DE (1) | DE602005003008T2 (es) |
DK (1) | DK1705676T3 (es) |
ES (1) | ES2296116T3 (es) |
IL (1) | IL185992A (es) |
MX (1) | MX2007011641A (es) |
PT (1) | PT1705676E (es) |
RU (1) | RU2433499C2 (es) |
UA (1) | UA94039C2 (es) |
WO (1) | WO2006099945A1 (es) |
ZA (1) | ZA200707988B (es) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7627812B2 (en) | 2005-10-27 | 2009-12-01 | Microsoft Corporation | Variable formatting of cells |
US8461948B2 (en) * | 2007-09-25 | 2013-06-11 | The United States Of America As Represented By The Secretary Of The Army | Electronic ohmic shunt RF MEMS switch and method of manufacture |
DE102009006421A1 (de) * | 2009-01-22 | 2010-07-29 | E.G.O. Elektro-Gerätebau GmbH | Bedieneinrichtung für ein Elektrogerät |
DK2230679T3 (da) | 2009-03-20 | 2012-07-30 | Delfmems | MEMS-struktur med en fleksibel membran og forbedrede elektriske påvirkningsmidler |
US8354899B2 (en) * | 2009-09-23 | 2013-01-15 | General Electric Company | Switch structure and method |
CN102074771A (zh) * | 2011-01-06 | 2011-05-25 | 东南大学 | 一种微固支梁式射频开关 |
PL2506282T3 (pl) | 2011-03-28 | 2014-02-28 | Delfmems | Przełącznik krzyżowy RF MEMS i matryca przełączników krzyżowych zawierająca przełączniki krzyżowe RF MEMS |
US9641174B2 (en) * | 2011-04-11 | 2017-05-02 | The Regents Of The University Of California | Use of micro-structured plate for controlling capacitance of mechanical capacitor switches |
US9085454B2 (en) * | 2011-07-05 | 2015-07-21 | Duality Reality Energy, LLC | Reduced stiffness micro-mechanical structure |
WO2013112608A1 (en) | 2012-01-23 | 2013-08-01 | The Regents Of The University Of Michigan | Photoconductive device with plasmonic electrodes |
EP2969912A4 (en) | 2013-03-15 | 2016-11-09 | Wispry Inc | DEVICES AND METHODS FOR CONTROLLING AND SEPARATING ACTUATOR PLATES |
FR3006808B1 (fr) * | 2013-06-06 | 2015-05-29 | St Microelectronics Rousset | Dispositif de commutation integre electriquement activable |
US9859079B2 (en) | 2013-08-06 | 2018-01-02 | The Regents Of The University Of Michigan | Reconfigurable device for terahertz (THz) and infrared (IR) filtering and modulation |
RU2527942C1 (ru) * | 2013-11-05 | 2014-09-10 | Общество С Ограниченной Ответственностью "Научно-Производственное Предприятие "Технология" | Способ изготовления электростатического силового мэмс ключа |
CN103762123A (zh) * | 2014-01-21 | 2014-04-30 | 西安电子科技大学 | 一种静电驱动双稳态rfmems开关 |
EP3038126A1 (en) * | 2014-12-22 | 2016-06-29 | DelfMEMS SAS | MEMS structure with thick movable membrane |
EP3038125A1 (en) | 2014-12-22 | 2016-06-29 | DelfMEMS SAS | Mems structure with multilayer membrane |
FR3031098A1 (fr) * | 2014-12-26 | 2016-07-01 | Delfmems | Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane mobile en translation et une electrode d'actionnement isolee de la membrane par une couche dielectrique |
FR3031096A1 (fr) * | 2014-12-26 | 2016-07-01 | Delfmems | Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane qui est mobile en translation et est profilee pour reduire les courts-circuits et la formation d'arcs electriques |
EP3302224B1 (en) | 2015-05-27 | 2020-10-14 | The Regents of The University of California | Terahertz endoscopy through laser-driven terahertz sources and detectors |
CN108291846B (zh) * | 2015-12-07 | 2020-08-04 | 尼尔斯·奥格·尤尔·艾勒森 | 测压仪 |
KR200480523Y1 (ko) | 2015-12-31 | 2016-06-29 | 한지흠 | 펄스모양 회전축을 구비한 중풍 손 물리치료 기구 |
KR200481233Y1 (ko) | 2015-12-31 | 2016-09-01 | 한지흠 | 마비된 중풍 손가락의 관절과 근육 물리치료용 운동기구 |
CN105680132B (zh) * | 2016-03-16 | 2018-06-29 | 西安电子科技大学 | 一种太赫兹波阻抗易调谐空气共面波导结构及其制备方法 |
FR3051784B1 (fr) * | 2016-05-24 | 2018-05-25 | Airmems | Membrane mems a ligne de transmission integree |
RU169456U1 (ru) * | 2016-07-06 | 2017-03-21 | Общество с ограниченной ответственностью "Базовые технологии" | Трехбитный РЧ МЭМС варактор |
WO2018195429A1 (en) | 2017-04-20 | 2018-10-25 | The Regents Of The University Of California | Systems and methods for high frequency nanoscopy |
EP3635752B1 (en) | 2017-06-01 | 2023-12-27 | The Regents of The University of California | Metallo-graphene nanocomposites and methods for using metallo-graphene nanocomposites for electromagnetic energy conversion |
JP7176108B2 (ja) * | 2018-10-16 | 2022-11-21 | フラウンホファー ゲセルシャフト ツール フェールデルンク ダー アンゲヴァンテン フォルシュンク エー.ファオ. | アクチュエータとしての曲げ変換器、センサとしての曲げ変換器、曲げ変換器システム |
RU2705564C1 (ru) * | 2018-12-20 | 2019-11-08 | федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) | Интегральный микроэлектромеханический переключатель |
RU2705792C1 (ru) * | 2018-12-26 | 2019-11-12 | федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) | Интегральный микроэлектромеханический переключатель |
CN110212805B (zh) * | 2019-05-30 | 2020-12-25 | 上海集成电路研发中心有限公司 | 一种改善翘曲程度的mems结构 |
EP4038366A4 (en) | 2019-10-01 | 2024-03-06 | Univ California | METHOD FOR IDENTIFYING CHEMICAL AND STRUCTURAL VARIATIONS BY TERAHERTZ SPECTROSCOPY IN THE TIME DOMAIN |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6717496B2 (en) * | 2001-11-13 | 2004-04-06 | The Board Of Trustees Of The University Of Illinois | Electromagnetic energy controlled low actuation voltage microelectromechanical switch |
US20040050674A1 (en) * | 2002-09-14 | 2004-03-18 | Rubel Paul John | Mechanically bi-stable mems relay device |
KR100513723B1 (ko) * | 2002-11-18 | 2005-09-08 | 삼성전자주식회사 | Mems스위치 |
JP4066928B2 (ja) * | 2002-12-12 | 2008-03-26 | 株式会社村田製作所 | Rfmemsスイッチ |
JP2004319215A (ja) * | 2003-04-15 | 2004-11-11 | Murata Mfg Co Ltd | 静電駆動素子 |
US6882256B1 (en) * | 2003-06-20 | 2005-04-19 | Northrop Grumman Corporation | Anchorless electrostatically activated micro electromechanical system switch |
JP4364565B2 (ja) * | 2003-07-02 | 2009-11-18 | シャープ株式会社 | 静電アクチュエーター,マイクロスイッチ,マイクロ光スイッチ,電子機器および静電アクチュエーターの製造方法 |
FR2858459B1 (fr) * | 2003-08-01 | 2006-03-10 | Commissariat Energie Atomique | Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant |
US20070188846A1 (en) * | 2003-09-03 | 2007-08-16 | Slicker James M | MEMS switch with bistable element having straight beam components |
US7348870B2 (en) * | 2005-01-05 | 2008-03-25 | International Business Machines Corporation | Structure and method of fabricating a hinge type MEMS switch |
-
2005
- 2005-03-21 DK DK05370005T patent/DK1705676T3/da active
- 2005-03-21 PT PT05370005T patent/PT1705676E/pt unknown
- 2005-03-21 ES ES05370005T patent/ES2296116T3/es active Active
- 2005-03-21 DE DE602005003008T patent/DE602005003008T2/de active Active
- 2005-03-21 EP EP05370005A patent/EP1705676B9/en not_active Not-in-force
- 2005-03-21 AT AT05370005T patent/ATE376704T1/de active
-
2006
- 2006-03-07 RU RU2007134310/07A patent/RU2433499C2/ru not_active IP Right Cessation
- 2006-03-07 MX MX2007011641A patent/MX2007011641A/es unknown
- 2006-03-07 CN CN2006800092844A patent/CN101147223B/zh not_active Expired - Fee Related
- 2006-03-07 US US11/886,684 patent/US7834722B2/en not_active Expired - Fee Related
- 2006-03-07 WO PCT/EP2006/002076 patent/WO2006099945A1/en not_active Application Discontinuation
- 2006-03-07 BR BRPI0611549-7A patent/BRPI0611549A2/pt not_active Application Discontinuation
- 2006-03-07 KR KR1020077021560A patent/KR101230284B1/ko not_active IP Right Cessation
- 2006-03-07 CA CA2602187A patent/CA2602187C/en not_active Expired - Fee Related
- 2006-03-07 AU AU2006226642A patent/AU2006226642B2/en not_active Ceased
- 2006-03-07 JP JP2008502274A patent/JP4637234B2/ja not_active Expired - Fee Related
- 2006-07-03 UA UAA200710442A patent/UA94039C2/ru unknown
-
2007
- 2007-09-17 IL IL185992A patent/IL185992A/en not_active IP Right Cessation
- 2007-09-17 ZA ZA200707988A patent/ZA200707988B/en unknown
Also Published As
Publication number | Publication date |
---|---|
JP2008533690A (ja) | 2008-08-21 |
DE602005003008D1 (de) | 2007-12-06 |
DK1705676T3 (da) | 2008-02-18 |
ATE376704T1 (de) | 2007-11-15 |
ES2296116T3 (es) | 2008-04-16 |
AU2006226642A1 (en) | 2006-09-28 |
EP1705676B1 (en) | 2007-10-24 |
US20080237024A1 (en) | 2008-10-02 |
WO2006099945A1 (en) | 2006-09-28 |
CA2602187A1 (en) | 2006-09-28 |
PT1705676E (pt) | 2008-02-07 |
EP1705676B9 (en) | 2010-08-11 |
RU2007134310A (ru) | 2009-04-27 |
JP4637234B2 (ja) | 2011-02-23 |
IL185992A (en) | 2011-08-31 |
DE602005003008T2 (de) | 2008-08-14 |
CN101147223A (zh) | 2008-03-19 |
KR20080004467A (ko) | 2008-01-09 |
UA94039C2 (en) | 2011-04-11 |
EP1705676A1 (en) | 2006-09-27 |
KR101230284B1 (ko) | 2013-02-06 |
ZA200707988B (en) | 2008-06-25 |
CN101147223B (zh) | 2010-09-08 |
RU2433499C2 (ru) | 2011-11-10 |
AU2006226642B2 (en) | 2010-11-11 |
US7834722B2 (en) | 2010-11-16 |
CA2602187C (en) | 2014-05-06 |
BRPI0611549A2 (pt) | 2010-09-21 |
IL185992A0 (en) | 2008-01-20 |
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