ATE376704T1 - Rf mems schalter mit einer flexiblen und freien schaltmembran - Google Patents
Rf mems schalter mit einer flexiblen und freien schaltmembranInfo
- Publication number
- ATE376704T1 ATE376704T1 AT05370005T AT05370005T ATE376704T1 AT E376704 T1 ATE376704 T1 AT E376704T1 AT 05370005 T AT05370005 T AT 05370005T AT 05370005 T AT05370005 T AT 05370005T AT E376704 T1 ATE376704 T1 AT E376704T1
- Authority
- AT
- Austria
- Prior art keywords
- mems switch
- flexible
- free switching
- switching membrane
- switching means
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/01—Switches
- B81B2201/012—Switches characterised by the shape
- B81B2201/018—Switches not provided for in B81B2201/014 - B81B2201/016
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05370005A EP1705676B9 (de) | 2005-03-21 | 2005-03-21 | RF MEMS Schalter mit einer flexiblen und freien Schaltmembran |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE376704T1 true ATE376704T1 (de) | 2007-11-15 |
Family
ID=34942756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05370005T ATE376704T1 (de) | 2005-03-21 | 2005-03-21 | Rf mems schalter mit einer flexiblen und freien schaltmembran |
Country Status (19)
Country | Link |
---|---|
US (1) | US7834722B2 (de) |
EP (1) | EP1705676B9 (de) |
JP (1) | JP4637234B2 (de) |
KR (1) | KR101230284B1 (de) |
CN (1) | CN101147223B (de) |
AT (1) | ATE376704T1 (de) |
AU (1) | AU2006226642B2 (de) |
BR (1) | BRPI0611549A2 (de) |
CA (1) | CA2602187C (de) |
DE (1) | DE602005003008T2 (de) |
DK (1) | DK1705676T3 (de) |
ES (1) | ES2296116T3 (de) |
IL (1) | IL185992A (de) |
MX (1) | MX2007011641A (de) |
PT (1) | PT1705676E (de) |
RU (1) | RU2433499C2 (de) |
UA (1) | UA94039C2 (de) |
WO (1) | WO2006099945A1 (de) |
ZA (1) | ZA200707988B (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7627812B2 (en) | 2005-10-27 | 2009-12-01 | Microsoft Corporation | Variable formatting of cells |
US8461948B2 (en) * | 2007-09-25 | 2013-06-11 | The United States Of America As Represented By The Secretary Of The Army | Electronic ohmic shunt RF MEMS switch and method of manufacture |
DE102009006421A1 (de) * | 2009-01-22 | 2010-07-29 | E.G.O. Elektro-Gerätebau GmbH | Bedieneinrichtung für ein Elektrogerät |
ES2388126T3 (es) | 2009-03-20 | 2012-10-09 | Delfmems | Estructura de tipo MEMS con una membrana flexible y medios de accionamiento eléctrico mejorados |
US8354899B2 (en) * | 2009-09-23 | 2013-01-15 | General Electric Company | Switch structure and method |
CN102074771A (zh) * | 2011-01-06 | 2011-05-25 | 东南大学 | 一种微固支梁式射频开关 |
EP2506282B1 (de) * | 2011-03-28 | 2013-09-11 | Delfmems | RF-MEMS-Kreuzpunktschalter und Kreuzpunktschaltermatrix mit RF-MEMS-Kreuzpunktschaltern |
US9641174B2 (en) * | 2011-04-11 | 2017-05-02 | The Regents Of The University Of California | Use of micro-structured plate for controlling capacitance of mechanical capacitor switches |
US9085454B2 (en) * | 2011-07-05 | 2015-07-21 | Duality Reality Energy, LLC | Reduced stiffness micro-mechanical structure |
WO2013112608A1 (en) | 2012-01-23 | 2013-08-01 | The Regents Of The University Of Michigan | Photoconductive device with plasmonic electrodes |
CN108439325B (zh) | 2013-03-15 | 2023-03-14 | 瑞声科技(新加坡)有限公司 | 微电子机械系统装置及调整其可动部件的形状的方法 |
FR3006808B1 (fr) * | 2013-06-06 | 2015-05-29 | St Microelectronics Rousset | Dispositif de commutation integre electriquement activable |
WO2015021100A1 (en) * | 2013-08-06 | 2015-02-12 | The Regents Of The University Of Michigan | Reconfigurable device for terahertz (thz) and infrared (ir) filtering and modulation |
RU2527942C1 (ru) * | 2013-11-05 | 2014-09-10 | Общество С Ограниченной Ответственностью "Научно-Производственное Предприятие "Технология" | Способ изготовления электростатического силового мэмс ключа |
CN103762123A (zh) * | 2014-01-21 | 2014-04-30 | 西安电子科技大学 | 一种静电驱动双稳态rfmems开关 |
EP3038126A1 (de) * | 2014-12-22 | 2016-06-29 | DelfMEMS SAS | MEMS-Struktur mit dicker bewegbarer Membran |
EP3038125A1 (de) * | 2014-12-22 | 2016-06-29 | DelfMEMS SAS | MEMS-Struktur mit mehrschichtiger Membran |
FR3031098A1 (fr) * | 2014-12-26 | 2016-07-01 | Delfmems | Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane mobile en translation et une electrode d'actionnement isolee de la membrane par une couche dielectrique |
FR3031096A1 (fr) * | 2014-12-26 | 2016-07-01 | Delfmems | Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane qui est mobile en translation et est profilee pour reduire les courts-circuits et la formation d'arcs electriques |
JP6860210B2 (ja) | 2015-05-27 | 2021-04-14 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニアThe Regents Of The University Of California | レーザ駆動式テラヘルツ源および検出器を通したテラヘルツ内視鏡検査 |
EP3387402B1 (de) * | 2015-12-07 | 2021-04-07 | EILERSEN, Nils Aage Juul | Kraftmesszelle |
KR200480523Y1 (ko) | 2015-12-31 | 2016-06-29 | 한지흠 | 펄스모양 회전축을 구비한 중풍 손 물리치료 기구 |
KR200481233Y1 (ko) | 2015-12-31 | 2016-09-01 | 한지흠 | 마비된 중풍 손가락의 관절과 근육 물리치료용 운동기구 |
CN105680132B (zh) * | 2016-03-16 | 2018-06-29 | 西安电子科技大学 | 一种太赫兹波阻抗易调谐空气共面波导结构及其制备方法 |
FR3051784B1 (fr) * | 2016-05-24 | 2018-05-25 | Airmems | Membrane mems a ligne de transmission integree |
RU169456U1 (ru) * | 2016-07-06 | 2017-03-21 | Общество с ограниченной ответственностью "Базовые технологии" | Трехбитный РЧ МЭМС варактор |
WO2018195429A1 (en) | 2017-04-20 | 2018-10-25 | The Regents Of The University Of California | Systems and methods for high frequency nanoscopy |
EP3635752B1 (de) | 2017-06-01 | 2023-12-27 | The Regents of The University of California | Metallo-graphen-nanokomposite und verfahren zur verwendung von metallo-graphen-nanokompositen zur umwandlung elektromagnetischer energie |
CN113195399A (zh) * | 2018-10-16 | 2021-07-30 | 弗劳恩霍夫应用研究促进协会 | 作为致动器的弯曲换能器、作为传感器的弯曲换能器、以及弯曲换能器系统 |
RU2705564C1 (ru) * | 2018-12-20 | 2019-11-08 | федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) | Интегральный микроэлектромеханический переключатель |
RU2705792C1 (ru) * | 2018-12-26 | 2019-11-12 | федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) | Интегральный микроэлектромеханический переключатель |
CN110212805B (zh) * | 2019-05-30 | 2020-12-25 | 上海集成电路研发中心有限公司 | 一种改善翘曲程度的mems结构 |
WO2021067635A1 (en) | 2019-10-01 | 2021-04-08 | The Regents Of The University Of California | Method for identifying chemical and structural variations through terahertz time-domain spectroscopy |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6717496B2 (en) * | 2001-11-13 | 2004-04-06 | The Board Of Trustees Of The University Of Illinois | Electromagnetic energy controlled low actuation voltage microelectromechanical switch |
US20040050674A1 (en) * | 2002-09-14 | 2004-03-18 | Rubel Paul John | Mechanically bi-stable mems relay device |
KR100513723B1 (ko) * | 2002-11-18 | 2005-09-08 | 삼성전자주식회사 | Mems스위치 |
JP4066928B2 (ja) * | 2002-12-12 | 2008-03-26 | 株式会社村田製作所 | Rfmemsスイッチ |
JP2004319215A (ja) * | 2003-04-15 | 2004-11-11 | Murata Mfg Co Ltd | 静電駆動素子 |
US6882256B1 (en) * | 2003-06-20 | 2005-04-19 | Northrop Grumman Corporation | Anchorless electrostatically activated micro electromechanical system switch |
JP4364565B2 (ja) * | 2003-07-02 | 2009-11-18 | シャープ株式会社 | 静電アクチュエーター,マイクロスイッチ,マイクロ光スイッチ,電子機器および静電アクチュエーターの製造方法 |
FR2858459B1 (fr) * | 2003-08-01 | 2006-03-10 | Commissariat Energie Atomique | Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant |
US20070188846A1 (en) * | 2003-09-03 | 2007-08-16 | Slicker James M | MEMS switch with bistable element having straight beam components |
US7348870B2 (en) * | 2005-01-05 | 2008-03-25 | International Business Machines Corporation | Structure and method of fabricating a hinge type MEMS switch |
-
2005
- 2005-03-21 EP EP05370005A patent/EP1705676B9/de not_active Not-in-force
- 2005-03-21 DK DK05370005T patent/DK1705676T3/da active
- 2005-03-21 DE DE602005003008T patent/DE602005003008T2/de active Active
- 2005-03-21 AT AT05370005T patent/ATE376704T1/de active
- 2005-03-21 ES ES05370005T patent/ES2296116T3/es active Active
- 2005-03-21 PT PT05370005T patent/PT1705676E/pt unknown
-
2006
- 2006-03-07 RU RU2007134310/07A patent/RU2433499C2/ru not_active IP Right Cessation
- 2006-03-07 CN CN2006800092844A patent/CN101147223B/zh not_active Expired - Fee Related
- 2006-03-07 JP JP2008502274A patent/JP4637234B2/ja not_active Expired - Fee Related
- 2006-03-07 CA CA2602187A patent/CA2602187C/en not_active Expired - Fee Related
- 2006-03-07 US US11/886,684 patent/US7834722B2/en not_active Expired - Fee Related
- 2006-03-07 WO PCT/EP2006/002076 patent/WO2006099945A1/en not_active Application Discontinuation
- 2006-03-07 AU AU2006226642A patent/AU2006226642B2/en not_active Ceased
- 2006-03-07 BR BRPI0611549-7A patent/BRPI0611549A2/pt not_active Application Discontinuation
- 2006-03-07 KR KR1020077021560A patent/KR101230284B1/ko not_active IP Right Cessation
- 2006-03-07 MX MX2007011641A patent/MX2007011641A/es unknown
- 2006-07-03 UA UAA200710442A patent/UA94039C2/ru unknown
-
2007
- 2007-09-17 ZA ZA200707988A patent/ZA200707988B/en unknown
- 2007-09-17 IL IL185992A patent/IL185992A/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1705676A1 (de) | 2006-09-27 |
EP1705676B1 (de) | 2007-10-24 |
JP4637234B2 (ja) | 2011-02-23 |
RU2007134310A (ru) | 2009-04-27 |
IL185992A0 (en) | 2008-01-20 |
RU2433499C2 (ru) | 2011-11-10 |
IL185992A (en) | 2011-08-31 |
CN101147223B (zh) | 2010-09-08 |
WO2006099945A1 (en) | 2006-09-28 |
ES2296116T3 (es) | 2008-04-16 |
AU2006226642A1 (en) | 2006-09-28 |
US7834722B2 (en) | 2010-11-16 |
CA2602187A1 (en) | 2006-09-28 |
US20080237024A1 (en) | 2008-10-02 |
KR101230284B1 (ko) | 2013-02-06 |
ZA200707988B (en) | 2008-06-25 |
EP1705676B9 (de) | 2010-08-11 |
DE602005003008D1 (de) | 2007-12-06 |
CA2602187C (en) | 2014-05-06 |
DE602005003008T2 (de) | 2008-08-14 |
AU2006226642B2 (en) | 2010-11-11 |
DK1705676T3 (da) | 2008-02-18 |
MX2007011641A (es) | 2008-01-18 |
CN101147223A (zh) | 2008-03-19 |
UA94039C2 (en) | 2011-04-11 |
KR20080004467A (ko) | 2008-01-09 |
JP2008533690A (ja) | 2008-08-21 |
PT1705676E (pt) | 2008-02-07 |
BRPI0611549A2 (pt) | 2010-09-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification |
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