ATE349762T1 - Mems-kontaktanordnung und mikro-relais - Google Patents

Mems-kontaktanordnung und mikro-relais

Info

Publication number
ATE349762T1
ATE349762T1 AT02405741T AT02405741T ATE349762T1 AT E349762 T1 ATE349762 T1 AT E349762T1 AT 02405741 T AT02405741 T AT 02405741T AT 02405741 T AT02405741 T AT 02405741T AT E349762 T1 ATE349762 T1 AT E349762T1
Authority
AT
Austria
Prior art keywords
contact
contact arrangement
micro relay
micro
mems contact
Prior art date
Application number
AT02405741T
Other languages
English (en)
Inventor
Ralf Struempler
Sami Kotilainen
Jan-Henning Fabian
Original Assignee
Abb Research Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Abb Research Ltd filed Critical Abb Research Ltd
Application granted granted Critical
Publication of ATE349762T1 publication Critical patent/ATE349762T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/24—Contacts characterised by the manner in which co-operating contacts engage by abutting with resilient mounting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/36—Contacts characterised by the manner in which co-operating contacts engage by sliding
    • H01H1/38—Plug-and-socket contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H01H1/52—Contacts adapted to act as latches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H01H2001/0047—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet operable only by mechanical latching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
AT02405741T 2002-08-30 2002-08-30 Mems-kontaktanordnung und mikro-relais ATE349762T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02405741A EP1394825B1 (de) 2002-08-30 2002-08-30 MEMS-Kontaktanordnung und Mikro-Relais

Publications (1)

Publication Number Publication Date
ATE349762T1 true ATE349762T1 (de) 2007-01-15

Family

ID=31198013

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02405741T ATE349762T1 (de) 2002-08-30 2002-08-30 Mems-kontaktanordnung und mikro-relais

Country Status (3)

Country Link
EP (1) EP1394825B1 (de)
AT (1) ATE349762T1 (de)
DE (1) DE50209085D1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006043512A1 (de) * 2006-05-22 2007-11-29 Continental Teves Ag & Co. Ohg Beschleunigungsschalter
DE102022200336A1 (de) * 2022-01-13 2023-07-13 Robert Bosch Gesellschaft mit beschränkter Haftung Kontaktelement eines MEMS-Relais

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6020564A (en) * 1998-06-04 2000-02-01 Wang Electro-Opto Corporation Low-voltage long life electrostatic microelectromechanical system switches for radio-frequency applications
DE19950373B4 (de) * 1998-10-23 2005-06-30 Rohde & Schwarz Gmbh & Co. Kg Mikromechanisches Relais mit federndem Kontakt und Verfahren zum Herstellen desselben
US6587021B1 (en) * 2000-11-09 2003-07-01 Raytheon Company Micro-relay contact structure for RF applications
WO2002058089A1 (en) * 2001-01-19 2002-07-25 Massachusetts Institute Of Technology Bistable actuation techniques, mechanisms, and applications

Also Published As

Publication number Publication date
EP1394825B1 (de) 2006-12-27
DE50209085D1 (de) 2007-02-08
EP1394825A1 (de) 2004-03-03

Similar Documents

Publication Publication Date Title
ATE394344T1 (de) Miniaturrelais und entsprechende verwendungen davon und verfahren zum schalten des relais
ATE388480T1 (de) Membranakivierter mikroelektromechanischer schalter
ATE533171T1 (de) Mikro-elektromechanischer systemschalter
IL185992A0 (en) Rf mems switch a flexible and free switch membrane
ATE487436T1 (de) Munddusche mit zwei miteinander verbindbaren gehäusen
WO2003014789A3 (en) Microsystem switches
EP1202311A3 (de) Schiebeschalter
TW200703399A (en) Micro electromechanical switch and method of manufacturing the same
TW200513433A (en) MEMS having a three-wafer structure
MY135407A (en) Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation
ES2192952B1 (es) Interruptor electrico a membrana, con siete posiciones de contacto.
WO2006096645A3 (en) Miniaturized switch device
ATE486408T1 (de) Bedienverfahren und bedieneinrichtung für ein elektrogerät
ES2176041T3 (es) Conmutador electrico.
ATE459082T1 (de) Grossflächiges schaltgerät
WO2006036560A3 (en) Mems switches with deforming membranes
DE60103235D1 (de) Druckschalter für Starkstrom
ATE349762T1 (de) Mems-kontaktanordnung und mikro-relais
DE502004002996D1 (de) Elektrische Schalter
DE602004025223D1 (de) Erdungsschalter
DE50213032D1 (de) Schaltkontaktanordnung mit einer einrichtung zur verstärkung einer zwischen schaltkontakten wirkenden kontaktkraft
DE50302154D1 (de) Handbetätigbares, elektrisches Bedienungsteil
ATE331293T1 (de) Elektrischer mehrwegeschalter
EP1428721A3 (de) Kombinationsschaltgerät
ATE398829T1 (de) Schalteinrichtung für elektrische hausinstallationen

Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee