ATE394344T1 - Miniaturrelais und entsprechende verwendungen davon und verfahren zum schalten des relais - Google Patents

Miniaturrelais und entsprechende verwendungen davon und verfahren zum schalten des relais

Info

Publication number
ATE394344T1
ATE394344T1 AT03772360T AT03772360T ATE394344T1 AT E394344 T1 ATE394344 T1 AT E394344T1 AT 03772360 T AT03772360 T AT 03772360T AT 03772360 T AT03772360 T AT 03772360T AT E394344 T1 ATE394344 T1 AT E394344T1
Authority
AT
Austria
Prior art keywords
relay
switching
applicable uses
miniature relays
conductor
Prior art date
Application number
AT03772360T
Other languages
English (en)
Inventor
Silvestre Josep Montanya
Original Assignee
Baolab Microsystems Sl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Baolab Microsystems Sl filed Critical Baolab Microsystems Sl
Application granted granted Critical
Publication of ATE394344T1 publication Critical patent/ATE394344T1/de

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733Structural details or topology
    • G01C19/5755Structural details or topology the devices having a single sensing mass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726Signal processing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/093Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • H01H59/0009Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
    • H01H2036/0093Micromechanical switches actuated by a change of the magnetic field
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00Thermally-actuated switches
    • H01H2037/008Micromechanical switches operated thermally
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00Switches operated by change of a physical condition
    • H01H35/02Switches operated by change of position, inclination or orientation of the switch itself in relation to gravitational field
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00Switches operated by change of a physical condition
    • H01H35/14Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00Switches operated by change of a physical condition
    • H01H35/24Switches operated by change of fluid pressure, by fluid pressure waves, or by change of fluid flow
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
AT03772360T 2002-11-19 2003-11-18 Miniaturrelais und entsprechende verwendungen davon und verfahren zum schalten des relais ATE394344T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES200202792 2002-11-19

Publications (1)

Publication Number Publication Date
ATE394344T1 true ATE394344T1 (de) 2008-05-15

Family

ID=32695801

Family Applications (2)

Application Number Title Priority Date Filing Date
AT03772361T ATE322033T1 (de) 2002-11-19 2003-11-18 Elektrooptische miniatureinrichtung und entsprechendeverwendungen dafür
AT03772360T ATE394344T1 (de) 2002-11-19 2003-11-18 Miniaturrelais und entsprechende verwendungen davon und verfahren zum schalten des relais

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT03772361T ATE322033T1 (de) 2002-11-19 2003-11-18 Elektrooptische miniatureinrichtung und entsprechendeverwendungen dafür

Country Status (13)

Country Link
US (2) US7876182B2 (de)
EP (2) EP1564584B1 (de)
JP (2) JP4372689B2 (de)
KR (2) KR20050085065A (de)
CN (2) CN100375921C (de)
AT (2) ATE322033T1 (de)
AU (2) AU2003279414A1 (de)
BR (1) BR0316409A (de)
CA (2) CA2506710A1 (de)
DE (2) DE60320832D1 (de)
ES (3) ES2258735T3 (de)
RU (1) RU2325722C2 (de)
WO (2) WO2004046807A1 (de)

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JP4601528B2 (ja) * 2005-09-15 2010-12-22 ドングク ユニバーシティ インダストリー−アカデミック コオペレーション ファウンデーション プルアップ型接触パッドを利用したマイクロマシーニングスイッチの製造法
ES2259570B1 (es) * 2005-11-25 2007-10-01 Baolab Microsystems S.L. Dispositivo para la conexion de dos puntos de un circuito electrico.
ES2288111B1 (es) * 2006-03-14 2008-10-16 Baolab Microsystems S.L. Conjunto electrooptico reflector miniaturizado para el procesado de una señal luminosa y procedimiento correspondiente.
WO2007104811A1 (es) * 2006-03-10 2007-09-20 Baolab Microsystems S.L. Dispositivo electroóptico reflector y procedimientos de actuación correspondientes
ES2281294B1 (es) * 2006-03-10 2008-09-16 Baolab Microsystems S.L. Dispositivo electrooptico reflector digital miniaturizado.
ES2288110B1 (es) * 2006-03-13 2008-10-16 Baolab Microsystems, S.L. Procedimiento de actuacion de un dispositivo electrooptico reflector miniaturizado y dispositivo correspondiente.
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US8040142B1 (en) 2006-03-31 2011-10-18 Cypress Semiconductor Corporation Touch detection techniques for capacitive touch sense systems
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FR2911129A1 (fr) * 2007-01-08 2008-07-11 Microcomposants De Haute Secur Micro-relais de type mems et procede de fabrication associe
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US9500686B1 (en) 2007-06-29 2016-11-22 Cypress Semiconductor Corporation Capacitance measurement system and methods
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US8570053B1 (en) 2007-07-03 2013-10-29 Cypress Semiconductor Corporation Capacitive field sensor with sigma-delta modulator
US8525798B2 (en) 2008-01-28 2013-09-03 Cypress Semiconductor Corporation Touch sensing
US8319505B1 (en) 2008-10-24 2012-11-27 Cypress Semiconductor Corporation Methods and circuits for measuring mutual and self capacitance
US8358142B2 (en) 2008-02-27 2013-01-22 Cypress Semiconductor Corporation Methods and circuits for measuring mutual and self capacitance
US9104273B1 (en) 2008-02-29 2015-08-11 Cypress Semiconductor Corporation Multi-touch sensing method
US8321174B1 (en) 2008-09-26 2012-11-27 Cypress Semiconductor Corporation System and method to measure capacitance of capacitive sensor array
ES2342872B1 (es) * 2009-05-20 2011-05-30 Baolab Microsystems S.L. Chip que comprende un mems dispuesto en un circuito integrado y procedimiento de fabricacion correspondiente.
TW201234527A (en) 2010-11-19 2012-08-16 Baolab Microsystems Sl Methods and systems for fabrication of MEMS CMOS devices
JP5950336B2 (ja) * 2012-03-22 2016-07-13 矢崎総業株式会社 電子部品モジュール
US11780725B2 (en) 2020-01-08 2023-10-10 Nanusens SL MEMS device built using the BEOL metal layers of a solid state semiconductor process
CN113782356B (zh) * 2021-07-23 2023-06-16 宁波金宸科技有限公司 一种基于液压传动的继电器
CN115355836B (zh) * 2022-08-18 2023-12-19 西安铁路信号有限责任公司 一种继电器绝对间隙的测量方法

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Also Published As

Publication number Publication date
AU2003279415A1 (en) 2004-06-15
CN100375921C (zh) 2008-03-19
RU2325722C2 (ru) 2008-05-27
US7446300B2 (en) 2008-11-04
JP4351634B2 (ja) 2009-10-28
ES2239549A1 (es) 2005-09-16
CN100410165C (zh) 2008-08-13
WO2004046807A1 (es) 2004-06-03
ES2305527T3 (es) 2008-11-01
CN1729136A (zh) 2006-02-01
JP2006506674A (ja) 2006-02-23
ES2258735T3 (es) 2006-09-01
AU2003279414A1 (en) 2004-06-15
ATE322033T1 (de) 2006-04-15
EP1564584B1 (de) 2006-03-29
DE60320832D1 (de) 2008-06-19
EP1564584A1 (de) 2005-08-17
US20060152739A1 (en) 2006-07-13
DE60304355T2 (de) 2006-10-19
BR0316409A (pt) 2005-10-11
CN1729425A (zh) 2006-02-01
KR20050083929A (ko) 2005-08-26
EP1564182A1 (de) 2005-08-17
DE60304355D1 (de) 2006-05-18
CA2506775A1 (en) 2004-06-03
JP2006506785A (ja) 2006-02-23
JP4372689B2 (ja) 2009-11-25
CA2506710A1 (en) 2004-06-03
ES2239549B1 (es) 2006-06-16
KR20050085065A (ko) 2005-08-29
WO2004046019A1 (es) 2004-06-03
US7876182B2 (en) 2011-01-25
RU2005119166A (ru) 2006-01-20
US20060021864A1 (en) 2006-02-02
EP1564182B1 (de) 2008-05-07

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