ATE388480T1 - Membranakivierter mikroelektromechanischer schalter - Google Patents

Membranakivierter mikroelektromechanischer schalter

Info

Publication number
ATE388480T1
ATE388480T1 AT02768707T AT02768707T ATE388480T1 AT E388480 T1 ATE388480 T1 AT E388480T1 AT 02768707 T AT02768707 T AT 02768707T AT 02768707 T AT02768707 T AT 02768707T AT E388480 T1 ATE388480 T1 AT E388480T1
Authority
AT
Austria
Prior art keywords
membrane
switch
cavity
plunger
electrodes
Prior art date
Application number
AT02768707T
Other languages
English (en)
Inventor
Christopher Jahnes
Jennifer Lund
Katherine Saenger
Richard Volant
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of ATE388480T1 publication Critical patent/ATE388480T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay

Landscapes

  • Micromachines (AREA)
  • Push-Button Switches (AREA)
  • Amplifiers (AREA)
  • Air Bags (AREA)
  • Electronic Switches (AREA)
AT02768707T 2002-08-26 2002-08-26 Membranakivierter mikroelektromechanischer schalter ATE388480T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2002/027115 WO2004019362A1 (en) 2002-08-26 2002-08-26 Diaphragm activated micro-electromechanical switch

Publications (1)

Publication Number Publication Date
ATE388480T1 true ATE388480T1 (de) 2008-03-15

Family

ID=31945421

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02768707T ATE388480T1 (de) 2002-08-26 2002-08-26 Membranakivierter mikroelektromechanischer schalter

Country Status (8)

Country Link
US (1) US7256670B2 (de)
EP (1) EP1535297B1 (de)
JP (1) JP4045274B2 (de)
CN (1) CN1317727C (de)
AT (1) ATE388480T1 (de)
AU (1) AU2002331725A1 (de)
DE (1) DE60225484T2 (de)
WO (1) WO2004019362A1 (de)

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US7999635B1 (en) 2008-07-29 2011-08-16 Silicon Laboratories Inc. Out-of plane MEMS resonator with static out-of-plane deflection
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US9641174B2 (en) * 2011-04-11 2017-05-02 The Regents Of The University Of California Use of micro-structured plate for controlling capacitance of mechanical capacitor switches
US8754338B2 (en) * 2011-05-28 2014-06-17 Banpil Photonics, Inc. On-chip interconnects with reduced capacitance and method of afbrication
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CN105391340B (zh) * 2014-09-01 2018-06-29 三星电机株式会社 压电能量收集器和包括其的无线开关
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FR3051458B1 (fr) * 2016-05-20 2020-09-04 Univ Limoges Commutateur variable microelectromecanique radiofrequence
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WO2019118109A2 (en) * 2017-11-10 2019-06-20 Visca, Llc Rapid assessment device for radiation exposure
US11078071B2 (en) * 2018-10-19 2021-08-03 Encite Llc Haptic actuators fabricated by roll-to-roll processing
US11107594B2 (en) * 2018-10-31 2021-08-31 Ge-Hitachi Nuclear Energy Americas Llc Passive electrical component for safety system shutdown using Gauss' Law
CN109911845A (zh) * 2019-03-07 2019-06-21 无锡众创未来科技应用有限公司 一种低功耗静电驱动式rf mems开关的制造方法
CN109820267B (zh) * 2019-03-25 2024-11-26 成都柔电云科科技有限公司 一种静态手势识别手套
CN109820266A (zh) * 2019-03-25 2019-05-31 成都柔电云科科技有限公司 一种手指弯曲识别手套
CN110212805B (zh) * 2019-05-30 2020-12-25 上海集成电路研发中心有限公司 一种改善翘曲程度的mems结构
EP4256597A1 (de) * 2020-12-04 2023-10-11 Clean Energy Labs, LLC Elektrisch leitender membrandruckschalter
CN114113813B (zh) * 2021-11-24 2022-06-28 北京中科飞龙传感技术有限责任公司 一种自适应型mems电场传感器及其结构
FR3138657A1 (fr) 2022-08-08 2024-02-09 Airmems Commutateur MEMS à multiples déformations et commutateur comprenant un ou plusieurs commutateurs MEMS
DE102023209781A1 (de) * 2023-10-06 2025-04-10 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanischer Schalter

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Also Published As

Publication number Publication date
EP1535297B1 (de) 2008-03-05
CN1650383A (zh) 2005-08-03
AU2002331725A1 (en) 2004-03-11
EP1535297A1 (de) 2005-06-01
EP1535297A4 (de) 2007-07-18
JP2005536847A (ja) 2005-12-02
WO2004019362A1 (en) 2004-03-04
US20060017533A1 (en) 2006-01-26
CN1317727C (zh) 2007-05-23
JP4045274B2 (ja) 2008-02-13
DE60225484T2 (de) 2009-03-12
DE60225484D1 (de) 2008-04-17
US7256670B2 (en) 2007-08-14

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