DE60225484D1 - Membranakivierter mikroelektromechanischer schalter - Google Patents

Membranakivierter mikroelektromechanischer schalter

Info

Publication number
DE60225484D1
DE60225484D1 DE60225484T DE60225484T DE60225484D1 DE 60225484 D1 DE60225484 D1 DE 60225484D1 DE 60225484 T DE60225484 T DE 60225484T DE 60225484 T DE60225484 T DE 60225484T DE 60225484 D1 DE60225484 D1 DE 60225484D1
Authority
DE
Germany
Prior art keywords
membrane
switch
cavity
plunger
activated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60225484T
Other languages
English (en)
Other versions
DE60225484T2 (de
Inventor
Christopher V Jahnes
Jennifer L Lund
Katherine L Saenger
Richard P Volant
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE60225484D1 publication Critical patent/DE60225484D1/de
Application granted granted Critical
Publication of DE60225484T2 publication Critical patent/DE60225484T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay

Landscapes

  • Micromachines (AREA)
  • Push-Button Switches (AREA)
  • Air Bags (AREA)
  • Amplifiers (AREA)
  • Electronic Switches (AREA)
DE60225484T 2002-08-26 2002-08-26 Membranakivierter mikroelektromechanischer schalter Expired - Lifetime DE60225484T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2002/027115 WO2004019362A1 (en) 2002-08-26 2002-08-26 Diaphragm activated micro-electromechanical switch

Publications (2)

Publication Number Publication Date
DE60225484D1 true DE60225484D1 (de) 2008-04-17
DE60225484T2 DE60225484T2 (de) 2009-03-12

Family

ID=31945421

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60225484T Expired - Lifetime DE60225484T2 (de) 2002-08-26 2002-08-26 Membranakivierter mikroelektromechanischer schalter

Country Status (8)

Country Link
US (1) US7256670B2 (de)
EP (1) EP1535297B1 (de)
JP (1) JP4045274B2 (de)
CN (1) CN1317727C (de)
AT (1) ATE388480T1 (de)
AU (1) AU2002331725A1 (de)
DE (1) DE60225484T2 (de)
WO (1) WO2004019362A1 (de)

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FR2876220B1 (fr) 2004-10-06 2007-09-28 Commissariat Energie Atomique Procede d'elaboration de structures empilees mixtes, a zones isolantes diverses et/ou zones de conduction electrique verticale localisees.
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FR2897982B1 (fr) 2006-02-27 2008-07-11 Tracit Technologies Sa Procede de fabrication des structures de type partiellement soi, comportant des zones reliant une couche superficielle et un substrat
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EP1850360A1 (de) * 2006-04-26 2007-10-31 Seiko Epson Corporation Mikroschalter mit einem ersten betätigbaren Teil und mit einem zweiten Kontaktteil
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US7923790B1 (en) 2007-03-09 2011-04-12 Silicon Laboratories Inc. Planar microshells for vacuum encapsulated devices and damascene method of manufacture
US7736929B1 (en) 2007-03-09 2010-06-15 Silicon Clocks, Inc. Thin film microshells incorporating a getter layer
US7659150B1 (en) 2007-03-09 2010-02-09 Silicon Clocks, Inc. Microshells for multi-level vacuum cavities
US8421305B2 (en) * 2007-04-17 2013-04-16 The University Of Utah Research Foundation MEMS devices and systems actuated by an energy field
US7864006B2 (en) * 2007-05-09 2011-01-04 Innovative Micro Technology MEMS plate switch and method of manufacture
US7999335B2 (en) 2007-12-05 2011-08-16 Semiconductor Energy Laboratory Co., Ltd. Micromachine and method for manufacturing the same
US8384500B2 (en) * 2007-12-13 2013-02-26 Broadcom Corporation Method and system for MEMS switches fabricated in an integrated circuit package
US8592925B2 (en) * 2008-01-11 2013-11-26 Seiko Epson Corporation Functional device with functional structure of a microelectromechanical system disposed in a cavity of a substrate, and manufacturing method thereof
FR2930352B1 (fr) * 2008-04-21 2010-09-17 Commissariat Energie Atomique Membrane perfectionnee notamment pour dispositif optique a membrane deformable
US7999635B1 (en) 2008-07-29 2011-08-16 Silicon Laboratories Inc. Out-of plane MEMS resonator with static out-of-plane deflection
JP5385117B2 (ja) 2009-12-17 2014-01-08 富士フイルム株式会社 圧電ｍｅｍｓスイッチの製造方法
US9641174B2 (en) * 2011-04-11 2017-05-02 The Regents Of The University Of California Use of micro-structured plate for controlling capacitance of mechanical capacitor switches
US8754338B2 (en) * 2011-05-28 2014-06-17 Banpil Photonics, Inc. On-chip interconnects with reduced capacitance and method of afbrication
US8471641B2 (en) 2011-06-30 2013-06-25 Silicon Laboratories Inc. Switchable electrode for power handling
CN204029730U (zh) * 2011-09-27 2014-12-17 西门子公司 接触器
US9530537B2 (en) 2011-09-30 2016-12-27 Dow Global Technologies Llc Halogen-free propylene-based insulation and conductor coated with same
JP5813471B2 (ja) * 2011-11-11 2015-11-17 株式会社東芝 Ｍｅｍｓ素子
EP2780925B1 (de) * 2011-12-21 2018-09-05 Siemens Aktiengesellschaft Schütz
US9496110B2 (en) * 2013-06-18 2016-11-15 Globalfoundries Inc. Micro-electro-mechanical system (MEMS) structure and design structures
US9637371B2 (en) 2014-07-25 2017-05-02 Semiconductor Manufacturing International (Shanghai) Corporation Membrane transducer structures and methods of manufacturing same using thin-film encapsulation
US10125010B2 (en) 2014-07-30 2018-11-13 Hewlett-Packard Development Company, L.P. Elastic device
US9330874B2 (en) 2014-08-11 2016-05-03 Innovative Micro Technology Solder bump sealing method and device
CN105391340B (zh) * 2014-09-01 2018-06-29 三星电机株式会社 压电能量收集器和包括其的无线开关
US9847782B2 (en) * 2015-03-20 2017-12-19 Sanjay Dinkar KARKHANIS Push or slide type capacitor switch
GB201519620D0 (en) * 2015-11-06 2015-12-23 Univ Manchester Device and method of fabricating such a device
US10104478B2 (en) 2015-11-13 2018-10-16 Infineon Technologies Ag System and method for a perpendicular electrode transducer
ITUB20159497A1 (it) * 2015-12-24 2017-06-24 St Microelectronics Srl Dispositivo piezoelettrico mems e relativo procedimento di fabbricazione
FR3051458B1 (fr) * 2016-05-20 2020-09-04 Univ Limoges Commutateur variable microelectromecanique radiofrequence
DE102016111909B4 (de) * 2016-06-29 2020-08-13 Infineon Technologies Ag Mikromechanische Struktur und Verfahren zu ihrer Herstellung
US11192104B2 (en) * 2017-11-10 2021-12-07 Visca, Llc Rapid assessment device for radiation exposure
US11078071B2 (en) * 2018-10-19 2021-08-03 Encite Llc Haptic actuators fabricated by roll-to-roll processing
US11107594B2 (en) * 2018-10-31 2021-08-31 Ge-Hitachi Nuclear Energy Americas Llc Passive electrical component for safety system shutdown using Gauss' Law
CN109911845A (zh) * 2019-03-07 2019-06-21 无锡众创未来科技应用有限公司 一种低功耗静电驱动式rf mems开关的制造方法
CN109820266A (zh) * 2019-03-25 2019-05-31 成都柔电云科科技有限公司 一种手指弯曲识别手套
CN109820267A (zh) * 2019-03-25 2019-05-31 成都柔电云科科技有限公司 一种静态手势识别手套
CN110212805B (zh) * 2019-05-30 2020-12-25 上海集成电路研发中心有限公司 一种改善翘曲程度的mems结构
CN114113813B (zh) * 2021-11-24 2022-06-28 北京中科飞龙传感技术有限责任公司 一种自适应型mems电场传感器及其结构
FR3138657A1 (fr) 2022-08-08 2024-02-09 Airmems Commutateur MEMS à multiples déformations et commutateur comprenant un ou plusieurs commutateurs MEMS

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JP4066928B2 (ja) * 2002-12-12 2008-03-26 株式会社村田製作所 Ｒｆｍｅｍｓスイッチ

Also Published As

Publication number Publication date
CN1650383A (zh) 2005-08-03
JP4045274B2 (ja) 2008-02-13
JP2005536847A (ja) 2005-12-02
EP1535297A1 (de) 2005-06-01
ATE388480T1 (de) 2008-03-15
WO2004019362A1 (en) 2004-03-04
DE60225484T2 (de) 2009-03-12
EP1535297A4 (de) 2007-07-18
US7256670B2 (en) 2007-08-14
CN1317727C (zh) 2007-05-23
AU2002331725A1 (en) 2004-03-11
US20060017533A1 (en) 2006-01-26
EP1535297B1 (de) 2008-03-05

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Legal Events

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8364 No opposition during term of opposition