DE602004010156D1 - Elektrisch drehbarer mikrospiegel oder mikrolinse - Google Patents

Elektrisch drehbarer mikrospiegel oder mikrolinse

Info

Publication number
DE602004010156D1
DE602004010156D1 DE602004010156T DE602004010156T DE602004010156D1 DE 602004010156 D1 DE602004010156 D1 DE 602004010156D1 DE 602004010156 T DE602004010156 T DE 602004010156T DE 602004010156 T DE602004010156 T DE 602004010156T DE 602004010156 D1 DE602004010156 D1 DE 602004010156D1
Authority
DE
Germany
Prior art keywords
microline
electrically rotatable
electrode
free end
rotatable microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004010156T
Other languages
English (en)
Other versions
DE602004010156T2 (de
Inventor
Fabien Filhol
Claire Divoux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE602004010156D1 publication Critical patent/DE602004010156D1/de
Application granted granted Critical
Publication of DE602004010156T2 publication Critical patent/DE602004010156T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Mechanical Optical Scanning Systems (AREA)
DE602004010156T 2003-09-08 2004-09-07 Elektrisch drehbarer mikrospiegel oder mikrolinse Active DE602004010156T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0350508 2003-09-08
FR0350508A FR2859541B1 (fr) 2003-09-08 2003-09-08 Micro-miroir actionnable electriquement en rotation
PCT/FR2004/002265 WO2005026814A1 (fr) 2003-09-08 2004-09-07 Micro-miroir ou micro-lentille actionnable electriquement en rotation

Publications (2)

Publication Number Publication Date
DE602004010156D1 true DE602004010156D1 (de) 2007-12-27
DE602004010156T2 DE602004010156T2 (de) 2008-09-04

Family

ID=34178989

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004010156T Active DE602004010156T2 (de) 2003-09-08 2004-09-07 Elektrisch drehbarer mikrospiegel oder mikrolinse

Country Status (7)

Country Link
US (1) US7408695B2 (de)
EP (1) EP1664896B1 (de)
JP (1) JP4435164B2 (de)
AT (1) ATE378617T1 (de)
DE (1) DE602004010156T2 (de)
FR (1) FR2859541B1 (de)
WO (1) WO2005026814A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4550653B2 (ja) * 2005-04-15 2010-09-22 富士通株式会社 マイクロ可動素子および光スイッチング装置
FR2887537B1 (fr) * 2005-06-23 2007-09-07 Commissariat Energie Atomique Actionneur electrostatique, dispositif comportant de tels actionneurs, microsysteme comportant un tel dispositif et procede de realisation d'un tel actionneur
JP4895196B2 (ja) * 2007-01-10 2012-03-14 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP2009063637A (ja) * 2007-09-04 2009-03-26 Fujifilm Corp 光走査プローブおよび光走査プローブ装置並びに光走査プローブの制御方法
EP2107038B1 (de) * 2008-03-31 2012-05-16 Imec Elektrostatisch betätigbare MEMS-Vorrichtung mit verringerter Substrataufladung
US9025234B2 (en) * 2009-01-22 2015-05-05 E Ink California, Llc Luminance enhancement structure with varying pitches
US9269536B2 (en) * 2012-04-17 2016-02-23 Varian Semiconductor Equipment Associates, Inc. Double ended electrode manipulator

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6115231A (en) * 1997-11-25 2000-09-05 Tdk Corporation Electrostatic relay
US6496612B1 (en) * 1999-09-23 2002-12-17 Arizona State University Electronically latching micro-magnetic switches and method of operating same
US6632374B1 (en) * 2000-09-28 2003-10-14 Xerox Corporation Method for an optical switch on a silicon on insulator substrate
US6735004B1 (en) * 2001-03-15 2004-05-11 Nanogear, Inc. Rotatable counterbalanced actuator

Also Published As

Publication number Publication date
US20070091406A1 (en) 2007-04-26
EP1664896A1 (de) 2006-06-07
FR2859541B1 (fr) 2005-10-14
DE602004010156T2 (de) 2008-09-04
JP2007505335A (ja) 2007-03-08
ATE378617T1 (de) 2007-11-15
FR2859541A1 (fr) 2005-03-11
WO2005026814A1 (fr) 2005-03-24
US7408695B2 (en) 2008-08-05
EP1664896B1 (de) 2007-11-14
JP4435164B2 (ja) 2010-03-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition