ATE536623T1 - Federstruktur für mems-vorrichtung - Google Patents

Federstruktur für mems-vorrichtung

Info

Publication number
ATE536623T1
ATE536623T1 AT05807167T AT05807167T ATE536623T1 AT E536623 T1 ATE536623 T1 AT E536623T1 AT 05807167 T AT05807167 T AT 05807167T AT 05807167 T AT05807167 T AT 05807167T AT E536623 T1 ATE536623 T1 AT E536623T1
Authority
AT
Austria
Prior art keywords
movable element
movable
electrode
section
electrodes
Prior art date
Application number
AT05807167T
Other languages
English (en)
Inventor
Peter G Steeneken
Beek Jozef Thomas Martinus Van
Theo Rijks
Original Assignee
Epcos Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos Ag filed Critical Epcos Ag
Application granted granted Critical
Publication of ATE536623T1 publication Critical patent/ATE536623T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/24—Contacts characterised by the manner in which co-operating contacts engage by abutting with resilient mounting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
AT05807167T 2004-10-27 2005-10-24 Federstruktur für mems-vorrichtung ATE536623T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP04105335 2004-10-27
PCT/IB2005/053475 WO2006046192A1 (en) 2004-10-27 2005-10-24 Spring structure for mems device

Publications (1)

Publication Number Publication Date
ATE536623T1 true ATE536623T1 (de) 2011-12-15

Family

ID=35717471

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05807167T ATE536623T1 (de) 2004-10-27 2005-10-24 Federstruktur für mems-vorrichtung

Country Status (6)

Country Link
US (1) US8098120B2 (de)
EP (1) EP1807856B1 (de)
JP (1) JP5259188B2 (de)
CN (1) CN101048840B (de)
AT (1) ATE536623T1 (de)
WO (1) WO2006046192A1 (de)

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US8063886B2 (en) * 2006-07-18 2011-11-22 Iee International Electronics & Engineering S.A. Data input device
JP4867007B2 (ja) * 2006-08-30 2012-02-01 国立大学法人 鹿児島大学 Ｍｅｍｓスイッチ及び携帯無線端末機器
WO2008152559A2 (en) 2007-06-13 2008-12-18 Nxp B.V. Controller for tunable mems capacitor
JP5189881B2 (ja) * 2007-06-27 2013-04-24 株式会社エヌ・ティ・ティ・ドコモ 可変回路、通信システム
US8363380B2 (en) * 2009-05-28 2013-01-29 Qualcomm Incorporated MEMS varactors
JP5348032B2 (ja) * 2010-03-16 2013-11-20 セイコーエプソン株式会社 光フィルター並びにそれを用いた分析機器及び光機器
US9203489B2 (en) 2010-05-05 2015-12-01 Google Technology Holdings LLC Method and precoder information feedback in multi-antenna wireless communication systems
KR101136820B1 (ko) 2010-05-28 2012-04-19 주식회사 넥스비보 미소기계 구동기
JP5593903B2 (ja) * 2010-07-16 2014-09-24 富士通株式会社 可変容量素子
JP5177209B2 (ja) 2010-11-24 2013-04-03 株式会社デンソー ファブリペロー干渉計
JP5807353B2 (ja) * 2011-03-18 2015-11-10 セイコーエプソン株式会社 光フィルター及び光フィルターモジュール並びに分析機器及び光機器
US9085454B2 (en) * 2011-07-05 2015-07-21 Duality Reality Energy, LLC Reduced stiffness micro-mechanical structure
US9813262B2 (en) 2012-12-03 2017-11-07 Google Technology Holdings LLC Method and apparatus for selectively transmitting data using spatial diversity
US9591508B2 (en) 2012-12-20 2017-03-07 Google Technology Holdings LLC Methods and apparatus for transmitting data between different peer-to-peer communication groups
US9979531B2 (en) 2013-01-03 2018-05-22 Google Technology Holdings LLC Method and apparatus for tuning a communication device for multi band operation
US10229697B2 (en) 2013-03-12 2019-03-12 Google Technology Holdings LLC Apparatus and method for beamforming to obtain voice and noise signals
US9300227B2 (en) * 2013-06-05 2016-03-29 Silicon Laboratories Inc. Monolithic body MEMS devices
US9386542B2 (en) 2013-09-19 2016-07-05 Google Technology Holdings, LLC Method and apparatus for estimating transmit power of a wireless device
CN104555882B (zh) * 2013-10-10 2016-03-23 原相科技股份有限公司 微机电元件与微机电补偿结构
EP3074763A1 (de) 2013-11-25 2016-10-05 Oil States Industries, Inc. Verfahren und system zur integritätsüberwachung von elastomeren flexiblen kompositelementen
US9301177B2 (en) 2013-12-18 2016-03-29 Google Technology Holdings LLC Method and system to improve antenna tuner reliability
US9549290B2 (en) 2013-12-19 2017-01-17 Google Technology Holdings LLC Method and apparatus for determining direction information for a wireless device
JP2015156611A (ja) * 2014-02-21 2015-08-27 セイコーエプソン株式会社 振動子及びその製造方法、並びに電子装置
CN103943417A (zh) * 2014-04-09 2014-07-23 苏州锟恩电子科技有限公司 一种电容式rf mems开关
US9491007B2 (en) 2014-04-28 2016-11-08 Google Technology Holdings LLC Apparatus and method for antenna matching
US9478847B2 (en) 2014-06-02 2016-10-25 Google Technology Holdings LLC Antenna system and method of assembly for a wearable electronic device
US9334153B1 (en) * 2014-11-03 2016-05-10 Hrl Laboratories, Llc MEMS device connected to a substrate by flexible support structures
DE102017200111B3 (de) * 2017-01-05 2018-03-15 Robert Bosch Gmbh Mikromechanische Schallwandleranordnung und entsprechendes Herstellungsverfahren
CN106851509B (zh) * 2017-03-06 2021-02-19 瑞声声学科技(深圳)有限公司 Mems麦克风
FR3067853A1 (fr) 2017-06-15 2018-12-21 Commissariat A L'energie Atomique Et Aux Energies Alternatives Condensateur a capacite variable electromecanique a quatre electrodes
FR3138657A1 (fr) * 2022-08-08 2024-02-09 Airmems Commutateur MEMS à multiples déformations et commutateur comprenant un ou plusieurs commutateurs MEMS
CN116027543A (zh) * 2022-10-31 2023-04-28 上海集成电路研发中心有限公司 微电子元件及其制备方法、电子设备

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DE4205340C1 (en) 1992-02-21 1993-08-05 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay with parallel electrodes - has frame shaped armature substrate with armature contacts above base electrode contacts on base substrate
EP1024512B8 (de) 1997-10-21 2005-03-23 Omron Corporation Elektrostatisches mikrorelais
US6115231A (en) * 1997-11-25 2000-09-05 Tdk Corporation Electrostatic relay
GB2353410B (en) 1999-08-18 2002-04-17 Marconi Electronic Syst Ltd Electrical switches
US6418006B1 (en) * 2000-12-20 2002-07-09 The Board Of Trustees Of The University Of Illinois Wide tuning range variable MEMs capacitor
KR100738064B1 (ko) 2001-02-27 2007-07-12 삼성전자주식회사 비선형적 복원력의 스프링을 가지는 ｍｅｍｓ 소자
WO2002084732A2 (en) 2001-04-13 2002-10-24 Koninklijke Philips Electronics N.V. Method of manufacturing an electronic device
JP4555950B2 (ja) 2002-10-24 2010-10-06 エプコス アクチエンゲゼルシャフト 微小電気機械装置を製造するための方法及びこの方法により得られる微小電気機械装置
KR100422305B1 (ko) 2002-12-05 2004-03-10 씨제이 주식회사 리보플라빈을 생산하는 미생물 및 이를 이용한리보플라빈의 생산방법
JP4182861B2 (ja) 2002-12-05 2008-11-19 オムロン株式会社 接点開閉器および接点開閉器を備えた装置
DE60328131D1 (de) * 2002-12-13 2009-08-06 Wispry Inc Varactorvorrichtungen und verfahren
WO2005043573A2 (en) 2003-10-31 2005-05-12 Koninklijke Philips Electronics N.V. A method of manufacturing an electronic device and electronic device
US7265477B2 (en) * 2004-01-05 2007-09-04 Chang-Feng Wan Stepping actuator and method of manufacture therefore

Also Published As

Publication number Publication date
JP5259188B2 (ja) 2013-08-07
EP1807856A1 (de) 2007-07-18
JP2008517784A (ja) 2008-05-29
CN101048840A (zh) 2007-10-03
CN101048840B (zh) 2010-06-16
US8098120B2 (en) 2012-01-17
WO2006046192A1 (en) 2006-05-04
EP1807856B1 (de) 2011-12-07
US20080135385A1 (en) 2008-06-12

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