WO2023216739A1 - Appareil de stockage de boîte de matériau en quinconce multiniveaux, dispositif d'évacuation et de tri de matériau, et système de tri - Google Patents

Appareil de stockage de boîte de matériau en quinconce multiniveaux, dispositif d'évacuation et de tri de matériau, et système de tri Download PDF

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Publication number
WO2023216739A1
WO2023216739A1 PCT/CN2023/083871 CN2023083871W WO2023216739A1 WO 2023216739 A1 WO2023216739 A1 WO 2023216739A1 CN 2023083871 W CN2023083871 W CN 2023083871W WO 2023216739 A1 WO2023216739 A1 WO 2023216739A1
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WO
WIPO (PCT)
Prior art keywords
box
material box
assembly
slide rail
staggered
Prior art date
Application number
PCT/CN2023/083871
Other languages
English (en)
Chinese (zh)
Inventor
顾烨
庄再城
吴屹慧
熊勇
曹葵康
薛峰
Original Assignee
苏州天准科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 苏州天准科技股份有限公司 filed Critical 苏州天准科技股份有限公司
Publication of WO2023216739A1 publication Critical patent/WO2023216739A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36—Sorting apparatus characterised by the means used for distribution
    • B07C5/38—Collecting or arranging articles in groups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36—Sorting apparatus characterised by the means used for distribution
    • B07C5/361—Processing or control devices therefor, e.g. escort memory
    • B07C5/362—Separating or distributor mechanisms
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the invention belongs to the field of silicon wafer detection and sorting, and relates to blanking and storage technology. Specifically, it discloses a multi-layer staggered box storage device, blanking and sorting equipment and a sorting system.
  • Silicon wafer sorting machine is an automated inspection and sorting equipment that integrates automation, measurement, and visual defect detection. It is used in the solar silicon wafer production process, such as the blanking disclosed in the patent applied for by our company (publication number CN112605010A) Sorting device and silicon wafer intelligent sorting machine, the sorting machine can realize the thickness, TTV, line marks, resistivity, size, dirt, edge chipping, cracking and other items of the solar silicon wafers sliced and cleaned. Measurement and inspection, and according to the sorting menu, the silicon wafers are automatically sorted into different boxes according to quality grade requirements, fully meeting the quality control needs of the silicon wafer manufacturers, and is an indispensable link in production.
  • the existing silicon wafer storage box mechanism usually includes multiple storage boxes spaced up and down, or storage boxes spaced up and down to avoid vibration (such as our company's CN215390948U patent); however, the above-mentioned box structure limits the use of a single box. Capacity, and the replacement of the material box is time-consuming and laborious, and it is difficult to ensure that the working position of the material box is highly consistent after replacement.
  • the purpose of the present invention is to provide a multi-layer staggered box storage device, a blanking and sorting equipment and a sorting system, which can solve the above problems.
  • the material box storage device includes a material box slide rail assembly, a material box assembly, a staggered driving assembly, a vertical guide rail assembly, a vertical driving assembly, and a material changing warning button arranged on a storage rack.
  • a plurality of the material box slide rail assemblies are arranged horizontally and parallel up and down on the storage rack; one of the material box slide rail assemblies is provided on each of the material box slide rail assemblies, and A plurality of the material box assemblies are arranged staggered up and down; the staggered driving assembly is used to drive the material box assemblies to slide along the material box slide rail assembly to send the material box assemblies to the material receiving position or the box changing position; except for the top layer of materials
  • the box assemblies are all connected to the box slide rail assembly through the vertical guide rail assembly;
  • the vertical drive assembly is drivingly connected to the vertical guide rail assembly and is used to drive the vertical guide rail assembly to move up and down to facilitate Reach the preset material receiving height or exit and replace the material box; multiple of the material changing warning buttons are used to prompt whether the corresponding material box component is full of material and the empty box is in place, and are used to send a material box exit or loading signal to the material box controller ;
  • the staggered drive assembly, the vertical drive assembly and the material change warning button are
  • the storage rack includes a main storage vertical plate and a storage bottom plate for supporting the entire device.
  • the magazine slide rail assembly includes a magazine slide rail, a slide block, a magazine pad, an outer end buffer block and a slide block position sensor; multiple magazine slide rails are installed in parallel up and down to the main storage stand.
  • the slider On the storage surface of the board, the slider is slidably connected to the material box slide rail, and the material box assembly is installed on the slider through the material box pad; the outer end buffer block is installed on the material box slide rail. The outer end is used for buffering the end of the slider; multiple slider position sensors are installed on the main storage vertical plate and are arranged under the slide rail of the box.
  • the magazine assembly includes a magazine adapter, a magazine bracket, a magazine specification adjustment pad, a magazine guide stop column and a resin plate; wherein, the magazine adapter of the top magazine assembly Connect directly to all On the box pad, the box adapters of the lower box assemblies at each level pass through the vertical guide rail assembly and then are connected to the box pad; the box bracket is tilted toward the lower side of the outer end. is connected to the material box adapter, the position of the material box specification adjustment pad is adjustable and installed on the material box bracket, and the material box is set at the outer end of the material box specification adjustment pad
  • the guide stop column and the resin plate with optional specifications are laid on the specification adjustment pad of the material box to directly receive and support the blanking of silicon wafers.
  • the staggered drive assembly includes a box drive motor, a synchronous wheel set, a synchronous belt set and a synchronous belt clamp; the box drive motor and synchronous wheel set are installed on the main storage vertical plate; the synchronous belt set The part parallel to the magazine slide rail is connected to the upper and lower adjacent magazine slide rail assemblies through two synchronous belt clamps to realize the staggered driving of the two upper and lower adjacent magazine slide rail assemblies.
  • the vertical guide rail assembly includes a lifting slide rail and a lifting slide block; the lifting slide block is connected to the magazine pad of the magazine slide rail assembly corresponding to the magazine assembly to be lifted, and the lifting slide rail is The upper part is connected to the magazine adapter of the magazine assembly that needs to be lifted, so that the magazine assembly can slide up and down along the vertical guide rail assembly.
  • the vertical driving assembly includes a lifting cylinder, a lifting solenoid valve, a lifting bottom plate and a lifting bottom limit block.
  • the cylinder body of the lifting cylinder is fixed to the main storage vertical plate.
  • the bottom of the driving rod of the lifting cylinder Connected to the lifting base plate, when the vertical guide rail assembly moves to the lifting bottom limit block, the lifting solenoid valve is activated to drive the lifting base plate to move up and down to realize the lifting drive of the vertical guide rail assembly.
  • the vertical drive assembly includes a lifting cylinder and a lifting solenoid valve.
  • the cylinder body of the lifting cylinder is fixed to the main storage vertical plate.
  • the bottom of the driving rod of the lifting cylinder is connected to the lifting base plate.
  • the lifting and lowering drive of the vertical guide rail assembly is realized under the control of the lifting solenoid valve.
  • the invention also discloses a blanking and sorting equipment.
  • the blanking and sorting equipment includes a slicing device installed on the blanking frame, a material box storage device installed on both discharge ends of the slicing device, and a blanking central axis belt.
  • the top plate frame is arranged above the flow line of the unloading center axis belt; a plurality of slicing devices are arranged at intervals along the flow line of the unloading center axis belt, and their tops are connected to the lower surface of the top plate of the top plate frame.
  • a material box storage device is provided at the left and right ends of each slicing device; the tail material box is placed directly opposite the tail end of the unloading central axis belt streamline, and is used to carry miscellaneous silicon wafers or undetected silicon wafers. Silicon wafer; wherein, the box storage device adopts the aforementioned multi-layer staggered box storage device.
  • the invention also provides an intelligent silicon wafer sorting system.
  • the sorting system includes loading equipment, detection equipment and the aforementioned unloading and sorting equipment; a material type detection device is provided between the loading equipment and the detection equipment. And a debris removal device is used to detect the silicon wafer model and whether it is broken, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the detection equipment.
  • the beneficial effect of the present invention is that: compared with the previous generation or existing material boxes, the multi-layer staggered material box storage device of the present application adopts a staggered arrangement and integrates in-place detection and material full sensing. , the material boxes are staggered to supply and receive materials, which reduces the time caused by changing the material boxes, improves the operating efficiency and production capacity, and facilitates the promotion and application in the fields of silicon wafers and PCBs involving sheet products.
  • Figures 1-3 are schematic views of the multi-layer staggered box storage device of the present invention from different perspectives;
  • Figure 4 is a schematic diagram of the blanking and sorting equipment
  • Figures 5 and 6 are schematic layout diagrams of the multi-layer staggered box storage device, blanking and sorting equipment, and the flow lines of the blanking axis belt;
  • Figure 7 is a schematic diagram of the intelligent silicon wafer sorting system.
  • Pulley protection cover 2501. Lifting slide rail; 2502. Lifting slide block; 2601. Lifting cylinder; 2602. Lifting solenoid valve; 2603. Lifting bottom plate; 2604. Lifting bottom limit block; 2605.
  • Material box position sensor assembly 2700. Material change warning button; 3000, blanking center axis belt streamline; 4000, tailing box; 5000, roof rack; 6000, blanking rack; 7000, blanking transition mechanism; 8000, emergency stop mechanism; 9000, buzzer; 20000, testing equipment; 30000, loading equipment; 40000, material type detection device; 50000, debris removal device.
  • the box storage device 2000 includes a box slide assembly, a box assembly, a staggered drive assembly, a vertical guide rail assembly, and a vertical rail assembly. Direct drive assembly, refueling warning button and magazine controller.
  • a plurality of the material box slide rail assemblies are arranged horizontally and parallel up and down on the storage rack; one of the material box slide rail assemblies is provided on each of the material box slide rail assemblies, and a plurality of the material box slide rail assemblies are arranged on the storage rack.
  • the box assemblies are arranged staggered up and down; the staggered driving assembly is used to drive two groups of adjacent upper and lower box assemblies to slide staggered along the box slide rail assembly to send the box assemblies to the material receiving position or the box changing position; except for the top layer
  • the material box components are all connected to the material box slide rail assembly through the vertical guide rail assembly; the vertical drive component is drivingly connected to The vertical guide rail assembly is used to drive the vertical guide rail assembly to move up and down in order to reach the preset material receiving height or exit the replacement material box; a plurality of the material replacement warning buttons are used to prompt whether the corresponding material box assembly is full of material and The empty box is in place and used to send a box ejection or loading signal to the box controller.
  • the staggered drive component, the vertical drive component and the material change warning button are electrically connected to the material box controller, and the material box controller controls the drive to realize the material receiving, full material withdrawal and replacement of multiple material box components. .
  • the box storage device 2000 uses a double-layer box, using two sets of box slide rail assemblies, two box assemblies, a staggered drive assembly, a vertical guide rail assembly, and a vertical drive. components and two refueling warning buttons.
  • the storage rack includes a main storage vertical plate 2101 and a storage bottom plate 2102, which are used to support the entire device.
  • the storage rack also includes an outer end vertical plate 2103, a main protective cover 2014 and a motor protective cover 2015.
  • the outer end vertical plate 2103 is provided at the outer end of the main storage vertical plate 2101.
  • the main protective cover 2014 is provided at the main storage vertical plate.
  • the motor protective cover 2015 is provided at the outer end vertical plate 2103.
  • the cartridge slide rail assembly includes a cartridge slide rail 2201, a slider 2202, a cartridge pad 2203, an outer end buffer block 2204 and a slider position sensor 2205.
  • a plurality of magazine slide rails 2201 are installed parallel to each other up and down on the storage surface of the main storage vertical plate 2101.
  • the slider 2202 is slidably sleeved on the magazine slide rails 2201.
  • the box assembly is installed on the slider 2202 through the box pad 2203; the outer end buffer block 2204 is installed on the outer end of the box slide rail 2201 for buffering the end of the slider 2202 in place;
  • a plurality of slider position sensors 2205 are installed on the main storage vertical plate 2101 and are arranged below the magazine slide rail 2201 .
  • the material box assembly includes a material box adapter 2301, a material box bracket 2302, a material box specification adjustment piece
  • the magazine adapter 2301 passes through the vertical guide rail assembly and then is connected to the magazine pad 2203; the magazine bracket 2302 is connected to the magazine adapter 2301 at an angle toward the lower side of the outer end.
  • the position of the box specification adjustment pad 2303 is adjustable and installed on the box bracket 2302, and the box guide stop post 2304 is provided at the outer end of the box specification adjustment pad 2303.
  • An optional resin board 2305 is laid on the box specification adjustment pad 2303 to directly receive and support silicon wafer blanking.
  • the lower level material box assemblies also include lifting top limiting blocks 2306, which are provided on the material box adapter 2301 and are arranged directly above the vertical guide rail assembly.
  • box bracket 2302 is L-shaped or concave, and is adjustable front and rear and/or left and right, wherein a long slot hole in the front and rear direction is opened on the bottom plate of the box bracket 2302 for Box specification adjustment pad 2303 position adjustment.
  • the staggered driving assembly includes a box driving motor 2401, a synchronous wheel set, a synchronous belt set and a synchronous belt clamp 2402; the box driving motor 2401 and the synchronous wheel set are installed on the main storage vertical plate 2101.
  • the part of the synchronous belt group that is parallel to the magazine slide rail 2201 is connected to the upper and lower adjacent magazine slide rail assemblies through two synchronous belt clamps 2402 to realize staggered driving of the two upper and lower adjacent magazine slide rail assemblies.
  • the parallel-driven synchronous belt is connected to the slider 2202 or the magazine pad 2203 of the magazine slide rail assembly through two synchronous belt clamps 2402 to realize the staggered driving assembly to drive two adjacent magazine slide rail assemblies and The magazine components move staggered along the magazine slide rail 2201.
  • the synchronous wheel set includes a driving wheel 2403, a double-ended transmission wheel 2404 and a horizontal inner end transmission wheel 2405, wherein the horizontal inner end transmission wheel 2405 and the double-end transmission wheel 2404 have the same specifications and are arranged flush with each other horizontally.
  • the synchronous belt set includes a driving synchronous belt 2406 and a transmission synchronous belt 2407.
  • the driving synchronous belt 2406 is installed on one of the driving wheel 2403 and the double-ended transmission wheel 2404 to realize power input; the transmission
  • the synchronous belt 2407 is arranged on the wheel head of the horizontal inner end transmission wheel 2405 and the double-ended transmission wheel 2404 on the same side.
  • the motor and pulley can also be arranged on the same side, and the conveyor belt uses one belt for a group of box components. These can be arranged according to the actual installation space and scene.
  • a pulley protective cover 2408 is provided at the wheel head of the double-ended transmission wheel 2404 on the same side as the horizontal inner end transmission wheel 2405.
  • the vertical guide rail assembly includes a lifting slide rail 2501 and a lifting slide block 2502; the lifting slide block 2502 is connected with the cartridge pad 2203 of the cartridge slide rail assembly corresponding to the cartridge assembly to be lifted.
  • the upper part of the slide rail 2501 is connected to the magazine adapter 2301 of the magazine assembly that needs to be lifted, so that the magazine assembly can slide up and down along the vertical guide rail assembly.
  • the vertical drive assembly includes a lifting cylinder 2601, a lifting solenoid valve 2602, a lifting bottom plate 2603 and a lifting bottom limit block 2604.
  • the cylinder body of the lifting cylinder 2601 is fixed to the main storage vertical plate 2101.
  • the lifting cylinder 2601 The bottom of the driving rod is connected to the lifting bottom plate 2603.
  • the lifting solenoid valve 2602 is activated to drive the lifting bottom plate 2603 to move up and down to realize the lifting drive of the vertical guide rail assembly. .
  • the vertical drive assembly also includes a material box in-position sensor component 2605.
  • the material box in-position sensor component 2605 is installed on the main storage vertical plate 2101 and is used to detect whether the corresponding material box component in the lower layer reaches the top material receiving position.
  • the number of the refueling warning buttons 2700 is equal to the number of the material box components. They are connected to the top of the main storage vertical plate 2101 through the bottom plate of the material box button.
  • the refueling warning buttons use different display colors to display the material. The box is in place, the box is full and the box is loaded, and press the button in the corresponding state. button to trigger the corresponding drive control signal.
  • the blanking and sorting equipment 10000 includes a slicing device 1000 installed on the blanking frame 6000, and a box storage device installed on both discharge ends of the slicing device 1000. 2000, 3000 for the blanking center axis belt streamline, 4000 for the tail material box and 5000 for the top plate frame.
  • the blanking central axis belt streamline 3000 is installed on the blanking frame 6000 along the central axis, and the top plate frame 5000 is arranged above the blanking central axis belt streamline 3000; multiple points The slicing devices 1000 are arranged at intervals along the cutting axis belt streamline 3000, and the top thereof is connected to the lower surface of the top plate of the top plate frame 5000; a material box is provided at both left and right ends of each slicing device 1000 Storage device 2000; the tail material box 4000 is placed directly opposite the tail end of the blanking axis belt streamline 3000, and is used to carry miscellaneous silicon wafers or untested silicon wafers; wherein, the material box storage device 2000 adopts The aforementioned multi-layer staggered box storage device.
  • the blanking and sorting equipment 10000 also includes a blanking transition mechanism 7000, an emergency stop mechanism 8000, and a buzzer 9000.
  • the blanking transition mechanism 7000 is provided at the front end of the blanking center axis belt streamline 3000 for connecting the upstream
  • the silicon wafers that have been inspected by the process are transitionally guided to the blanking center axis belt streamline 3000 with a flush top surface.
  • a plurality of the emergency stop mechanisms 8000 are arranged around the unloading frame 6000, so that workers can conveniently and quickly stop the machine when encountering an emergency.
  • the buzzer 9000 is installed on the outer periphery of the unloading frame 6000 . Not shown in the figure, alarms such as three-color lights can also be set at the unloading rack 6000.
  • two sets of symmetrically arranged box storage devices 2000 are arranged at the two discharging ends of a slicing device 1000.
  • the unloading central axis belt streamline 3000 transports the detected material from the bottom to the slicing device 1000.
  • silicon wafer The slicing device 1000 transfers silicon wafers according to different types of defects to both ends into the magazine assembly of the magazine storage device 2000, and directly drops onto the resin plate 2305 of the magazine assembly at the material receiving position.
  • the material change warning button 2700 issues a full material warning, and the staff presses the button as needed.
  • the material box assembly retreats to the outer end, and manual or mechanical arms carry the silicon wafers in the material box assembly back to the warehouse.
  • the lower material box assembly extends forward and rises to the material receiving position to continue receiving silicon wafers.
  • the sorting system includes a loading equipment 30000, a detection equipment 20000 and the aforementioned unloading and sorting equipment 10000; it is set between the loading equipment 30000 and the detection equipment 20000.
  • the material type detection device 40000 and the fragment removal device 50000 are used to detect the silicon wafer model and whether it is broken, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the detection equipment 20000.
  • the system's unloading and sorting equipment 10000 adopts a non-contact adsorption slicing device 1000, which improves the efficiency of sorting and slicing.
  • the multi-layer staggered box storage device improves the efficiency of box replacement; the testing equipment 20000 integrates multiple tests. Including but not limited to the measurement and detection of thickness, TTV, line marks, resistivity, size, dirt, chipping, cracks and other items, the detection items can be modularized according to actual needs; the debris is removed in advance through the debris removal device 50000 Elimination improves the overall production capacity of the system.

Abstract

La présente invention concerne un appareil de stockage de boîte de matériau en quinconce multiniveaux (2000), un dispositif d'évacuation et de tri de matériau (10000), et un système de tri, qui se rapportent à la technologie d'évacuation et de collecte de matériau dans le domaine des semi-conducteurs ou du photovoltaïque. L'appareil de stockage de boîte de matériau comprend des ensembles rails de coulissement de boîte de matériau, des ensembles boîtes de matériau, un ensemble d'entraînement en quinconce, un ensemble rail de guidage vertical, un ensemble d'entraînement vertical, des boutons d'avertissement de remplacement de matériau (2700), et un dispositif de commande de boîte de matériau qui sont agencés sur un rayonnage d'entreposage ; l'ensemble d'entraînement en quinconce est utilisé pour entraîner verticalement des ensembles boîtes de matériau adjacents pour coulisser le long des ensembles rails de coulissement de boîte de matériau, de façon à envoyer les ensembles boîtes de matériau à un site de réception de matériau ou à un site de remplacement de boîte. Par rapport à une génération actuelle ou précédente de boîtes de matériau, le présent appareil de stockage de boîte de matériau en quinconce multiniveaux utilise une configuration en quinconce et intègre une détection de position, détectant un remplissage complet, et une alimentation en quinconce de boîtes de matériau pour la réception de matériau ; le temps consacré au remplacement de boîte de matériau est raccourci, l'efficacité de fonctionnement et la capacité de production sont améliorées, et la présente invention facilite la promotion et l'application dans les domaines des tranches de silicium et des cartes de circuit imprimé parmi des produits de matériau en feuille.
PCT/CN2023/083871 2022-05-09 2023-03-24 Appareil de stockage de boîte de matériau en quinconce multiniveaux, dispositif d'évacuation et de tri de matériau, et système de tri WO2023216739A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202210496627.5A CN114871157B (zh) 2022-05-09 2022-05-09 多层交错式料盒收纳装置、下料分选设备和分选系统
CN202210496627.5 2022-05-09

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WO2023216739A1 true WO2023216739A1 (fr) 2023-11-16

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WO (1) WO2023216739A1 (fr)

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CN116727260A (zh) * 2023-04-25 2023-09-12 浙江赛摩智能科技有限公司 多工位ai缺陷视觉检测系统
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