WO2023216737A1 - Dispositif d'évacuation et de tri de matériau, système de tri et procédé d'évacuation de matériau - Google Patents

Dispositif d'évacuation et de tri de matériau, système de tri et procédé d'évacuation de matériau Download PDF

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Publication number
WO2023216737A1
WO2023216737A1 PCT/CN2023/083869 CN2023083869W WO2023216737A1 WO 2023216737 A1 WO2023216737 A1 WO 2023216737A1 CN 2023083869 W CN2023083869 W CN 2023083869W WO 2023216737 A1 WO2023216737 A1 WO 2023216737A1
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WO
WIPO (PCT)
Prior art keywords
material box
adsorption
box
assembly
frame
Prior art date
Application number
PCT/CN2023/083869
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English (en)
Chinese (zh)
Inventor
顾烨
庄再城
曹葵康
薛峰
徐一华
Original Assignee
苏州天准科技股份有限公司
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Application filed by 苏州天准科技股份有限公司 filed Critical 苏州天准科技股份有限公司
Publication of WO2023216737A1 publication Critical patent/WO2023216737A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36—Sorting apparatus characterised by the means used for distribution
    • B07C5/361—Processing or control devices therefor, e.g. escort memory
    • B07C5/362—Separating or distributor mechanisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36—Sorting apparatus characterised by the means used for distribution
    • B07C5/38—Collecting or arranging articles in groups
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the invention relates to the field of semiconductor or photovoltaic silicon wafer detection and sorting, and specifically relates to a blanking and sorting equipment, a sorting system and a blanking method.
  • the solar silicon wafer sorting machine is an automated inspection and sorting equipment that integrates automation, measurement, and visual defect detection. It is used in the solar silicon wafer production process, as disclosed in the patent applied for by our company (publication number CN112605010A) Material sorting device and silicon wafer intelligent sorting machine, the sorting machine can realize the thickness, TTV, line marks, resistivity, size, dirt, edge chipping, cracks, etc. of the solar silicon wafers sliced and cleaned. Measurement and inspection of the project, and automatically sorting silicon wafers into different boxes according to quality grade requirements according to the sorting menu, fully meeting the quality control needs of silicon wafer manufacturers, is an indispensable link in production.
  • the traditional analytical direction-changing transportation requires lifting the silicon wafers on the streamline, and then changing its transportation direction so that it flows into the corresponding storage box.
  • the problem with the above method is that since the transportation time in industrial production is relatively precise and continuous, lifting the silicon wafer may cause the silicon wafer to be separated from the transportation streamline. At this time, the silicon wafer will be suspended in the air for a short period of time. state, while the conveying streamline continues to work, there may be a problem of collision with the silicon wafers transported from behind when the silicon wafer falls; secondly, the jacking diversion The slicing mode limits the efficiency of the blanking line.
  • the silicon wafer negative pressure lifting device used in our previous generation model has a maximum production capacity limited to about 8500pcs/h, which is difficult to break through;
  • the material box structure such as our company's patent for the previous generation model (CN215390948U)
  • the material box has a multi-layer structure.
  • it needs to be adjusted manually, which reduces the efficiency of box changing and makes it difficult to break through the production capacity.
  • the purpose of the present invention is to provide a material cutting and sorting equipment, a sorting system and a material cutting method, which can solve the above problems.
  • the blanking and sorting equipment includes a slicing device installed on a blanking frame, a multi-layer material box installed on both discharging ends of the slicing device, a blanking central axis belt streamline, and tailing materials.
  • the unloading center axis belt streamline is installed on the unloading frame along the central axis, and the top plate frame is arranged above the unloading center axis belt streamline; multiple slicing devices Belt streamlines are arranged at intervals along the central axis of the unloading, and the top thereof is connected to the lower surface of the top plate of the top plate frame; a multi-layer material box is provided at both left and right ends of each slicing device; wherein, The slicing device adopts a non-contact adsorption slicing device. Each slicing device is integrated with an adsorption module and a belt drive module.
  • the multi-layer material boxes adopt a multi-layer staggered material box storage device.
  • Each material box storage device includes a plurality of material box assemblies that are staggeredly driven. Two adjacent material box assemblies are staggered internally and externally through transverse staggered driving components. Move, and lift the material box assembly of the lower layer to be received by the vertical drive assembly to the material receiving station at the top layer; the tail material box is set directly against the tail end of the unloading center axis belt streamline, with For carrying miscellaneous wafers or untested wafers.
  • the slicing device includes an adsorption and sorting main module, a first adsorption branch line module, a second adsorption branch line module, a first connector, a second connector, a third connector and a controller; the adsorption The main sorting module, the first adsorption branch line module, and the second adsorption branch line module all include a belt drive module and an adsorption module; wherein the first adsorption branch line module and the second adsorption branch line module pass through the first The connecting piece, the second connecting piece and the third connecting piece are suspended and arranged at the two discharge ends of the main adsorption and sorting module; the relative distance between the first connecting piece and the second connecting piece is adjustable and connected to The third connector is used to realize the adjustable streamline distance from the first adsorption branch line module to the second adsorption branch line module; it is provided on the main adsorption and sorting module, the first adsorption branch line module, The adsorption bottom surface of the adsorption
  • the adsorption and sorting main module transports silicon wafers to the first adsorption branch line module or the second adsorption branch line module under the control of the controller. , so that the silicon wafer is adsorbed and transported to the corresponding material position in a non-contact manner.
  • the multi-layer material box includes a material box slide rail assembly, a material box assembly, a staggered drive component, a vertical guide rail assembly, a vertical drive component, a material change warning button and a material box controller arranged on the storage rack;
  • a plurality of the material box slide rail assemblies are arranged horizontally and parallel up and down on the storage rack; one of the material box slide rail assemblies is provided on each of the material box slide rail assemblies, and a plurality of the material box slide rail assemblies are arranged on the storage rack.
  • the components are arranged staggered up and down; the staggered driving assembly is used to drive the two groups of adjacent upper and lower material box assemblies to slide staggered along the said material box slide rail assembly to send the material box assemblies to the material receiving position or the box changing position; except for the top layer
  • the material box assemblies are all connected to the material box slide rail assembly through the vertical guide rail assembly; the vertical drive assembly is drivingly connected to the vertical guide rail assembly and is used to drive the vertical guide rail assembly to move up and down.
  • a plurality of the material changing warning buttons are used to prompt whether the corresponding material box component is full of material and the empty box is in place, and are used to issue a message to the material box controller to exit or load the material box. signal; the interleaved drive component, The vertical drive assembly and the material change warning button are electrically connected to the material box controller, and the material box controller controls the drive to realize the in-place material receiving, full material withdrawal and replacement of multiple material box components.
  • the unloading center axis belt streamline includes a base frame assembly, a belt frame assembly, a conveyor belt assembly, a driving assembly and a material position monitoring assembly; wherein, the belt frame assembly is erected on the base frame assembly to Support the entire streamline; the conveyor belt assembly and the driving assembly are provided only on the belt frame assembly to provide belt driving and material transportation; multiple sets of material position monitoring assemblies are provided on the belt frame assembly for Check whether there is incoming material or empty material at the corresponding sensing position.
  • the tail material box includes a material box fixing seat, a material box transfer block, a material box raising block, a material box body, a main pad, a multi-standard upper pad and a material sensor; wherein, the material The box body is connected to the box fixing seat by tilting toward the rear through the box padding block and the box adapter block, and is fixed to the machine platform or the rear end of the frame through the box body; a multi-directional adjustment slot is provided The position of the main pad is adjustable and connected to the material box body; the upper pads of various specifications are laid on the main pad for buffering the receiving tail materials; the material sensor is installed on The bottom of the material box body is used to sense whether materials are coming from the material box body.
  • the top frame includes a top frame column base, a top frame support frame, a top frame protective plate, an external block and a top plate reinforcing beam.
  • the bottom of the top frame column base is installed on the unloading frame.
  • the top frame The support frame is connected and supported by the tops of a plurality of the top frame column bases; a plurality of the external blocks are provided on the lower surface of the top frame support frame for suspended connection of the slicing devices; on the top
  • a plurality of roof reinforcing beams are provided in the middle of the roof support frame, and the roof protection plate is fully covered on the top of the roof support frame.
  • the invention also provides an intelligent silicon wafer sorting system.
  • the sorting system includes loading equipment, detection equipment and the aforementioned unloading and sorting equipment; a material type detection device is provided between the loading equipment and the detection equipment. And a debris removal device is used to detect the silicon wafer model and whether it is broken, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the detection equipment.
  • the invention also provides a cutting method, which includes:
  • the main line conveys materials, and the materials are continuously transported through the unloading center axis belt streamline;
  • the slicing device separates and collects materials from multi-layer boxes.
  • the incoming material is sensed at the adsorption distributing position corresponding to the type of material defect on the unloading axis belt streamline, the corresponding slicing device above the adsorption distributing position performs non-contact adsorption Pick up the material below and transport it to the multi-layer material box at the corresponding end;
  • miscellaneous materials stored without corresponding defect types or materials that need to be analyzed in the future are streamlined and transported to the tail material box set at the tail end by the unloading central axis belt.
  • the slicing device divides and collects materials from multi-layer boxes including:
  • the slicing device transfers the material to the material receiving positions at the multi-layer material boxes at both ends, breaks the vacuum and transports the material to the empty upper material box at the material receiving position until the upper material box is full. ;
  • the vertical drive assembly drives the lower material box to move upward along the vertical guide rail assembly to the material receiving position, and unload the materials in the upper material box;
  • the lower material box receives material: The lower material box located at the material receiving position receives material until it is full. After it is full, the vertical drive assembly drives the lower material box to move downward along the vertical guide rail assembly to the material withdrawal position;
  • the present application provides a cutting and sorting equipment integrating a non-contact adsorption slicing device, a staggered multi-layer material box and a tail material box for miscellaneous material collection. It can significantly improve the sorting efficiency of the sorting machine.
  • the streamline length is adjustable and can handle silicon wafers of different specifications.
  • the arrangement spacing of the suction cups is controllable to ensure stable and reliable adsorption of silicon wafers during transportation.
  • the material boxes are staggered and exchanged. Receive materials and reduce the time of changing the material box. Compared with the traditional lifting and distributing materials, it reduces the process flow, improves the operating efficiency and production capacity, and facilitates the promotion and application in the fields of silicon wafers and PCBs involving sheet products.
  • Figure 1 is a schematic diagram of the cutting and sorting equipment of the present invention
  • Figures 2 and 3 are diagrams showing the layout of the slicing device, multi-layer material boxes and the flow lines of the unloading center axis belt;
  • Figure 4 is a schematic structural diagram of the slicing device
  • Figures 5-7 are schematic structural diagrams of the multi-layer material box
  • Figure 8 is a schematic structural diagram of the flow line of the unloading center axis belt
  • Figures 9-12 are schematic structural diagrams of the tailing box
  • FIGS 13 and 14 are schematic diagrams of the top rack
  • Figure 15 is a schematic diagram of the sorting system
  • Figure 16 is a schematic diagram of the blanking action process of the blanking and sorting equipment
  • Figure 17 is a schematic flow chart of the blanking method.
  • Slicing device 100. Main adsorption and sorting module; 200. First adsorption branch line module; 300. Second adsorption branch line module; 400. First connector; 500. Second connector; 600. Three connectors;
  • 3000 blanking axis belt streamline; 3001, streamline bottom column; 3002, bottom plate; 3003, streamline support bar; 3004, streamline connection block; 3005, bearing support seat; 3006, end shaft assembly; 3007, conveyor belt wheel; 3008, conveyor belt; 3009, intermediate wheel; 3010, drive belt; 3011, driving wheel; 3012, drive motor; 3013, induction sensor; 3014, sensor mounting plate;
  • tail material box 4001, box holder; 4002, material box transfer block; 4003, material box heightening block; 4004, material box body; 40041, material box bottom plate; 400411, material induction port; 400412, material taking Gap; 40042, material box tail plate; 40043, material box side plate; 4005, main backing plate; 40051, multi-directional adjustment slot; 4006, upper backing plate; 4007, material sensor; 4008, small material baffle; 4009, auxiliary block;
  • roof frame 5001, roof column base; 5002, roof support frame; 5003, roof protection plate; 5004, external block; 5005, roof reinforcement beam;
  • system means of distinguishing different components, elements, parts, portions or assemblies at different levels.
  • said words may be replaced by other expressions if they serve the same purpose.
  • the blanking and sorting equipment 10000 includes a slicing device 1000 installed on the blanking frame 6000, a multi-layer material box 2000 installed on both discharging ends of the slicing device 1000, a blanking center axis belt streamline 3000, 4000 for the tail box and 5000 for the top rack.
  • the blanking central axis belt streamline 3000 is installed on the blanking frame 6000 along the central axis, and the top plate frame 5000 is arranged above the blanking central axis belt streamline 3000; see Figure 2
  • multiple slicing devices 1000 are arranged at intervals along the flow line 3000 of the unloading central axis belt, and their tops are connected to the lower surface of the top plate of the top plate frame 5000; the left and right sides of each slicing device 1000
  • a multi-layer material box 2000 is provided at both ends.
  • the tail material box 4000 is disposed directly opposite the tail end of the blanking axis belt streamline 3000, and is used to carry miscellaneous silicon wafers or untested silicon wafers.
  • the slicing device 1000 adopts a non-contact adsorption type slicing device.
  • Each slicing device 1000 is integrated with an adsorption module and a belt drive module.
  • the material below is picked up by non-contact adsorption at the corresponding material adsorption position and can be Selected to transmit to both sides.
  • the slicing device 1000 includes an adsorption and sorting main module 100, a first adsorption branch line module 200, a second adsorption branch line module 300, a first connector 400, a second connector 500, a third connector 600 and Controller; the main adsorption and sorting module 100, the first adsorption branch line module 200, and the second adsorption branch line module 300 all include a belt drive module and an adsorption module.
  • first adsorption branch line module 200 and the second adsorption branch line module 300 are arranged in the adsorption sorting station and are suspended through the first connector 400, the second connector 500 and the third connector 600.
  • the two discharging ends of the main module 100; the first connecting piece 400 and the second connecting piece 500 are connected to the third connecting piece 600 with an adjustable relative distance, thereby realizing the first adsorption branch line module
  • the streamline distance from 200 to the second adsorption branch line module 300 is adjustable; the adsorption bottom surface of the adsorption module provided on the main adsorption and sorting module 100, the first adsorption branch line module 200, and the second adsorption branch line module 300 flush and suck
  • the disc spacing is adjustable to accommodate silicon wafers of different specifications.
  • the adsorption bottom surfaces of the adsorption modules of the main adsorption and sorting module 100, the first adsorption branch line module 200, and the second adsorption branch line module 300 are arranged higher than the belt bottom surface of the belt drive module.
  • the module 100 transports silicon wafers to the first adsorption branch line module 200 or the second adsorption branch line module 300 under the control of the controller, so that the silicon wafers are adsorbed and transported to the corresponding material level in a non-contact manner.
  • the multi-layer material box 2000 adopts a multi-layer staggered material box storage device.
  • Each material box storage device includes a plurality of staggered driven material box assemblies. Two adjacent material box assemblies pass through the transverse direction.
  • the staggered drive assembly is moved internally and externally in a staggered manner, and the vertical drive assembly lifts the lower material box assembly to be received to the top material receiving station.
  • the multi-layer material box 2000 includes a material box slide rail assembly, a material box assembly, a staggered driving component, a vertical guide rail assembly, a vertical driving component, a material change warning button and a material box controller that are arranged on the storage rack.
  • a plurality of the material box slide rail assemblies are arranged horizontally and parallel up and down on the storage rack; one of the material box slide rail assemblies is provided on each of the material box slide rail assemblies, and a plurality of the material box slide rail assemblies are arranged on the storage rack.
  • the box assemblies are arranged staggered up and down; the staggered driving assembly is used to drive two groups of adjacent upper and lower box assemblies to slide staggered along the box slide rail assembly to send the box assemblies to the material receiving position or the box changing position; except for the top layer
  • the material box assemblies are all connected to the material box slide rail assembly through the vertical guide rail assembly; the vertical drive assembly is drivingly connected to the vertical guide rail assembly and is used to drive the vertical guide rail assembly to move up and down.
  • a plurality of the material changing warning buttons are used to prompt whether the corresponding material box assembly is full of material and the empty box is in place, and are used to send the material box exit or exit to the material box controller.
  • Loading signal; the staggered drive component, the vertical drive component and the material change warning button are electrically connected to the material box controller, and the material box controller controls the drive to realize the in-place material receiving and filling of multiple material box components. Exit and replace.
  • the storage rack includes a main storage vertical plate 2101 and a storage bottom plate 2102 for supporting the entire device.
  • the storage rack also includes an outer end vertical plate 2103, a main protective cover 2014 and a motor protective cover 2015.
  • the outer end vertical plate 2103 is provided at the outer end of the main storage vertical plate 2101.
  • the main protective cover 2014 is installed on the opposite installation side of the main storage vertical plate 2101 from the material box assembly.
  • the motor protective cover 2015 is provided on the main storage vertical plate 2101. There are 2103 outer end vertical boards.
  • the magazine slide rail assembly includes a magazine slide rail 2201, a slider 2202, a magazine pad 2203, an outer end buffer block 2204 and a slider position sensor 2205.
  • a plurality of magazine slide rails 2201 are installed parallel to each other up and down on the storage surface of the main storage vertical plate 2101.
  • the slider 2202 is slidably sleeved on the magazine slide rails 2201.
  • the box assembly is installed on the slider 2202 through the box pad 2203; the outer end buffer block 2204 is installed on the outer end of the box slide rail 2201 for buffering the end of the slider 2202 in place;
  • a plurality of slider position sensors 2205 are installed on the main storage vertical plate 2101 and are arranged below the magazine slide rail 2201 .
  • the cartridge assembly includes a cartridge adapter 2301, a cartridge bracket 2302, a cartridge specification adjustment pad 2303, a cartridge guide stop column 2304 and a resin plate 2305; wherein, the top layer of the cartridge assembly
  • the material box adapter 2301 is directly connected to the material box pad 2203.
  • the material box adapter 2301 of the lower material box assemblies passes through the vertical guide rail assembly and then is connected to the material box pad 2203.
  • the material box bracket 2302 is connected to the material box adapter 2301 with an inclination toward the lower side of the outer end, and the material box specification adjustment pad 2303 is adjustable in position and installed on the material box bracket 2302 , and set the box guide stop column 2304 at the outer end of the box specification adjustment pad 2303, and a resin plate 2305 with optional specifications is laid on the box specification adjustment pad 2303 to directly receive the supporting silicon Piece blanking.
  • the lower level material box assemblies also include lifting top limiting blocks 2306, which are provided on the material box adapter 2301 and are arranged directly above the vertical guide rail assembly.
  • the cartridge bracket 2302 is L-shaped or concave, preferably L-shaped, and is adjustable front and rear and/or left and right, wherein a long strip in the front-to-back direction is opened on the bottom plate of the cartridge bracket 2302 slot, Used to adjust the position of the material box specification adjustment pad 2303.
  • the staggered driving assembly includes a box driving motor 2401, a synchronous wheel set, a synchronous belt set and a synchronous belt clamp 2402; the box driving motor 2401 and the synchronous wheel set are installed on the main storage vertical plate 2101.
  • the part of the synchronous belt group that is parallel to the magazine slide rail 2201 is connected to the upper and lower adjacent magazine slide rail assemblies through two synchronous belt clamps 2402 to realize staggered driving of the two upper and lower adjacent magazine slide rail assemblies.
  • the parallel-driven synchronous belt is connected to the slider 2202 or the magazine pad 2203 of the magazine slide rail assembly through two synchronous belt clamps 2402 to realize the staggered drive assembly to drive two adjacent magazine slide rail assemblies and the magazine assembly. Move staggered along the magazine slide rail 2201.
  • the synchronous wheel set includes a driving wheel 2403, a double-ended transmission wheel 2404 and a horizontal inner end transmission wheel 2405, wherein the horizontal inner end transmission wheel 2405 and the double-end transmission wheel 2404 have the same specifications and are arranged flush with each other.
  • the synchronous belt set includes a driving synchronous belt 2406 and a transmission synchronous belt 2407.
  • the driving synchronous belt 2406 is installed on one of the driving wheel 2403 and the double-ended transmission wheel 2404 to realize power input; the transmission
  • the synchronous belt 2407 is arranged on the wheel head of the horizontal inner end transmission wheel 2405 and the double-ended transmission wheel 2404 on the same side.
  • the motor and pulley can also be arranged on the same side, and the conveyor belt uses one belt for a group of box components. These can be arranged according to the actual installation space and scene.
  • a pulley protective cover 2408 is provided at the wheel head of the double-ended transmission wheel 2404 on the same side as the horizontal inner end transmission wheel 2405.
  • the vertical guide rail assembly includes a lifting slide rail 2501 and a lifting slide block 2502; the lifting slide block 2502 is connected to the cartridge pad 2203 of the cartridge slide rail assembly corresponding to the cartridge assembly to be lifted, and the The upper part of the lifting slide rail 2501 is connected to the magazine adapter 2301 of the magazine assembly that needs to be lifted, so that the magazine assembly can slide up and down along the vertical guide rail assembly.
  • the vertical drive assembly includes a lifting cylinder 2601, a lifting solenoid valve 2602, a lifting bottom plate 2603 and a lifting bottom limit block 2604.
  • the cylinder body of the lifting cylinder 2601 is fixed to the main storage vertical plate 2101.
  • the lifting cylinder 2601 The bottom of the driving rod is connected to the lifting bottom plate 2603.
  • the lifting solenoid valve 2602 is activated to drive the lifting bottom plate 2603 to move up and down to realize the lifting drive of the vertical guide rail assembly. .
  • the vertical drive assembly also includes a material box in-position sensor component 2605.
  • the material box in-position sensor component 2605 is installed on the main storage vertical plate 2101 and is used to detect whether the corresponding material box component in the lower layer reaches the top material receiving position.
  • the number of refueling warning buttons 2700 is equal to the number of material box assemblies. They are connected to the top of the main storage vertical plate 2101 through the bottom plate of the material box buttons. The refueling warning buttons use different display colors to display the material. The box is in place, the box is full, and the box loading is completed, and the corresponding drive signal is triggered by pressing the button in the corresponding state.
  • the unloading center axis belt flow line 3000 includes a chassis assembly, a belt frame assembly, a conveyor belt assembly, a driving assembly and a material position monitoring assembly.
  • the arrangement relationship is as follows: the belt frame assembly is installed on the bottom frame assembly to support the entire streamline; the conveyor belt assembly and the driving assembly are installed only on the belt frame assembly to provide belt driving and material transportation; Multiple groups of the material position monitoring components are provided at the belt frame component, and are used to sense whether the corresponding positions have incoming materials or empty materials.
  • chassis assembly includes a plurality of streamlined bottom columns 3001 and a bottom plate 3002.
  • the streamlined bottom columns 3001 are fixed to the machine platform or the bottom surface through the bottom plate 3002.
  • the belt frame assembly includes two oppositely arranged streamline support bars 3003, a plurality of streamline connection blocks 3004, two bearing support seats 3005 and two sets of end shaft assemblies 3006; the two streamline support bars 3003 are arranged through the middle
  • the streamline connection block 3004 is supported on the top of the streamline bottom column 3001; two bearing support seats 3005 are respectively provided at the ends of the two streamline support bars 3003, and the end shaft group Both ends of the member 3006 are supported on two opposite bearing support seats 3005.
  • the conveyor belt assembly includes two conveyor belts 3008 and conveyor pulleys 3007 installed at both ends of the end shaft assembly 3006.
  • the conveyor belt 3008 is sleeved on the two conveyor pulleys 3007 for directly horizontally conveying materials.
  • the driving assembly includes an intermediate wheel 3009, a driving belt 3010, a driving wheel 3011 and a driving motor 3012.
  • the intermediate wheel 3009 is installed on the transmission shaft of the end shaft assembly 3006, and the driving motor 3012 is installed on the flow path.
  • the driving belt 3010 is installed on the intermediate wheel 3009 and the driving wheel 3011 provided at the output end of the driving motor 3012 for driving the conveyor belt assembly to transport materials.
  • Each group of material position monitoring components includes two induction sensors 3013 and sensors. Install the plate 3014; the induction sensor 3013 on the upstream side of each group of material position monitoring components is used to sense whether the material has arrived, and the induction sensor 3013 on the downstream side is used to sense whether the material is empty.
  • the tail box 4000 shown in Figures 9 to 12 which includes a box fixing seat 4001, a box adapter block 4002, a box raising block 4003, a box body 4004, a main pad 4005, and multiple specifications.
  • the arrangement relationship is: the material box body 4004 is connected to the material box fixing seat 4001 through the material box raising block 4003 and the material box adapter block 4002 in sequence, and is fixed to the machine platform or the machine through the material box body 4004.
  • the rear end of the frame; the main pad 4005 with a multi-directional adjustment groove 40051 is adjustable in position and connected to the box body 4004; the upper pads 4006 of various specifications are laid on the main pad 4005.
  • Receive tail material for buffering; the material sensor 4007 is installed at the bottom of the material box body 4004 and is used to sense whether material is coming to the material box body 4004.
  • the material box body 4004 is a rectangular open material box, including a material box bottom plate 40041, a material box tail plate 40042 and a material box side plate 40043; a material sensing port is provided on the material box bottom plate 40041 400411 and multiple material-taking gaps 400412; the material sensor 4007 is installed on the bottom plate 40041 of the material box adjacent to the material sensing port 400411, and its sensing direction is arranged upward; multiple material-taking gaps 400412 are opened There is no magazine tail plate 40042 and magazine side plate 40043 on the edge of the magazine bottom plate 40041 for convenience of picking up and unloading materials.
  • the main pad 4005 and the upper pad 4006 are elastic pads for buffering and receiving incoming materials. Wherein, the thickness of the main pad 4005 is greater than the thickness of the upper pad 4006.
  • the main pad 4005 and the upper pad 4006 are also provided with pad gaps to facilitate the retrieval of tail materials.
  • the tail material box 4000 also includes a small material baffle 4008.
  • the small material baffle 4008 is adjustable in position and installed on the main backing plate 4005 to adapt to upper backing plates of different specifications. 4006 incoming material limit.
  • the tail material box 4000 also includes an auxiliary block 4009, which is installed on the main backing plate 4005 and the small material baffle 4008 for receiving auxiliary small-sized materials. Limit.
  • the small material baffle 4008 and the auxiliary stop 4009 are elastic plates, and are used for buffering as incoming material stop limits.
  • the elastic pad and elastic plate are made of resin, rubber and other materials. Different elastic materials can be set according to actual needs.
  • the material sensor 4007 adopts a photoelectric sensor, and the corresponding upper pad 4006 is a transparent or translucent elastic plate.
  • the top frame 5000 includes a top frame column base 5001, a top frame support frame 5002, a top frame protective plate 5003, an external block 5004 and a top plate reinforcing beam 5005.
  • the bottom of the top frame column base 5001 is installed On the unloading frame 6000, the top frame support frame 5002 is supported by the top connections of multiple top frame column seats 5001; a plurality of the external connection blocks 5004 are provided on the lower surface of the top frame support frame 5002, Used to connect the slicing device 1000 for suspension; set in the middle of the top frame support frame 5002 A plurality of roof reinforcing beams 5005 are provided, and the roof protection plate 5003 is provided to fully cover the top of the roof support frame 5002.
  • the blanking and sorting equipment 10000 also includes a blanking transition mechanism 7000, an emergency stop mechanism 8000 and a buzzer 9000.
  • the blanking transition mechanism 7000 is provided at the front end of the blanking center axis belt streamline 3000. It is used to transitionally guide the silicon wafers that have been inspected in the upstream process to the blanking center axis belt streamline 3000 with a flush top surface.
  • a plurality of the emergency stop mechanisms 8000 are arranged around the unloading frame 6000, so that workers can conveniently and quickly stop the machine when encountering an emergency.
  • the buzzer 9000 is installed on the outer periphery of the unloading frame 6000 . Not shown in the figure, alarms such as three-color lights can also be set at the unloading rack 6000.
  • the sorting system includes a loading equipment 30000, a detection equipment 20000 and the aforementioned unloading and sorting equipment 10000; it is set between the loading equipment 30000 and the detection equipment 20000.
  • the material type detection device 40000 and the fragment removal device 50000 are used to detect the silicon wafer model and whether it is broken, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the detection equipment 20000.
  • the cutting method includes:
  • the main line transports materials, and the materials are continuously transported through the unloading center axis belt streamline 3000;
  • the slicing device separates the multi-layer material boxes and collects the materials.
  • the incoming material is sensed on the adsorption and distribution position corresponding to the material defect type on the unloading center axis belt streamline 3000, the corresponding slicing device 1000 above the adsorption and distribution position is non-contact.
  • the adsorption picks up the material below and transports it to the multi-layer material box 2000 at the corresponding end;
  • miscellaneous materials stored without corresponding defect types or materials that need to be analyzed in the future are transported to the tail material box 4000 set at the tail end by the unloading central axis belt streamline 3000.
  • the slicing device separates and collects materials from multi-layer boxes including the following steps.
  • the slicing device 1000 transfers the material to the material receiving positions of the multi-layer material boxes 2000 at both ends, breaks the vacuum and transports the material to the empty upper material box at the material receiving position, until the upper material box Full of materials;
  • the vertical drive assembly drives the lower material box to move upward along the vertical guide rail assembly to the material receiving position, and unload the materials in the upper material box;
  • the lower material box receives material: The lower material box located at the material receiving position receives material until it is full. After it is full, the vertical drive assembly drives the lower material box to move downward along the vertical guide rail assembly to the material withdrawal position;
  • the invention also provides a computer-readable storage medium on which computer instructions are stored, and when the computer instructions are run, the steps of the foregoing method are executed.
  • a computer-readable storage medium on which computer instructions are stored, and when the computer instructions are run, the steps of the foregoing method are executed.
  • the program can be stored in a computer-readable storage medium.
  • the computer-readable medium includes a permanent Permanent and non-permanent, removable and non-removable media may be implemented by any method or technology for information storage.
  • Information may be computer-readable instructions, data structures, modules of programs, or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), and read-only memory.
  • PRAM phase change memory
  • SRAM static random access memory
  • DRAM dynamic random access memory
  • RAM random access memory
  • read-only memory read-only memory
  • ROM read-only memory
  • EEPROM electrically erasable programmable read-only memory
  • flash memory or other memory technology
  • compact disc read-only memory CD-ROM
  • DVD digital versatile disc
  • Magnetic tape cassettes tape magnetic disk storage or other magnetic storage devices or any other non-transmission medium can be used to store information that can be accessed by a computing device.
  • computer-readable media does not include transitory media, such as modulated data signals and carrier waves.
  • the present invention also provides a terminal, including a memory and a processor.
  • the memory stores data provider information and computer instructions that can be run on the processor.
  • the processor runs the computer instructions, it executes the foregoing.
  • Method steps For the method, please refer to the detailed introduction in the previous section and will not be described again here.

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

La présente invention concerne un dispositif d'évacuation et de tri de matériau (10000), un système de tri et un procédé d'évacuation de matériau. Le dispositif d'évacuation et de tri de matériau (10000) comprend des dispositifs de séparation de tranche (1000) montés sur un support d'évacuation de matériau (6000), un contenant de matériau multiniveaux (2000) monté au niveau de chacune des deux extrémités de sortie de chaque dispositif de séparation de tranche (1000), une ligne de bande transporteuse d'axe central d'évacuation de matériau (3000), un contenant arrière (4000) et des plaques de cadre supérieures (5000). Les dispositifs de séparation de tranche (1000) sont des dispositifs de séparation de tranche à aspiration sans contact, et les contenants de matériau multiniveaux (2000) sont des dispositifs de stockage de contenant de matériau en quinconce multiniveaux.
PCT/CN2023/083869 2022-05-09 2023-03-24 Dispositif d'évacuation et de tri de matériau, système de tri et procédé d'évacuation de matériau WO2023216737A1 (fr)

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114871154B (zh) * 2022-05-09 2023-04-04 苏州天准科技股份有限公司 下料分选设备、分选系统和下料方法
CN114871157B (zh) * 2022-05-09 2023-03-10 苏州天准科技股份有限公司 多层交错式料盒收纳装置、下料分选设备和分选系统
CN116371751A (zh) * 2023-04-27 2023-07-04 苏州天准科技股份有限公司 一种能级拓展的下料分选设备及下料方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006019353A (ja) * 2004-06-30 2006-01-19 Hitachi High-Tech Instruments Co Ltd 部品供給装置
CN110540043A (zh) * 2018-05-28 2019-12-06 亨内克系统有限公司 晶片生产线和用于输送晶片的方法
CN111468425A (zh) * 2020-05-12 2020-07-31 无锡尚品高自动化设备有限公司 硅片晶花分选机
CN111482374A (zh) * 2020-04-03 2020-08-04 无锡森顿智能科技有限公司 硅片检测分选机及其分选方法
CN212085034U (zh) * 2020-06-10 2020-12-04 无锡奥特维科技股份有限公司 硅片收料盒及硅片分档收料装置
CN114871154A (zh) * 2022-05-09 2022-08-09 苏州天准科技股份有限公司 下料分选设备、分选系统和下料方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH085521B2 (ja) * 1990-09-13 1996-01-24 不二越機械工業株式会社 ウェハーの厚さ別分類装置
CN109047029B (zh) * 2018-08-21 2023-11-10 武汉爱疆智能科技有限公司 一种太阳能电池分选机
CN112605010A (zh) * 2020-12-04 2021-04-06 苏州天准科技股份有限公司 下料分选装置及硅片智能分选机
CN215430337U (zh) * 2021-01-11 2022-01-07 无锡奥特维科技股份有限公司 长方形硅片出料装置及分选机

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006019353A (ja) * 2004-06-30 2006-01-19 Hitachi High-Tech Instruments Co Ltd 部品供給装置
CN110540043A (zh) * 2018-05-28 2019-12-06 亨内克系统有限公司 晶片生产线和用于输送晶片的方法
CN111482374A (zh) * 2020-04-03 2020-08-04 无锡森顿智能科技有限公司 硅片检测分选机及其分选方法
CN111468425A (zh) * 2020-05-12 2020-07-31 无锡尚品高自动化设备有限公司 硅片晶花分选机
CN212085034U (zh) * 2020-06-10 2020-12-04 无锡奥特维科技股份有限公司 硅片收料盒及硅片分档收料装置
CN114871154A (zh) * 2022-05-09 2022-08-09 苏州天准科技股份有限公司 下料分选设备、分选系统和下料方法

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